Patents by Inventor Bahman Hekmatshoartabari

Bahman Hekmatshoartabari has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11818886
    Abstract: A method of manufacturing a low program voltage flash memory cell with an embedded heater in the control gate creates, on a common device substrate, a conventional flash memory cell in a conventional flash memory area (CFMA), and a neuromorphic computing memory cell in a neuromorphic computing memory area (NCMA). The method comprises providing a flash memory stack in both the CFMA and the NCMA, depositing a heater on top of the flash memory stack in the NCMA without depositing a heater on top of the flash memory stack in the CFMA.
    Type: Grant
    Filed: September 29, 2021
    Date of Patent: November 14, 2023
    Assignee: International Business Machines Corporation
    Inventors: Takashi Ando, Nanbo Gong, Bahman Hekmatshoartabari, Alexander Reznicek
  • Patent number: 11800698
    Abstract: Techniques for fabricating semiconductor structures and devices with stacked structures having embedded capacitors are disclosed. In one example, a semiconductor structure includes a substrate having a first region and a second region. The semiconductor structure further includes a capacitor structure disposed in the second region of the substrate. The capacitor structure includes a capacitor conductor and a dielectric insulator disposed between the capacitor conductor and the substrate. The semiconductor structure further includes a stacked device disposed on the first region of the substrate. The stacked device includes a first transistor and a second transistor. At least a portion of the second transistor is disposed under at least a portion of the first transistor. The first transistor and the second transistor are each coupled to the capacitor conductor.
    Type: Grant
    Filed: August 17, 2021
    Date of Patent: October 24, 2023
    Assignee: International Business Machines Corporation
    Inventors: Ruilong Xie, Takashi Ando, Alexander Reznicek, Bahman Hekmatshoartabari
  • Publication number: 20230309422
    Abstract: A structure including a bottom electrode, a phase change material layer vertically aligned and an ovonic threshold switching layer vertically aligned above the phase change material layer. A structure including a bottom electrode, a phase change material layer and an ovonic threshold switching layer vertically aligned above the phase change material layer, and a first barrier layer physically separating the ovonic threshold switching layer from a top electrode. A method including forming a structure including a liner vertically aligned above a first barrier layer, the first barrier layer vertically aligned above a phase change material layer, the phase change material layer vertically aligned above a bottom electrode, forming a dielectric surrounding the structure, and forming an ovonic threshold switching layer on the first barrier layer, vertical side surfaces of the first buffer layer are vertically aligned with the first buffer layer, the phase change material layer and the bottom electrode.
    Type: Application
    Filed: May 4, 2023
    Publication date: September 28, 2023
    Inventors: Nanbo Gong, Takashi Ando, Robert L. Bruce, Alexander Reznicek, Bahman Hekmatshoartabari
  • Publication number: 20230260990
    Abstract: A sensor device includes a vertically stacked cascode bipolar junction transistor pair, and a first trench having a first sidewall, wherein a portion of the first sidewall is provided by the first sensing surface, wherein a bipolar junction transistor and a dual-base bipolar junction transistor of the cascode bipolar junction transistor pair are stacked vertically along the first trench.
    Type: Application
    Filed: February 16, 2022
    Publication date: August 17, 2023
    Inventors: Alexander Reznicek, Bahman Hekmatshoartabari
  • Patent number: 11697889
    Abstract: A structure including a three-dimensionally stretchable single crystalline semiconductor membrane located on a substrate is provided. The structure is formed by providing a three-dimensional (3D) wavy silicon germanium alloy layer on a silicon handler substrate. A single crystalline semiconductor material membrane is then formed on a physically exposed surface of the 3D wavy silicon germanium alloy layer. A substrate is then formed on a physically exposed surface of the single crystalline semiconductor material membrane. The 3D wavy silicon germanium alloy layer and the silicon handler substrate are thereafter removed providing the structure.
