Patents by Inventor Daniel Alvarez, Jr.

Daniel Alvarez, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190309411
    Abstract: A method and chemical delivery system are provided for low temperature atomic layer deposition. Thus, methods of forming nitrogen-containing thin films by atomic layer deposition using a substantially water free hydrazine gas and plasma treatment are provided.
    Type: Application
    Filed: April 24, 2019
    Publication date: October 10, 2019
    Inventors: Jeffrey J. Spiegelman, Daniel Alvarez, JR., Jian Yang, Russell J. Holmes, Edward Heinlein, Christopher Ramos, Jeremiah Trammel
  • Publication number: 20190247791
    Abstract: Provided herein is a device for removing residual hydrogen peroxide or hydrazine from an effluent gas stream which includes a metal oxide scrubber material configured to react with residual process gases under increased temperatures. Also provided are systems and methods of using the same.
    Type: Application
    Filed: April 25, 2019
    Publication date: August 15, 2019
    Inventors: Daniel Alvarez, JR., Russell J. Holmes, Jeffrey J. Spiegelman, Edward Heinlein, Christopher Ramos
  • Publication number: 20190070521
    Abstract: Provided herein are methods, systems, and devices for the vapor phase delivery of high purity process gases to a critical process or application.
    Type: Application
    Filed: November 5, 2018
    Publication date: March 7, 2019
    Inventors: Daniel Alvarez, JR., Russell J. Holmes, Jeffrey J. Spiegelman, Edward Heinlein, Christopher Ramos, Jeremiah Trammel
  • Patent number: 10214420
    Abstract: A method and chemical delivery system and device are provided. One method includes contacting a non-aqueous hydrazine solution with a carrier gas and/or vacuum and delivering a gas stream comprising hydrazine to a critical process or application. One chemical delivery system and device includes a non-aqueous hydrazine solution having a vapor phase that is in contact with a carrier gas and/or vacuum. One device includes a chamber for containing a liquid comprising at least one volatile process chemical, such as a non-aqueous hydrazine solution, a hydrogen peroxide solution, or another suitable process chemical, and a head space from which the volatile can be drawn using a carrier gas and/or vacuum. Another method useful in the present invention involves drawing a process chemical from a device as a disclosed herein using a carrier or vacuum and delivering the process chemical to a critical process or application.
    Type: Grant
    Filed: October 22, 2015
    Date of Patent: February 26, 2019
    Assignee: RASIRC, Inc.
    Inventors: Daniel Alvarez, Jr., Russell J. Holmes, Jeffrey Spiegelman, Edward Heinlein, Christopher Ramos
  • Patent number: 10196685
    Abstract: Methods and delivery systems for providing a gas phase of a multi-component liquid source for delivery to a critical process application are provided. The methods include concentration of a component of the liquid source which is less volatile than water for delivery of a gas stream comprising the less volatile component to a critical process application. Critical process applications include decontamination and microelectronic processing applications.
    Type: Grant
    Filed: May 12, 2015
    Date of Patent: February 5, 2019
    Assignee: RASIRC, Inc.
    Inventors: Daniel Alvarez, Jr., Jeffrey J. Spiegelman, Russell J. Holmes, Edward Heinlein, Zohreh Shamsi, Christopher Ramos, Alex Deptala, James Hogan
  • Patent number: 10150048
    Abstract: Provided herein are methods, systems, and devices for the vapor phase delivery of high purity process gases to a critical process or application.
    Type: Grant
    Filed: April 14, 2017
    Date of Patent: December 11, 2018
    Assignee: Rasirc, Inc.
    Inventors: Daniel Alvarez, Jr., Russell J. Holmes, Jeffrey J. Spiegelman, Edward Heinlein, Christopher Ramos, Jeremiah Trammel
  • Publication number: 20180134554
    Abstract: Compositions, methods, devices, and systems for purifying a source liquid from a replenishment stock solution that includes stabilizing agents, such as metal ions, prior to vaporization. Certain embodiments effect the purification with a solid perfluoronated ionomer, such as a perfluoronated ionomer membrane. Advantageously, source liquids purified in this manner provide feed stocks for production of ultra-pure gaseous reagents. As well, performance characteristics of membrane-based vaporizers relying on transport processes are improved.
    Type: Application
    Filed: April 6, 2016
    Publication date: May 17, 2018
    Inventors: Daniel ALVAREZ, JR., Christopher RAMOS, Jeffrey J. SPIEGELMAN
  • Publication number: 20180127272
    Abstract: The present invention generally relates to the field of gas and liquid phase desiccation. In particular, the present invention relates to methods for removing moisture (and hence oxygen precursors) from hydrazine, thereby providing a high purity source gas suitable for use in vapor deposition processes, such as but not limited to, chemical vapor deposition (CVD) or an atomic layer deposition (ALD).
