Patents by Inventor Balaji Padmanabhan

Balaji Padmanabhan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20160322485
    Abstract: An electronic device can include a bidirectional HEMT. In an aspect, a packaged electronic device can include the bidirectional HEMT can be part of a die having a die substrate connection that is configured to be at a fixed voltage, electrically connected to drain/source or source/drain depending on current flow through the bidirectional HEMT, or electrically float. In another aspect, the electronic device can include Kelvin connections on both the drain/source and source/drain side of the circuit. In a further embodiment, a circuit can include the bidirectional HEMT, switch transistors, and diodes with breakdown voltages to limit voltage swings at the drain/source and source/drain of the switch transistors.
    Type: Application
    Filed: April 20, 2016
    Publication date: November 3, 2016
    Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Balaji PADMANABHAN, Prasad VENKATRAMAN, Chun-Li LIU, Peter MOENS
  • Publication number: 20160322351
    Abstract: An electronic device can include a bidirectional HEMT. In an aspect, the electronic device can include a pair of switch gate and blocking gate electrodes, wherein the switch gate electrodes are not electrically connected to the blocking gate electrodes, and the first blocking, first switch, second blocking, and second switch gate electrodes are on the same die. In another aspect, the electronic device can include shielding structures having different numbers of laterally extending portions. In a further aspect, the electronic device can include a gate electrode and a shielding structure, wherein a portion of the shielding structure defines an opening overlying the gate electrode.
    Type: Application
    Filed: April 20, 2016
    Publication date: November 3, 2016
    Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Peter MOENS, Balaji PADMANABHAN, Herbert DE VLEESCHOUWER, Prasad VENKATRAMAN
  • Patent number: 9466708
    Abstract: In one embodiment, a semiconductor device is formed to include a gate structure extending into a semiconductor material that is underlying a first region of semiconductor material. The gate structure includes a conductor and also a gate insulator that has a first portion positioned between the gate conductor and a first portion of the semiconductor material that underlies the gate conductor. The first portion of the semiconductor material is configured to form a channel region of the transistor which underlies the gate conductor. The gate structure may also include a shield conductor overlying the gate conductor and having a shield insulator between the shield conductor and the gate conductor. The shield insulator may also have a second portion positioned between the shield conductor and a second portion of the gate insulator and a third portion overlying the shield conductor.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: October 11, 2016
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Balaji Padmanabhan, Prasad Venkatraman, Gordon M. Grivna
  • Patent number: 9450091
    Abstract: In one embodiment, a vertical insulated-gate field effect transistor includes a feature embedded within a control electrode. The feature is placed within the control electrode to induce stress within predetermined regions of the transistor.
    Type: Grant
    Filed: October 2, 2014
    Date of Patent: September 20, 2016
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Gordon M. Grivna, Zia Hossain, Kirk K. Huang, Balaji Padmanabhan, Francine Y. Robb, Prasad Venkatraman
  • Publication number: 20160118379
    Abstract: In one embodiment, a cascode rectifier structure includes a group III-V semiconductor structure includes a heterostructure disposed on a semiconductor substrate. A first current carrying electrode and a second current carrying electrode are disposed adjacent a major surface of the heterostructure and a control electrode is disposed between the first and second current carrying electrode. A rectifier device is integrated with the group III-V semiconductor structure and is electrically connected to the first current carrying electrode and to a third electrode. The control electrode is further electrically connected to the semiconductor substrate and the second current path is generally perpendicular to a primary current path between the first and second current carrying electrodes.
    Type: Application
    Filed: September 14, 2015
    Publication date: April 28, 2016
    Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Balaji PADMANABHAN, Prasad VENKATRAMAN, Zia HOSSAIN, Chun-Li LIU, Woochul JEON, Jason MCDONALD
  • Publication number: 20160118490
    Abstract: In one embodiment, a group III-V transistor structure includes a heterostructure disposed on a semiconductor substrate. A first current carrying electrode and a second current carrying electrode are disposed adjacent a major surface of the heterostructure and a control electrode is disposed between the first and second current carrying electrode. A clamping device is integrated with the group III-V transistor structure and is electrically connected to the first current carrying electrode a third electrode to provide a secondary current path during, for example, an electrical stress event.
