Patents by Inventor Chung-Ming Wang

Chung-Ming Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11748540
    Abstract: A method includes forming a first mandrel pattern and a second mandrel pattern. The first mandrel pattern includes at least first and second mandrels for a mandrel-spacer double patterning process. The second mandrel pattern includes at least a third mandrel inserted between the first and second mandrels. The first mandrel pattern and the second mandrel pattern include a same material. The first and second mandrels are merged together with the third mandrel to form a single pattern.
    Type: Grant
    Filed: April 13, 2021
    Date of Patent: September 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Ming Wang, Chih-Hsiung Peng, Chi-Kang Chang, Kuei-Shun Chen, Shih-Chi Fu
  • Publication number: 20220237356
    Abstract: A method of fabricating a semiconductor device includes generating at least one photomask based on a layout and forming a plurality of active patterns on a substrate, using the at least one photomask. The layout includes a plurality of first patterns that extend parallel to each other in a first direction on a low-density region of the layout and a plurality of second patterns that extend parallel to each other in the first direction on a high-density region of the layout. The forming of the plurality of active patterns includes using the first patterns and the second patterns of the layout to respectively form a plurality of first active patterns and a plurality of second active patterns on the substrate.
    Type: Application
    Filed: April 13, 2022
    Publication date: July 28, 2022
    Inventors: Chung-Ming Wang, Chih-Hsiung Peng, Chi-Kang Chang, Kuei-Shun Chen, Shih-Chi Fu
  • Publication number: 20210232747
    Abstract: A method includes forming a first mandrel pattern and a second mandrel pattern. The first mandrel pattern includes at least first and second mandrels for a mandrel-spacer double patterning process. The second mandrel pattern includes at least a third mandrel inserted between the first and second mandrels. The first mandrel pattern and the second mandrel pattern include a same material. The first and second mandrels are merged together with the third mandrel to form a single pattern.
    Type: Application
    Filed: April 13, 2021
    Publication date: July 29, 2021
    Inventors: Chung-Ming Wang, Chih-Hsiung Peng, Chi-Kang Chang, Kuei-Shun Chen, Shih-Chi Fu
  • Patent number: 11010526
    Abstract: A semiconductor device includes a first active fin on a substrate; a second active fin on the substrate and separate from the first active fin; and a first fin stub on the substrate, wherein the first fin stub connects a first end of the first active fin and a first end of the second active fin, wherein the fin stub is lower than both the first and the second active fins in height, wherein from a top view the first active fin is oriented lengthwise in a first direction, and the first fin stub is oriented lengthwise in a second direction that is different from the first direction.
    Type: Grant
    Filed: December 23, 2019
    Date of Patent: May 18, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Ming Wang, Chih-Hsiung Peng, Chi-Kang Chang, Kuei-Shun Chen, Shih-Chi Fu
  • Publication number: 20200134250
    Abstract: A semiconductor device includes a first active fin on a substrate; a second active fin on the substrate and separate from the first active fin; and a first fin stub on the substrate, wherein the first fin stub connects a first end of the first active fin and a first end of the second active fin, wherein the fin stub is lower than both the first and the second active fins in height, wherein from a top view the first active fin is oriented lengthwise in a first direction, and the first fin stub is oriented lengthwise in a second direction that is different from the first direction.
    Type: Application
    Filed: December 23, 2019
    Publication date: April 30, 2020
    Inventors: Chung-Ming Wang, Chih-Hsiung Peng, Chi-Kang Chang, Kuei-Shun Chen, Shih-Chi Fu
  • Patent number: 10521541
    Abstract: A semiconductor device includes a first active fin on a substrate; a second active fin on the substrate and separate from the first active fin; a first fin stub on the substrate, wherein the first fin stub connects a bottom portion of the first active fin and a bottom portion of the second active fin; and an isolation feature over the first fin stub and between the first and second active fins. The first fin stub is lower than both the first and the second active fins in height. The isolation feature is higher than the first fin stub and lower than both the first and the second active fins in height. From a top view, the first active fin is oriented lengthwise in a first direction, and the first fin stub is oriented lengthwise in a second direction that is different from the first direction.
