Patents by Inventor Byung-Soo So

Byung-Soo So has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12058888
    Abstract: A method of manufacturing a polycrystalline silicon layer for a display device includes the steps of forming an amorphous silicon layer on a substrate, cleaning the amorphous silicon layer with hydrofluoric acid, rinsing the amorphous silicon layer with hydrogenated deionized water, and irradiating the amorphous silicon layer with a laser beam to form a polycrystalline silicon layer.
    Type: Grant
    Filed: October 18, 2021
    Date of Patent: August 6, 2024
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Dong-Sung Lee, Seo Jong Oh, Byung Soo So, Dong-min Lee
  • Patent number: 12040186
    Abstract: A laser irradiation apparatus includes a laser light source which emits a laser beam, a first lens through which the laser beam emitted from the laser light source passes, a first scanner which reflects the laser beam passing through the first lens and changes a direction of the laser beam, a second scanner which reflects the laser beam deflected by the first scanner and changes a direction of the laser beam, a plurality of second lenses through which the laser beam deflected by the second scanner passes, where at least one of the plurality of second lenses is configured to vibrate in one direction, and an optical element through which the laser beam passing through the plurality of second lenses passes, where the optical element is configured to correct an incident angle of the laser beam incident a substrate.
    Type: Grant
    Filed: August 17, 2021
    Date of Patent: July 16, 2024
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Hiroshi Okumura, Jongjun Baek, Byung Soo So
  • Patent number: 11961851
    Abstract: A laser apparatus includes a laser generator configured to generate a first laser beam proceeding along a first direction, and an inversion module configured to convert the first laser beam to a second laser beam proceeding along the first direction, the inversion module including a splitter configured to form a reflected laser beam by partially reflecting the first laser beam, and a transmitted laser beam by partially transmitting the first laser beam, and a prism configured to reflect the reflected laser beam.
    Type: Grant
    Filed: February 15, 2022
    Date of Patent: April 16, 2024
    Assignee: Samsung Display Co., Ltd.
    Inventors: Dong-min Lee, Ji-Hwan Kim, Jongoh Seo, Byung Soo So, Dong-Sung Lee, Jonghoon Choi
  • Patent number: 11942481
    Abstract: A display device may include a thin film transistor disposed on a substrate, and a display element electrically connected to the thin film transistor. The thin film transistor may include an active pattern including polycrystalline silicon, a gate insulation layer disposed on the active pattern, and a gate electrode disposed on the gate insulation layer. An average value of grain sizes of the active pattern may be in a range of about 400 nm to about 800 nm. An RMS value of a surface roughness of the active pattern may be about 4 nm or less. A method of manufacturing a polycrystalline silicon layer may include cleaning an amorphous silicon layer with hydrofluoric acid, rinsing the amorphous silicon layer with hydrogenated deionized water, and irradiating the amorphous silicon layer with a laser beam having an energy density of about 440 mJ/cm2 to about 490 mJ/cm2.
    Type: Grant
    Filed: October 26, 2021
    Date of Patent: March 26, 2024
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Dong-Sung Lee, Jongoh Seo, Byung Soo So, Dong-min Lee, Yeon Hee Jeon, Jonghoon Choi
  • Publication number: 20240071757
    Abstract: A method of manufacturing a stacked structure includes forming a first metal buffer layer including crystal grains on a base substrate, forming a second metal buffer material layer on the first metal buffer layer, and crystallizing the second metal buffer material layer to form a second metal buffer layer, wherein the second metal buffer material layer includes crystal grains, and a density of the crystal grains of the second metal buffer material layer is lower than a density of the crystal grains of the first metal buffer layer.
    Type: Application
    Filed: November 6, 2023
    Publication date: February 29, 2024
    Applicants: Samsung Display Co., LTD., Industry-Academic Cooperation Foundation, Yonsei University
    Inventors: Mann Ho CHO, Kwang Sik JEONG, Hyeon Sik KIM, Hyun Eok SHIN, Byung Soo SO, Ju Hyun LEE
  • Patent number: 11903247
    Abstract: A method of manufacturing a polycrystalline silicon layer for a display device includes the steps of forming an amorphous silicon layer on a substrate, cleaning the amorphous silicon layer with hydrofluoric acid, rinsing the amorphous silicon layer with hydrogenated deionized water, and irradiating the amorphous silicon layer with a laser beam to form a polycrystalline silicon layer.
    Type: Grant
    Filed: October 18, 2021
    Date of Patent: February 13, 2024
    Assignee: Samsung Display Co., Ltd.
    Inventors: Dong-Sung Lee, Seo Jong Oh, Byung Soo So, Dong-min Lee
  • Patent number: 11837468
    Abstract: A method of manufacturing a stacked structure includes forming a first metal buffer layer including crystal grains on a base substrate, forming a second metal buffer material layer on the first metal buffer layer, and crystallizing the second metal buffer material layer to form a second metal buffer layer, wherein the second metal buffer material layer includes crystal grains, and a density of the crystal grains of the second metal buffer material layer is lower than a density of the crystal grains of the first metal buffer layer.
