Patents by Inventor Cyrille Le Royer

Cyrille Le Royer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210005443
    Abstract: Method for producing a semiconductor device, including: producing, on a first region of a surface layer comprising a first semiconductor and disposed on a buried dielectric layer, a layer of a second compressive strained semiconductor along a first direction; etching a trench through the layer of the second semiconductor forming an edge of a portion of the layer of the second semiconductor oriented perpendicularly to the first direction, and wherein the bottom wall is formed by the surface layer; thermal oxidation forming in the surface layer a semiconductor compressive strained portion along the first direction and forming in the trench an oxide portion; producing, through the surface layer and/or the oxide portion, and through the buried dielectric layer, dielectric isolation portions around an assembly formed of the compressive strained semiconductor portion and the oxide portion; and wherein the first semiconductor is silicon, the second semiconductor is SiGe, and said at least one compressive strained
    Type: Application
    Filed: June 29, 2020
    Publication date: January 7, 2021
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Loic GABEN, Cyrille LE ROYER, Fabrice NEMOUCHI, Nicolas POSSEME, Shay REBOH
  • Publication number: 20200211906
    Abstract: A method is provided for producing a microelectronic component on a substrate including in an exposed manner on a first face thereof, an active zone and an electrical isolation zone adjacent thereto, the method including forming a gate on the active zone, forming spacers each configured to cover a surface of a different edge of the gate, and forming source and drain zones by doping portions of the active zone adjacent to the gate, the method successively including forming a first layer of spacer material above the active zone and the electrical isolation zone; an ion implantation to produce doping of the portions through the first layer; removing a modified portion of the first layer disposed overlooking the portions, the modified portion coming from the ion implantation, the removing being configured to preserve at least part of the first layer at a level of edges of the gate.
    Type: Application
    Filed: December 12, 2019
    Publication date: July 2, 2020
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Nicolas POSSEME, Cyrille LE ROYER
  • Publication number: 20200203161
    Abstract: A process for fabricating an integrated circuit is provided, including steps of providing a substrate including a silicon layer, a layer of insulator a layer of hard mask and accesses to first and second regions of the silicon layer; forming first and second deposits of SiGe alloy on the first and the second regions in order to form first and second stacks; then protecting the first deposit and maintaining an access to the second deposit; then performing an etch in order to form trenches between the hard mask and two opposite edges of the second stack; then forming a tensilely strained silicon layer in the second region via amorphization of the second region; then crystallization; and enriching the first region in germanium by diffusion from the first deposit.
    Type: Application
    Filed: December 17, 2019
    Publication date: June 25, 2020
    Applicant: Commissariat A L'Energie Atomique et aux Energies Alternatives
    Inventors: Nicolas POSSEME, Loic Gaben, Cyrille Le Royer, Fabrice Nemouchi, Shay Reboh
  • Publication number: 20200185497
    Abstract: A process for fabricating an electronic component with multiple quantum dots is provided, including providing a stack including a substrate, a nanostructure made of semiconductor material superposed over the substrate and including first and second quantum dots and a link linking the quantum dots, first and second control gate stacks arranged on the quantum dots, the gate stacks separated by a gap, the quantum dots and the link having a same thickness; partially thinning the link while using the gate stacks as masks to obtain the link, a thickness of which is less than that of the quantum dots; and conformally forming a dielectric layer on either side of the gate stacks so as to fill the gap above the partially thinned link. An electronic component with multiple quantum dots is also provided.
    Type: Application
    Filed: November 29, 2019
    Publication date: June 11, 2020
    Applicant: Commissariat A L'Energie Atomique et aux Energies Alternatives
    Inventors: Nicolas POSSEME, Louis HUTIN, Cyrille LE ROYER, Fabrice NEMOUCHI
  • Publication number: 20190244869
    Abstract: There is provided a method for producing, on one same plate, at least one first transistor surmounted at least partially on a voltage stressed layer and a second transistor surmounted at least partially on a compression stressed layer, the method including providing a plate including the first and the second transistors; forming at least one stressed nitride-based layer, on the first and the second transistors, the layer being voltage stressed; depositing a protective layer so as to cover a first zone of the layer, the first zone covering at least partially the first transistor and leaving a second zone of the layer uncovered, the second zone at least partially covering the second transistor; and modifying a type of stress of the second zone of the layer by implanting hydrogen-based ions from a plasma in the second zone, such that the second zone of the layer is compression stressed.