    Type: Grant
    Filed: April 4, 2018
    Date of Patent: December 31, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Ming Wang, Chih-Hsiung Peng, Chi-Kang Chang, Kuei-Shun Chen, Shih-Chi Fu
  • Patent number: 10157990
    Abstract: A semiconductor device is provided, which includes a substrate, a shallow trench isolation (STI), a gate dielectric structure, a capping structure and a gate structure. The STI is in the substrate and defines an active area of the substrate. The gate dielectric structure is on the active area. The capping structure is adjacent to the gate dielectric structure and at edges of the active area. The gate structure is on the gate dielectric structure and the capping structure. An equivalent oxide thickness of the capping structure is substantially greater than an equivalent oxide thickness of the gate dielectric structure.
    Type: Grant
    Filed: March 13, 2017
    Date of Patent: December 18, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chung-Ming Wang, Fang-Ting Kuo
  • Publication number: 20180225404
    Abstract: A semiconductor device includes a first active fin on a substrate; a second active fin on the substrate and separate from the first active fin; a first fin stub on the substrate, wherein the first fin stub connects a bottom portion of the first active fin and a bottom portion of the second active fin; and an isolation feature over the first fin stub and between the first and second active fins. The first fin stub is lower than both the first and the second active fins in height. The isolation feature is higher than the first fin stub and lower than both the first and the second active fins in height. From a top view, the first active fin is oriented lengthwise in a first direction, and the first fin stub is oriented lengthwise in a second direction that is different from the first direction.
    Type: Application
    Filed: April 4, 2018
    Publication date: August 9, 2018
    Inventors: Chung-Ming Wang, Chih-Hsiung Peng, Chi-Kang Chang, Kuei-Shun Chen, Shih-Chi Fu
  • Publication number: 20180166545
    Abstract: A semiconductor device is provided, which includes a substrate, a shallow trench isolation (STI), a gate dielectric structure, a capping structure and a gate structure. The STI is in the substrate and defines an active area of the substrate. The gate dielectric structure is on the active area. The capping structure is adjacent to the gate dielectric structure and at edges of the active area. The gate structure is on the gate dielectric structure and the capping structure. An equivalent oxide thickness of the capping structure is substantially greater than an equivalent oxide thickness of the gate dielectric structure.
    Type: Application
    Filed: March 13, 2017
    Publication date: June 14, 2018
    Inventors: Chung-Ming WANG, Fang-Ting KUO
  • Patent number: 9946827
    Abstract: A method includes receiving an integrated circuit design layout that includes first and second layout blocks separated by a first space. The first and second layout blocks include, respectively, first and second line patterns oriented lengthwise in a first direction. The method further includes adding a dummy pattern to the first space, which connects the first and second line patterns. The method further includes outputting a mandrel pattern layout and a cut pattern layout in a computer-readable format. The mandrel pattern layout includes the first and second line patterns and the dummy pattern. The cut pattern layout includes a pattern corresponding to the first space. In embodiments, the method further includes manufacturing a first mask with the mandrel pattern layout and manufacturing a second mask with the cut pattern layout. In embodiments, the method further includes patterning a substrate with the first mask and the second mask.
    Type: Grant
    Filed: July 16, 2015
    Date of Patent: April 17, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Ming Wang, Chih-Hsiung Peng, Chi-Kang Chang, Kuei-Shun Chen, Shih-Chi Fu
  • Publication number: 20170017745
    Abstract: A method includes receiving an integrated circuit design layout that includes first and second layout blocks separated by a first space. The first and second layout blocks include, respectively, first and second line patterns oriented lengthwise in a first direction. The method further includes adding a dummy pattern to the first space, which connects the first and second line patterns. The method further includes outputting a mandrel pattern layout and a cut pattern layout in a computer-readable format. The mandrel pattern layout includes the first and second line patterns and the dummy pattern. The cut pattern layout includes a pattern corresponding to the first space. In embodiments, the method further includes manufacturing a first mask with the mandrel pattern layout and manufacturing a second mask with the cut pattern layout. In embodiments, the method further includes patterning a substrate with the first mask and the second mask.
