Abstract: A gas panel comprising a plurality of discreet blocks. The gas panel of the present invention includes a first functional component coupled to a first face of a first block wherein the first face has a first port configuration. A second functional component coupled to a first face of a second block wherein the first face of the second block has the first port configuration and wherein the first functional component is different than the second functional component.

Abstract: A mounting plane technology for a gas panel comprising a plurality of discreet blocks. The mounting plane of the present invention includes a track and a centering element. The centering element glides along the tracks such that modular blocks may be anchored to any position along the track. Centering elements are easily added to and removed form tracks thus maximizing the speed and flexibility of configuring or reconfiguring the modular blocks. The centering element and track have a geometrical symmetry that allows for highly precise anchoring of the modular block with respect to the mounting plane. The centering element is harder than the plane material and has grooves to increase the friction between the plane and centering element when the modular block is anchored. Centering elements are deliberately manufactured with a slight asymmetry with respect to the track so that high manufacturing yield is guaranteed.

Abstract: A gas panel comprising a plurality of discreet blocks. The gas panel of the present invention includes a first functional component coupled to a first face of a first block wherein the first face has a first port configuration. A second functional component coupled to a first face of a second block wherein the first face of the second block has the first port configuration and wherein the first functional component is different than the second functional component.

Abstract: A novel integrated gas panel is described. The integrated gas panel of the present invention, comprises a plurality of individual process gas modules or blocks coupled together with a plurality of gaskets located between them. Each process gas module comprises an upstream isolation valve coupled between a process gas inlet and an MFC inlet. An upstream purge valve is coupled between an upstream purge port and the MFC inlet. A mass flow controller is coupled between the MFC inlet and an MFC outlet. A mix isolation valve is coupled between the MFC outlet and a mix port. The modules are coupled together such that respective ports of each module are in fluid communication with one another to form a common tube or port. Gaskets placed between the various modules either allow or block the flow of gas between ports of adjacent modules. By arranging blocks and gaskets in different ways, gas panels with a wide variety of different functions and capabilities can be easily designed and fabricated.

Abstract: An apparatus (10) for purifying gas distribution systems has a gas inlet (12) and a gas outlet (14) for connection to gas distribution lines (54). A housing (22) encloses a resistance heater (24) and a particle filter (26) for the gas. The resistance heater (24) is connected to the gas inlet (12) and the particle filter (26) is connected between the resistance heater (24) and the gas outlet (14). The resistance heater includes a sealed tube (26) defining a gas plenum (28). A resistance heater element enclosed in a cylindrical Inconel alloy shell (30) is centrally disposed in the sealed tube (26). A spiral ridge (32) winds around the shell (30) to define a spiral path for gas flowing through the plenum (28). The spiral ridge (32) has a narrower pitch near the gas inlet (12) and a wider pitch moving toward the filter (26) end of the plenum (28).