Patents by Inventor Chao-Hsien Huang
Chao-Hsien Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230369118Abstract: The present disclosure relates to a method for forming a semiconductor structure includes depositing a dielectric layer on a substrate and depositing a patterning layer on the dielectric layer. The method also includes performing a first etching process on the patterning layer to form a first region including a first plurality of blocks at a first pattern density and a second region including a second plurality of blocks at a second pattern density that is lower than the first pattern density. The method also includes performing a second etching process on the second plurality of blocks to decrease a width of each block of the second plurality of blocks and etching the dielectric layer and the substrate using the first and second pluralities of blocks to form a plurality of fin structures.Type: ApplicationFiled: July 26, 2023Publication date: November 16, 2023Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wei-Lun Chen, Li-Te Lin, Chao-Hsien Huang
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Publication number: 20230345140Abstract: The disclosure provides a driving method. The driving method includes following steps. During a normal scan period, a part of drivers provide first control signals generated according to a first clock frequency to target gate lines included in a part of gate line groups. During a high scanning period, the part of drivers provide second control signals generated according to a second clock frequency to residual gate lines included in the part of gate line groups.Type: ApplicationFiled: August 11, 2022Publication date: October 26, 2023Inventors: Jeng-Yi HUANG, Yen-Yu CHEN, Chao-Yi HSU, Tsung-Hsien HSIEH
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Publication number: 20230343649Abstract: A method includes forming a gate stack over a semiconductor region, and forming a first gate spacer on a sidewall of the gate stack. The first gate spacer includes an inner sidewall spacer, and a dummy spacer portion on an outer side of the inner sidewall spacer. The method further includes removing the dummy spacer portion to form a trench, and forming a dielectric layer to seal a portion of the trench as an air gap. The air gap and the inner sidewall spacer in combination form a second gate spacer. A source/drain region is formed to have a portion on an outer side of the second gate spacer.Type: ApplicationFiled: June 28, 2023Publication date: October 26, 2023Inventors: Yi-Lun Chen, Chao-Hsien Huang, Li-Te Lin, Chun-Hsiung Lin
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Publication number: 20230320227Abstract: A method for manufacturing a semiconductor structure is provided. The method may include several operations. A piezoelectric capacitor is formed over a substrate, wherein the piezoelectric capacitor includes a metal electrode. An intermediate layer is formed on the metal electrode, and is patterned using a first mask layer as a mask. A metal layer is formed on the intermediate layer, wherein the metal layer electrically connects to the metal electrode. The metal layer is patterned using a second mask layer, wherein the intermediate layer is within a coverage area of the metal layer from a top-view perspective after the patterning of the metal layer. A semiconductor structure thereof is also provided.Type: ApplicationFiled: March 29, 2022Publication date: October 5, 2023Inventors: CHING-HUI LIN, FU-CHUN HUANG, CHUN-REN CHENG, WEI CHUN WANG, CHAO-HUNG CHU, YI-HSIEN CHANG, PO-CHEN YEH, CHI-YUAN SHIH, SHIH-FEN HUANG, YAN-JIE LIAO, SHENG KAI YEH
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Patent number: 11776850Abstract: The present disclosure relates to a method for forming a semiconductor structure includes depositing a dielectric layer on a substrate and depositing a patterning layer on the dielectric layer. The method also includes performing a first etching process on the patterning layer to form a first region including a first plurality of blocks at a first pattern density and a second region including a second plurality of blocks at a second pattern density that is lower than the first pattern density. The method also includes performing a second etching process on the second plurality of blocks to decrease a width of each block of the second plurality of blocks and etching the dielectric layer and the substrate using the first and second pluralities of blocks to form a plurality of fin structures.Type: GrantFiled: February 28, 2022Date of Patent: October 3, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wei-Lun Chen, Li-Te Lin, Chao-Hsien Huang