    Type: Application
    Filed: July 16, 2015
    Publication date: January 19, 2017
    Inventors: Chung-Ming Wang, Chih-Hsiung Peng, Chi-Kang Chang, Kuei-Shun Chen, Shih-Chi Fu
  • Patent number: 9274414
    Abstract: A method of fabricating a mask is described. The method includes receiving receiving an integrated circuit (IC) design layout that has a first pattern layer including a first feature and has a second pattern layer including a second feature, wherein the first pattern layer and the second pattern layer are spatially related when formed in a substrate such that the first and second features are spaced a first distance between a first edge of the first feature and a second edge of the second feature, modifying the IC design layout by adjusting a dimension of the first feature based on the first distance, and generating a tape-out data from the modified IC design layout for mask making. The method further includes applying a logic operation (LOP) to the IC design layout.
    Type: Grant
    Filed: December 3, 2014
    Date of Patent: March 1, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Lun Liu, Chia-Chu Liu, Kuei-Shun Chen, Chung-Ming Wang, Chie-Chieh Lin
  • Publication number: 20150202720
    Abstract: A fixing structure for a metal unit and a plastic unit includes a metal unit, a metal engagement portion, a plastic unit and a plastic engagement portion. The metal unit has a metal main body and a base body formed on one side of the metal main body. The metal engagement portion is a metal body fixed by welding to the base body of the metal unit. The plastic unit has a plastic main body. The plastic engagement portion is integrally formed as one piece on the plastic main body. The plastic unit is accommodated in the metal main body of the metal unit, and the metal engagement portion and the plastic engagement portion are mutually engaged. Aesthetics is increased and thermal cycle tests can be passed.
    Type: Application
    Filed: April 14, 2014
    Publication date: July 23, 2015
    Applicants: LITE-ON ELECTRONICS (GUANGZHOU) LIMITED, LITE-ON TECHNOLOGY CORPORATION
    Inventors: CHUNG-MING WANG, CHE-CHENG CHANG, CHUN-CHING SHEN
  • Publication number: 20150086910
    Abstract: A method of fabricating a mask is described. The method includes receiving receiving an integrated circuit (IC) design layout that has a first pattern layer including a first feature and has a second pattern layer including a second feature, wherein the first pattern layer and the second pattern layer are spatially related when formed in a substrate such that the first and second features are spaced a first distance between a first edge of the first feature and a second edge of the second feature, modifying the IC design layout by adjusting a dimension of the first feature based on the first distance, and generating a tape-out data from the modified IC design layout for mask making. The method further includes applying a logic operation (LOP) to the IC design layout.
    Type: Application
    Filed: December 3, 2014
    Publication date: March 26, 2015
    Inventors: Yu-Lun Liu, Chia-Chu Liu, Kuei-Shun Chen, Chung-Ming Wang, Chie-Chieh Lin
  • Patent number: 8983109
    Abstract: A wireless ear-hook headset includes a flexible tube, a receiver and a transceiver. The flexible tube has a cable, a first fixing binder fixed on one end of the cable, a second fixing binder fixed on the other end of the cable, and an outer layer. The cable has at least one shapeable metallic wire, a plurality of signal wires and an insulating cover layer. The outer layer has two ends which are fixedly connected with the first and second fixing binders respectively and fully covering the cable. The receiver is connected to the first fixing binder of the flexible tube. The transceiver is connected to the second fixing binder of the flexible tube. The present invention also discloses the flexible tube structure and a method for manufacturing the flexible tube.
