Abstract: Disclosed herein are methods for forming MOSFETs. In some embodiments, a method may include providing a device structure including a plurality of trenches, and forming a mask over the device structure including within each of the plurality of trenches and over a top surface of the device structure. The method may further include removing the mask from within the trenches, wherein the mask remains along the top surface of the device structure, and implanting the device structure to form a treated layer along a bottom of the trenches. In some embodiments, the method may further include forming a gate oxide layer along a sidewall of each of the trenches and along the bottom of the trenches, wherein a thickness of the oxide along the bottom of the trenches is greater than a thickness of the oxide along the sidewall of each of the trenches.

Abstract: Systems and methods are provided for high volume roll-to-roll transfer lamination of electrodes for silicon-dominant anode cells.

Abstract: In some embodiments, an electrode can include a current collector, a composite material in electrical communication with the current collector, and at least one phase configured to adhere the composite material to the current collector. The current collector can include one or more layers of metal, and the composite material can include electrochemically active material. The at least one phase can include a compound of the metal and the electrochemically active material. In some embodiments, a composite material can include electrochemically active material. The composite material can also include at least one phase configured to bind electrochemically active particles of the electrochemically active material together. The at least one phase can include a compound of metal and the electrochemically active material.

Abstract: Disclosed herein are methods for forming split-gate MOSFETs including a gate shield. In some embodiments, a method may include providing a device structure including a well formed in an epitaxial layer, forming a set of trenches through the well and the epitaxial layer, implanting the device structure to form a gate shield layer at a bottom of each of the set of trenches, and forming a gate spacer layer over the device structure including within the set of trenches.

Abstract: The present application describes a method of forming an energy storage device that directly adds a lithium layer (such as a lithium foil or otherwise deposited lithium) into the cell stack during cell assembly for prelithiating. The method includes providing a silicon-based anode, providing a cathode, positioning a separator between the anode and the cathode, and disposing a lithium layer between the silicon-based anode and the separator, such that the lithium layer is in contact with the anode.

Abstract: Systems and methods are provided for heat treatment of whole cell structures. A battery may be formed based on applying of heat treatment to a whole cell composition that includes, at least, both anode material and cathode material, such that the anode material and the cathode material are heat treated at the same time. The heat treatment may include pyrolysis. The whole cell composition, and the corresponding cell formed based thereon, may include solid state electrolyte.

Abstract: Systems and methods are provided for carbon additives for direct coating of silicon-dominant anodes. An example composition for use in directly coated anodes may include a silicon-dominated anode active material, a carbon-based binder, and a carbon-based additive, with the composition being configured for low-temperature pyrolysis. The low-temperature pyrolysis may be conducted at <600° C. An anode may be formed using a direct coating process of the composition on a current collector. The anode active material yields silicon constituting between 86% and 97% of weight of the formed anode after pyrolysis. The carbon-based additive yields carbon constituting between 2% and 6% of weight of the formed anode after pyrolysis.

Abstract: In some embodiments, an electrode can include a current collector, a composite material in electrical communication with the current collector, and at least one phase configured to adhere the composite material to the current collector. The current collector can include one or more layers of metal, and the composite material can include electrochemically active material. The at least one phase can include a compound of the metal and the electrochemically active material. In some embodiments, a composite material can include electrochemically active material. The composite material can also include at least one phase configured to bind electrochemically active particles of the electrochemically active material together. The at least one phase can include a compound of metal and the electrochemically active material.

Abstract: A method for performing an ion implantation process including providing a hardmask layer disposed atop a substrate, providing a photoresist layer disposed atop the hardmask layer and defining a pattern exposing a portion of the hardmask layer, performing a room temperature ion implantation process wherein an ion beam formed of an ionized first dopant species is directed onto the exposed portion of the hardmask layer to make the exposed portion more susceptible to ion etching or wet etching, performing an etching process wherein the exposed portion of the hardmask layer is etched away to expose an underlying portion of the substrate, and performing a high energy, hot ion implantation process wherein an ion beam formed of a ionized second dopant species is directed onto the exposed portion of the substrate.

Abstract: Systems and methods for silosilazanes, silosiloxanes, and siloxanes as additives for silicon-dominant anodes in a battery that may include a cathode, an electrolyte, and an anode active material. The active material may comprise 50% or more silicon as well as an additive including one or more of: silosilazane, polysilosilazane, silicon oxycarbides, and polyorganosiloxane. The active material may comprise a film with a thickness between 10 and 80 microns. The film may have a conductivity of 1 S/cm or more. The active material may comprise between 50% and 95% silicon. The active material may be held together by a pyrolyzed carbon film. The anode may comprise lithium, sodium, potassium, silicon, and/or mixtures and combinations thereof. The battery may comprise a lithium ion battery. The electrolyte may comprise a liquid, solid, or gel.

Abstract: In some embodiments, an electrode can include a current collector, a composite material in electrical communication with the current collector, and at least one phase configured to adhere the composite material to the current collector. The current collector can include one or more layers of metal, and the composite material can include electrochemically active material. The at least one phase can include a compound of the metal and the electrochemically active material. In some embodiments, a composite material can include electrochemically active material. The composite material can also include at least one phase configured to bind electrochemically active particles of the electrochemically active material together. The at least one phase can include a compound of metal and the electrochemically active material.

