Patents by Inventor Chia-Jung Hsu

Chia-Jung Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11631613
    Abstract: Provided is a semiconductor device, including a substrate including a pixel region, a gate structure on the substrate in the pixel region, wherein the gate structure comprises a gate dielectric layer and a gate conductive layer on the gate dielectric layer; a dielectric layer located over the substrate and the gate structure; and a contact located in the dielectric layer and electrically connected to the gate conductive layer. The contact includes a doped polysilicon layer in contact with the gate conductive layer; a metal layer located on the doped polysilicon layer, wherein a part of the metal layer is embedded in the doped polysilicon layer; a barrier layer located between the metal layer and the doped polysilicon layer; and a metal silicide layer located between the barrier layer and the doped polysilicon layer.
    Type: Grant
    Filed: February 25, 2021
    Date of Patent: April 18, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chih-Kai Hsu, Ssu-I Fu, Chia-Jung Hsu, Chun-Ya Chiu, Chin-Hung Chen, Yu-Hsiang Lin
  • Publication number: 20230078573
    Abstract: A planarization method includes: providing a substrate, wherein the substrate includes a first region and a second region having different degrees of hydrophobicity or hydrophilicity, the second region covering an upper surface of the first region; polishing the substrate with a polishing slurry until the upper surface of the first region is exposed; and continuing polishing and performing a surface treatment by the polishing slurry to adjust the degree of hydrophobicity or hydrophilicity of at least one of the first region and the second region. The polishing slurry and the upper surface of the second region have a first contact angle, and the polishing slurry and the upper surface of the first region have a second contact angle. The surface treatment keeps a contact angle difference between the first contact angle and the second contact angle being equal to or less than 30 degrees during the polishing.
    Type: Application
    Filed: June 23, 2022
    Publication date: March 16, 2023
    Inventors: TUNG-KAI CHEN, CHING-HSIANG TSAI, KAO-FENG LIAO, CHIH-CHIEH CHANG, CHUN-HAO KUNG, FANG-I CHIH, HSIN-YING HO, CHIA-JUNG HSU, HUI-CHI HUANG, KEI-WEI CHEN
  • Publication number: 20230067986
    Abstract: A semiconductor device may include a single-photon avalanche diode (SPAD) arranged for illumination at a back surface of a substrate. The semiconductor device may include a full deep trench isolation (FDTI) structure between the SPAD and a neighboring SPAD of the semiconductor device. The FDTI may be associated with isolating the SPAD from the neighboring SPAD. The FDTI structure may include a shallow trench isolation (STI) element at the back surface of the substrate. The FDTI structure may include a deep trench isolation (DTI) element at a front surface of the substrate.
    Type: Application
    Filed: August 31, 2021
    Publication date: March 2, 2023
    Inventors: Yu Ling OU, Chia-Jung HSU, Chia-Yu WEI, Kuo-Cheng LEE
  • Publication number: 20230047580
    Abstract: A high voltage transistor structure including a substrate, a first isolation structure, a second isolation structure, a gate structure, a first source and drain region, and a second source and drain region is provided. The first isolation structure and the second isolation structure are disposed in the substrate. The gate structure is disposed on the substrate, at least a portion of the first isolation structure, and at least a portion of the second isolation structure. The first source and drain region and the second source and drain region are located in the substrate on two sides of the first isolation structure and the second isolation structure. The depth of the first isolation structure is greater than the depth of the second isolation structure.
    Type: Application
    Filed: August 16, 2021
    Publication date: February 16, 2023
    Applicant: United Microelectronics Corp.
    Inventors: Chin-Hung Chen, Ssu-I Fu, Chih-Kai Hsu, Chun-Ya Chiu, Chia-Jung Hsu, Yu-Hsiang Lin
  • Publication number: 20230037410
    Abstract: A high voltage transistor structure including a substrate, a first drift region, a second drift region, a first cap layer, a second cap layer, a gate structure, a first source and drain region, and a second source and drain region is provided. The first and second drift regions are disposed in the substrate. The first and second cap layers are respectively disposed on the first and second drift regions. The gate structure is disposed on the substrate and located over at least a portion of the first drift region and at least a portion of the second drift region. The first and second source and drain regions are respectively disposed in the first and second drift regions and located on two sides of the gate structure. The size of the first drift region and the size of the second drift region are asymmetric.
