Patents by Inventor Atsuo Urata
Atsuo Urata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9972933Abstract: The present invention intends to suppress a contact probe from interfering with a guide plate to produce shavings.Type: GrantFiled: August 11, 2017Date of Patent: May 15, 2018Assignee: Japan Electronic Materials CorporationInventors: Teppei Kimura, Noriyuki Fukushima, Atsuo Urata, Naoki Arita, Tomoyuki Takeda
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Publication number: 20170346211Abstract: The present invention intends to suppress a contact probe from interfering with a guide plate to produce shavings.Type: ApplicationFiled: August 11, 2017Publication date: November 30, 2017Applicant: Japan Electronic Materials CorporationInventors: Teppei Kimura, Noriyuki Fukushima, Atsuo Urata, Naoki Arita, Tomoyuki Takeda
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Patent number: 9774121Abstract: The present invention intends to suppress a contact probe from interfering with a guide plate to produce shavings.Type: GrantFiled: November 27, 2013Date of Patent: September 26, 2017Assignee: Japan Electronics Material CorporationInventors: Teppei Kimura, Noriyuki Fukushima, Atsuo Urata, Naoki Arita, Tomoyuki Takeda
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Publication number: 20150280345Abstract: The present invention intends to suppress a contact probe from interfering with a guide plate to produce shavings.Type: ApplicationFiled: November 27, 2013Publication date: October 1, 2015Inventors: Teppei Kimura, Noriyuki Fukushima, Atsuo Urata, Naoki Arita, Tomoyuki Takeda
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Patent number: 7692438Abstract: It is an object of the present invention to provide a probe which can provide stable electrical conduction to an electrode of an object to be measured even when it is miniaturized. A probe 100 comprises a columnar contact part 110 which can come in contact with an electrode 10 of an object to be measured almost perpendicularly, and a base end (not shown) connected to the contact part 110, the contact part 110 comprises a base part 111 and an expansion part 111a bonded to an end of the base part 111 in a width direction, and the expansion part 111a is formed of a material having a thermal expansion coefficient higher than that of the base part 111.Type: GrantFiled: May 19, 2005Date of Patent: April 6, 2010Assignees: National Institute for Materials Science, Japan Electronic Materials CorporationInventors: Kazumichi Machida, Atsuo Urata, Takeshi Konno, Akira Ishida, Mitsuru Egashira, Mikihiko Kobayashi
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Publication number: 20080054916Abstract: It is an object of the present invention to provide a probe which can provide stable electrical conduction to an electrode of an object to be measured even when it is miniaturized. A probe 100 comprises a columnar contact part 110 which can come in contact with an electrode 10 of an object to be measured almost perpendicularly, and a base end (not shown) connected to the contact part 110, the contact part 110 comprises a base part 111 and an expansion part 111a bonded to an end of the base part 111 in a width direction, and the expansion part 111a is formed of a material having a thermal expansion coefficient higher than that of the base part 111.Type: ApplicationFiled: May 19, 2005Publication date: March 6, 2008Inventors: Kazumichi Machida, Atsuo Urata, Takeshi Konno, Akira Ishida, Mitsuru Egashira, Mikihiko Kobayashi
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Patent number: 7268568Abstract: The invention aims to provide a vertical type probe card in which a probe can scrape an oxide film on a surface of an electrode of the measurement object, thereby ensuring stable contact with the electrode of the measurement object.Type: GrantFiled: September 13, 2005Date of Patent: September 11, 2007Assignee: Nihon Denshizairyo Kabushiki KaishaInventors: Kazumichi Machida, Atsuo Urata, Teppei Kimura
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Patent number: 7208964Abstract: It is an object of the present invention to provide an arch type probe capable of enduring a load caused by overdriving even if the probe is miniaturized, and a probe card using the same. An arch type probe 200 has a shape including a first quarter circle arc portion 210 which is supported at one end thereof by the base plate 100 and a second quarter circle arc portion 220 which is connected to the other end of the first quarter circle arc portion 210, extending toward the base plate and a little shorter than the first quarter circle arc portion 221. The top portion of the arch type probe 200 serves as a contact surface brought into contact with an electrode of a semiconductor water B.Type: GrantFiled: May 5, 2004Date of Patent: April 24, 2007Assignee: Nihon Denshizairyo Kabushiki KaishaInventors: Atsushi Mine, Toranosuke Furusho, Kazumichi Machida, Atsuo Urata, Teppei Kimura, Teruhisa Sakata
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Publication number: 20070052432Abstract: The invention aims to provide a vertical type probe card in which a probe can scrape an oxide film on a surface of an electrode of the measurement object, thereby ensuring stable contact with the electrode of the measurement object.Type: ApplicationFiled: September 13, 2005Publication date: March 8, 2007Applicant: NIHON DENSHIZAIRYO KABUSHIKI KAISHAInventors: Kazumichi Machida, Atsuo Urata, Teppei Kimura