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Publication number: 20230302494Abstract: The present disclosure relates to an integrated chip structure. The integrated chip structure includes a dielectric stack disposed on a substrate. The integrated chip structure further includes one or more piezoelectric ultrasonic transducers (PMUTs) and one or more capacitive ultrasonic transducers (CMUTs). The one or more PMUTs include a piezoelectric stack disposed within the dielectric stack over one or more PMUT cavities. The one or more CMUTs include electrodes disposed within the dielectric stack and separated by one or more CMUT cavities. An isolation chamber is arranged within the dielectric stack laterally between the one or more PMUTs and the one or more CMUTs. The isolation chamber vertically extends past at least a part of both the one or more PMUTs and the one or more CMUTs.Type: ApplicationFiled: June 6, 2022Publication date: September 28, 2023Inventors: Ching-Hui Lin, Yi-Hsien Chang, Chun-Ren Cheng, Fu-Chun Huang, Yi Heng Tsai, Shih-Fen Huang, Chao-Hung Chu, Po-Chen Yeh
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Publication number: 20230282520Abstract: A semiconductor device includes a substrate, a semiconductor fin protruding from the substrate, an isolation layer disposed above the substrate, a dielectric fin with a bottom portion embedded in the isolation layer, and a gate structure over top and sidewall surfaces of the semiconductor fin and the dielectric fin. The semiconductor fin has a first sidewall and a second sidewall facing away from the first sidewall. The isolation layer includes a first portion disposed on the first sidewall of the semiconductor fin and a second portion disposed on the second sidewall of the semiconductor fin. A top portion of the dielectric fin includes an air pocket with a top opening sealed by the gate structure.Type: ApplicationFiled: May 8, 2023Publication date: September 7, 2023Inventors: Han-Yu Lin, Yi-Ruei Jhan, Fang-Wei Lee, Tze-Chung Lin, Chao-Hsien Huang, Li-Te Lin, Pinyen Lin, Akira Mineji
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Publication number: 20230260900Abstract: A semiconductor structure and the manufacturing method thereof are disclosed. An exemplary semiconductor structure includes a first source/drain contact and a second source/drain contact spaced apart by a gate structure, an etch stop layer (ESL) over the first source/drain contact and the second source/drain contact, a conductive feature disposed in the etch stop layer and in direct contact with the first source/drain contact and the second source/drain contact, a dielectric layer over the etch stop layer, and a contact via extending through the dielectric layer and electrically connected to the conductive feature. By providing the conductive feature, a number of metal lines in an interconnect structure of the semiconductor structure may be advantageously reduced.Type: ApplicationFiled: April 28, 2023Publication date: August 17, 2023Inventors: Chao-Hsun Wang, Wang-Jung Hsueh, Fu-Kai Yang, Mei-Yun Wang, Sheng-Hsiung Wang, Shih-Hsien Huang
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Patent number: 11728221Abstract: A method includes forming a gate stack over a semiconductor region, and forming a first gate spacer on a sidewall of the gate stack. The first gate spacer includes an inner sidewall spacer, and a dummy spacer portion on an outer side of the inner sidewall spacer. The method further includes removing the dummy spacer portion to form a trench, and forming a dielectric layer to seal a portion of the trench as an air gap. The air gap and the inner sidewall spacer in combination form a second gate spacer. A source/drain region is formed to have a portion on an outer side of the second gate spacer.Type: GrantFiled: March 15, 2021Date of Patent: August 15, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yi-Lun Chen, Chao-Hsien Huang, Li-Te Lin, Chun-Hsiung Lin
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Publication number: 20230237695Abstract: The disclosure provides a feature point position detection method and an electronic device. The method includes: obtaining a plurality of first relative positions of a plurality of feature points on a specific object relative to a first image capturing element; obtaining a plurality of second relative positions of the plurality of feature points on the specific object relative to a second image capturing element; and in response to determining that the first image capturing element is unreliable, estimating a current three-dimensional position of each feature point based on a historical three-dimensional position and the plurality of second relative positions of each feature point.Type: ApplicationFiled: October 14, 2022Publication date: July 27, 2023Applicant: Acer IncorporatedInventors: Yen-Hsien Li, Shih-Ting Huang, Chao-Shih Huang