    Type: Grant
    Filed: December 18, 2019
    Date of Patent: July 11, 2023
    Assignee: International Business Machines Corporation
    Inventors: Alexander Reznicek, Karthik Balakrishnan, Stephen W. Bedell, Pouya Hashemi, Bahman Hekmatshoartabari, Keith E. Fogel
  • Patent number: 11695004
    Abstract: A semiconductor device or circuit includes a vertical bipolar junction transistor (vBJT) and a vertical filed effect transistor (vFET). The vBJT collector is electrically and/or physically connected to an adjacent vFET source. For example, a vBJT collector and a vFET source may be integrated upon a same semiconductor material substrate or layer. The vFET provides negative feedback for the collector-base voltage and the vBJT emitter and collector allow for low transit times.
    Type: Grant
    Filed: October 21, 2021
    Date of Patent: July 4, 2023
    Assignee: International Business Machines Corporation
    Inventors: Alexander Reznicek, Ruilong Xie, Jeng-Bang Yau, Bahman Hekmatshoartabari
  • Patent number: 11682718
    Abstract: A vertical bipolar junction transistor may include an intrinsic base epitaxially grown on a first emitter or collector, the intrinsic base being compositionally graded, a second collector or emitter formed on the intrinsic base, and an extrinsic base formed all-around the intrinsic base. The extrinsic base may be isolated from the first emitter or collector by a first spacer. The extrinsic base may be isolated from the second collector or emitter by a second spacer. The extrinsic base may have a larger bandgap than the intrinsic base. The intrinsic base may be doped with a p-type dopant, and the first emitter or collector, and the second collector or emitter may be doped with an n-type dopant. The first emitter or collector, the intrinsic base, and the second collector or emitter may be made of a III-V semiconductor material.
    Type: Grant
    Filed: April 15, 2021
    Date of Patent: June 20, 2023
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Alexander Reznicek, Bahman Hekmatshoartabari, Tak H. Ning, Liying Jiang
  • Patent number: 11683941
    Abstract: A semiconductor structure may include two vertical transport field effect transistors comprising a top source drain, a bottom source drain, and an epitaxial channel and a resistive random access memory between the two vertical transport field effect transistors, the resistive random access memory may include an oxide layer, a top electrode, and a bottom electrode, wherein the oxide layer may contact the top source drain of the two vertical field effect transistor. The top source drain may function as the bottom electrode of the resistive random access memory. The semiconductor structure may include a shallow trench isolation between the two vertical transport field effect transistors, the shallow trench isolation may be embedded in a first spacer, a doped source, and a portion of a substrate.
    Type: Grant
    Filed: December 3, 2019
    Date of Patent: June 20, 2023
    Assignee: International Business Machines Corporation
    Inventors: Alexander Reznicek, Karthik Balakrishnan, Bahman Hekmatshoartabari, Takashi Ando
  • Publication number: 20230180637
    Abstract: A bottom electrode, a phase change material layer, the phase change material layer includes a similar lattice constant as a lattice constant of the bottom electrode, and a top electrode vertically aligned. A phase change material layer, a top electrode adjacent to a first vertical side surface of the phase change material layer, and a bottom electrode adjacent to a second vertical side surface of the phase change material layer. Forming a phase change material layer, forming a top electrode adjacent to a first vertical side surface and overlapping a first portion of an upper horizontal surface of the phase change material layer, forming a bottom electrode, adjacent to a second vertical side surface and overlapping a second portion of the upper horizontal surface of the phase change material layer, and forming a dielectric material horizontally isolating the bottom electrode and the top electrode.
    Type: Application
    Filed: December 7, 2021
    Publication date: June 8, 2023
    Inventors: Devendra K. Sadana, Ning Li, Bahman Hekmatshoartabari
  • Publication number: 20230180638
    Abstract: A crystallization seed layer in a substrate, a phase change material layer, the phase change material layer includes a similar lattice constant as a lattice constant of the crystallization seed layer, a top electrode adjacent to a first vertical side surface and a bottom electrode adjacent to a second vertical side surface of the phase change material layer. A plurality of memory structures configured in a crossbar array, each including a crystallization seed layer, a phase change material layer above, a top electrode adjacent to a first vertical side surface and a bottom electrode adjacent to a second vertical side surface of the phase change material layer. A method including forming a crystallization seed layer, forming a phase change material layer, forming a top electrode and a bottom electrode on the substrate, each adjacent to a vertical side surface of the phase change material layer.