    Type: Application
    Filed: December 21, 2018
    Publication date: August 8, 2019
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Nicolas POSSEME, Cyrille LE ROYER, Yves MORAND
  • Patent number: 9911820
    Abstract: A method of fabrication, including the steps for supplying a substrate including a layer of semiconductor material covered by a sacrificial gate including a sacrificial gate insulator including a middle part, and edges covered by sacrificial spacers and having a thickness tox; removal of the sacrificial gate insulator and the sacrificial gate material; formation of a conformal deposition of thickness thk of dielectric material inside of the groove formed in order to form a gate insulator, with tox>thk?tox/2; formation of a gate electrode within the groove; removal of the sacrificial spacers so as to open up edges of the gate insulator layer; formation of spacers on the edges of the gate insulator layer on either side of the gate electrode, these spacers having a dielectric constant at the most equal to 3.5.
    Type: Grant
    Filed: March 21, 2017
    Date of Patent: March 6, 2018
    Assignees: Commissariat A L'Energie Atomique et aux Energies Alternatives, STMicroelectronics SA, STMicroelectronics (Crolles 2) SAS
    Inventors: Cyrille Le Royer, Frederic Boeuf, Laurent Grenouillet, Louis Hutin, Yves Morand
  • Publication number: 20170271470
    Abstract: A method of fabrication, including the steps for supplying a substrate including a layer of semiconductor material covered by a sacrificial gate including a sacrificial gate insulator including a middle part, and edges covered by sacrificial spacers and having a thickness tox; removal of the sacrificial gate insulator and the sacrificial gate material; formation of a conformal deposition of thickness thk of dielectric material inside of the groove formed in order to form a gate insulator, with tox>thk?tox/2; formation of a gate electrode within the groove; removal of the sacrificial spacers so as to open up edges of the gate insulator layer; formation of spacers on the edges of the gate insulator layer on either side of the gate electrode, these spacers having a dielectric constant at the most equal to 3.5.
    Type: Application
    Filed: March 21, 2017
    Publication date: September 21, 2017
    Applicants: Commissariat a I'energie atomique et aux energies alternatives, STMicroelectronics SA, STMicroelectronics (Crolles 2) SAS
    Inventors: Cyrille LE ROYER, Frederic Boeuf, Laurent Grenouillet, Louis Hutin, Yves Morand
  • Patent number: 9502558
    Abstract: Method to strain a channel zone of a transistor of the semiconductor on insulator type transistor that makes use of an SMT stress memorization technique in which regions located under the insulation layer of the substrate (FIG. 6) are amorphized, before the transistor gate is made.
    Type: Grant
    Filed: July 6, 2015
    Date of Patent: November 22, 2016
    Assignees: Commissariat a l'energie atomique et aux energies alternatives, STMICROELECTRONICS (CROLLES 2) SAS
    Inventors: Shay Reboh, Laurent Grenouillet, Cyrille Le Royer, Sylvain Maitrejean, Yves Morand
  • Patent number: 9276102
    Abstract: A tunnel-effect transistor the drain region of which includes a first zone doped with a doping of a first type, and a second zone doped with a doping of a second type forming a junction with the first zone.
    Type: Grant
    Filed: July 8, 2013
    Date of Patent: March 1, 2016
    Assignees: Commissariat àl'énergie atomique et aux énergies alternatives, CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
    Inventors: Cyrille Le Royer, Sorin Cristoloveanu, Jing Wan, Alexander Zaslavsky
  • Patent number: 9252269
    Abstract: A tunnel effect transistor includes a channel made of an intrinsic semiconductor material; source and drain extension regions on either side of the channel, the source extension region being made of a semiconductor material doped according to a first type of doping P or N and the drain extension region being made of a semiconductor material doped according to a second type of doping opposite to said first type of doping; source and drain conductive regions respectively in contact with the source and drain extension regions; a gate structure including a gate dielectric layer in contact with the channel and a gate area arranged such that the gate dielectric layer is arranged between the gate area and the channel; and an area doped according to the first type of doping inserted between the channel and the drain extension region.
