Patents by Inventor Byeong Yeol JANG

Byeong Yeol JANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • HYBRID DEPOSITING APPARATUS FOR GALLIUM OXIDE AND METHOD FOR HYBRID DEPOSITING USING SAME
    Publication number: 20250084532
    Abstract: The present disclosure relates to a hybrid deposition apparatus for gallium oxide, and a hybrid deposition apparatus for gallium oxide according to a disclosed embodiment of the present disclosure includes a gas supply assembly for supplying a source gas, a reaction gas, and a purge gas, a liquid supply assembly for supplying at least a portion of the source gas, and a chamber unit which is connected to the gas supply assembly and the liquid supply assembly and has a substrate disposed therein.
    Type: Application
    Filed: November 21, 2024
    Publication date: March 13, 2025
    Applicant: NEXUSBE CO., LTD
    Inventors: Sung Hwan JANG, Sang Hun KIM, Keun Sik KIM, Byeong Yeol JANG, Sang Hee WON, Ho Young PARK, Sang Gyun KIM, Hag Young CHOI