Patents by Inventor David Alan Beglau

David Alan Beglau has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20100116334
    Abstract: A VHF energized plasma deposition process wherein a process gas is decomposed in a plasma so as to deposit the thin film material onto a substrate, is carried out at process gas pressures which are in the range of 0.5-2.0 torr, with substrate temperatures that do not exceed 300° C., and substrate-cathode spacings in the range of 10-50 millimeters. Deposition rates are at least 5 angstroms per second. The present method provides for the high speed deposition of semiconductor materials having a quality at least equivalent to materials produced at a much lower deposition rate.
    Type: Application
    Filed: November 7, 2008
    Publication date: May 13, 2010
    Applicant: United Solar Ovonic LLC
    Inventors: Xixiang Xu, David Alan Beglau, Guozhen Yue, Baojie Yan, Yang Li, Scott Jones, Subhendu Guha, Chi Yang