Patents by Inventor Charles Chen

Charles Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20030181139
    Abstract: Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing pad are provided. One window includes a first portion and a second portion. The first portion includes a first material, and the second portion includes a second material different than the first. Another window includes a substantially transparent gel. In some instances, the gel includes a triblock copolymer and a plasticizing oil. An additional window includes an upper window, a housing, and a diaphragm. The housing may allow a fluid to flow into and out of a space between the housing and the diaphragm. In another embodiment, a window includes a layer of material coupled to lateral surfaces of the window. In some cases, the window may be disposed within an opening in a polishing pad, and movement of the window within the polishing pad may compress the layer of material.
    Type: Application
    Filed: February 4, 2003
    Publication date: September 25, 2003
    Inventors: Kurt Lehman, Charles Chen, Ronald L. Allen, Robert Shinagawa, Anantha Sethuraman, Christopher F. Bevin, Thanassis Trikas, Haiguang Chen, Ching Ling Meng
  • Publication number: 20030180973
    Abstract: Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, a characteristic of a polishing pad, or a characteristic of a polishing tool are provided. One method includes scanning a specimen with a measurement device during polishing of a specimen to generate output signals at measurement spots on the specimen. The method also includes determining if the output signals are outside of a range of output signals. Output signals outside of the range may indicate that a parameter of the measurement device is out of control limits. In a different embodiment, output signals outside of the range may indicate damage to the specimen. Another method includes scanning a polishing pad with a measurement device to generate output signals at measurement spots on the polishing pad. The method also includes determining a characteristic of the polishing pad from the output signals.
    Type: Application
    Filed: February 4, 2003
    Publication date: September 25, 2003
    Inventors: Kurt Lehman, Charles Chen, Ronald L. Allen, Robert Shinagawa, Anantha Sethuraman, Christopher F. Bevis, Thanassis Trikas, Haiguang Chen, Ching Ling Meng
  • Publication number: 20030181132
    Abstract: Methods and systems for generating a two-dimensional map of a characteristic at relative or absolute locations of measurement spots on a specimen during polishing are provided. One method includes scanning a specimen with a measurement device during polishing to generate output signals at measurement spots on the specimen. The method may also include determining a characteristic of polishing at the measurement spots from the output signals. In addition, the method may include determining relative or absolute locations of the measurement spots on the specimen. The method may further include generating a two-dimensional map of the characteristic at the relative or absolute locations of the measurement spots on the specimen. In some embodiments, the relative locations of the measurement spots may be determined from a representative scan path of the measurement device and an average spacing between starting points on individual scans.
    Type: Application
    Filed: February 4, 2003
    Publication date: September 25, 2003
    Inventors: Kurt Lehman, Charles Chen, Ronald L. Allen, Robert Shinagawa, Anantha Sethuraman, Christopher F. Bevis, Thanassis Trikas, Haiguang Chen, Ching Ling Meng
  • Publication number: 20030181131
    Abstract: Systems and methods for characterizing a polishing process are provided. One method includes scanning a specimen with two or more measurement devices during polishing. In one embodiment, the two or more measurement devices may include a reflectometer and a capacitance probe. In another embodiment, the two or more measurement devices may include an optical device and an eddy current device. An additional embodiment relates to a measurement device for scanning a specimen during polishing. The device includes a light source and a scanning assembly. The scanning assembly is configured to scan light from the light source across the specimen during polishing. Another measurement device includes a laser light source coupled to a first fiber optic bundle and a detector coupled to a second fiber optic bundle. An additional method includes scanning a specimen with different measurement devices during different steps of a polishing process.