    Type: Application
    Filed: December 7, 2021
    Publication date: June 8, 2023
    Inventors: Devendra K. Sadana, Ning Li, Bahman Hekmatshoartabari
  • Publication number: 20230180644
    Abstract: Embodiments of the present invention include a phase change memory (PCM) array. The PCM array may include a plurality of PCM cells. Each PCM cell in the plurality of PCM cells may include a top electrode, a resistive element, and a bottom electrode. The PCM array may also include a global heater surrounding the plurality of PCM cells having a thermally conductive material contacting each of the plurality of PCM cells. The global heater may be configured to receive an electric signal to heat the plurality of PCM cells simultaneously.
    Type: Application
    Filed: December 8, 2021
    Publication date: June 8, 2023
    Inventors: Nanbo Gong, Takashi Ando, Alexander Reznicek, Bahman Hekmatshoartabari
  • Publication number: 20230180642
    Abstract: A structure including a bottom electrode, a phase change material layer, the phase change material layer includes a similar lattice constant as a lattice constant of the substrate, a top electrode on and vertically aligned with the phase change material layer, a dielectric material horizontally isolating the bottom electrode from the top electrode and the phase change material layer. A structure including a phase change material layer selected from amorphous silicon, amorphous germanium and amorphous silicon germanium, a top electrode on the phase change material layer, a bottom electrode, a dielectric material isolating the bottom electrode from the top electrode and the phase change material layer. Forming a bottom electrode, forming a phase change material layer adjacent to the bottom electrode, forming a top electrode above the phase change material, forming a dielectric material horizontally isolating the bottom electrode from the top electrode and the phase change material layer.
    Type: Application
    Filed: December 7, 2021
    Publication date: June 8, 2023
    Inventors: Devendra K. Sadana, Ning Li, Bahman Hekmatshoartabari
  • Patent number: 11665983
    Abstract: A structure including a bottom electrode, a phase change material layer vertically aligned and an ovonic threshold switching layer vertically aligned above the phase change material layer. A structure including a bottom electrode, a phase change material layer and an ovonic threshold switching layer vertically aligned above the phase change material layer, and a first barrier layer physically separating the ovonic threshold switching layer from a top electrode. A method including forming a structure including a liner vertically aligned above a first barrier layer, the first barrier layer vertically aligned above a phase change material layer, the phase change material layer vertically aligned above a bottom electrode, forming a dielectric surrounding the structure, and forming an ovonic threshold switching layer on the first barrier layer, vertical side surfaces of the first buffer layer are vertically aligned with the first buffer layer, the phase change material layer and the bottom electrode.
    Type: Grant
    Filed: December 11, 2020
    Date of Patent: May 30, 2023
    Assignee: International Business Machines Corporation
    Inventors: Nanbo Gong, Takashi Ando, Robert L. Bruce, Alexander Reznicek, Bahman Hekmatshoartabari
  • Patent number: 11663809
    Abstract: An apparatus for performing fuzzy template matching includes multiple damped oscillators arranged in at least one two-dimensional matrix, each of the damped oscillators being capacitively coupled to at least one adjacent damped oscillator in the matrix. The apparatus further includes peripheral circuitry coupled with the damped oscillators. The peripheral circuitry is configured to selectively interface with the damped oscillators, as a function of one or more control signals supplied to the peripheral circuitry, and to generate at least one output signal indicative of an accuracy of matching between a template pattern and an input pattern.
    Type: Grant
    Filed: May 22, 2020
    Date of Patent: May 30, 2023
    Assignee: International Business Machines Corporation
    Inventor: Bahman Hekmatshoartabari
  • Publication number: 20230155009
    Abstract: A semiconductor tunnel FET (field effect transistor) including a plurality of nanosheet channels disposed between a first source/drain region and a second source/drain region. The first source/drain region includes a p-type material; and the second source/drain region includes an n-type material.
