Patents by Inventor Bennett Greenwood

Bennett Greenwood has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

Composite particles and a process for making the same

Patent number: 9926398

Abstract: The invention provides composite particles comprising core particles having organosilica particles disposed about the core particles. The invention also provides a process for making the composite particles.

Type: Grant

Filed: March 18, 2014

Date of Patent: March 27, 2018

Assignee: Cabot Corporation

Inventors: Qingling Zhang, Bennett Greenwood, Ravi Sharma, Geoffrey D. Moeser
Chemical mechanical planarization slurry composition comprising composite particles, process for removing material using said composition, CMP polishing pad and process for preparing said composition

Patent number: 9725621

Abstract: CMP processes, tools and slurries utilize composite particles that include core particles having organosilica particles disposed about the core particles. Using these processes, tools and slurries can enhance removal rates, reduce defectivity and increase cleanability with respect to comparable systems and substrates.

Type: Grant

Filed: April 30, 2014

Date of Patent: August 8, 2017

Assignee: Cabot Corporation

Inventors: Qingling Zhang, Bennett Greenwood, Ravi Sharma, Geoffrey D. Moeser, Brian G. Prevo, Mark J. Hampden-Smith
Chemical Mechanical Planarization Slurry Composition Comprising Composite Particles, Process for Removing Material Using Said Composition, CMP Polishing Pad and Process for Preparing Said Composition

Publication number: 20160090513

Abstract: CMP processes, tools and slurries utilize composite particles that include core particles having organosilica particles disposed about the core particles. Using these processes, tools and slurries can enhance removal rates, reduce defectivity and increase cleanability with respect to comparable systems and substrates.

Type: Application

Filed: April 30, 2014

Publication date: March 31, 2016

Inventors: Qingling Zhang, Bennett Greenwood, Ravi Sharma, Geoffrey D. Moeser, Brian G. Prevo, Mark J. Hampden-Smith
Composite Particles and a Process for Making the Same

Publication number: 20160009844

Abstract: The invention provides composite particles comprising core particles having organosilica particles disposed about the core particles. The invention also provides a process for making the composite particles.

Type: Application

Filed: March 18, 2014

Publication date: January 14, 2016

Inventors: Qingling Zhang, Bennett Greenwood, Ravi Sharma, Geoffrey D. Moeser

Composite particles and a process for making the same

Chemical mechanical planarization slurry composition comprising composite particles, process for removing material using said composition, CMP polishing pad and process for preparing said composition

Chemical Mechanical Planarization Slurry Composition Comprising Composite Particles, Process for Removing Material Using Said Composition, CMP Polishing Pad and Process for Preparing Said Composition

Composite Particles and a Process for Making the Same