    Type: Application
    Filed: November 8, 2017
    Publication date: May 10, 2018
    Applicant: Matheson Tri-Gas, Inc.
    Inventors: Hideharu Shimizu, Mark Raynor, Daniel Tempel, Robin Gardiner, Daniel Alvarez, JR.
  • Patent number: 9932630
    Abstract: Methods, systems, and devices for decontaminating materials containing biological or biologically derived materials, such as microorganisms or DNA products, are provided. The methods, systems, and devices may be used for decontaminating or sterilizing materials, such as surfaces, including, but not limited to reducing the number of viable microorganisms on surfaces. The methods, systems, and devices may further be used for rendering DNA non-amplifiable in nucleic acid amplification reactions that synthesize DNA amplification products.
    Type: Grant
    Filed: August 8, 2016
    Date of Patent: April 3, 2018
    Assignee: RASIRC, Inc.
    Inventors: Daniel Alvarez, Jr., Jeffrey J. Spiegelman, Russell J. Holmes, James Hogan
  • Publication number: 20170369315
    Abstract: A method and chemical delivery system and device are provided. One method includes contacting a non-aqueous hydrazine solution with a carrier gas and/or vacuum and delivering a gas stream comprising hydrazine to a critical process or application. One chemical delivery system and device includes a non-aqueous hydrazine solution having a vapor phase that is in contact with a carrier gas and/or vacuum. One device includes a chamber for containing a liquid comprising at least one volatile process chemical, such as a non-aqueous hydrazine solution, a hydrogen peroxide solution, or another suitable process chemical, and a head space from which the volatile can be drawn using a carrier gas and/or vacuum. Another method useful in the present invention involves drawing a process chemical from a device as a disclosed herein using a carrier or vacuum and delivering the process chemical to a critical process or application.
    Type: Application
    Filed: October 22, 2015
    Publication date: December 28, 2017
    Inventors: Daniel Alvarez, JR., Russell J. Holmes, Jeffrey Spiegelman, Edward Heinlein, Christopher Ramos
  • Publication number: 20170312687
    Abstract: Provided herein is a device for removing residual hydrogen peroxide or hydrazine from an effluent gas stream which includes a metal oxide scrubber material configured to react with residual process gases under increased temperatures. Also provided are systems and methods of using the same.
    Type: Application
    Filed: April 28, 2017
    Publication date: November 2, 2017
    Inventors: Daniel Alvarez, JR., Russell J. Holmes, Jeffrey J. Spiegelman, Edward Heinlein, Christopher Ramos
  • Publication number: 20170216738
    Abstract: Provided herein are methods, systems, and devices for the vapor phase delivery of high purity process gases to a critical process or application.
    Type: Application
    Filed: April 14, 2017
    Publication date: August 3, 2017
    Inventors: Daniel Alvarez, JR., Russell J. Holmes, Jeffrey J. Spiegelman, Edward Heinlein, Christopher Ramos, Jeremiah Trammel
  • Patent number: 9610550
    Abstract: A method and chemical delivery system are provided. The method includes providing a vapor phase of a multi-component liquid source. The method further includes contacting a pre-loaded carrier gas with the vapor phase, wherein the pre-loaded carrier gas includes a carrier gas and at least one component of the multi-component liquid source and delivering a gas stream comprising at least one component of the liquid source to a critical process or application, wherein the amount of the component in the carrier gas is sufficient to keep the ratio of components in the multi-component liquid source relatively constant. The chemical delivery system includes a multi-component liquid source having a vapor phase.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: April 4, 2017
    Assignee: Rasirc, Inc.
    Inventors: Daniel Alvarez, Jr., Jeffrey Spiegelman, Russell J. Holmes, Edward Heinlein, Zohreh Shamsi
  • Publication number: 20170072081
    Abstract: Methods and delivery systems for providing a gas phase of a multi-component liquid source for delivery to a critical process application are provided. The methods include concentration of a component of the liquid source which is less volatile than water for delivery of a gas stream comprising the less volatile component to a critical process application. Critical process applications include decontamination and microelectronic processing applications.
    Type: Application
    Filed: May 12, 2015
    Publication date: March 16, 2017
    Applicant: RASIRC, INC.