Abstract: Systems and methods are provided for high volume roll-to-roll direct coating of electrodes for silicon-dominant anode cells and may include applying a slurry to a current collector film, the slurry comprising silicon particles and a binder material; drying the slurry to form a precursor composite film; rolling the current collector film into a precursor composite roll; and applying a heat treatment to the precursor composite film and the current collector film in a nitrogen gas environment, wherein the heat treatment is configured for converting the precursor composite film to a pyrolyzed composite film. The heat treatment may include one or both of: applying the heat treatment to a roll comprising the precursor composite roll in whole; and applying the heat treatment to the current collector film as it is continuously fed from the precursor composite roll.

Abstract: Systems and methods for silosilazanes, silosiloxanes, and siloxanes as additives for silicon-dominant anodes in a battery that may include a cathode, an electrolyte, and an anode active material. The active material may comprise 50% or more silicon as well as an additive including one or more of: silosilazane, silicon oxycarbides, and polyorganosiloxane. The silosilazane may comprise one or more amine groups, silanols, silyl ethers, sylil chlorides, dialkylamoinosilanes, silyl hydrides, and cyclic azasilanes. The active material may comprise a film with a thickness between 10 and 80 microns. The film may have a conductivity of 1 S/cm or more. The active material may comprise between 50% and 95% silicon. The active material may be held together by a pyrolyzed carbon film. The anode may comprise lithium, sodium, potassium, silicon, and/or mixtures and combinations thereof. The battery may comprise a lithium ion battery. The electrolyte may comprise a liquid, solid, or gel.

Abstract: Systems and methods for silosilazanes, silosiloxanes, and siloxanes as additives for silicon-dominant anodes in a battery that may include a cathode, an electrolyte, and an anode active material. The active material may comprise 50% or more silicon as well as an additive including one or more of: silosilazane, silicon oxycarbides, and polyorganosiloxane. The silosilazane may comprise one or more amine groups, silanols, silyl ethers, sylil chlorides, dialkylamoinosilanes, silyl hydrides, and cyclic azasilanes. The active material may comprise a film with a thickness between 10 and 80 microns. The film may have a conductivity of 1 S/cm or more. The active material may comprise between 50% and 95% silicon. The active material may be held together by a pyrolyzed carbon film. The anode may comprise lithium, sodium, potassium, silicon, and/or mixtures and combinations thereof. The battery may comprise a lithium ion battery. The electrolyte may comprise a liquid, solid, or gel.

Abstract: Systems and methods are provided for carbon additives for direct coating of silicon- dominant anodes. An example composition for use in directly coated anodes may include a silicon-dominated anode active material, a carbon-based binder, and a carbon-based additive, with the composition being configured for low-temperature pyrolysis. The low-temperature pyrolysis may be conducted at <600° C. An anode may be formed using a direct coating process of the composition on a current collector. The anode active material yields silicon constituting between 86% and 97% of weight of the formed anode after pyrolysis. The carbon-based additive yields carbon constituting between 2% and 6% of weight of the formed anode after pyrolysis.

Abstract: Systems and methods are provided for heat treatment of whole cell structures. A battery may be formed based on applying of heat treatment to a whole cell composition that includes, at least, both anode material and cathode material, such that the anode material and the cathode material are heat treated at the same time. The heat treatment may include pyrolysis. The whole cell composition, and the corresponding cell formed based thereon, may include solid state electrolyte.

Abstract: Systems and methods for configuring anisotropic expansion of silicon-dominant anodes using particle size may include a cathode, an electrolyte, and an anode, where the anode may include a current collector and an active material on the current collector. An expansion of the anode during operation may be configured by utilizing a predetermined particle size distribution of silicon particles in the active material. The expansion of the anode may be greater for smaller particle size distributions, which may range from 1 to 10 ?m. The expansion of the anode may be smaller for a rougher surface active material, which may be configured by utilizing larger particle size distributions that may range from 5 to 25 ?m. The expansion may be configured to be more anisotropic using more rigid materials for the current collector, where a more rigid current collector may comprise nickel and a less rigid current collector may comprise copper.

Abstract: Systems and methods for batteries comprising a cathode, an electrolyte, and an anode, wherein sacrificial salts and prelithiation reagents are added to the cathode as functional additives for electrochemical prelithiation.

Abstract: Systems and methods are provided for carbon additives for direct coating of silicon-dominant anodes. An example composition for use in directly coated anodes may include a silicon-dominated anode active material, a carbon-based binder, and a carbon-based additive, with the composition being configured for low-temperature pyrolysis. The low-temperature pyrolysis may be conducted at <850° C. An anode may be formed using a direct coating process of the composition on a current collector. The anode active material may yield silicon constituting between 90% and 95% of weight of the formed anode after pyrolysis. The carbon-based additive may yield carbon constituting between 2% and 6% of weight of the formed anode after pyrolysis. The carbon-based additive may include carbon particles with surface area >65 m2/g.

Abstract: Systems and methods are provided for carbon additives for direct coating of silicon-dominant anodes. An example composition for use in directly coated anodes may include a silicon-dominated anode active material, a carbon-based binder, and a carbon-based additive, with the composition being configured for low-temperature pyrolysis. The low-temperature pyrolysis may be conducted at <600° C. An anode may be formed using a direct coating process of the composition on a current collector. The anode active material yields silicon constituting between 86% and 97% of weight of the formed anode after pyrolysis. The carbon-based additive yields carbon constituting between 2% and 6% of weight of the formed anode after pyrolysis.