Patents by Inventor Charles Borsody

Charles Borsody has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5793489
    Abstract: Disclosed herein is an interferometric-based materials analysis system (10) that employs a novel combination of laser beam shaping and pointing techniques, the use of a low cost, rugged, and compact diode laser (22) as a detection laser, and the use of signal processing techniques that compensate for inherent instabilities and short-term drift in the diode laser. A matched filter processing technique is disclosed for processing interferometrically-obtained data points from a target being analyzed. The matched filter technique is shown to be especially useful for detecting and analyzing Lamb modes within thin targets, such as a silicon wafer undergoing a rapid thermal processing cycle. Also disclosed is a method and apparatus for interferometrically monitoring a target to determine, in accordance with predetermined criteria, an occurrence of a period of time that is optimum for obtaining a data point.
    Type: Grant
    Filed: February 14, 1997
    Date of Patent: August 11, 1998
    Assignee: Textron System Corporation
    Inventors: Petros Amestis Kotidis, Paul Fred Gozewski, Charles Borsody, Daniel Edward Klimek, Jaime A. Woodroffe
  • Patent number: 5781304
    Abstract: Disclosed herein is an interferometric-based materials analysis system (10) that employs a novel combination of laser beam shaping and pointing techniques, the use of a low cost, rugged, and compact diode laser (22) as a detection laser, and the use of signal processing techniques that compensate for inherent instabilities and short-term drift in the diode laser. A matched filter processing technique is disclosed for processing interferometrically-obtained data points from a target being analyzed. The matched filter technique is shown to be especially useful for detecting and analyzing Lamb modes within thin targets, such as a silicon wafer undergoing a rapid thermal processing cycle.
    Type: Grant
    Filed: February 14, 1997
    Date of Patent: July 14, 1998
    Assignee: Textron Systems Corporation
    Inventors: Petros Amestis Kotidis, James Frederick Cunningham, Paul Fred Gozewski, Charles Borsody, Daniel Edward Klimek, Jaime A. Woodroffe
  • Patent number: 5604592
    Abstract: Disclosed herein is an interferometric-based materials analysis system (10) that employs a novel combination of laser beam shaping and pointing techniques, the use of a low cost, rugged, and compact diode laser (22) as a detection laser, and the use of signal processing techniques that compensate for inherent instabilities and short-term drift in the diode laser. A matched filter processing technique is disclosed for processing interferometrically-obtained data points from a target being analyzed. The matched filter technique is shown to be especially useful for detecting and analyzing Lamb modes within thin targets, such as a silicon wafer undergoing a rapid thermal processing cycle. Also disclosed is a method and apparatus for interferometrically monitoring a target to determine, in accordance with predetermined criteria, an occurrence of a period of time that is optimum for obtaining a data point.
    Type: Grant
    Filed: June 7, 1995
    Date of Patent: February 18, 1997
    Assignee: Textron Defense Systems, Division of Avco Corporation
    Inventors: Petros A. Kotidis, James F. Cunningham, Paul F. Gozewski, Charles Borsody, Daniel E. Klimek, Jaime A. Woodroffe