    Type: Application
    Filed: August 18, 2021
    Publication date: February 9, 2023
    Applicant: United Microelectronics Corp.
    Inventors: Chun-Ya Chiu, Ssu-I Fu, Chih-Kai Hsu, Chin-Hung Chen, Chia-Jung Hsu, Yu-Hsiang Lin
  • Publication number: 20230020037
    Abstract: A stacked semiconductor device and systems and methods for producing the same are disclosed here. In some embodiments, the method includes aligning a first array of bond pads on an upper surface of a first semiconductor substrate with a second array of bond pads on a lower surface of a second semiconductor substrate. The method then includes annealing the stacked semiconductor device to bond the upper surface of the first semiconductor substrate to the lower surface of the second semiconductor substrate. The annealing results in at least one void between the upper surface and the lower surface that includes a layer of diffused metal. The layer of diffused metal extends from a first individual bond pad towards a second individual bond pad and forms and electrical or thermal short. The method then includes exposing the stacked semiconductor device to microwave radiation to excite a chemical constituent present in the void.
    Type: Application
    Filed: July 19, 2021
    Publication date: January 19, 2023
    Inventors: Chia Jung Hsu, Eiichi Nakano
  • Patent number: 11557654
    Abstract: A method for fabricating of semiconductor device is provided, including providing a substrate. A first trench isolation and a second trench isolation are formed in the substrate. A portion of the substrate is etched to have a height between a top and a bottom of the first and second trench isolations. A germanium (Ge) doped layer region is formed in the portion of the substrate. A fluorine (F) doped layer region is formed in the portion of the substrate, lower than and overlapping with the germanium doped layer region. An oxidation process is performed on the portion of the substrate to form a gate oxide layer between the first and second trench isolations.
    Type: Grant
    Filed: October 27, 2021
    Date of Patent: January 17, 2023
    Assignee: United Microelectronics Corp.
    Inventors: Chia-Jung Hsu, Chin-Hung Chen, Chun-Ya Chiu, Chih-Kai Hsu, Ssu-I Fu, Tsai-Yu Wen, Shi You Liu, Yu-Hsiang Lin
  • Publication number: 20230010751
    Abstract: The method includes placing a wafer in a chamber body of a plasma processing tool; moving a first movable jig along an arc path to comb a spiral-shaped radio frequency (RF) coil over the chamber body, the first movable jig having a plurality of first confining slots penetrated by a plurality of coil segments of the spiral-shaped RF coil, respectively; and generating plasma in the chamber body through the spiral-shaped RF coil.
    Type: Application
    Filed: March 7, 2022
    Publication date: January 12, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yung Chang HUANG, Chia Jung HSU, Yu Hsiu CHEN
  • Patent number: 11551738
    Abstract: A memory device includes a well, a poly layer, a dielectric layer, an alignment layer and an active area. The poly layer is formed above the well. The dielectric layer is formed above the poly layer. The alignment layer is formed on the dielectric layer, used to receive an alignment layer voltage and substantially aligned with the dielectric layer in a projection direction. The active area is formed on the well. The dielectric layer is thicker than the alignment layer. A first overlap area of the poly layer and the active area is smaller than a second overlap area of the poly layer and the dielectric layer excluding the first overlap area.
    Type: Grant
    Filed: April 8, 2021
    Date of Patent: January 10, 2023
    Assignee: eMemory Technology Inc.
    Inventors: Chia-Jung Hsu, Wei-Ren Chen, Wein-Town Sun
  • Publication number: 20220375970
    Abstract: A semiconductor arrangement is provided. The semiconductor arrangement includes a first component in a substrate. The semiconductor arrangement includes a gap fill layer. A first portion of the gap fill layer overlies the first component. The first portion of the gap fill layer has a tapered sidewall. A first portion of the substrate separates the first portion of the gap fill layer from the first component.