    Type: Grant
    Filed: September 8, 2021
    Date of Patent: December 5, 2023
    Assignees: SAMSUNG DISPLAY CO., LTD., INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY
    Inventors: Mann Ho Cho, Kwang Sik Jeong, Hyeon Sik Kim, Hyun Eok Shin, Byung Soo So, Ju Hyun Lee
  • Patent number: 11804389
    Abstract: An annealing apparatus includes: a main body configured to receive a substrate; a microwave generating unit configured to generate microwaves to be transmitted to the main body; an incidence unit configured to transmit the microwaves from the microwave generating unit to the main body; and a diffraction unit disposed between the incident unit and the main body. The diffraction unit is configured to pass the microwaves therethrough before they are transmitted to the main body.
    Type: Grant
    Filed: August 7, 2019
    Date of Patent: October 31, 2023
    Assignee: Samsung Display Co., Ltd.
    Inventors: Byung Soo So, In Cheol Ko, Jong Jun Baek, Jae Woo Jeong
  • Patent number: 11706949
    Abstract: A display device and a method of manufacturing a display device are provided. A display device includes a lower conductive pattern disposed on a substrate, a lower insulating layer disposed on the lower conductive pattern, the lower insulating layer including a first lower insulating pattern including an overlapping region overlapping the lower conductive pattern, and a protruding region. The display device includes a semiconductor pattern disposed on the first lower insulating pattern and having a side surface, the side surface being aligned with a side surface of the first lower insulating pattern or disposed inward from the side surface of the first lower insulating pattern, a gate insulating layer disposed on the semiconductor pattern, a gate electrode disposed on the gate insulating layer, and an empty space disposed between the substrate and the protruding region of the first lower insulating pattern.
    Type: Grant
    Filed: March 4, 2021
    Date of Patent: July 18, 2023
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Jong Oh Seo, Byung Soo So
  • Publication number: 20230215871
    Abstract: A display device may include a substrate, a buffer layer on the substrate, a first active pattern on the buffer layer, the first active pattern having a first thickness, a second active pattern on the buffer layer spaced from the first active pattern and having a second thickness smaller than the first thickness, a first gate insulating layer on the first active pattern and the second active pattern, a first gate electrode on the first gate insulating layer, the first gate electrode overlapping the first active pattern, and a second gate electrode on the first gate insulating layer, the second gate electrode overlapping the second active pattern.
    Type: Application
    Filed: March 15, 2023
    Publication date: July 6, 2023
    Inventors: JONGHOON CHOI, JONGOH SEO, JI-HWAN KIM, JONGJUN BAEK, BYUNG SOO SO
  • Publication number: 20230124284
    Abstract: A laser crystallization device includes: a first solid-state laser generator which generates a first solid-state laser having a first energy intensity; a second solid-state laser generator which generates a second solid-state laser having a second energy intensity lower than the first energy intensity; and a third solid-state laser generator which generates a third solid-state laser having a third energy intensity lower than the first energy intensity.
    Type: Application
    Filed: August 29, 2022
    Publication date: April 20, 2023
    Inventors: DONG-MIN LEE, JANG-HYUN KIM, BYUNG SOO SO, JAEWOO JEONG, DONGGYU JIN
  • Publication number: 20230106004
    Abstract: A display device includes: a substrate; a semiconductor layer on the substrate, and including a channel of at least one transistor; a first insulating layer on the semiconductor layer; and a gate electrode on the first insulating layer. The semiconductor layer includes polycrystalline silicon, and the channel includes: a first region containing a first impurity; and a second region containing a second impurity different from the first impurity.
    Type: Application
    Filed: May 23, 2022
    Publication date: April 6, 2023
    Inventors: Jong Oh SEO, Jang Hyun KIM, Byung Soo SO, Jae Woo JEONG
  • Publication number: 20230100985
    Abstract: A display panel according to an embodiment includes a substrate, a thin film transistor disposed on the substrate, and a light emitting element electrically connected to the thin film transistor. The substrate includes a first resin layer, a first barrier layer disposed on the first resin layer, a second resin layer including a lower portion disposed on the first barrier layer and an upper portion having a carbon content less than a carbon content of the lower portion, and a second barrier layer disposed on the second resin layer.
    Type: Application
    Filed: May 26, 2022
    Publication date: March 30, 2023
    Applicant: Samsung Display Co., LTD.
    Inventors: Jaewoo JEONG, Taesung KIM, Hyunmin CHO, Taewook KANG, Byung Soo SO
  • Patent number: 11610919
    Abstract: A display device may include a substrate, a buffer layer on the substrate, a first active pattern on the buffer layer, the first active pattern having a first thickness, a second active pattern on the buffer layer spaced from the first active pattern and having a second thickness smaller than the first thickness, a first gate insulating layer on the first active pattern and the second active pattern, a first gate electrode on the first gate insulating layer, the first gate electrode overlapping the first active pattern, and a second gate electrode on the first gate insulating layer, the second gate electrode overlapping the second active pattern.
