Patents by Inventor Chin Cheng Chien
Chin Cheng Chien has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10700101Abstract: A pixel of the display panel includes a first transistor, a second transistor, a first electrode pattern and a second electrode pattern. A first drain of the first transistor is electrically connected with the first electrode pattern. A second drain of the second transistor is electrically connected with the second electrode pattern. The first electrode pattern comprises a first connection portion and a first protrusion. The second electrode pattern comprises a second connection portion and two second protrusions. The second protrusions are respectively connected with two sides of the second connection portion and are extended towards the first connection portion. The first protrusion is connected with the first connection portion and is extended towards the second connection portion and to the location between the second protrusions. The width of the distal end of each of the first protrusion and the second protrusion is smaller.Type: GrantFiled: February 8, 2016Date of Patent: June 30, 2020Assignee: INNOLUX CORPORATIONInventors: Meng-Chang Hung, Li-Wei Sung, Chin-Cheng Chien
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Patent number: 10381228Abstract: An epitaxial process applying light illumination includes the following steps. A substrate is provided. A dry etching process and a wet etching process are performed to form a recess in the substrate, wherein an infrared light illuminates while the wet etching process is performed. An epitaxial structure is formed in the recess.Type: GrantFiled: February 25, 2015Date of Patent: August 13, 2019Assignee: UNITED MICROELECTRONICS CORP.Inventors: Yu-Ying Lin, Ted Ming-Lang Guo, Chin-Cheng Chien, Chih-Chien Liu, Hsin-Kuo Hsu, Chin-Fu Lin, Chun-Yuan Wu
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Fabricating method of a semiconductor device with a high-K dielectric layer having a U-shape profile
Patent number: 10141193Abstract: A semiconductor device including a substrate, a spacer and a high-k dielectric layer having a U-shape profile is provided. The spacer located on the substrate surrounds and defines a trench. The high-k dielectric layer having a U-shape profile is located in the trench, and the high-k dielectric layer having a U-shape profile exposes an upper portion of the sidewalls of the trench.Type: GrantFiled: November 24, 2015Date of Patent: November 27, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chin-Cheng Chien, Chun-Yuan Wu, Chih-Chien Liu, Chin-Fu Lin, Teng-Chun Tsai -
Patent number: 10014227Abstract: A semiconductor device includes a semiconductor substrate, at least a first fin structure, at least a second fin structure, a first gate, a second gate, a first source/drain region and a second source/drain region. The semiconductor substrate has at least a first active region to dispose the first fin structure and at least a second active region to dispose the second fin structure. The first/second fin structure partially overlapped by the first/second gate has a first/second stress, and the first stress and the second stress are different from each other. The first/second source/drain region is disposed in the first/second fin structure at two sides of the first/second gate.Type: GrantFiled: August 12, 2015Date of Patent: July 3, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Teng-Chun Tsai, Chun-Yuan Wu, Chih-Chien Liu, Chin-Cheng Chien, Chin-Fu Lin
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Patent number: 9923095Abstract: The present invention provides a non-planar FET and a method of manufacturing the same. The non-planar FET includes a substrate, a fin structure, a gate and a gate dielectric layer. The fin structure is disposed on the substrate. The fin structure includes a first portion adjacent to the substrate wherein the first portion shrinks towards a side of the substrate. The gate is disposed on the fin structure. The gate dielectric layer is disposed between the fin structure and the gate. The present invention further provides a method of manufacturing the non-planar FET.Type: GrantFiled: December 15, 2016Date of Patent: March 20, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chin-Cheng Chien, Chun-Yuan Wu, Chih-Chien Liu, Chin-Fu Lin, Chia-Lin Hsu
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Publication number: 20170098710Abstract: The present invention provides a non-planar FET and a method of manufacturing the same. The non-planar FET includes a substrate, a fin structure, a gate and a gate dielectric layer. The fin structure is disposed on the substrate. The fin structure includes a first portion adjacent to the substrate wherein the first portion shrinks towards a side of the substrate. The gate is disposed on the fin structure. The gate dielectric layer is disposed between the fin structure and the gate. The present invention further provides a method of manufacturing the non-planar FET.Type: ApplicationFiled: December 15, 2016Publication date: April 6, 2017Inventors: Chin-Cheng Chien, Chun-Yuan Wu, Chih-Chien Liu, Chin-Fu Lin, Chia-Lin Hsu
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Patent number: 9559189Abstract: The present invention provides a non-planar FET which includes a substrate, a fin structure, a gate and a gate dielectric layer. The fin structure is disposed on the substrate. The fin structure includes a first portion adjacent to the substrate wherein the first portion shrinks towards a side of the substrate. The gate is disposed on the fin structure. The gate dielectric layer is disposed between the fin structure and the gate. The present invention further provides a method of manufacturing the non-planar FET.Type: GrantFiled: April 16, 2012Date of Patent: January 31, 2017Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chin-Cheng Chien, Chun-Yuan Wu, Chih-Chien Liu, Chin-Fu Lin, Chia-Lin Hsu
