Abstract: An RF powered CO2 gas-discharge laser includes discharge electrodes and a lasing gas mixture between the electrode. The lasing gas mixture is ionized when the RF power is applied to the electrodes and laser action is initiated when the RF power has been applied for a duration sufficient to ignite a discharge in the lasing gas mixture. The gas mixture is pre-ionized by periodically applying the RF power to the electrodes for a predetermined period during which ignition of a discharge is not expected to occur. RF power reflected back from the electrodes is monitored. If the monitored power falls below a predetermined level indicative of the imminent onset of laser action before the predetermined duration has elapsed, application of the RF power to the electrodes is terminated to prevent the laser action from occurring.

Abstract: A pulse width modulation method for controlling the output power of a pulsed gas discharge laser powered by a pulsed RF power supply comprises delivering a train of digital pulses to the RF power supply. Each pulse in the train has an incrementally variable duration. The power supply is arranged to deliver a train of RF pulses corresponding in number and duration to the train of digital pulses received. The average power in the RF-pulse train can be varied by incrementally varying the duration of one or more of the digital pulses in the digital pulse train. The train of RF pulses is used to power a gas discharge laser. The gas discharge laser outputs a pulse train corresponding to the RF pulse train.

Abstract: A pulse width modulation method for controlling the output power of a pulsed gas discharge laser powered by a pulsed RF power supply comprises delivering a train of digital pulses to the RF power supply. Each pulse in the train has an incrementally variable duration. The power supply is arranged to deliver a train of RF pulses corresponding in number and duration to the train of digital pulses received. The average power in the RF-pulse train can be varied by incrementally varying the duration of one or more of the digital pulses in the digital pulse train. The train of RF pulses is used to power a gas discharge laser. The gas discharge laser outputs a pulse train corresponding to the RF pulse train.