    Type: Grant
    Filed: April 26, 2021
    Date of Patent: March 21, 2023
    Assignee: Samsung Display Co., Ltd.
    Inventors: Jonghoon Choi, Jongoh Seo, Ji-Hwan Kim, Jongjun Baek, Byung Soo So
  • Patent number: 11407061
    Abstract: A laser crystallizing apparatus may include a laser light source, an optical system, and an optical module. The laser light source may generate a laser beam. The optical system may convert the laser beam into a line laser beam. The optical module may disperse energy of the line laser beam in a first direction for generating a dispersed line laser beam. The first direction may be perpendicular to a lengthwise direction of the optical module.
    Type: Grant
    Filed: November 27, 2019
    Date of Patent: August 9, 2022
    Inventors: Dong-Sung Lee, Dong-min Lee, Jongoh Seo, Byung Soo So
  • Publication number: 20220216285
    Abstract: A method of manufacturing a display device including forming a polysilicon layer on a substrate, patterning the polysilicon layer to form a polysilicon pattern including a first region and a second region each having a first thickness, and a third region having a second thickness less than the first thickness, forming a gate insulation layer on the polysilicon pattern, forming a gate electrode on the gate insulation layer, partially implanting ions into the polysilicon pattern to form an active layer, forming an insulation interlayer on the gate electrode, forming source and drain contact holes each passing through the insulation interlayer and the gate insulation layer and respectively overlapping the first region and the second region, forming source and drain electrodes respectively filling the source and drain contact holes, and forming a light emitting element electrically connected to the source electrode or the drain electrode.
    Type: Application
    Filed: March 30, 2020
    Publication date: July 7, 2022
    Inventors: Jong-Oh SEO, Ji-Hwan KIM, Byung-Soo SO, Dong-Min LEE, Jong-Hoon CHOI
  • Patent number: 11380544
    Abstract: A laser annealing device includes a stage, a laser generator, and a reflective member. The stage supports a substrate with a thin film formed thereon to be processed, and may be moved in a first direction at a set or predetermined speed. The laser generator irradiates a first area of the thin film with a laser beam while the stage is moved. The reflective member reflects a part of the laser beam, which is reflected from the first area of the thin film, to a second area of the thin film. The first area and the second area are spaced apart from each other.
    Type: Grant
    Filed: August 19, 2020
    Date of Patent: July 5, 2022
    Assignee: Samsung Display Co., Ltd.
    Inventors: Dong-Min Lee, Ji-Hwan Kim, Jongoh Seo, Byung Soo So
  • Publication number: 20220173134
    Abstract: A laser apparatus includes a laser generator configured to generate a first laser beam proceeding along a first direction, and an inversion module configured to convert the first laser beam to a second laser beam proceeding along the first direction, the inversion module including a splitter configured to form a reflected laser beam by partially reflecting the first laser beam, and a transmitted laser beam by partially transmitting the first laser beam, and a prism configured to reflect the reflected laser beam.
    Type: Application
    Filed: February 15, 2022
    Publication date: June 2, 2022
    Inventors: Dong-min LEE, Ji-Hwan KIM, Jongoh SEO, Byung Soo SO, Dong-Sung LEE, Jonghoon CHOI
  • Patent number: 11335561
    Abstract: A laser irradiation apparatus includes: a laser module configured to emit a laser beam; a first optical system configured to scan the laser beam emitted from the laser module along a first direction; an optical element configured to refract the laser beam emitted from the first optical system; and a substrate supporter on which a base substrate to which the laser beam refracted through the optical element reaches is arranged.
    Type: Grant
    Filed: June 19, 2020
    Date of Patent: May 17, 2022
    Assignee: Samsung Display Co., Ltd.
    Inventors: Hiroshi Okumura, Jong Jun Baek, Byung Soo So
  • Publication number: 20220130667
    Abstract: A method of manufacturing a stacked structure includes forming a first metal buffer layer including crystal grains on a base substrate, forming a second metal buffer material layer on the first metal buffer layer, and crystallizing the second metal buffer material layer to form a second metal buffer layer, wherein the second metal buffer material layer includes crystal grains, and a density of the crystal grains of the second metal buffer material layer is lower than a density of the crystal grains of the first metal buffer layer.
    Type: Application
    Filed: September 8, 2021
    Publication date: April 28, 2022
    Applicants: Samsung Display Co., LTD., Industry-Academic Cooperation Foundation, Yonsei University
    Inventors: Mann Ho CHO, Kwang Sik JEONG, Hyeon Sik KIM, Hyun Eok SHIN, Byung Soo SO, Ju Hyun LEE