    Type: Grant
    Filed: March 6, 2014
    Date of Patent: February 2, 2016
    Assignee: Commissariat à l'ènergie atomique et aux ènergies alernatives
    Inventors: Costin Anghel, Cyrille Le Royer, Adam Makosiej
  • Publication number: 20160005862
    Abstract: Method to strain a channel zone of a transistor of the semiconductor on insulator type transistor that makes use of an SMT stress memorisation technique in which regions located under the insulation layer of the substrate (FIG. 6) are amorphised, before the transistor gate is made.
    Type: Application
    Filed: July 6, 2015
    Publication date: January 7, 2016
    Applicants: Commissariat a L'Energie Atomique et aux Energies Alternatives, STMICROELECTRONICS (CROLLES 2) SAS
    Inventors: Shay REBOH, Laurent GRENOUILLET, Cyrille LE ROYER, Sylvain MAITREJEAN, Yves MORAND
  • Patent number: 9117805
    Abstract: A MOS transistor including, above a gate insulator, a conductive gate stack having a height, a length, and a width, this stack having a lower portion close to the gate insulator and an upper portion, wherein the stack has a first length in its lower portion, and a second length shorter than the first length in its upper portion.
    Type: Grant
    Filed: January 31, 2014
    Date of Patent: August 25, 2015
    Assignees: STMicroelectronics SA, STMicroelectronics (Crolles 2) SAS, Commissariat a l'Energie Atomique et aux Energies Alternatives
    Inventors: Heimanu Niebojewski, Yves Morand, Cyrille Le Royer
  • Patent number: 9099555
    Abstract: A TFET transistor includes an intrinsic channel, source and drain extension regions, source and drain conductive regions, a gate surmounting the channel and laid out such that an end of the channel is not covered by the gate. The transistor includes a first arrangement for forming an isolating space between the sides of the gate and the source conductive region including a first and a second dielectric spacer. The extension region has a thickness strictly greater than that of the channel such that the extension region has an increased thickness opposite the gate dielectric layer. The first face of the first spacer is in contact with the side of the gate followed by the side of the gate dielectric layer such that the first face covers the whole of the side of the layer.
    Type: Grant
    Filed: June 24, 2013
    Date of Patent: August 4, 2015
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Cyrille Le Royer, Costin Anghel
  • Publication number: 20150091089
    Abstract: A MOS transistor has a gate insulator layer that is made of a material of high dielectric constant deposited on a substrate. The gate insulator layer extends, with a constant thickness, under and beyond a gate stack. Spacers of low dielectric constant are formed on either side of the gate stack and vertically separated from the substrate by the extension of the gate insulator layer beyond the sides of the gate stack. The spacers of low dielectric constant are preferably air spacers.
    Type: Application
    Filed: September 29, 2014
    Publication date: April 2, 2015
    Applicants: STMICROELECTRONICS (CROLLES 2) SAS, STMICROELECTRONICS SA, Commissariat A L'Energie Atomique et aux Energies Alternatives
    Inventors: Heimanu Niebojewski, Yves Morand, Cyrille Le Royer, Olivier Rozeau
  • Publication number: 20140252407
    Abstract: A tunnel effect transistor includes a channel made of an intrinsic semiconductor material; source and drain extension regions on either side of the channel, the source extension region being made of a semiconductor material doped according to a first type of doping P or N and the drain extension region being made of a semiconductor material doped according to a second type of doping opposite to said first type of doping; source and drain conductive regions respectively in contact with the source and drain extension regions; a gate structure including a gate dielectric layer in contact with the channel and a gate area arranged such that the gate dielectric layer is arranged between the gate area and the channel; and an area doped according to the first type of doping inserted between the channel and the drain extension region.