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Publication number: 20230223357Abstract: A method of manufacturing a semiconductor package includes depositing a first dielectric layer over a carrier substrate. A first metallization pattern is formed over the first dielectric layer. The first metallization pattern has a first opening exposing the first dielectric layer. A second dielectric layer is deposited over the first metallization pattern, forming a dielectric slot through the first metallization pattern by filling the first opening. A second metallization pattern and a third dielectric layer are formed over the second dielectric layer. A through via is formed over the third dielectric layer, so that the dielectric slot is laterally under the through via.Type: ApplicationFiled: May 24, 2022Publication date: July 13, 2023Inventors: Yi-Che Chiang, Chien-Hsun Chen, Tuan-Yu Hung, Hsin-Yu Pan, Wei-Kang Hsieh, Tsung-Hsien Chiang, Chao-Hsien Huang, Tzu-Sung Huang, Ming Hung Tseng, Wei-Chih Chen, Ban-Li Wu, Hao-Yi Tsai, Yu-Hsiang Hu, Chung-Shi Liu
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Publication number: 20230204901Abstract: An optical element driving mechanism is provided and includes a fixed assembly, a movable assembly, a driving assembly and a circuit assembly. The movable assembly is configured to connect an optical element, the movable assembly is movable relative to the fixed assembly, and the optical element has an optical axis. The driving assembly is configured to drive the movable assembly to move relative to the fixed assembly. The circuit assembly includes a plurality of circuits and is affixed to the fixed assembly.Type: ApplicationFiled: February 23, 2023Publication date: June 29, 2023Inventors: Sin-Hong LIN, Yung-Ping YANG, Wen-Yen HUANG, Yu-Cheng LIN, Kun-Shih LIN, Chao-Chang HU, Yung-Hsien YEH, Mao-Kuo HSU, Chih-Wei WENG, Ching-Chieh HUANG, Chih-Shiang WU, Chun-Chia LIAO, Chia-Yu CHANG, Hung-Ping CHEN, Wei-Zhong LUO, Wen-Chang LIN, Shou-Jen LIU, Shao-Chung CHANG, Chen-Hsin HUANG, Meng-Ting LIN, Yen-Cheng CHEN, I-Mei HUANG, Yun-Fei WANG, Wei-Jhe SHEN
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Patent number: 11681321Abstract: An image identification method is used to eliminate accumulated error of operation of a joystick. The joystick has an optical sensor adapted to analyze a movement of a plurality of identification dots disposed on a stick body. The image identification method includes receiving a series of detection images, setting a first identification dot of the plurality of identification dots as being a reference identification dot, and setting a second identification dot of the plurality of identification dos as being the reference identification dot and cancelling the first identification dot as being the reference identification dot when the first identification dot is near a border of the detection image. A position change of the reference identification dot in the series of detection images is used for identifying a control status of the joystick.Type: GrantFiled: November 9, 2021Date of Patent: June 20, 2023Assignee: PixArt Imaging Inc.Inventors: Chao-Chien Huang, Yen-Hung Wang, Yi-Chung Chen, Hui-Hsuan Chen, Yi-Hsien Ko
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Patent number: 11646234Abstract: A semiconductor device includes a semiconductor substrate, a semiconductor fin protruding from the semiconductor substrate, and an isolation layer disposed above the semiconductor substrate. The isolation layer includes a first portion disposed on a first sidewall of the semiconductor fin and a second portion disposed on a second sidewall of the semiconductor fin. Top surfaces of the first and second portions of the isolation layer are leveled. The first portion of the isolation layer includes an air pocket. The semiconductor device also includes a dielectric fin with a bottom portion embedded in the second portion of the isolation layer.Type: GrantFiled: June 29, 2021Date of Patent: May 9, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTDInventors: Han-Yu Lin, Yi-Ruei Jhan, Fang-Wei Lee, Tze-Chung Lin, Chao-Hsien Huang, Li-Te Lin, Pinyen Lin, Akira Mineji
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Publication number: 20230089130Abstract: A method includes providing a semiconductor structure including a first semiconductor substrate, an insulator layer over the first semiconductor substrate, and a second semiconductor substrate over the insulator layer; patterning the second semiconductor substrate to form a top fin portion over the insulator layer; conformally depositing a protection layer to cover the top fin portion, wherein a first portion of the protection layer is in contact with a top surface of the insulator layer; etching the protection layer to remove a second portion of the protection layer directly over the top fin portion while a third portion of the protection layer still covers a sidewall of the top fin portion; etching the insulator layer by using the third portion of the protection layer as an etch mask; and after etching the insulator layer, removing the third portion of the protection layer.Type: ApplicationFiled: November 28, 2022Publication date: March 23, 2023Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Shu-Hao KUO, Jung-Hao CHANG, Chao-Hsien HUANG, Li-Te LIN, Kuo-Cheng CHING
