Patents by Inventor Chao-Hsien Huang

Chao-Hsien Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240105846
    Abstract: A transistor structure and a formation method thereof are provided. The transistor structure includes a transistor device, formed on an active region of a semiconductor substrate, and including: a gate structure, disposed on the active region; gate spacers, formed along opposite sidewalls of the gate structure; source/drain structures, formed in recesses of the active region at opposite sides of the gate structure; and buried isolation structures, separately extending along bottom sides of the source/drain structures. Further, a channel portion of the active region between the source/drain structures is strained as a result of a strained etching stop layer lying above or dislocation stressors formed in the source/drain structures.
    Type: Application
    Filed: September 22, 2023
    Publication date: March 28, 2024
    Applicant: Invention And Collaboration Laboratory Pte. Ltd.
    Inventors: Chao-Chun Lu, Li-Ping HUANG, Wen-Hsien Tu
  • Publication number: 20240107746
    Abstract: A memory device and a manufacturing method thereof are provided. The memory device includes an access transistor defined within an active region of a semiconductor substrate and a storage capacitor disposed on the access transistor. A recessed gate structure of the access transistor extends into the active region from above the active region. Source/drain contacts of the access transistor are disposed on the active region at opposite sides of the recessed gate structure. The storage capacitor includes: a composite bottom electrode, formed by alternately stacked first conductive layers and second conductive layers, wherein each second conductive layer is sandwiched between a pair of the first conductive layers, and tunnels laterally extend through the second conductive layers, respectively; a capacitor dielectric layer, covering inner and outer surfaces of the composite bottom electrode; and a top electrode, in contact with the composite bottom electrode through the capacitor dielectric layer.
    Type: Application
    Filed: September 22, 2023
    Publication date: March 28, 2024
    Applicant: Invention And Collaboration Laboratory Pte. Ltd.
    Inventors: Chao-Chun Lu, Li-Ping HUANG, Wen-Hsien Tu
  • Patent number: 11934027
    Abstract: An optical system affixed to an electronic apparatus is provided, including a first optical module, a second optical module, and a third optical module. The first optical module is configured to adjust the moving direction of a first light from a first moving direction to a second moving direction, wherein the first moving direction is not parallel to the second moving direction. The second optical module is configured to receive the first light moving in the second moving direction. The first light reaches the third optical module via the first optical module and the second optical module in sequence. The third optical module includes a first photoelectric converter configured to transform the first light into a first image signal.
    Type: Grant
    Filed: June 21, 2022
    Date of Patent: March 19, 2024
    Assignee: TDK TAIWAN CORP.
    Inventors: Chao-Chang Hu, Chih-Wei Weng, Chia-Che Wu, Chien-Yu Kao, Hsiao-Hsin Hu, He-Ling Chang, Chao-Hsi Wang, Chen-Hsien Fan, Che-Wei Chang, Mao-Gen Jian, Sung-Mao Tsai, Wei-Jhe Shen, Yung-Ping Yang, Sin-Hong Lin, Tzu-Yu Chang, Sin-Jhong Song, Shang-Yu Hsu, Meng-Ting Lin, Shih-Wei Hung, Yu-Huai Liao, Mao-Kuo Hsu, Hsueh-Ju Lu, Ching-Chieh Huang, Chih-Wen Chiang, Yu-Chiao Lo, Ying-Jen Wang, Shu-Shan Chen, Che-Hsiang Chiu
  • Patent number: 11930157
    Abstract: The disclosure provides an eye tracking method and an eye tracking device. The method includes obtaining a reference interpupillary distance value; taking images of a user of a 3D display, and finding a first eye pixel coordinate corresponding to a first eye of the user and a second eye pixel coordinate corresponding to a second eye of the user in each image; detecting a first and a second eye spatial coordinates of the first and the second eyes, and determining projection coordinates based on the first eye spatial coordinate, the second eye spatial coordinate, and optical parameters of image capturing elements; determining an optimization condition related to the first and second eye spatial coordinates based on the first and second eye pixel coordinates, the projection coordinates, and the reference interpupillary distance value of each image; and optimizing the first and second eye spatial coordinates based on the optimization condition.