    Type: Application
    Filed: February 4, 2003
    Publication date: September 25, 2003
    Inventors: Kurt Lehman, Charles Chen, Ronald L. Allen, Robert Shinagawa, Anantha Sethuraman, Christopher F. Bevis, Thanassis Trikas, Haiguang Chen, Ching Ling Meng
  • Publication number: 20030181138
    Abstract: Systems and methods for characterizing polishing of a specimen are provided. One method includes scanning a specimen with an eddy current device during polishing to generate output signals at measurement spots across the specimen. The method also includes combining a portion of the output signals generated at the measurement spots located within a zone on the specimen. In addition, the method includes determining a characteristic of polishing within the zone from the combined portion of the output signals. In some instances, a zone may include a predetermined range of radial and azimuthal positions on the specimen. In one embodiment, the method may include determining a characteristic of polishing within more than one zone on the specimen. Some embodiments may include determining an additional characteristic of polishing from the characteristic of polishing within more than one zone on the specimen.
    Type: Application
    Filed: February 4, 2003
    Publication date: September 25, 2003
    Inventors: Kurt Lehman, Charles Chen, Ronald L. Allen, Robert Shinagawa, Anantha Sethuraman, Christopher F. Bevis, Thanassis Trikas, Haiguang Chen, Ching Ling Meng
  • Patent number: 6618130
    Abstract: A method for detecting during a planarization process the removal of a first layer of material overlying a workpiece is provided. Relative motion is effected between the first layer and a working surface to remove the first layer. A light having a spectrum of wavelengths is transmitted to the workpiece. The intensity for each of a plurality of reflected wavelengths of a reflected light reflected from the workpiece is measured to obtain a spectrum. The spectrum is a function of the plurality of reflective wavelengths. A spectrum reference value is calculated and a plurality of spectrum difference values are calculated by subtracting the spectrum reference value from the spectrum. An absolute value for each of the plurality of spectrum difference values that is a function of one of the plurality of reflected wavelengths that falls within a selected range of wavelengths is summed together to obtain a delta value. An endpoint parameter is calculated from the delta value.
    Type: Grant
    Filed: August 28, 2001
    Date of Patent: September 9, 2003
    Assignee: SpeedFam-IPEC Corporation
    Inventor: Charles Chen
  • Patent number: 6549279
    Abstract: The invention provides calibrated spectrometers in a multi-spectrometer system, where chemical mechanical polishing endpoint detection is an issue. In one aspect of the invention, a spectrometer is calibrated by selecting a filter slide having a predetermined light transmittance or reflectance variation with location (e.g. angular or linear displacement) on the slide. Light is incident on locations on the filter slide, and this incidence light is either transmitted or reflected. Transmitted or reflected light is received by a spectrometer, and the wavelength measured is compared with the known wavelength that corresponds to its location on the slide. The spectrometer is calibrated by normalizing the wavelength readings obtained at various locations on the slide with the known readings dictated by the reference slide. The spectrometers are also calibrated to a standard light source for intensity of light.
    Type: Grant
    Filed: April 9, 2001
    Date of Patent: April 15, 2003
    Assignee: SpeedFam-IPEC Corporation
    Inventors: John A. Adams, Robert A. Eaton, Charles Chen
  • Publication number: 20030053042
    Abstract: A method for detecting during a planarization process the removal of a first layer of material overlying a workpiece is provided. Relative motion is effected between the first layer and a working surface to remove the first layer. A light having a spectrum of wavelengths is transmitted to the workpiece. The intensity for each of a plurality of reflected wavelengths of a reflected light reflected from the workpiece is measured to obtain a spectrum. The spectrum is a function of the plurality of reflective wavelengths. A spectrum reference value is calculated and a plurality of spectrum difference values are calculated by subtracting the spectrum reference value from the spectrum. An absolute value for each of the plurality of spectrum difference values that is a function of one of the plurality of reflected wavelengths that falls within a selected range of wavelengths is summed together to obtain a delta value. An endpoint parameter is calculated from the delta value.
    Type: Application
    Filed: August 28, 2001
    Publication date: March 20, 2003
    Inventor: Charles Chen
  • Publication number: 20030020909
    Abstract: The invention provides calibrated spectrometers in a multi-spectrometer system, where chemical mechanical polishing endpoint detection is an issue. In one aspect of the invention, a spectrometer is calibrated by selecting a filter slide having a predetermined light transmittance or reflectance variation with location (e.g. angular or linear displacement) on the slide. Light is incident on locations on the filter slide, and this incident light is either transmitted or reflected. Transmitted or reflected light is received by a spectrometer, and the wavelength measured is compared with the known wavelength that corresponds to its location on the slide. The spectrometer is calibrated by normalizing the wavelength readings obtained at various locations on the slide with the known readings dictated by the reference slide. The spectrometers are also calibrated to a standard light source for intensity of light.