    Type: Application
    Filed: September 14, 2015
    Publication date: April 28, 2016
    Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Balaji PADMANABHAN, Prasad VENKATRAMAN, Zia HOSSAIN, Chun-Li LIU, Jason MCDONALD, Ali SALIH, Alexander YOUNG
  • Publication number: 20160043219
    Abstract: In accordance with an embodiment, a method for manufacturing a semiconductor component includes forming a first trench through a plurality of layers of compound semiconductor material. An insulating material is formed on first and second sidewalls of the first trench and first and second sidewalls of the second trench and a trench fill material is formed in the first and second trenches. In accordance with another embodiment, the semiconductor component includes a plurality of layers of compound semiconductor material over a body of semiconductor material and first and second filled trenches extending into the plurality of layers of compound semiconductor material. The first trench has first and second sidewalls and a floor and a first dielectric liner over the first and second sidewalls and the second trench has first and second sidewalls and a floor and second dielectric liner over the first and second sidewalls of the second trench.
    Type: Application
    Filed: August 5, 2014
    Publication date: February 11, 2016
    Inventors: Chun-Li Liu, Balaji Padmanabhan, Ali Salih, Peter Moens
  • Patent number: 9245963
    Abstract: In one embodiment, a vertical insulated-gate field effect transistor includes a shield electrode formed in trench structure within a semiconductor material. A gate electrode is isolated from the semiconductor material using gate insulating layers. Before the shield electrode is formed, spacer layers can be used form shield insulating layers along portions of the trench structure. The shield insulating layers are thicker than the gate insulating layers. In another embodiment, the shield insulating layers have variable thickness.
    Type: Grant
    Filed: October 14, 2014
    Date of Patent: January 26, 2016
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Peter A Burke, Gordon M Grivna, Balaji Padmanabhan, Prasad Venkatraman
  • Publication number: 20150340482
    Abstract: In one embodiment, Group III-nitride materials are used to form a semiconductor device. A fin structure is formed in the Group III-nitride material, and a gate structure, source electrodes and drain electrodes are formed in spaced relationship to the fin structure. The fin structure provides both polar and semi-polar 2DEG regions. In one embodiment, the gate structure is configured to control current flow in the polar 2DEG region. Shield conductor layers are included above the gate structure and in spaced relationship with drain regions of the semiconductor device.
    Type: Application
    Filed: July 30, 2015
    Publication date: November 26, 2015
    Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Balaji PADMANABHAN, John Michael PARSEY, JR., Ali SALIH, Prasad VENKATRAMAN
  • Patent number: 9129889
    Abstract: In one embodiment, Group III-nitride materials are used to form a semiconductor device. A fin structure is formed in the Group III-nitride material, and a gate structure, source electrodes and drain electrodes are formed in spaced relationship to the fin structure. The fin structure provides both polar and semi-polar 2DEG regions. In one embodiment, the gate structure is configured to control current flow in the polar 2DEG region. Shield conductor layers are included above the gate structure and in spaced relationship with drain regions of the semiconductor device.
    Type: Grant
    Filed: March 10, 2014
    Date of Patent: September 8, 2015
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Balaji Padmanabhan, John Michael Parsey, Jr., Ali Salih, Prasad Venkatraman
  • Patent number: 9048214
    Abstract: In one embodiment, a structure for a semiconductor device has trench shield electrodes formed above and below a gate electrode. The structure can be configured to function as a bidirectional power field effect transistor.
    Type: Grant
    Filed: August 21, 2012
    Date of Patent: June 2, 2015
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Balaji Padmanabhan, Prasad Venkatraman
  • Patent number: 9029215
    Abstract: In one embodiment, a method for forming a semiconductor device includes forming trench and a dielectric layer along surfaces of the trench. A shield electrode is formed in a lower portion of the trench and the dielectric layer is removed from upper sidewall surfaces of the trench. A gate dielectric layer is formed along the upper surfaces of the trench. Oxidation-resistant spacers are formed along the gate dielectric layer. Thereafter, an interpoly dielectric layer is formed above the shield electrode using localized oxidation. The oxidation step increases the thickness of lower portions of the gate dielectric layer. The oxidation-resistant spacers are removed before forming a gate electrode adjacent the gate dielectric layer.
    Type: Grant
    Filed: May 14, 2012
    Date of Patent: May 12, 2015
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Zia Hossain, Gordon M. Grivna, Duane B. Barber, Peter McGrath, Balaji Padmanabhan, Prasad Venkatraman
  • Patent number: 8969956
    Abstract: An electronic device can include a transistor structure, including a patterned semiconductor layer overlying a substrate and having a primary surface, wherein the patterned semiconductor layer defines a first trench and a second trench that extend from the primary surface towards the substrate. The electronic device can further include a first conductive electrode and a gate electrode within the first trench. The electronic device can still further include a second conductive electrode within the second trench. The electronic device can include a source region within the patterned semiconductor layer and disposed between the first and second trenches. The electronic device can further include a body contact region within the patterned semiconductor layer and between the first and second trenches, wherein the body contact region is spaced apart from the primary surface. Processes of forming the electronic device can take advantage of forming all trenches during processing sequence.