    Type: Grant
    Filed: August 7, 2013
    Date of Patent: March 17, 2015
    Assignees: Lite-On Electronics (Guangzhou) Limited, Lite-On Technology Corporation
    Inventors: Chung-Ming Wang, Che-Cheng Chang
  • Patent number: 8906595
    Abstract: A method of fabricating a mask is described. The method includes receiving receiving an integrated circuit (IC) design layout that has a first pattern layer including a first feature and has a second pattern layer including a second feature, wherein the first pattern layer and the second pattern layer are spatially related when formed in a substrate such that the first and second features are spaced a first distance between a first edge of the first feature and a second edge of the second feature, modifying the IC design layout by adjusting a dimension of the first feature based on the first distance, and generating a tape-out data from the modified IC design layout for mask making. The method further includes applying a logic operation (LOP) to the IC design layout.
    Type: Grant
    Filed: November 1, 2012
    Date of Patent: December 9, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Lun Liu, Chia-Chu Liu, Kuei-Shun Chen, Chung-Ming Wang, Chie-Chieh Lin
  • Publication number: 20140334658
    Abstract: A wireless ear-hook headset includes a flexible tube, a receiver and a transceiver. The flexible tube has a cable, a first fixing binder fixed on one end of the cable, a second fixing binder fixed on the other end of the cable, and an outer layer. The cable has at least one shapeable metallic wire, a plurality of signal wires and an insulating cover layer. The outer layer has two ends which are fixedly connected with the first and second fixing binders respectively and fully covering the cable. The receiver is connected to the first fixing binder of the flexible tube. The transceiver is connected to the second fixing binder of the flexible tube. The present invention also discloses the flexible tube structure and a method for manufacturing the flexible tube.
    Type: Application
    Filed: August 7, 2013
    Publication date: November 13, 2014
    Applicants: LITE-ON TECHNOLOGY CORPORATION, LITE-ON ELECTRONICS (GUANGZHOU) LIMITED
    Inventors: CHUNG-MING WANG, CHE-CHENG CHANG
  • Patent number: 8877598
    Abstract: A method of forming a integrated circuit pattern. The method includes forming gate stacks on a substrate, two adjacent gate stacks of the gate stacks being spaced away by a dimension G; forming a nitrogen-containing layer on the gate stacks and the substrate; forming a dielectric material layer on the nitrogen-containing layer, the dielectric material layer having a thickness T substantially less than G/2; coating a photoresist layer on the dielectric material layer; and patterning the photoresist layer by a lithography process.
    Type: Grant
    Filed: June 1, 2012
    Date of Patent: November 4, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Ming Wang, Yu Lun Liu, Chia-Chu Liu, Ya Hui Chang, Kuei-Shun Chen
  • Patent number: 8765363
    Abstract: A method of forming a integrated circuit pattern. The method includes coating a photoresist layer on a substrate; performing a lithography exposure process to the photoresist layer; performing a multiple-step post-exposure-baking (PEB) process to the photoresist layer; and developing the photoresist layer to form a patterned photoresist layer.
    Type: Grant
    Filed: May 23, 2012
    Date of Patent: July 1, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Ming Wang, Yu Lun Liu, Chia-Chu Liu, Kuei-Shun Chen
  • Publication number: 20140120459
    Abstract: A method of fabricating a mask is described. The method includes receiving receiving an integrated circuit (IC) design layout that has a first pattern layer including a first feature and has a second pattern layer including a second feature, wherein the first pattern layer and the second pattern layer are spatially related when formed in a substrate such that the first and second features are spaced a first distance between a first edge of the first feature and a second edge of the second feature, modifying the IC design layout by adjusting a dimension of the first feature based on the first distance, and generating a tape-out data from the modified IC design layout for mask making. The method further includes applying a logic operation (LOP) to the IC design layout.
    Type: Application
    Filed: November 1, 2012
    Publication date: May 1, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Lin Liu, Chia-Chu Liu, Kuei-Shun Chen, Chung-Ming Wang, Chie-Chieh Lin