    Type: Application
    Filed: April 9, 2001
    Publication date: January 30, 2003
    Applicant: SpeedFam-IPEC Corporation
    Inventors: John A. Adams, Robert A. Eaton, Charles Chen
  • Patent number: 6223959
    Abstract: A bag includes a bag body, a shoulder strap, and an air pocket. The shoulder strap has two ends attached to the bag body, and an envelope part sewn to the shoulder strap. The air pocket is received in the envelope part to provide a long-term cushioning effect.
    Type: Grant
    Filed: December 10, 1999
    Date of Patent: May 1, 2001
    Inventor: Charles Chen
  • Patent number: 6179039
    Abstract: A method of reducing distortion in a spray formed rapid tool includes the steps of making a model of a desired tool and constructing a ceramic pattern as the inverse of the model. The method also includes the steps of building a thermal model of the desired tool from a solid model of the ceramic pattern and applying thermal boundary conditions to the thermal model based on known conditions. The method also includes the steps of running the thermal model to produce a temperature distribution of the desired tool and determining any temperature deviations in the temperature distribution above a predetermined value. The method further includes thermally spraying a metal material against the ceramic pattern to form the desired tool if there are no temperature deviations in the temperature distribution above the predetermined value.
    Type: Grant
    Filed: March 25, 1999
    Date of Patent: January 30, 2001
    Assignee: Visteon Global Technologies, Inc.
    Inventors: Grigoriy Grinberg, Charles Chen, David Robert Collins, Jeffrey Alan Kinane, Paul Earl Pergande
  • Patent number: 5952933
    Abstract: A system for monitoring and controlling an area comprising a controller for controlling system operational functions and responsive to at least one remote-control transmitter. The transmitter transmits system commands to the controller in a code word having a fixed word and a hopping word therein. The fixed and hopping words are scrambled using a format word resident in the transmitter and sent to the controller only during a learn mode.
    Type: Grant
    Filed: September 15, 1997
    Date of Patent: September 14, 1999
    Inventors: Darrell E. Issa, Jerry W. Birchfield, Charles Chen
  • Patent number: 5914667
    Abstract: A system for monitoring and controlling an area comprising a controller for controlling system operational functions; at least one remote-control transmitter for transmitting system commands to the controller in a code word having a fixed word and a hopping word therein; the fixed word comprising at least one fixed data bit and the hopping word comprising at least one changing data bit, wherein the hopping word changes its binary value from transmission to transmission of the system commands; and, means for scrambling bits of the fixed word and bits of the hopping word within the code word.
    Type: Grant
    Filed: September 15, 1997
    Date of Patent: June 22, 1999
    Inventors: Darrell E. Issa, Jerry W. Birchfield, Charles Chen
  • Patent number: 5872519
    Abstract: A system for monitoring and controlling an area comprising a controller for controlling system operational functions; at least one remote-control transmitter for transmitting system commands to the controller in a code word having a fixed word and a hopping word therein; the fixed word comprising at least one fixed data bit and the hopping word comprising at least one changing data bit, wherein the hopping word changes its binary value from transmission to transmission of the system commands; and, means for scrambling bits of the fixed word and bits of the hopping word within the code word.
    Type: Grant
    Filed: April 20, 1995
    Date of Patent: February 16, 1999
    Assignee: Directed Electronics, Inc.
    Inventors: Darrell E. Issa, Jerry W. Birchfield, Charles Chen
  • Patent number: 5835962
    Abstract: A memory management unit (MMU) includes a translation lookaside buffer capable of simultaneously servicing three requests supplied to the MMU by an instruction cache and two data caches, respectively. Also, an arbiter selects one of several pending requests from sources of different priorities for immediate processing by the MMU, using a process which avoids undue delay in servicing requests from sources of lower priority.