    Type: Grant
    Filed: March 29, 2022
    Date of Patent: March 12, 2024
    Assignee: Acer Incorporated
    Inventors: Yen-Hsien Li, Shih-Ting Huang, Chao-Shih Huang
  • Publication number: 20230420331
    Abstract: A semiconductor package including one or more heat dissipation systems and a method of forming are provided. The semiconductor package may include one or more integrated circuit dies, an encapsulant surrounding the one or more integrated circuit dies, a redistribution structure over the one or more integrated circuit dies and the encapsulant. The redistribution structure may include one or more heat dissipation systems, which are electrically isolated from remaining portions of the redistribution structure. Each heat dissipation system may include a first metal pad, a second metal pad, and one or more metal vias connecting the first metal pad to the second metal pad.
    Type: Application
    Filed: June 27, 2022
    Publication date: December 28, 2023
    Inventors: Ban-Li Wu, Tsung-Hsien Chiang, Tzu-Sung Huang, Chao-Hsien Huang, Chia-Lun Chang, Hsiu-Jen Lin, Ming Hung Tseng, Hao-Yi Tsai
  • Publication number: 20230369118
    Abstract: The present disclosure relates to a method for forming a semiconductor structure includes depositing a dielectric layer on a substrate and depositing a patterning layer on the dielectric layer. The method also includes performing a first etching process on the patterning layer to form a first region including a first plurality of blocks at a first pattern density and a second region including a second plurality of blocks at a second pattern density that is lower than the first pattern density. The method also includes performing a second etching process on the second plurality of blocks to decrease a width of each block of the second plurality of blocks and etching the dielectric layer and the substrate using the first and second pluralities of blocks to form a plurality of fin structures.
    Type: Application
    Filed: July 26, 2023
    Publication date: November 16, 2023
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Lun Chen, Li-Te Lin, Chao-Hsien Huang
  • Publication number: 20230343649
    Abstract: A method includes forming a gate stack over a semiconductor region, and forming a first gate spacer on a sidewall of the gate stack. The first gate spacer includes an inner sidewall spacer, and a dummy spacer portion on an outer side of the inner sidewall spacer. The method further includes removing the dummy spacer portion to form a trench, and forming a dielectric layer to seal a portion of the trench as an air gap. The air gap and the inner sidewall spacer in combination form a second gate spacer. A source/drain region is formed to have a portion on an outer side of the second gate spacer.
    Type: Application
    Filed: June 28, 2023
    Publication date: October 26, 2023
    Inventors: Yi-Lun Chen, Chao-Hsien Huang, Li-Te Lin, Chun-Hsiung Lin
  • Patent number: 11776850
    Abstract: The present disclosure relates to a method for forming a semiconductor structure includes depositing a dielectric layer on a substrate and depositing a patterning layer on the dielectric layer. The method also includes performing a first etching process on the patterning layer to form a first region including a first plurality of blocks at a first pattern density and a second region including a second plurality of blocks at a second pattern density that is lower than the first pattern density. The method also includes performing a second etching process on the second plurality of blocks to decrease a width of each block of the second plurality of blocks and etching the dielectric layer and the substrate using the first and second pluralities of blocks to form a plurality of fin structures.
    Type: Grant
    Filed: February 28, 2022
    Date of Patent: October 3, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Lun Chen, Li-Te Lin, Chao-Hsien Huang
  • Publication number: 20230282520
    Abstract: A semiconductor device includes a substrate, a semiconductor fin protruding from the substrate, an isolation layer disposed above the substrate, a dielectric fin with a bottom portion embedded in the isolation layer, and a gate structure over top and sidewall surfaces of the semiconductor fin and the dielectric fin. The semiconductor fin has a first sidewall and a second sidewall facing away from the first sidewall. The isolation layer includes a first portion disposed on the first sidewall of the semiconductor fin and a second portion disposed on the second sidewall of the semiconductor fin. A top portion of the dielectric fin includes an air pocket with a top opening sealed by the gate structure.
    Type: Application
    Filed: May 8, 2023
    Publication date: September 7, 2023
    Inventors: Han-Yu Lin, Yi-Ruei Jhan, Fang-Wei Lee, Tze-Chung Lin, Chao-Hsien Huang, Li-Te Lin, Pinyen Lin, Akira Mineji
  • Patent number: 11728221
    Abstract: A method includes forming a gate stack over a semiconductor region, and forming a first gate spacer on a sidewall of the gate stack. The first gate spacer includes an inner sidewall spacer, and a dummy spacer portion on an outer side of the inner sidewall spacer. The method further includes removing the dummy spacer portion to form a trench, and forming a dielectric layer to seal a portion of the trench as an air gap. The air gap and the inner sidewall spacer in combination form a second gate spacer. A source/drain region is formed to have a portion on an outer side of the second gate spacer.