    Type: Application
    Filed: March 6, 2014
    Publication date: September 11, 2014
    Inventors: Costin Anghel, Cyrille Le Royer, Adam Makosiej
  • Patent number: 8822332
    Abstract: A method for forming gate, source, and drain contacts on a MOS transistor having an insulated gate including polysilicon covered with a metal gate silicide, this gate being surrounded with at least one spacer made of a first insulating material, the method including the steps of a) covering the structure with a second insulating material and leveling the second insulating material to reach the gate silicide; b) oxidizing the gate so that the gate silicide buries and covers the a silicon oxide; c) selectively removing the second insulating material; and d) covering the structure with a first conductive material and leveling the first conductive material all the way to a lower level at the top of the spacer.
    Type: Grant
    Filed: April 26, 2013
    Date of Patent: September 2, 2014
    Assignees: STMicroelectronics S.A., Commissariat à l'Énergie Atomique et aux Énergies Alternatives
    Inventors: Heimanu Niebojewski, Yves Morand, Cyrille Le Royer, Fabrice Nemouchi
  • Publication number: 20140217520
    Abstract: A MOS transistor including, above a gate insulator, a conductive gate stack having a height, a length, and a width, this stack having a lower portion close to the gate insulator and an upper portion, wherein the stack has a first length in its lower portion, and a second length shorter than the first length in its upper portion.
    Type: Application
    Filed: January 31, 2014
    Publication date: August 7, 2014
    Applicants: STMicroelectronics S.A., Commissariat à I'Énergie Atomique et aux Énergies Alternatives, STMicroelectronics (Crolles 2) SAS
    Inventors: Heimanu Niebojewski, Yves Morand, Cyrille Le Royer
  • Publication number: 20140035040
    Abstract: A TFET transistor includes an intrinsic channel, source and drain extension regions, source and drain conductive regions, a gate surmounting the channel and laid out such that an end of the channel is not covered by the gate. The transistor includes a first arrangement for forming an isolating space between the sides of the gate and the source conductive region including a first and a second dielectric spacer. The extension region has a thickness strictly greater than that of the channel such that the extension region has an increased thickness opposite the gate dielectric layer. The first face of the first spacer is in contact with the side of the gate followed by the side of the gate dielectric layer such that the first face covers the whole of the side of the layer.
    Type: Application
    Filed: June 24, 2013
    Publication date: February 6, 2014
    Inventors: Cyrille Le Royer, Costin Anghel
  • Patent number: 8634229
    Abstract: A memory cell is provided with a transistor which includes source and drain electrodes formed in a semiconductor film by respectively N-doped and P-doped areas. The transistor includes first and second devices for generating a potential barrier in the semiconductor film. The two potential barriers are shifted laterally and are opposed to the passage of the charge carriers emitted by the nearest source/drain electrode. One of the devices for generating the potential barrier is electrically connected to the gate. The other of the devices for generating the potential barrier is electrically connected to the counter-electrode. The writing of a high state is carried out by imposing on the P-doped electrode a potential higher than that of the N-doped electrode and charging the capacitor formed between the gate and the semiconductor film. The resetting of the memory cell is obtained by discharging the capacitor.
    Type: Grant
    Filed: October 22, 2012
    Date of Patent: January 21, 2014
    Assignees: Commissariat a l'Energie Atomique et aux Energies Alternatives, Centre National de Recherche Scientifique
    Inventors: Jing Wan, Sorin Cristoloveanu, Cyrille Le Royer, Alexander Zaslavsky
  • Publication number: 20140015009
    Abstract: A tunnel-effect transistor the drain region of which includes a first zone doped with a doping of a first type, and a second zone doped with a doping of a second type forming a junction with the first zone.
    Type: Application
    Filed: July 8, 2013
    Publication date: January 16, 2014
    Inventors: Cyrille LE ROYER, Sorin Cristoloveanu, Jing Wan, Alexander Zaslavsky