Abstract: MEMS and fabrication techniques for positioning the center of mass of released structures in MEMS are provided. A MEMS device includes a substrate and a released structure connected to the substrate via a flexure. The released structure includes a frame rotatable with respect to the substrate, and an elongate first member having a longitudinal axis extending perpendicularly from an undersurface of the frame and a free end remote from the frame. A recess is formed in an end face of the free end. The recess has a longitudinal axis substantially parallel to the longitudinal axis of the first member and a transverse area smaller than an area of the end face.

Abstract: MEMS and fabrication techniques for positioning the center of mass of released structures in MEMS are provided. In an embodiment, a mirror substrate is affixed to a member partially released from a first substrate and a through hole formed in the second substrate is accessed to complete release of the member.

Abstract: MEMS and fabrication techniques for positioning the center of mass of released structures in MEMS are provided. A released structure may include a member with a recess formed into an end face of its free end. A released structure may include a plurality of members, with the longitudinal lengths of the members being of differing lengths. Mass of a member disposed below a plane of a flexure may be balanced by mass of a second substrate affixed to the member. In an embodiment, a mirror substrate is affixed to a member partially released from a first substrate and a through hole formed in the second substrate is accessed to complete release of the member.

Abstract: MEMS and fabrication techniques for positioning the center of mass of released structures in MEMS are provided. In an embodiment, a minor substrate is affixed to a member partially released from a first substrate and a through hole formed in the second substrate is accessed to complete release of the member.