    Type: Grant
    Filed: March 15, 2021
    Date of Patent: August 15, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yi-Lun Chen, Chao-Hsien Huang, Li-Te Lin, Chun-Hsiung Lin
  • Publication number: 20230223357
    Abstract: A method of manufacturing a semiconductor package includes depositing a first dielectric layer over a carrier substrate. A first metallization pattern is formed over the first dielectric layer. The first metallization pattern has a first opening exposing the first dielectric layer. A second dielectric layer is deposited over the first metallization pattern, forming a dielectric slot through the first metallization pattern by filling the first opening. A second metallization pattern and a third dielectric layer are formed over the second dielectric layer. A through via is formed over the third dielectric layer, so that the dielectric slot is laterally under the through via.
    Type: Application
    Filed: May 24, 2022
    Publication date: July 13, 2023
    Inventors: Yi-Che Chiang, Chien-Hsun Chen, Tuan-Yu Hung, Hsin-Yu Pan, Wei-Kang Hsieh, Tsung-Hsien Chiang, Chao-Hsien Huang, Tzu-Sung Huang, Ming Hung Tseng, Wei-Chih Chen, Ban-Li Wu, Hao-Yi Tsai, Yu-Hsiang Hu, Chung-Shi Liu
  • Patent number: 11646234
    Abstract: A semiconductor device includes a semiconductor substrate, a semiconductor fin protruding from the semiconductor substrate, and an isolation layer disposed above the semiconductor substrate. The isolation layer includes a first portion disposed on a first sidewall of the semiconductor fin and a second portion disposed on a second sidewall of the semiconductor fin. Top surfaces of the first and second portions of the isolation layer are leveled. The first portion of the isolation layer includes an air pocket. The semiconductor device also includes a dielectric fin with a bottom portion embedded in the second portion of the isolation layer.
    Type: Grant
    Filed: June 29, 2021
    Date of Patent: May 9, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Han-Yu Lin, Yi-Ruei Jhan, Fang-Wei Lee, Tze-Chung Lin, Chao-Hsien Huang, Li-Te Lin, Pinyen Lin, Akira Mineji
  • Publication number: 20230089130
    Abstract: A method includes providing a semiconductor structure including a first semiconductor substrate, an insulator layer over the first semiconductor substrate, and a second semiconductor substrate over the insulator layer; patterning the second semiconductor substrate to form a top fin portion over the insulator layer; conformally depositing a protection layer to cover the top fin portion, wherein a first portion of the protection layer is in contact with a top surface of the insulator layer; etching the protection layer to remove a second portion of the protection layer directly over the top fin portion while a third portion of the protection layer still covers a sidewall of the top fin portion; etching the insulator layer by using the third portion of the protection layer as an etch mask; and after etching the insulator layer, removing the third portion of the protection layer.
    Type: Application
    Filed: November 28, 2022
    Publication date: March 23, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shu-Hao KUO, Jung-Hao CHANG, Chao-Hsien HUANG, Li-Te LIN, Kuo-Cheng CHING
  • Patent number: 11515423
    Abstract: A device includes a semiconductor substrate, a first fin arranged over the semiconductor substrate, and an isolation structure. The first fin includes an upper portion, a bottom portion, and an insulator layer between the upper portion and the bottom portion. A top surface of the insulator layer is wider than a bottom surface of the upper portion of the first fin. The isolation structure surrounds the bottom portion of the first fin.
    Type: Grant
    Filed: May 21, 2020
    Date of Patent: November 29, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shu-Hao Kuo, Jung-Hao Chang, Chao-Hsien Huang, Li-Te Lin, Kuo-Cheng Ching
  • Publication number: 20220360667
    Abstract: The disclosure provides a processing method for a priority notification of an incoming call and a mobile device. The processing method for a priority notification of an incoming call is applied to a mobile device. The processing method includes: receiving an incoming call signal and generating a notification signal when a plurality of trigger conditions is met. The trigger conditions include: determining, according to the incoming call signal, that a repeated call is within a first preset time or a time interval between repeated calls is less than a second preset time, that a caller number corresponding to the incoming call signal is in a priority contact list, and that the mobile device is in a preset use situation. Then, a mandatory reminder mode is activated according to the notification signal to notify a user.
