Patents by Inventor Burkhard Corves
Burkhard Corves has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 10416570Abstract: An optical imaging arrangement includes an optical element unit, and an actuator device connected to the optical element unit and is configured to be connected to a support structure for supporting the optical unit. The actuator device is configured to: actively adjust, in an adjustment state, a position and/or an orientation of the optical unit with respect to the support structure in N degrees of freedom; and support the optical element unit in a statically overdetermined manner in at least one of the N degrees of freedom via a plurality of active first and second actuator components such that, in a holding state following the adjustment state, the first and second actuator components cause a parasitic residual load introduced into the optical element unit in the at least one of the N degrees of freedom.Type: GrantFiled: November 29, 2018Date of Patent: September 17, 2019Assignee: Carl Zeiss SMT GmbHInventors: Jens Kugler, Stefan Hembacher, Michaela Schmid, Bernhard Geuppert, Burkhard Corves, Martin Riedel, Martin Wahle, Mathias Huesing, Michael Lorenz, Tim Detert, Marwène Nefzi
-
Patent number: 10279327Abstract: An orbital shaker with a balancing device that automatically and passively compensates, without supply of external energy, forces and moments which are caused by imbalance and arise during operation, in particular as a result of a possible variable loading (mass, geometry of the containers, properties of the contents) and variable operating parameters (speed of rotation and shaking radius). The balancing device can be designed such that only the unbalance forces (static balancing) and/or the unbalance moments (dynamic balancing) are compensated.Type: GrantFiled: July 20, 2015Date of Patent: May 7, 2019Assignee: ADOLF KÜHNER AGInventors: Burkhard Corves, Mathias Schumacher, Jochen Büchs, Wolf Klöckner
-
Patent number: 10274845Abstract: An optical module, in particular for microlithography, includes an optical element and a support unit. The optical element has at least one optically utilized area, which defines a rotational axis of symmetry. To support the optical element the support unit has a plurality of more than three support elements. Each of the support elements in the area of a first end is connected with the optical element and in the area of a second end is connected with the support structure. The support unit is designed such that the degree of freedom of rotation of the optical element around the rotational axis of symmetry is restricted, while the position or orientation of the optical element in the other five degrees of freedom is spatially adjustable via the support unit.Type: GrantFiled: April 21, 2011Date of Patent: April 30, 2019Assignee: Carl Zeiss SMT GmbHInventors: Ivan Ivanov, Taoufik Mbarek, Mathias Huesing, Burkhard Corves
-
Publication number: 20190094705Abstract: An optical imaging arrangement includes an optical element unit, and an actuator device connected to the optical element unit and is configured to be connected to a support structure for supporting the optical unit. The actuator device is configured to: actively adjust, in an adjustment state, a position and/or an orientation of the optical unit with respect to the support structure in N degrees of freedom; and support the optical element unit in a statically overdetermined manner in at least one of the N degrees of freedom via a plurality of active first and second actuator components such that, in a holding state following the adjustment state, the first and second actuator components cause a parasitic residual load introduced into the optical element unit in the at least one of the N degrees of freedom.Type: ApplicationFiled: November 29, 2018Publication date: March 28, 2019Inventors: Jens Kugler, Stefan Hembacher, Michaela Schmid, Bernhard Geuppert, Burkhard Corves, Martin Riedel, Martin Wahle, Mathias Huesing, Michael Lorenz, Tim Detert, Marwène Nefzi
-
Publication number: 20180008943Abstract: An orbital shaker with a balancing device that automatically and passively compensates, without supply of external energy, forces and moments which are caused by imbalance and arise during operation, in particular as a result of a possible variable loading (mass, geometry of the containers, properties of the contents) and variable operating parameters (speed of rotation and shaking radius). The balancing device can be designed such that only the unbalance forces (static balancing) and/or the unbalance moments (dynamic balancing) are compensated.Type: ApplicationFiled: July 20, 2015Publication date: January 11, 2018Inventors: Burkhard CORVES, Mathias SCHUMACHER, Jochen BÜCHS, Wolf KLÖCKNER
