Patents by Inventor Aschwin L. H. J. van Meer

Aschwin L. H. J. van Meer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic projection apparatus
    Patent number: 6392738
    Abstract: A lithographic projection apparatus is disclosed. The lithographic projection apparatus includes an illumination system to supply a projection beam of radiation, a first object table to hold a mask, a second object table provided with a support surface to support and hold a substrate at its backside surface and a projection system to image an irradiated portion of the mask onto a target portion of the substrate including a detector constructed and arranged to detect the presence of contamination on one or both of the support surface and the substrate backside surface.
    Type: Grant
    Filed: October 10, 2000
    Date of Patent: May 21, 2002
    Assignee: ASML Netherlands B.V.
    Inventors: Engelbertus A. F. van de Pasch, Aschwin L. H. J. van Meer, Franciscus A. G. Klaassen