Patents by Inventor Chih-Yung Huang
Chih-Yung Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240105521Abstract: A method for forming a semiconductor device structure is provided. The method includes providing a substrate having a base, a first fin, and a second fin over the base. The method includes forming a first trench in the base and between the first fin and the second fin. The method includes forming an isolation layer over the base and in the first trench. The first fin and the second fin are partially in the isolation layer. The method includes forming a first gate stack over the first fin and the isolation layer. The method includes forming a second gate stack over the second fin and the isolation layer. The method includes removing a bottom portion of the base. The isolation layer passes through the base after the bottom portion of the base is removed.Type: ApplicationFiled: February 9, 2023Publication date: March 28, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Da-Zhi ZHANG, Chung-Pin HUANG, Po-Nien CHEN, Hsiao-Han LIU, Jhon-Jhy LIAW, Chih-Yung LIN
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Patent number: 11929273Abstract: A system and computer-implemented method are provided for manufacturing a semiconductor electronic device. An assembler receives a jig and a boat supporting a die. The assembler includes a separator that separates the jig into a first jig portion and a second jig portion and a loader that positions the boat between the first jig portion and the second jig portion. A robot receives an assembly prepared by the assembler and manipulates a locking system that fixes an alignment of the boat relative to the first jig portion and the second jig portion to form a locked assembly. A process chamber receives the locked assembly and subjects the locked assembly to a fabrication operation.Type: GrantFiled: July 27, 2020Date of Patent: March 12, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDInventors: Tsung-Sheng Kuo, Chih-Hung Huang, Guan-Wei Huang, Ping-Yung Yen, Hsuan Lee, Jiun-Rong Pai
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Publication number: 20240079396Abstract: A package structure includes a first carrier, a second carrier, and a first electronic device. The first carrier is electrically connected to a first voltage. The second carrier includes a first substrate and a first interconnect structure. The first substrate is in contact with the first carrier, the first interconnect structure is electrically connected to a second voltage, and the first interconnect structure and the first carrier are deposited on two opposite sides of the first substrate. The first electronic device is deposited on the first interconnect structure and away from the first carrier. The first electronic device is in contact with the first interconnect structure.Type: ApplicationFiled: November 30, 2022Publication date: March 7, 2024Inventors: Lung-Sheng LIN, Chih-Feng HUANG, Ta-Yung YANG
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Publication number: 20230402262Abstract: A remote plasma source (RPS) for generating etchants leverages symmetrical hallow cathode cavities to increase etchant rates. The RPS includes an upper electrode with a first hollow cavity configured to induce a hollow cathode effect within the first hollow cavity, a lower electrode with a second hollow cavity configured to induce a hollow cathode effect within the second hollow cavity, wherein the first hollow cavity and the second hollow cavity are symmetrical, a first gap positioned between and electrically separating the upper electrode and the lower electrode, and an annular dielectric cover in direct contact with the lower electrode in the first gap and forms a second gap between an uppermost surface of the annular dielectric cover and a lowermost surface of the upper electrode. The annular dielectric cover fills approximately 50% to approximately 95% of a height of the first gap.Type: ApplicationFiled: July 21, 2022Publication date: December 14, 2023Inventors: Tae Seung CHO, David Michael BENJAMINSON, Kenneth SCHATZ, Ryan Michael PAKULSKI, Martin Yue CHOY, Pratheep GUNASEELAN, Chih-Yung HUANG
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Patent number: 11820040Abstract: A detachable protective device includes a base support, a mounting unit connected to the base support, and a quick-release unit. The base support has a mounting hole having an engaging portion and an open end portion. The quick-release unit includes a positioning pin extending movably through the mounting hole. The quick-release unit is operable to move the positioning pin between a locked position, where a large-diameter section of the positioning pin is disposed in the engaging portion, and a release position, where a small-diameter section of the positioning pin is disposed in the engaging portion, thereby allowing separation of the mounting unit from the base support.Type: GrantFiled: February 9, 2022Date of Patent: November 21, 2023Assignee: P&F Brother Industrial CorporationInventors: Chih-Yung Huang, Po-Hsun Lin