    Type: Application
    Filed: July 27, 2022
    Publication date: November 24, 2022
    Inventors: Chia Jung HSU, Chia-Yu WEI, Kuo-Cheng LEE, Chen YING-HAO
  • Patent number: 11508425
    Abstract: A memory cell of a memory cell array includes a well region, a first doped region, a second doped region, a first gate structure, and a storage structure. The first doped region and the second doped region are formed in the well region. The first gate structure is formed over a first surface between the first doped region and the second doped region. The storage structure is formed over a second surface and the second surface is between the first surface and the second doped region. The storage structure is covered on a portion of the first gate structure, the second surface and an isolation structure.
    Type: Grant
    Filed: February 9, 2021
    Date of Patent: November 22, 2022
    Assignee: EMEMORY TECHNOLOGY INC.
    Inventors: Chia-Jung Hsu, Wein-Town Sun
  • Patent number: 11508720
    Abstract: A memory device includes a well, a first gate layer, a second gate layer, a doped region, a blocking layer and an alignment layer. The first gate layer is formed on the well. The second gate layer is formed on the well. The doped region is formed within the well and located between the first gate layer and the second gate layer. The blocking layer is formed to cover the first gate layer, the first doped region and a part of the second gate layer and used to block electrons from excessively escaping. The alignment layer is formed on the blocking layer and above the first gate layer, the doped region and the part of the second gate layer. The alignment layer is thinner than the blocking layer, and the alignment layer is thinner than the first gate layer and the second gate layer.
    Type: Grant
    Filed: May 12, 2020
    Date of Patent: November 22, 2022
    Assignee: eMemory Technology Inc.
    Inventors: Chia-Jung Hsu, Wei-Ren Chen, Wein-Town Sun
  • Patent number: 11502096
    Abstract: A memory device includes a first well, a second well, a first active area, a second active area, a third active area, a first poly layer and a second poly layer. The first well is of a first conductivity type. The second well is of a second conductivity type different from the first conductivity type. The first active area is of the second conductivity type and is formed on the first well. The second active area is of the first conductivity type and is formed on the first well and between the first active area and the second well. The third active area is of the first conductivity type and is formed on the second well. The first poly layer is formed above the first well and the second well. The second poly layer is formed above the first well.
    Type: Grant
    Filed: August 4, 2021
    Date of Patent: November 15, 2022
    Assignee: eMemory Technology Inc.
    Inventors: Chia-Jung Hsu, Wein-Town Sun
  • Patent number: 11495681
    Abstract: A semiconductor device includes a semiconductor substrate, a recess, a first gate oxide layer, and a gate structure. The semiconductor substrate includes a first region and a second region adjacent to the first region. The recess is disposed in the first region of the semiconductor substrate, and an edge of the recess is located at an interface between the first region and the second region. At least a part of the first gate oxide layer is disposed in the recess. The first gate oxide layer includes a hump portion disposed adjacent to the edge of the recess, and a height of the hump portion is less than a depth of the recess. The gate structure is disposed on the first region and the second region of the semiconductor substrate, and the gate structure overlaps the hump portion of the first gate oxide layer in a vertical direction.
    Type: Grant
    Filed: October 12, 2020
    Date of Patent: November 8, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chang-Po Hsiung, Ching-Chung Yang, Shan-Shi Huang, Shin-Hung Li, Nien-Chung Li, Wen-Fang Lee, Chiu-Te Lee, Chih-Kai Hsu, Chun-Ya Chiu, Chin-Hung Chen, Chia-Jung Hsu, Ssu-I Fu, Yu-Hsiang Lin
  • Patent number: 11488837
    Abstract: A method for fabricating a high-voltage (HV) transistor is provided. The method includes providing a substrate, having a first isolation structure and a second isolation structure in the substrate and a recess in the substrate between the first and second isolation structures. Further, a hydrogen annealing process is performed over the recess. A sacrificial dielectric layer is formed on the recess. The sacrificial dielectric layer is removed, wherein a portion of the first and second isolation structures is also removed. A gate oxide layer is formed in the recess between the first and second isolation structures after the hydrogen annealing process.
