Abstract: In a first aspect, an apparatus adapted to clean a semiconductor device manufacturing component is provided. The apparatus includes an ozone module adapted to (1) obtain Ozone; (2) combine the Ozone with a fluid to generate ozonated fluid; and (3) deliver the ozonated fluid to the semiconductor device manufacturing component so as to clean the semiconductor device manufacturing component. Numerous other aspects are provided.

Abstract: A scheduled price verification system and method which ensure that a scheduled price change has been scheduled for an electronic price label (EPL) associated with an item. The system includes a storage medium for storing an EPL data file and a spool file, and a computer. The computer executes a scheduled price verifier program which reads the EPL data file to obtain identification information for the item associated with the EPL, reads a price file to obtain a new price and a time that the new price is to be effective, reads the spool file after the time to determine whether it contains a record of the one price change to the new price for the EPL, and schedules a price change message containing the new price if the spool file does not contain the record of the one price change to the new price for the EPL.