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Patent number: 11515423Abstract: A device includes a semiconductor substrate, a first fin arranged over the semiconductor substrate, and an isolation structure. The first fin includes an upper portion, a bottom portion, and an insulator layer between the upper portion and the bottom portion. A top surface of the insulator layer is wider than a bottom surface of the upper portion of the first fin. The isolation structure surrounds the bottom portion of the first fin.Type: GrantFiled: May 21, 2020Date of Patent: November 29, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Shu-Hao Kuo, Jung-Hao Chang, Chao-Hsien Huang, Li-Te Lin, Kuo-Cheng Ching
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Publication number: 20220360667Abstract: The disclosure provides a processing method for a priority notification of an incoming call and a mobile device. The processing method for a priority notification of an incoming call is applied to a mobile device. The processing method includes: receiving an incoming call signal and generating a notification signal when a plurality of trigger conditions is met. The trigger conditions include: determining, according to the incoming call signal, that a repeated call is within a first preset time or a time interval between repeated calls is less than a second preset time, that a caller number corresponding to the incoming call signal is in a priority contact list, and that the mobile device is in a preset use situation. Then, a mandatory reminder mode is activated according to the notification signal to notify a user.Type: ApplicationFiled: April 22, 2022Publication date: November 10, 2022Inventors: Yen-Ling Chen, Pei Chen, Pu-Chien Lee, Jen-Pang Hsu, Chao-Hsien Huang
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Publication number: 20220181212Abstract: The present disclosure relates to a method for forming a semiconductor structure includes depositing a dielectric layer on a substrate and depositing a patterning layer on the dielectric layer. The method also includes performing a first etching process on the patterning layer to form a first region including a first plurality of blocks at a first pattern density and a second region including a second plurality of blocks at a second pattern density that is lower than the first pattern density. The method also includes performing a second etching process on the second plurality of blocks to decrease a width of each block of the second plurality of blocks and etching the dielectric layer and the substrate using the first and second pluralities of blocks to form a plurality of fin structures.Type: ApplicationFiled: February 28, 2022Publication date: June 9, 2022Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wei-Lun Chen, Li-Te Lin, Chao-Hsien Huang
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Publication number: 20220093469Abstract: A method for fabricating a semiconductor arrangement includes performing a first etching of a semiconductive structure to expose a first portion of a sidewall of a first layer adjacent the semiconductive structure. The first etching forms a first protective layer on the first portion of the sidewall of the first layer, and the first protective layer is formed from a first accumulation of by-product material formed from an etchant of the first etching interacting with the semiconductive structure. The method includes performing a first flash to remove at least some of the first protective layer.Type: ApplicationFiled: December 6, 2021Publication date: March 24, 2022Inventors: Wei-Lun Chen, Chao-Hsien HUANG, Li-Te LIN, Pinyen LIN
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Patent number: 11264281Abstract: The present disclosure relates to a method for forming a semiconductor structure includes depositing a dielectric layer on a substrate and depositing a patterning layer on the dielectric layer. The method also includes performing a first etching process on the patterning layer to form a first region including a first plurality of blocks at a first pattern density and a second region including a second plurality of blocks at a second pattern density that is lower than the first pattern density. The method also includes performing a second etching process on the second plurality of blocks to decrease a width of each block of the second plurality of blocks and etching the dielectric layer and the substrate using the first and second pluralities of blocks to form a plurality of fin structures.Type: GrantFiled: July 9, 2020Date of Patent: March 1, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wei-Lun Chen, Li-Te Lin, Chao-Hsien Huang