Abstract: A nut has two parts, each having a section of an internal thread which is radially slidable onto an external thread. The nut parts have cooperating connecting elements which permit relative displacement in a direction extending radially with respect to the axis of the internal thread until reaching a use position in which the internal thread of the nut engages around the external thread with a small clearance. The connecting elements have guide surfaces which guide the nut parts in a rotational movement about an axis of rotation extending transversely to the axis of the internal thread when displaced into the use position. Each nut part has at least one first locking arm which has on one side a guide surface which induces the rotational movement when the nut parts are displaced and bears against a complementary guide surface on a second locking arm of the other nut part.

Abstract: The invention relates to a method for operating a machine for microlithography which has a multiplicity of machine components. According to one aspect, malfunctions of these machine components that occur during the operation of the machine are each describable by a symptom, wherein the method includes the following steps: creating a database in which a cause is in each case assigned to different combinations of these symptoms, automatically recording the symptoms occurring within a predetermined time interval when a problem occurs during the operation of the machine and automatically assigning a cause to the problem on the basis of the recorded symptoms and the database.

Abstract: The invention relates to a nut having an internal thread and two nut parts (1, 2), each of the nut parts (1, 2) having a section of the internal thread which is radially slidable onto an external thread (25), the nut parts (1, 2) having cooperating connecting elements which permit relative displacement of the nut parts (1, 2) in a direction extending radially with respect to the axis of the internal thread until reaching a use position in which the internal thread of the nut engages around the external thread (25) with a small clearance.

Abstract: The invention relates to a method for operating a machine for microlithography which has a multiplicity of machine components. According to one aspect, malfunctions of these machine components that occur during the operation of the machine are each describable by a symptom, wherein the method includes the following steps: creating a database in which a cause is in each case assigned to different combinations of these symptoms, automatically recording the symptoms occurring within a predetermined time interval when a problem occurs during the operation of the machine and automatically assigning a cause to the problem on the basis of the recorded symptoms and the database.

Abstract: An irradiation module for a measuring apparatus is provided. The irradiation module is light-conductive, is configured as a cohesive body and comprises a beam-splitting surface arranged within the irradiation module for splitting an incoming measuring beam into two partial beams. Furthermore, the irradiation module comprises an optical diffraction grating for interaction with a first of the two partial beams and a reflection surface for reflecting the second partial beam.

Abstract: A temperature sensor is provided which comprises a measurement light source for generating measurement light and two optical waveguides. The two optical waveguides are arranged such that they respectively receive a measurement light portion of the measurement light and that the measurement light portions are superimposed after passing through the optical waveguides. Furthermore, the two optical waveguides have an optical property with different temperature dependency.

Abstract: A portable handheld device for introducing an external profile into a longitudinal workpiece by noncutting shaping includes a locking element and a profiling tool having a pitchless profile disposed opposite the locking element and disposable at an adjustable angle as a function of a desired lead angle of the external profile within a force transmission plane, wherein the workpiece is disposable and removable between the profiling tool and the locking element, and wherein the profile tool and the locking element are configured to execute a feed movement relative to one another and to be adjustable to a neutral position.

Abstract: An irradiation module for a measuring apparatus is provided. The irradiation module is light-conductive, is configured as a cohesive body and comprises a beam-splitting surface arranged within the irradiation module for splitting an incoming measuring beam into two partial beams. Furthermore, the irradiation module comprises an optical diffraction grating for interaction with a first of the two partial beams and a reflection surface for reflecting the second partial beam.

Abstract: A temperature sensor is provided which comprises a measurement light source for generating measurement light and two optical waveguides. The two optical waveguides are arranged such that they respectively receive a measurement light portion of the measurement light and that the measurement light portions are superimposed after passing through the optical waveguides. Furthermore, the two optical waveguides have an optical property with different temperature dependency.

Abstract: The invention relates to a device for introducing a thread into a workpiece having a cylindrical outer surface by means of thread rolling, comprising a profiling tool (7) having a profile without pitch, wherein the axis of the profiling tool is at an angle or parallel to the axis of the workpiece, wherein the profiling tool (7) is formed by a circular disk (9) rotatably mounted about the axis (8) of the disk, on the outer edge of which disk two annular, coaxial profiles (10) without pitch protrude, wherein said profiles form an annular space therebetween that corresponds in shape and dimensions to the thread profile of the thread to be created.

Abstract: A portable handheld device for introducing an external profile into a longitudinal workpiece by noncutting shaping includes a locking element and a profiling tool having a pitchless profile disposed opposite the locking element and disposable at an adjustable angle as a function of a desired lead angle of the external profile within a force transmission plane, wherein the workpiece is disposable and removable between the profiling tool and the locking element, and wherein the profile tool and the locking element are configured to execute a feed movement relative to one another and to be adjustable to a neutral position.

Abstract: A nut includes an internal thread and at least two parts, each of the parts having a section of the internal thread which can be pushed onto an external thread in the radial direction. The parts may have connecting elements which interact and permit a relative displacement of the parts in a direction running radially to the axis of the internal thread into a position of use. The connecting elements may have guide surfaces which are inclined at an angle to the plane running radially to the axis of the internal thread and guide the parts in a rotational movement about an axis of rotation running transversely to the axis. A part may have a locking arm with a guide surface only on one side which produces the rotational movement during the displacement of the parts and bears against a complementary guide surface of the other part.

Abstract: The invention relates to a nut (300) having an internal thread and at least two parts (301), wherein each of the parts (301) has a section (302) of the internal thread, and said section (302) can be pushed onto an external thread (50) in the radial direction, and wherein the parts (301) have connecting elements which interact with one another and which permit a relative displacement of the parts (301) in a direction running radially to the axis of the internal thread right into a position of use in which the internal thread of the nut (300) encloses the external thread (50) with slight play, wherein the connecting elements have guide surfaces (303, 304) which are inclined at an angle to the plane running radially to the axis of the internal thread and which guide the parts (301) of the nut (300), during the displacement into the position of use, in a rotational movement about an axis of rotation running transversely to the axis of the internal thread.

Abstract: A method and apparatus for stabilizing the relative frequency offset between a laser and a resonant optical cavity is described. Detected spatial mode patterns excited in a coupled nearly confocal resonator are used to derive a correction signal for frequency offset. The method can be applied to stabilizing a diode-cavity pathlength for an optical feedback locked diode laser system.