    Type: Grant
    Filed: December 24, 1996
    Date of Patent: November 10, 1998
    Assignee: Fujitsu Limited
    Inventors: Chih-Wei David Chang, Kioumars Dawallu, Joel F. Boney, Ming-Ying Li, Jen-Hong Charles Chen
  • Patent number: 5798711
    Abstract: A system for monitoring and controlling an area comprising a controller for controlling system operational functions; at least one remote control transmitter for transmitting at least one system command to said controller in a code word having a fixed word and a hopping word therein; the fixed word having an identification code for selective control of the controller, the identification code programmed therein, and a channel code for issuing high and low security commands to the controller; a hopping algorithm for modifying the hopping code of the transmitter n-times in response to n-times activation of said transmitter and for modifying the hopping word m-times within the controller upon receipt of the code word m-times from said transmitter; and, a bypass mode for bypassing the code hopping algorithm and for controlling system functions in response to the controller receiving the low security command.
    Type: Grant
    Filed: June 2, 1995
    Date of Patent: August 25, 1998
    Assignee: Directed Electronics, Inc.
    Inventors: Darrell E. Issa, Jerry W. Birchfield, Charles Chen
  • Patent number: 5170541
    Abstract: An apparatus for fastening a pair of handbag handling straps includes a longitudinal first grip member fixed to one handling strap and a longitudinal second grip member fixed to the other handling strap. The first grip member has a first face including a recessed receiving portion which has a curved portion. The second grip member includes a second face which is opposite and complementary to the first face. The second face has an outwardly projecting hood which extends into the recessed receiving portion and is movable in a longitudinal direction of the second face. A resilient member is provided in the second grip member to urge the hook to move in the longitudinal direction to engage with the curved portion when the first and second faces are engaged with each other. An releasing device is provided in the first grip member to release the hook from its engaging position.
    Type: Grant
    Filed: July 11, 1991
    Date of Patent: December 15, 1992
    Inventor: Charles Chen
  • Patent number: 5117883
    Abstract: A handbag has a side wall provided with a top rectangular opening. A rectangular flexible cover strip has a first end connected widthwise to the side wall and two peripheral edges. Each of a pair of zippers connects one of the peripheral edges to the side wall to close the opening. An inverted U-shaped handle member has two parallel portions connected to two sliding tabs of the zippers and a handling portion. A stationary shaft extends between the parallel portions. A tubular member is rotatably sleeved around the stationary shaft. The tubular member has an outer surface to which a second end of the cover strip is attached and which is in rolling contact with the cover strip. A torsional spring is mounted in the tubular member and sleeved around the stationary shaft. The handle member is movable between a closed position, wherein the opening is closed by the cover strip, and an opening position.
    Type: Grant
    Filed: September 13, 1991
    Date of Patent: June 2, 1992
    Inventor: Charles Chen
  • Patent number: 5088795
    Abstract: A dumping trailer and truck for containers has a frame for mounting and keeping firmly a container thereon and an oil pressure cylinder possible to raise the frame inclinedly with its front up so shock-enduring goods such as scrap, grain, etc., can be loaded in a container inclinedly raised up through an opening at the front or unloaded from a container inclinedly raised up through an opening at the rear.
    Type: Grant
    Filed: May 8, 1990
    Date of Patent: February 18, 1992
    Inventors: Junny Chen, Charles Chen
  • Patent number: 4865065
    Abstract: An improved height-adjustable crutch is provided in which the central carrier member, in which is telescopingly received an extensible leg member, is provided with laterally extending ribbed members, defining exterior concave surface, which matingly received therein the cylindrical portions of the diametrically-opposed tubes defining the lower extremity of the crutch proper. Each tube is coupled to a respective one of the ribbed members via a rivet, each rivet being independent of the other, so as to not to obstruct the interior, hollow passageway formed by the central carrier member, to allow for the sliding movement of the leg member in the central carrier member.
    Type: Grant
    Filed: October 18, 1988
    Date of Patent: September 12, 1989
    Assignee: Cypress Medical Products Ltd.
    Inventor: Charles Chen