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Patent number: 9466480Abstract: A cleaning process for oxide includes the following step. A substrate having a first area and a second area is provided. A first oxide layer is formed on the substrate of the first area and the second area. An ammonium hydroxide (NH4OH) and hydrogen peroxide (H2O2) containing process is performed on the first oxide layer of the first area and the second area. A photoresist layer covers the first oxide layer of the first area while exposing the first oxide layer of the second area. The first oxide layer of the second area is removed. The photoresist layer is then removed.Type: GrantFiled: November 4, 2014Date of Patent: October 11, 2016Assignee: UNITED MICROELECTRONICS CORP.Inventors: Ted Ming-Lang Guo, Chin-Cheng Chien, Chueh-Yang Liu, Neng-Hui Yang
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Patent number: 9461150Abstract: A method for fabricating semiconductor device with fin-shaped structure is disclosed. The method includes the steps of: forming a fin-shaped structure on a substrate; forming a first dielectric layer on the substrate and the fin-shaped structure; depositing a second dielectric layer on the first dielectric layer; etching back a portion of the second dielectric layer; removing part of the first dielectric layer to expose a top surface and part of the sidewall of the fin-shaped structure; forming an epitaxial layer to cover the exposed top surface and part of the sidewall of the fin-shaped structure; and removing a portion of the second dielectric layer.Type: GrantFiled: December 28, 2015Date of Patent: October 4, 2016Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chin-Cheng Chien, Hsin-Kuo Hsu, Chih-Chien Liu, Chin-Fu Lin, Chun-Yuan Wu
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Publication number: 20160260738Abstract: A pixel of the display panel includes a first transistor, a second transistor, a first electrode pattern and a second electrode pattern. A first drain of the first transistor is electrically connected with the first electrode pattern. A second drain of the second transistor is electrically connected with the second electrode pattern. The first electrode pattern comprises a first connection portion and a first protrusion. The second electrode pattern comprises a second connection portion and two second protrusions. The second protrusions are respectively connected with two sides of the second connection portion and are extended towards the first connection portion. The first protrusion is connected with the first connection portion and is extended towards the second connection portion and to the location between the second protrusions. The width of the distal end of each of the first protrusion and the second protrusion is smaller.Type: ApplicationFiled: February 8, 2016Publication date: September 8, 2016Inventors: MENG-CHANG HUNG, LI-WEI SUNG, CHIN-CHENG CHIEN
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Patent number: 9401429Abstract: A semiconductor structure includes a fin-shaped structure and a gate. The fin-shaped structure is located in a substrate, wherein the fin-shaped structure has a through hole located right below a suspended part. The gate surrounds the suspended part. Moreover, the present invention also provides a semiconductor process including the following steps for forming said semiconductor structure. A substrate is provided. A fin-shaped structure is formed in the substrate, wherein the fin-shaped structure has a bottom part and a top part. A part of the bottom part is removed to form a suspended part in the corresponding top part, thereby forming the suspended part over a through hole. A gate is formed to surround the suspended part.Type: GrantFiled: June 13, 2013Date of Patent: July 26, 2016Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chin-Cheng Chien, Chun-Yuan Wu, Chin-Fu Lin, Chih-Chien Liu, Chia-Lin Hsu
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Publication number: 20160211144Abstract: An epitaxial process applying light illumination includes the following steps. A substrate is provided. A dry etching process and a wet etching process are performed to form a recess in the substrate, wherein an infrared light illuminates while the wet etching process is performed. An epitaxial structure is formed in the recess.Type: ApplicationFiled: February 25, 2015Publication date: July 21, 2016Inventors: Yu-Ying Lin, Ted Ming-Lang Guo, Chin-Cheng Chien, Chih-Chien Liu, Hsin-Kuo Hsu, Chin-Fu Lin, Chun-Yuan Wu
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Publication number: 20160126091Abstract: A cleaning process for oxide includes the following step. A substrate having a first area and a second area is provided. A first oxide layer is formed on the substrate of the first area and the second area. An ammonium hydroxide (NH4OH) and hydrogen peroxide (H2O2) containing process is performed on the first oxide layer of the first area and the second area. A photoresist layer covers the first oxide layer of the first area while exposing the first oxide layer of the second area. The first oxide layer of the second area is removed. The photoresist layer is then removed.Type: ApplicationFiled: November 4, 2014Publication date: May 5, 2016Inventors: Ted Ming-Lang Guo, Chin-Cheng Chien, Chueh-Yang Liu, Neng-Hui Yang