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Publication number: 20230249376Abstract: A detachable protective device includes a base support, a mounting unit connected to the base support, and a quick-release unit. The base support has a mounting hole having an engaging portion and an open end portion. The quick-release unit includes a positioning pin extending movably through the mounting hole. The quick-release unit is operable to move the positioning pin between a locked position, where a large-diameter section of the positioning pin is disposed in the engaging portion, and a release position, where a small-diameter section of the positioning pin is disposed in the engaging portion, thereby allowing separation of the mounting unit from the base support.Type: ApplicationFiled: February 9, 2022Publication date: August 10, 2023Inventors: CHIH-YUNG HUANG, PO-HSUN LIN
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Patent number: 11680316Abstract: A deposition apparatus including a chamber having a deposition area and a non-deposition area, a gas intake device communicated with the chamber, a gas annulus disposed in the chamber and surrounding the gas intake device, a carrier disposed in the deposition area and a retaining annulus disposed in chamber and surrounding the carrier. The gas intake device is disposed corresponding to the deposition area and configured to draw a process gas into the deposition area. The gas annulus is configured to generate an annular gas curtain in the deposition area. The carrier carries a deposited object, wherein the gas annulus is located between the gas intake device and the carrier. The deposited object is surrounded by the annular gas curtain. The retaining annulus has a plurality of through holes. The retaining annulus is located between the gas annulus and the carrier.Type: GrantFiled: December 10, 2020Date of Patent: June 20, 2023Assignee: Industrial Technology Research InstituteInventors: Kuan-Chou Chen, Ching-Chiun Wang, Chih-Yung Huang, Muh-Wang Liang, Yi-Jiun Lin
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Patent number: 11569581Abstract: A transmission structure with a dual-frequency antenna is provided. The transmission structure includes a substrate, a first radiator and a second radiator. The first radiator has a first electrical connection portion. The first radiator extends from the first electrical connection portion in a first direction and a second direction, wherein the first direction is opposite to the second direction. The second radiator has a second electrical connection portion adjacent to the first electrical connection portion. The second electrical connection portion has a first side and a second side, wherein the first side is closer to the first electrical connection portion than the second side, the second electrical connection portion forms a ground area between the first side and the second side, and the length of the ground area is greater than a first set value.Type: GrantFiled: September 2, 2021Date of Patent: January 31, 2023Inventors: Chih-Yung Huang, Kuo-Chang Lo
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Patent number: 11358299Abstract: A table saw includes a locking device disposed on a rip fence device to couple a moving unit of the rip fence device to a rail unit of a worktable device. The locking device includes a locking pin extending and movable along an axis relative to the moving unit, and a turning member turnable about the axis to move the locking pin along the axis so as to lock or unlock the moving unit to or from the rail unit. An extending direction of the axis is parallel to the upper surface so as to render the turning operation of the turning member quick and convenient.Type: GrantFiled: November 17, 2020Date of Patent: June 14, 2022Assignee: P&F BROTHER INDUSTRIAL CORPORATIONInventors: Chih-Yung Huang, Po-Hsun Lin
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Patent number: 11320449Abstract: A visualization device for a flow field includes a chamber, a power supply, at least one pair of electrodes, and at least one flow field observation module. The flow field observation module includes a high-speed camera, a light detecting component, and a light filter component. The power supply outputs a voltage to generate a plasma, and the pair of electrodes is disposed in the chamber. The flow field observation module is disposed outside the chamber and captures an image of a fluid particle excited by the plasma toward the chamber. The light filter component is disposed between the high-speed camera and the chamber. The light detecting component obtains a light information within the chamber and sends the light information to the light filter component.Type: GrantFiled: December 2, 2019Date of Patent: May 3, 2022Assignee: Industrial Technology Research InstituteInventors: Chih-Yung Huang, Yao-Hsien Liu, Kuan-Chou Chen, Yi-Jiun Lin, Shih-Chin Lin, Ching-Chiun Wang
