Abstract: A vacuum valve connected to a vacuum pump, comprises: a valve plate to be openably/closably driven; a drive section configured to openably/closably drive the valve plate; a signal input section to which a pump information signal indicating an operation state of the vacuum pump is input; and a valve control section configured to control operation of the valve plate based on the input pump information signal.

Abstract: A valve control device configured such that a pressure measurement value of a chamber, a target pressure value of the chamber, and an opening degree measurement value of the vacuum valve are input to the valve control device and configured to control an opening degree of the vacuum valve based on a deviation between the pressure measurement value and the target pressure value, comprises: a storage storing a correlation between the opening degree of the vacuum valve and a conductance of a system including the vacuum valve; and a correction gain setting section obtaining, based on the correlation, a change rate of the conductance in association with an opening degree change at the input opening degree measurement value, thereby setting an inverse of the change rate as a correction gain. The opening degree of the vacuum valve is controlled based on the deviation and the correction gain.

Abstract: A vacuum valve attached to a vacuum pump configured to generate regenerative power to perform a stop operation upon blackout, comprises: a first power input section to which power is input from a commercial power source; a second power input section to which the regenerative power generated at the vacuum pump is input; and a valve source circuit to which the power input to each of the first and second power input sections is supplied. When the power from the commercial power source is supplied to the first power input section, the vacuum valve is operated by the supplied power, and when the power from the commercial power source is stopped, the vacuum valve is operated by the regenerative power.

Abstract: A vacuum valve attached to a vacuum pump configured to generate regenerative power to perform a stop operation upon blackout, comprises: a first power input section to which power is input from a commercial power source; a second power input section to which the regenerative power generated at the vacuum pump is input; and a valve source circuit to which the power input to each of the first and second power input sections is supplied. When the power from the commercial power source is supplied to the first power input section, the vacuum valve is operated by the supplied power, and when the power from the commercial power source is stopped, the vacuum valve is operated by the regenerative power.

Abstract: A vacuum valve connected to a vacuum pump, comprises: a valve plate to be openably/closably driven; a drive section configured to openably/closably drive the valve plate; a signal input section to which a pump information signal indicating an operation state of the vacuum pump is input; and a valve control section configured to control operation of the valve plate based on the input pump information signal.

Abstract: A valve control device configured such that a pressure measurement value of a chamber, a target pressure value of the chamber, and an opening degree measurement value of the vacuum valve are input to the valve control device and configured to control an opening degree of the vacuum valve based on a deviation between the pressure measurement value and the target pressure value, comprises: a storage storing a correlation between the opening degree of the vacuum valve and a conductance of a system including the vacuum valve; and a correction gain setting section obtaining, based on the correlation, a change rate of the conductance in association with an opening degree change at the input opening degree measurement value, thereby setting an inverse of the change rate as a correction gain. The opening degree of the vacuum valve is controlled based on the deviation and the correction gain.

Abstract: A control device configured to control each of a vacuum pump and a vacuum valve provided on a side of a suction port of the vacuum pump, the control device comprises: a motor driver configured to drive a rotor driving motor of the vacuum pump; a valve plate driver configured to drive a valve plate driving motor of the vacuum valve; and a controller configured to control the motor driver and the valve plate driver.