    Inventors: DANIEL ALVAREZ, Jr., JEFFREY J. SPIEGELMAN, RUSSELL J. HOLMES, EDWARD HEINLEIN, ZOHREH SHAMSI, CHRISTOPHER RAMOS, ALEX DEPTALA, JAMES HOGAN
  • Patent number: 9545585
    Abstract: A method and chemical delivery system are provided. The method includes providing a non-aqueous hydrogen peroxide solution having a vapor phase separated from the substantially non-aqueous hydrogen peroxide solution by a membrane. The method further includes contacting a carrier gas or vacuum with the vapor phase and delivering a gas stream comprising hydrogen peroxide to a critical process or application. The chemical delivery system includes a non-aqueous hydrogen peroxide solution having a vapor phase separated from the substantially non-aqueous hydrogen peroxide solution by a membrane. The system further includes a carrier gas or vacuum in fluid contact with the vapor phase and an apparatus for delivering a gas stream comprising at least one component of the hydrogen peroxide solution to a critical process or application.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: January 17, 2017
    Assignee: RASIRC, Inc.
    Inventors: Daniel Alvarez, Jr., Edward Heinlein, Russell J. Holmes, Jeffrey J. Spiegelman
  • Publication number: 20160348160
    Abstract: Methods, systems, and devices for decontaminating materials containing biological or biologically derived materials, such as microorganisms or DNA products, are provided. The methods, systems, and devices may be used for decontaminating or sterilizing materials, such as surfaces, including, but not limited to reducing the number of viable microorganisms on surfaces. The methods, systems, and devices may further be used for rendering DNA non-amplifiable in nucleic acid amplification reactions that synthesize DNA amplification products.
    Type: Application
    Filed: August 8, 2016
    Publication date: December 1, 2016
    Applicant: RASIRC, Inc.
    Inventors: Daniel Alvarez, JR., Jeffrey J. Spiegelman, Russell J. Holmes, James Hogan
  • Patent number: 9410191
    Abstract: Methods, systems, and devices for decontaminating materials containing biological or biologically derived materials, such as microorganisms or DNA products, are provided. The methods, systems, and devices may be used for decontaminating or sterilizing materials, such as surfaces, including, but not limited to reducing the number of viable microorganisms on surfaces. The methods, systems, and devices may further be used for rendering DNA non-amplifiable in nucleic acid amplification reactions that synthesize DNA amplification products.
    Type: Grant
    Filed: May 12, 2015
    Date of Patent: August 9, 2016
    Assignee: RASIRC, Inc.
    Inventors: Daniel Alvarez, Jr., Jeffrey J. Spiegelman, Russell J. Holmes, James Hogan
  • Publication number: 20160051928
    Abstract: A method and chemical delivery system are provided. The method includes providing a concentrated aqueous hydrogen peroxide solution in a boiler having a head space, boiling the concentrated aqueous hydrogen peroxide solution to produce a dilute vapor comprising hydrogen peroxide within the head space of the boiler, and adding a dilute aqueous hydrogen peroxide solution to the concentrated aqueous hydrogen peroxide solution within the boiler to maintain the concentration of the aqueous hydrogen peroxide solution in the boiler. The method further includes delivering the dilute vapor comprising hydrogen peroxide to a critical process or application.
    Type: Application
    Filed: April 3, 2014
    Publication date: February 25, 2016
    Applicant: RASIRC, Inc.
    Inventors: Jeffrey J. SPIEGELMAN, Russell J. HOLMES, Bhuvnesh ARYA, Edward HEINLEIN, Daniel ALVAREZ, JR.
  • Publication number: 20150329901
    Abstract: Methods, systems, and devices for decontaminating materials containing biological or biologically derived materials, such as microorganisms or DNA products, are provided. The methods, systems, and devices may be used for decontaminating or sterilizing materials, such as surfaces, including, but not limited to reducing the number of viable microorganisms on surfaces. The methods, systems, and devices may further be used for rendering DNA non-amplifiable in nucleic acid amplification reactions that synthesize DNA amplification products.
    Type: Application
    Filed: May 12, 2015
    Publication date: November 19, 2015
    Inventors: Daniel Alvarez, Jr., Jeffrey J. Spiegelman, Russell J. Holmes, James Hogan
  • Publication number: 20150190736
    Abstract: A method and chemical delivery system are provided. The method includes providing a non-aqueous hydrogen peroxide solution having a vapor phase separated from the substantially non-aqueous hydrogen peroxide solution by a membrane. The method further includes contacting a carrier gas or vacuum with the vapor phase and delivering a gas stream comprising hydrogen peroxide to a critical process or application. The chemical delivery system includes a non-aqueous hydrogen peroxide solution having a vapor phase separated from the substantially non-aqueous hydrogen peroxide solution by a membrane. The system further includes a carrier gas or vacuum in fluid contact with the vapor phase and an apparatus for delivering a gas stream comprising at least one component of the hydrogen peroxide solution to a critical process or application.
    Type: Application
    Filed: March 14, 2013
    Publication date: July 9, 2015
    Applicant: RASIRC, INC.
    Inventors: Daniel Alvarez, JR., Edward Heinlein, Russell J. Holmes, Jeffrey J. Spiegelman