    Type: Application
    Filed: April 22, 2022
    Publication date: November 10, 2022
    Inventors: Yen-Ling Chen, Pei Chen, Pu-Chien Lee, Jen-Pang Hsu, Chao-Hsien Huang
  • Publication number: 20220181212
    Abstract: The present disclosure relates to a method for forming a semiconductor structure includes depositing a dielectric layer on a substrate and depositing a patterning layer on the dielectric layer. The method also includes performing a first etching process on the patterning layer to form a first region including a first plurality of blocks at a first pattern density and a second region including a second plurality of blocks at a second pattern density that is lower than the first pattern density. The method also includes performing a second etching process on the second plurality of blocks to decrease a width of each block of the second plurality of blocks and etching the dielectric layer and the substrate using the first and second pluralities of blocks to form a plurality of fin structures.
    Type: Application
    Filed: February 28, 2022
    Publication date: June 9, 2022
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Lun Chen, Li-Te Lin, Chao-Hsien Huang
  • Publication number: 20220093469
    Abstract: A method for fabricating a semiconductor arrangement includes performing a first etching of a semiconductive structure to expose a first portion of a sidewall of a first layer adjacent the semiconductive structure. The first etching forms a first protective layer on the first portion of the sidewall of the first layer, and the first protective layer is formed from a first accumulation of by-product material formed from an etchant of the first etching interacting with the semiconductive structure. The method includes performing a first flash to remove at least some of the first protective layer.
    Type: Application
    Filed: December 6, 2021
    Publication date: March 24, 2022
    Inventors: Wei-Lun Chen, Chao-Hsien HUANG, Li-Te LIN, Pinyen LIN
  • Patent number: 11264281
    Abstract: The present disclosure relates to a method for forming a semiconductor structure includes depositing a dielectric layer on a substrate and depositing a patterning layer on the dielectric layer. The method also includes performing a first etching process on the patterning layer to form a first region including a first plurality of blocks at a first pattern density and a second region including a second plurality of blocks at a second pattern density that is lower than the first pattern density. The method also includes performing a second etching process on the second plurality of blocks to decrease a width of each block of the second plurality of blocks and etching the dielectric layer and the substrate using the first and second pluralities of blocks to form a plurality of fin structures.
    Type: Grant
    Filed: July 9, 2020
    Date of Patent: March 1, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Lun Chen, Li-Te Lin, Chao-Hsien Huang
  • Publication number: 20220013411
    Abstract: The present disclosure relates to a method for forming a semiconductor structure includes depositing a dielectric layer on a substrate and depositing a patterning layer on the dielectric layer. The method also includes performing a first etching process on the patterning layer to form a first region including a first plurality of blocks at a first pattern density and a second region including a second plurality of blocks at a second pattern density that is lower than the first pattern density. The method also includes performing a second etching process on the second plurality of blocks to decrease a width of each block of the second plurality of blocks and etching the dielectric layer and the substrate using the first and second pluralities of blocks to form a plurality of fin structures.
    Type: Application
    Filed: July 9, 2020
    Publication date: January 13, 2022
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Lun Chen, Li-Te Lin, Chao-Hsien Huang
  • Patent number: 11205706
    Abstract: In a method of manufacturing a semiconductor device, a fin structure, in which first semiconductor layers and second semiconductor layers are alternately stacked, is formed. A sacrificial gate structure is formed over the fin structure. A source/drain region of the fin structure, which is not covered by the sacrificial gate structure, is etched, thereby forming a source/drain space. The first semiconductor layers are laterally etched through the source/drain space. A first insulating layer is formed, in the source/drain space, at least on etched first semiconductor layers. A source/drain epitaxial layer is formed in the source/drain space, thereby forming air gaps between the source/drain epitaxial layer and the first semiconductor layers.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: December 21, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Lin Yang, Tung Ying Lee, Shao-Ming Yu, Chao-Ching Cheng, Tzu-Chiang Chen, Chao-Hsien Huang