    Type: Grant
    Filed: September 23, 2020
    Date of Patent: November 1, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Jung Hsu, Chun Yu Chen, Chin-Hung Chen, Chun-Ya Chiu, Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Lin
  • Patent number: 11442506
    Abstract: An external display module is provided, which is adapted to be detachably connected to an electronic device. The external display module includes a module base and a first screen unit. The module base includes a first base side, two first tracks and at least one first slot. The first screen unit is rotatably connected to the module base, wherein the first screen unit includes a first screen, a first shaft, at least one first guiding member and two first blocks, the first shaft is disposed on the edge of the first screen unit, the first guiding member is affixed to the first shaft and is rotated with the first shaft, the first block is connected to the first shaft, the first guiding member is inserted into the first slot and is guided by the first slot, and the first block is adapted to slide in the first track.
    Type: Grant
    Filed: June 29, 2021
    Date of Patent: September 13, 2022
    Assignee: QUANTA COMPUTER INC.
    Inventors: Chia-Jung Hsu, Chin-Kuo Wang, Yi-Chieh Liu
  • Patent number: 11429156
    Abstract: A notebook computer is provided. The notebook computer includes a device body, a cover and a media unit. The device body includes a first body housing and a second body housing, wherein the second body housing pivots on the first body housing. The cover pivots on the first body housing and is slidably connected to the second body housing. When the cover is rotated from a folded state to an unfolded state relative to the device body, the second body housing is pushed to rotate from the first housing orientation to the second housing orientation relative to the first body housing. The media unit pivots on the first body housing and is slidably connected to the second body housing.
    Type: Grant
    Filed: June 29, 2021
    Date of Patent: August 30, 2022
    Assignee: QUANTA COMPUTER INC.
    Inventors: Chia-Jung Hsu, Chin-Kuo Wang, Yi-Chieh Liu
  • Patent number: 11416665
    Abstract: A power rail design method is disclosed that includes the steps outlined below. A plurality of power rails and a plurality of power domains corresponding thereto in an integrated circuit design file are identified. A design rule check for a plurality of circuit units in the integrated circuit design file is performed to retrieve a plurality of non-violating circuit regions that correspond to the power rails in each of the power domains. The power rails corresponding to at least part of the plurality of non-violating circuit regions in the integrated circuit design file are widened to occupy at least part of the non-violating circuit regions for the plurality of power rails.
    Type: Grant
    Filed: October 22, 2020
    Date of Patent: August 16, 2022
    Assignee: REALTEK SEMICONDUCTOR CORPORATION
    Inventors: Cheng-Chen Huang, Yun-Ru Wu, Hsin-Chang Lin, Shu-Yi Kao, Chih-Chan Chen, Chia-Jung Hsu, Li-Yi Lin
  • Patent number: 11373879
    Abstract: A planarization method and a CMP method are provided. The planarization method includes providing a substrate with a first region and a second region having different degrees of hydrophobicity or hydrophilicity and performing a surface treatment to the first region to render the degrees of hydrophobicity or hydrophilicity in proximity to that of the second region. The CMP method includes providing a substrate with a first region and a second region; providing a polishing slurry on the substrate, wherein the polishing slurry and the surface of the first region have a first contact angle, and the polishing slurry and the surface of the first region have a second contact angle; modifying the surface of the first region to make a contact angle difference between the first contact angle and the second contact angle equal to or less than 30 degrees.
    Type: Grant
    Filed: September 12, 2020
    Date of Patent: June 28, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Tung-Kai Chen, Ching-Hsiang Tsai, Kao-Feng Liao, Chih-Chieh Chang, Chun-Hao Kung, Fang-I Chih, Hsin-Ying Ho, Chia-Jung Hsu, Hui-Chi Huang, Kei-Wei Chen
  • Publication number: 20220093411
    Abstract: A method for fabricating a high-voltage (HV) transistor is provided. The method includes providing a substrate, having a first isolation structure and a second isolation structure in the substrate and a recess in the substrate between the first and second isolation structures. Further, a hydrogen annealing process is performed over the recess. A sacrificial dielectric layer is formed on the recess. The sacrificial dielectric layer is removed, wherein a portion of the first and second isolation structures is also removed. A gate oxide layer is formed in the recess between the first and second isolation structures after the hydrogen annealing process.
    Type: Application
    Filed: September 23, 2020
    Publication date: March 24, 2022
    Applicant: United Microelectronics Corp.
    Inventors: Chia-Jung Hsu, Chun Yu Chen, Chin-Hung Chen, Chun-Ya Chiu, Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Lin