Patents by Inventor CHUNG-LUNG YIU

CHUNG-LUNG YIU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20040152305
    Abstract: A method of preventing the corrosion of tungsten plug within a substrate in the process of manufacturing a semiconductor device. The tungsten plug within the substrate is coupled to a conductive line on the substrate. The process includes treating the substrate with a charge neutralizer so that charges accumulated on the surface of the conductive line during etching is removed and conducting a wet-cleaning operation thereafter.
    Type: Application
    Filed: January 30, 2003
    Publication date: August 5, 2004
    Inventors: CHUNG-LUNG YIU, SZU-TSUN MA, KENT KUOHUA CHANG