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Publication number: 20220119943Abstract: A deposition apparatus including a chamber having a deposition area and a non-deposition area, a gas intake device communicated with the chamber, a gas annulus disposed in the chamber and surrounding the gas intake device, a carrier disposed in the deposition area and a retaining annulus disposed in chamber and surrounding the carrier. The gas intake device is disposed corresponding to the deposition area and configured to draw a process gas into the deposition area. The gas annulus is configured to generate an annular gas curtain in the deposition area. The carrier carries a deposited object, wherein the gas annulus is located between the gas intake device and the carrier. The deposited object is surrounded by the annular gas curtain. The retaining annulus has a plurality of through holes. The retaining annulus is located between the gas annulus and the carrier.Type: ApplicationFiled: December 10, 2020Publication date: April 21, 2022Applicant: Industrial Technology Research InstituteInventors: Kuan-Chou Chen, Ching-Chiun Wang, Chih-Yung Huang, Muh-Wang Liang, Yi-Jiun Lin
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Publication number: 20220094062Abstract: A transmission structure with a dual-frequency antenna is provided. The transmission structure includes a substrate, a first radiator and a second radiator. The first radiator has a first electrical connection portion. The first radiator extends from the first electrical connection portion in a first direction and a second direction, wherein the first direction is opposite to the second direction. The second radiator has a second electrical connection portion adjacent to the first electrical connection portion. The second electrical connection portion has a first side and a second side, wherein the first side is closer to the first electrical connection portion than the second side, the second electrical connection portion forms a ground area between the first side and the second side, and the length of the ground area is greater than a first set value.Type: ApplicationFiled: September 2, 2021Publication date: March 24, 2022Inventors: Chih-Yung HUANG, Kuo-Chang LO
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Publication number: 20220040879Abstract: A table saw includes a locking device disposed on a rip fence device to couple a moving unit of the rip fence device to a rail unit of a worktable device. The locking device includes a locking pin extending and movable along an axis relative to the moving unit, and a turning member turnable about the axis to move the locking pin along the axis so as to lock or unlock the moving unit to or from the rail unit. An extending direction of the axis is parallel to the upper surface so as to render the turning operation of the turning member quick and convenient.Type: ApplicationFiled: November 17, 2020Publication date: February 10, 2022Inventors: Chih-Yung HUANG, Po-Hsun LIN
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Publication number: 20210132104Abstract: A visualization device for a flow field includes a chamber, a power supply, at least one pair of electrodes, and at least one flow field observation module. The flow field observation module includes a high-speed camera, a light detecting component, and a light filter component. The power supply outputs a voltage to generate a plasma, and the pair of electrodes is disposed in the chamber. The flow field observation module is disposed outside the chamber and captures an image of a fluid particle excited by the plasma toward the chamber. The light filter component is disposed between the high-speed camera and the chamber. The light detecting component obtains a light information within the chamber and sends the light information to the light filter component.Type: ApplicationFiled: December 2, 2019Publication date: May 6, 2021Applicant: Industrial Technology Research InstituteInventors: Chih-Yung Huang, Yao-Hsien Liu, Kuan-Chou Chen, Yi-Jiun Lin, Shih-Chin Lin, Ching-Chiun Wang
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Patent number: 10688571Abstract: A positioning device for a miter saw includes a working table, an elastic member, and a lever member. The elastic member has a movable portion adapted to be adjacent to a scale disc of the miter saw, and a protruding portion. The lever member is disposed in the working table, and has a linking portion connected to the movable portion, and a handle portion movable to convert the elastic member from a locking state for engaging the protruding portion with one of notches in a scale disc of the miter saw so that the working table is non-rotatable, to a releasing state for moving the movable portion away from the scale disc so that, the protruding portion is disengaged from the one of the notches to permit rotation of the working table.Type: GrantFiled: August 13, 2018Date of Patent: June 23, 2020Assignee: P & F BROTHER INDUSTRIAL CORPORATIONInventors: Chun-Hung Chen, Chih-Yung Huang