    Type: Grant
    Filed: February 10, 2014
    Date of Patent: March 3, 2015
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Prasad Venkatraman, Balaji Padmanabhan
  • Publication number: 20150054068
    Abstract: In one embodiment, a vertical insulated-gate field effect transistor includes a feature embedded within a control electrode. The feature is placed within the control electrode to induce stress within predetermined regions of the transistor.
    Type: Application
    Filed: October 2, 2014
    Publication date: February 26, 2015
    Inventors: Gordon M. Grivna, Zia Hossain, Kirk K. Huang, Balaji Padmanabhan, Francine Y. Robb, Prasad Venkatraman
  • Publication number: 20150028414
    Abstract: In one embodiment, a vertical insulated-gate field effect transistor includes a shield electrode formed in trench structure within a semiconductor material. A gate electrode is isolated from the semiconductor material using gate insulating layers. Before the shield electrode is formed, spacer layers can be used form shield insulating layers along portions of the trench structure. The shield insulating layers are thicker than the gate insulating layers. In another embodiment, the shield insulating layers have variable thickness.
    Type: Application
    Filed: October 14, 2014
    Publication date: January 29, 2015
    Inventors: Peter A. Burke, Gordon M. Grivna, Balaji Padmanabhan, Prasad Venkatraman
  • Patent number: 8889532
    Abstract: In one embodiment, a vertical insulated-gate field effect transistor includes a shield electrode formed in trench structure within a semiconductor material. A gate electrode is isolated from the semiconductor material using gate insulating layers. Before the shield electrode is formed, spacer layers can be used form shield insulating layers along portions of the trench structure. The shield insulating layers are thicker than the gate insulating layers. In another embodiment, the shield insulating layers have variable thickness.
    Type: Grant
    Filed: June 27, 2011
    Date of Patent: November 18, 2014
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Peter A. Burke, Gordon M. Grivna, Balaji Padmanabhan, Prasad Venkatraman
  • Patent number: 8878286
    Abstract: In one embodiment, a vertical insulated-gate field effect transistor includes a feature embedded within a control electrode. The feature is placed within the control electrode to induce stress within predetermined regions of the transistor.
    Type: Grant
    Filed: May 15, 2013
    Date of Patent: November 4, 2014
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Gordon M. Grivna, Zia Hossain, Kirk K. Huang, Balaji Padmanabhan, Francine Y. Robb, Prasad Venkatraman
  • Publication number: 20140264369
    Abstract: In one embodiment, Group III-nitride materials are used to form a semiconductor device. A fin structure is formed in the Group III-nitride material, and a gate structure, source electrodes and drain electrodes are formed in spaced relationship to the fin structure. The fin structure provides both polar and semi-polar 2DEG regions. In one embodiment, the gate structure is configured to control current flow in the polar 2DEG region. Shield conductor layers are included above the gate structure and in spaced relationship with drain regions of the semiconductor device.
    Type: Application
    Filed: March 10, 2014
    Publication date: September 18, 2014
    Applicant: Semiconductor Components Industries, LLC
    Inventors: Balaji PADMANABHAN, John Michael PARSEY, JR., Ali Salih, Prasad Venkatraman
  • Publication number: 20140264449
    Abstract: In one embodiment, a HEMT semiconductor device includes an isolation region that may include oxygen wherein the isolation region may extend thorough an ALGaN and GaN layer into an underlying layer.
    Type: Application
    Filed: January 23, 2014
    Publication date: September 18, 2014
    Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: John Michael Parsey, JR., Chun-Li Liu, Balaji Padmanabhan, Ali Salih
  • Publication number: 20140264565
    Abstract: In one embodiment, a semiconductor device is formed to include a gate structure extending into a semiconductor material that is underlying a first region of semiconductor material. The gate structure includes a conductor and also a gate insulator that has a first portion positioned between the gate conductor and a first portion of the semiconductor material that underlies the gate conductor. The first portion of the semiconductor material is configured to form a channel region of the transistor which underlies the gate conductor. The gate structure may also include a shield conductor overlying the gate conductor and having a shield insulator between the shield conductor and the gate conductor. The shield insulator may also have a second portion positioned between the shield conductor and a second portion of the gate insulator and a third portion overlying the shield conductor.
    Type: Application
    Filed: March 15, 2013
    Publication date: September 18, 2014
    Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Balaji Padmanabhan, Prasad Venkatraman, Gordon M. Grivna