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Patent number: 6980013Abstract: A probe card including rectilinear probes; a guide base plate having an insulating property, in which a plurality of guide holes are formed through which the probes are inserted in a freely movable manner and a length of a guide hole is shorter than a length of a probe; and a plurality of sheet members having an insulating property, disposed above the guide base plate facing the plate, and laminated one on another with a spacing therebetween so as not to be in contact with one another. The tail ends of some of the probes can be brought into contact with the electrode pads on a lowest sheet member, and the tail ends of the other probes penetrate through the lowest sheet member so as to be enabled to be in contact with electrode pads on other sheet members.Type: GrantFiled: August 17, 2004Date of Patent: December 27, 2005Assignee: Nihon Denshizairyo Kabushiki KaishaInventors: Kazumichi Machida, Atsuo Urata, Teppei Kimura
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Publication number: 20050184745Abstract: An object of the invention is to provide a probe card capable of properly performing a measurement. A probe card according to the invention includes: probes 100 shaped to allow vertical elastic deformation; a supporting substrate 200 with the probes provided on the lower surface thereof; a main substrate 300 positioned opposing the upper surface of the supporting substrate 200; an intermediate substrate 400 disposed between the supporting substrate 200 and main substrate 300; a supporting member 500 that is a column-shaped member with one end thereof attached to the center of the supporting substrate 200 and the other end thereof attached to the intermediate substrate 400 and holds the supporting substrate 200 so that the supporting substrate 200 is inclinable; and elastic members for holding the supporting substrate 200 so that the supporting substrate 200 is in a horizontal position relative to the main substrate 300, which are provided between the supporting substrate 200 and main substrate 300.Type: ApplicationFiled: February 22, 2005Publication date: August 25, 2005Applicant: NIHON DENSHIZAIRYO KABUSHIKI KAISHAInventors: Kazumichi Machida, Atsuo Urata, Atsushi Mine
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Publication number: 20050151547Abstract: A probe card including rectilinear probes; a guide base plate having an insulating property, in which a plurality of guide holes are formed through which the probes are inserted in a freely movable manner and a length of a guide hole is shorter than a length of a probe; and a plurality of sheet members having an insulating property, disposed above the guide base plate facing the plate, and laminated one on another with a spacing therebetween so as not to be in contact with one another. The tail ends of some of the probes can be brought into contact with the electrode pads on a lowest sheet member, and the tail ends of the other probes penetrate through the lowest sheet member so as to be enabled to be in contact with electrode pads on other sheet members.Type: ApplicationFiled: August 17, 2004Publication date: July 14, 2005Applicant: NIHON DENSHIZAIRYO KABUSHIKI KAISHAInventors: Kazumichi Machida, Atsuo Urata, Teppei Kimura
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Publication number: 20050099194Abstract: It is an object of the present invention to provide an arch type probe capable of enduring a load caused by overdriving even if the probe is miniaturized, and a probe card using the same. An arch type probe 200 has a shape including a first quarter circle arc portion 210 which is supported at one end thereof by the base plate 100 and a second quarter circle arc portion 220 which is connected to the other end of the first quarter circle arc portion 210, extending toward the base plate and a little shorter than the first quarter circle arc portion 221. The top portion of the arch type probe 200 serves as a contact surface brought into contact with an electrode of a semiconductor water B.Type: ApplicationFiled: May 5, 2004Publication date: May 12, 2005Applicant: NIHON DENSHIZAIRYO KABUSHIKI KAISHAInventors: Atsushi MINE, Toranosuke FURUSHO, Kazumichi MACHIDA, Atsuo URATA, Teppei KIMURA, Teruhisa SAKATA
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Publication number: 20050099195Abstract: It is an object of the present invention to provide a probe sheet capable of achieving correct measurement independently of a dispersion in height of electrodes of measurement objective; and a probe sheet unit using the same. A probe sheet unit A is a sensing section of a measuring instrument (not shown) for a measurement objective B and includes: a base plate 100 mounted to a prober of the instrument; and a probe sheet 200 mounted to a lower surface of the base plate, and the probe sheet 200 includes: a sheet member 210 having a flexibility; and plural probes 220 for measurement provided on one surface of the sheet member 210, wherein a probe 220 has a shape capable of elastic deformation in a direction, upward or downward.Type: ApplicationFiled: May 18, 2004Publication date: May 12, 2005Applicant: NIHON DENSHIZAIRYO KABUSHIKI KAISHAInventors: Kazumichi MACHIDA, Atsuo URATA, Atsushi MINE, Teppei KIMURA, Teruhisa SAKATA