Patents by Inventor Brynne K. Bohannon

Brynne K. Bohannon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of clean up of a patterned metal layer
    Patent number: 5506171
    Abstract: A method of fabricating deformable mirror devices, or any other device, in which a metal pattern is to be etched over a photoresist layer. The method includes removal of a contaminating layer (11) that occurs as a result of the metal etch. This removal is accomplished at the wafer level, with an anhydrous hydrofluoric etch followed by a wet rinse.
    Type: Grant
    Filed: June 7, 1995
    Date of Patent: April 9, 1996
    Assignee: Texas Instruments Incorporated
    Inventors: Jerry L. Leonard, Brynne K. Bohannon
  • Metal selective polymer removal
    Patent number: 5348619
    Abstract: A metal selective polymer removal process is disclosed which prevents metal lift-off for use especially suited for ULSI fabrication.
    Type: Grant
    Filed: September 3, 1992
    Date of Patent: September 20, 1994
    Assignee: Texas Instruments Incorporated
    Inventors: Brynne K. Bohannon, Daniel J. Syverson
  • Metal selective polymer removal
    Patent number: RE36006
    Abstract: A metal selective polymer removal process is disclosed which prevents metal lift-off for use especially suited for ULSI fabrication.
    Type: Grant
    Filed: October 31, 1996
    Date of Patent: December 22, 1998
    Assignee: FSI International, Inc.
    Inventors: Brynne K. Bohannon, Daniel J. Syverson