Patents by Inventor Christopher D. Pettinato

Christopher D. Pettinato has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6287951
    Abstract: A hardmask layer (34) is formed over insulating layers (26, 24, 22 and 20), and an antireflective layer (36) is formed overlying the hardmask layer (34). A resist layer (38) is formed overlying the antireflective layer (36), and an opening is formed in the resist layer to expose a surface portion of the antireflective layer (36). The exposed surface portion of the antireflective layer (36) and portions of the hardmask layer (34) are etched to expose a surface portion of the insulating layers (26, 24, 22 and 20), and a feature opening (61) is formed in the insulating layers (26, 24, 22 and 20). A conductive material (74) is deposited to fill the feature opening (61), and portions of the conductive material (74) lying outside the opening are removed.
    Type: Grant
    Filed: December 7, 1998
    Date of Patent: September 11, 2001
    Assignee: Motorola Inc.
    Inventors: Kevin D. Lucas, Christopher D. Pettinato, Wayne D. Clark, Stanley M. Filipiak, Yeong Jyh Lii