-
Publication number: 20150168853Abstract: A lithography apparatus is disclosed, which comprises: a first component, a second component, a coupling device which is configured to couple the first and second components to one another, a capture device for capturing a movement of a floor on which the lithography apparatus stands, and a control device which is configured to actuate the coupling device depending on the captured movement of the floor in order to restrict a movement of the second component relative to the first component.Type: ApplicationFiled: December 22, 2014Publication date: June 18, 2015Inventors: Mathias Schumacher, Burkhard Corves, Jens Kugler, Markus Knuefermann, Bernhard Geuppert, Stefan Xalter, Bernhard Gellrich
-
Publication number: 20140021324Abstract: A lithography apparatus is disclosed, which comprises: a first component, a second component, a coupling device which is configured to couple the first and second components to one another, a capture device for capturing a movement (Z) of a floor on which the lithography apparatus stands, and a control device which is configured to actuate the coupling device depending on the captured movement (Z) of the floor in order to restrict a movement of the second component relative to the first component.Type: ApplicationFiled: July 3, 2013Publication date: January 23, 2014Inventors: Mathias Schumacher, Burkhard Corves, Jens Kugler, Markus Knuefermann, Bernhard Geuppert, Stefan Xalter, Bernhard Gellrich
-
Publication number: 20110261341Abstract: An optical module, in particular for microlithography, includes an optical element and a support unit. The optical element has at least one optically utilised area, which defines a rotational axis of symmetry. To support the optical element the support unit has a plurality of more than three support elements. Each of the support elements in the area of a first end is connected with the optical element and in the area of a second end is connected with the support structure. The support unit is designed such that the degree of freedom of rotation of the optical element around the rotational axis of symmetry is restricted, while the position or orientation of the optical element in the other five degrees of freedom is spatially adjustable via the support unit.Type: ApplicationFiled: April 21, 2011Publication date: October 27, 2011Applicant: CARL ZEISS SMT GMBHInventors: Ivan Ivanov, Taoufik Mbarek, Mathias Huesing, Burkhard Corves
-
Publication number: 20080265614Abstract: A vehicle door module comprises a drive shaft for displacing a displacement device, particularly a window lifter. The vehicle door module and the displacement device can be assembled together in any particular position of rotation of the drive shaft.Type: ApplicationFiled: April 28, 2005Publication date: October 30, 2008Applicant: Johnson Controls Interiors GmbH & Co. KGInventors: Alexander Schidan, Hans-Helmut Mieglitz, Burkhard Corves, Mathias Husing, Peter Markert, Mohannad Tarsha Kordi, Martin Riedel
-
Patent number: 6050172Abstract: A pneumatically operated mechanism for a glass machine comprises a piston and cylinder device, first and second air lines leading to opposite sides of the piston, and first and second control means for controlling the passage of air through the air lines, which control means each comprise an operating valve and a speed control valve. The valves are solenoid operated and by control of the timing of operation of the valves the speed of movement of the piston and the degree of cushioning at the ends of its stroke may be adjusted. In a modified mechanism pressure sensors which sense the pressures in the piston and cylinder device are connected to a processor which is adapted in response to data sensed by the sensors to operate the valves to obtain a desired movement of the piston.Type: GrantFiled: March 17, 1998Date of Patent: April 18, 2000Assignee: Emhart Glass S.A.Inventors: Burkhard Corves, Rudolf Schwegler, Leo Diehm
-
Patent number: 5857401Abstract: A pneumatic circuit for use in causing rapid, upward movement of a piston and cylinder device in a glass machine incorporates a supplementary valve which connects an upper part of the cylinder to exhaust for part of the upstroke, and through a restrictor valve to exhaust towards the end of the upstroke.Type: GrantFiled: March 31, 1997Date of Patent: January 12, 1999Assignee: Emhart Glass S.A.Inventors: Burkhard Corves, Rudolf Schwegler, Leo Diehm