    Type: Application
    Filed: November 17, 2021
    Publication date: May 18, 2023
    Inventors: Alexander Reznicek, Bahman Hekmatshoartabari, Ruilong Xie, ChoongHyun Lee
  • Patent number: 11646372
    Abstract: A Vertical Field Effect Transistor (VFET) and/or a one transistor dynamic random access memory 1T DRAM that has a substrate with a horizontal substrate surface, a source disposed on the horizontal substrate surface, a drain, and a channel. The channel has a channel top, a channel bottom, a first channel side, a second channel side, and two channel ends. The channel top is connected to the drain. The channel bottom is connected to the source. The channel is vertical and perpendicular to the substrate surface. A first gate stack interfaces with the first channel side and a second gate stack interfaces with the second channel side. A single external gate connection electrically connects the first gate stack and the second gate stack A gate bias (voltage) applied on the single external gate connection biases the first channel side in accumulation and biases the second channel side in inversion. The first gate stack is made of a first high-k dielectric layer and a first gate metal layer.
    Type: Grant
    Filed: September 19, 2020
    Date of Patent: May 9, 2023
    Assignee: International Business Machines Corporation
    Inventors: Alexander Reznicek, Karthik Balakrishnan, Bahman Hekmatshoartabari, Clint Jason Oteri
  • Publication number: 20230126578
    Abstract: A semiconductor device or circuit includes a vertical bipolar junction transistor (vBJT) and a vertical filed effect transistor (vFET). The vBJT collector is electrically and/or physically connected to an adjacent vFET source. For example, a vBJT collector and a vFET source may be integrated upon a same semiconductor material substrate or layer. The vFET provides negative feedback for the collector-base voltage and the vBJT emitter and collector allow for low transit times.
    Type: Application
    Filed: October 21, 2021
    Publication date: April 27, 2023
    Inventors: Alexander Reznicek, Ruilong Xie, Jeng-Bang Yau, Bahman Hekmatshoartabari
  • Publication number: 20230123050
    Abstract: A Darlington pair sensor is disclosed. The Darlington pair sensor has an amplifying/horizontal bipolar junction transistor (BJT) and a sensing/vertical BJT and can be used as a biosensor. The amplifying bipolar junction transistor (BJT) is horizontally disposed on a substrate. The amplifying BJT has a horizontal emitter, a horizontal base, a horizontal collector, and a common extrinsic base/collector. The common extrinsic base/collector is an extrinsic base for the amplifying BJT. The sensing BJT has a vertical orientation with respect to the amplifying BJT. The sensing BJT has a vertical emitter, a vertical base, an extrinsic vertical base, and the common extrinsic base/collector (in common with the amplifying BJT). The common extrinsic base/collector acts as the sensing BJT collector. The extrinsic vertical base is separated into a left extrinsic vertical base and a right extrinsic vertical base giving the sensing BJT has two separated (dual) bases, a sensing base and a control base.
    Type: Application
    Filed: October 18, 2021
    Publication date: April 20, 2023
    Inventors: Bahman Hekmatshoartabari, Alexander Reznicek, Tak H. Ning
  • Patent number: 11631462
    Abstract: A method is presented for temperature assisted programming of flash memory for neuromorphic computing. The method includes training a chip in an environment having a first temperature, adjusting the first temperature to a second temperature in the environment, and employing the chip for inference in the second temperature environment. The first temperature is about 125° C. or higher and the second temperature is about 50° C. or lower.
    Type: Grant
    Filed: February 10, 2020
    Date of Patent: April 18, 2023
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Nanbo Gong, Takashi Ando, Bahman Hekmatshoartabari, Alexander Reznicek
  • Publication number: 20230109345
    Abstract: A semiconductor structure may include one or more metal gates, one or more channels below the one or more metal gates, a gate dielectric layer separating the one or more metal gates from the one or more channels, and a high-k material embedded in the gate dielectric layer. Both the high-k material and the gate dielectric layer may be in direct contact with the one or more channels. The high-k material may provide threshold voltage variation in the one or more metal gates. The high-k material is a first high-k material or a second high-k material. The semiconductor structure may only include the first high-k material embedded in the gate dielectric layer. The semiconductor structure may only include the second high-k material embedded in the gate dielectric layer. The semiconductor structure may include both the first high-k material and the second high-k material embedded in the gate dielectric layer.
    Type: Application
    Filed: December 6, 2022
    Publication date: April 6, 2023
    Inventors: Clint Jason Oteri, Alexander Reznicek, Bahman Hekmatshoartabari, Jingyun Zhang, Ruilong Xie