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Publication number: 20200154555Abstract: A flow field visualization device includes a chamber, a power supply, at least one pair of electrodes, and at least two high-speed cameras. The power supply outputs a voltage for plasma generation, and the pair of electrodes is disposed in the chamber. The pair of electrodes includes a first electrode and a second electrode. The first electrode has a plurality of first tips, the second electrode has a plurality of second tips, and the first tips and the second tips are aligned with each other. The pair of electrodes generates a periodically densely distributed plasma by exciting a gas in the chamber through the voltage from the power supply. The high-speed cameras are disposed outside the chamber and are positioned in different directions corresponding to the pair of electrodes in order to capture images of different dimensions.Type: ApplicationFiled: December 17, 2018Publication date: May 14, 2020Applicant: Industrial Technology Research InstituteInventors: Chih-Yung Huang, Kuan-Chou Chen, Shih-Chin Lin, Yi-Jiun Lin, Ching-Chiun Wang
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Patent number: 10458019Abstract: A gas shower device having gas curtain comprises a first gas shower unit for injecting a reaction gas, thereby forming a reaction gas region, and a second gas shower unit. The second gas shower unit arranged around a periphery of the first gas shower unit comprises a buffer gas chamber for providing a buffer gas, and a curtain distribution plate. The curtain distribution plate further comprises a plurality through holes for injecting the buffer gas, thereby forming a gas curtain around a periphery of the reaction gas region. In another embodiment, an apparatus for depositing film is provided by utilizing the gas shower device having gas curtain, wherein the gas curtain prevents the reaction gas in the reaction gas region from being affected directly by a vacuum pressure so that a residence time of reaction gas can be extended thereby increasing the utilization of reaction gas and film-forming efficiency.Type: GrantFiled: July 5, 2013Date of Patent: October 29, 2019Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Ching-Chiun Wang, Chih-Yung Huang, Kung-Liang Lin, Jung-Chen Chien, Chen-Der Tsai, Chien-Chih Chen
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Patent number: 10249954Abstract: A dipole antenna includes a substrate, a first region and a second region, which is used for frequency with wavelength ?. The substrate is flat rectangular and insulating material, which has a substrate width W which is at least 2.5 mm and a substrate length L. The substrate width W, the substrate length L and the wavelength ? complies with the formula: L/W=?(±10%). The first region and the second region is conducting material, the first region is disposed on the substrate and shifting to one side of the substrate, the second region is disposed on the substrate and shifting to another side of the substrate. Part of the first region is disposed adjacent to part of the second region and an adjacent region is formed between and a coupling effect is reduced.Type: GrantFiled: September 7, 2017Date of Patent: April 2, 2019Assignee: ARCADYAN TECHNOLOGY CORPORATIONInventors: Chih-Yung Huang, Kuo-Chang Lo
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Publication number: 20190070678Abstract: A positioning device for a miter saw includes a working table, an elastic member, and a lever member. The elastic member has a movable portion adapted to be adjacent to a scale disc of the miter saw, and a protruding portion. The lever member is disposed in the working table, and has a linking portion connected to the movable portion, and a handle portion movable to convert the elastic member from a locking state for engaging the protruding portion with one of notches in a scale disc of the miter saw so that the working table is non-rotatable, to a releasing state for moving the movable portion away from the scale disc so that, the protruding portion is disengaged from the one of the notches to permit rotation of the working table.Type: ApplicationFiled: August 13, 2018Publication date: March 7, 2019Applicant: P & F BROTHER INDUSTRIAL CORPORATIONInventors: Chun-Hung CHEN, Chih-Yung HUANG
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Publication number: 20190013586Abstract: A dipole antenna includes a substrate, a first region and a second region, which is used for frequency with wavelength ?. The substrate is flat rectangular and insulating material, which has a substrate width W which is at least 2.5 mm and a substrate length L. The substrate width W, the substrate length L and the wavelength ? complies with the formula: L/W=?(±10%). The first region and the second region is conducting material, the first region is disposed on the substrate and shifting to one side of the substrate, the second region is disposed on the substrate and shifting to another side of the substrate. Part of the first region is disposed adjacent to part of the second region and an adjacent region is formed between and a coupling effect is reduced.Type: ApplicationFiled: September 7, 2017Publication date: January 10, 2019Inventors: Chih-Yung HUANG, Kuo-Chang LO