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Publication number: 20160111527Abstract: A method for fabricating semiconductor device with fin-shaped structure is disclosed. The method includes the steps of: forming a fin-shaped structure on a substrate; forming a first dielectric layer on the substrate and the fin-shaped structure; depositing a second dielectric layer on the first dielectric layer; etching back a portion of the second dielectric layer; removing part of the first dielectric layer to expose a top surface and part of the sidewall of the fin-shaped structure; forming an epitaxial layer to cover the exposed top surface and part of the sidewall of the fin-shaped structure; and removing a portion of the second dielectric layer.Type: ApplicationFiled: December 28, 2015Publication date: April 21, 2016Inventors: Chin-Cheng Chien, Hsin-Kuo Hsu, Chih-Chien Liu, Chin-Fu Lin, Chun-Yuan Wu
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Patent number: 9318567Abstract: A method of fabricating a semiconductor device includes the following steps. First, a semiconductor substrate is provided, which includes at least a fin structure and at least a gate semiconductor layer disposed thereon. The gate semiconductor layer covers a portion of the fin structure. Then a sacrificial layer is deposited to cover the fin structure entirely. Subsequently, a top surface of the fin structure is exposed from the sacrificial layer through an etching process. A material layer is then deposited, which covers the gate semiconductor layer, the fin structure and the sacrificial layer conformally. Finally, the material layer is etched until the top surface of the fin structure is exposed and a first spacer is concurrently formed on side surfaces of the gate semiconductor layer.Type: GrantFiled: September 5, 2012Date of Patent: April 19, 2016Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chin-Cheng Chien, Chun-Yuan Wu, Chin-Fu Lin, Chih-Chien Liu, Chia-Lin Hsu
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Patent number: 9312180Abstract: The present invention provides a method for forming a semiconductor structure, including the following steps: Firstly, a substrate is provided, the substrate has a first region defined thereon, a plurality of fin structure is disposed within the first region, and an insulating layer is disposed on the substrate and between each fin structure; next, a first material layer is then formed on the insulating layer, and the fin structures is exposed simultaneously, afterwards, the fin structure is partially removed, and an epitaxial layer is then formed on the top surface of each remained fin structure.Type: GrantFiled: August 18, 2014Date of Patent: April 12, 2016Assignee: UNITED MICROELECTRONICS CORP.Inventor: Chin-Cheng Chien
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Patent number: 9312258Abstract: A strained silicon substrate structure includes a first transistor and a second transistor disposed on a substrate. The first transistor includes a first gate structure and two first source/drain regions disposed at two sides of the first gate structure. A first source/drain to gate distance is between each first source/drain region and the first gate structure. The second transistor includes a second gate structure and two source/drain doped regions disposed at two side of the second gate structure. A second source/drain to gate distance is between each second source/drain region and the second gate structure. The first source/drain to gate distance is smaller than the second source/drain to gate distance.Type: GrantFiled: July 8, 2013Date of Patent: April 12, 2016Assignee: UNITED MICROELECTRONICS CORP.Inventors: Guang-Yaw Hwang, Ling-Chun Chou, I-Chang Wang, Shin-Chuan Huang, Jiunn-Hsiung Liao, Shin-Chi Chen, Pau-Chung Lin, Chiu-Hsien Yeh, Chin-Cheng Chien, Chieh-Te Chen
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Publication number: 20160079067Abstract: A semiconductor device including a substrate, a spacer and a high-k dielectric layer having a U-shape profile is provided. The spacer located on the substrate surrounds and defines a trench. The high-k dielectric layer having a U-shape profile is located in the trench, and the high-k dielectric layer having a U-shape profile exposes an upper portion of the sidewalls of the trench.Type: ApplicationFiled: November 24, 2015Publication date: March 17, 2016Inventors: Chin-Cheng Chien, Chun-Yuan Wu, Chih-Chien Liu, Chin-Fu Lin, Teng-Chun Tsai
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Patent number: 9281201Abstract: A method of manufacturing a semiconductor device having a metal gate is provided. A substrate having a first conductive type transistor and a second conductive type transistor formed thereon is provided. The first conductive type transistor has a first trench and the second conductive type transistor has a second trench. A first work function layer is formed in the first trench. A hardening process is performed for the first work function layer. A softening process is performed for a portion of the first work function layer. A pull back step is performed to remove the portion of the first work function layer. A second work function layer is formed in the second trench. A low resistive metal layer is formed in the first trench and the second trench.Type: GrantFiled: September 18, 2013Date of Patent: March 8, 2016Assignee: UNITED MICROELECTRONICS CORP.Inventors: Ted Ming-Lang Guo, Chiu-Hsien Yeh, Chin-Cheng Chien, Chun-Yuan Wu
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Patent number: 9263579Abstract: A semiconductor process includes the following steps. Two gates are formed on a substrate. A recess is formed in the substrate beside the gates. A surface modification process is performed on a surface of the recess to modify the shape of the recess and change the contents of the surface.Type: GrantFiled: May 27, 2015Date of Patent: February 16, 2016Assignee: UNITED MICROELECTRONICS CORP.Inventors: Ming-Hua Chang, Chun-Yuan Wu, Chin-Cheng Chien, Tien-Wei Yu, Yu-Shu Lin, Szu-Hao Lai