Patents by Inventor Dino Faralli
Dino Faralli has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11417827Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.Type: GrantFiled: December 11, 2018Date of Patent: August 16, 2022Assignee: STMicroelectronics S.r.l.Inventors: Maria Fortuna Bevilacqua, Flavio Francesco Villa, Rossana Scaldaferri, Valeria Casuscelli, Andrea Di Matteo, Dino Faralli
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Publication number: 20220246832Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.Type: ApplicationFiled: April 18, 2022Publication date: August 4, 2022Applicant: STMicroelectronics S.r.l.Inventors: Maria Fortuna BEVILACQUA, Flavio Francesco VILLA, Rossana SCALDAFERRI, Valeria CASUSCELLI, Andrea DI MATTEO, Dino FARALLI
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Patent number: 11001061Abstract: Methods for manufacturing a microfluidic delivery device comprising a semiconductor structure, such as silicon, are provided. In particular, the structure for delivering fluid may be formed from polycrystalline silicon, also called polysilicon, or epitaxial silicon. The microfluidic delivery device that predominantly uses semiconductor material, such as silicon, to form the structures that are in contact with the dispensed fluid results in a device that is compatible with a wide set of fluids and applications.Type: GrantFiled: December 28, 2015Date of Patent: May 11, 2021Assignee: STMICROELECTRONICS S.R.L.Inventors: Dino Faralli, Laura Maria Castoldi, Paolo Ferrari, Marta Carminati
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Patent number: 10682645Abstract: A microfluidic-based sensor, comprising: a semiconductor body, having a first and a second side opposite to one another in a direction; a buried channel, extending within the semiconductor body; a structural layer, of dielectric or insulating material, formed over the first side of the semiconductor body at least partially suspended above the buried channel; and a first thermocouple element, including a first strip, of a first electrical conductive material, and a second strip, of a second electrical conductive material different from the first electrical conductive material, electrically coupled to the first strip. The first thermocouple element is buried in the structural layer and partially extends over the buried channel at a first location. A corresponding manufacturing method is disclosed.Type: GrantFiled: April 23, 2018Date of Patent: June 16, 2020Assignees: STMICROELECTRONICS S.R.L., STMICROELECTRONICS ASIA PACIFIC PTE LTDInventors: Praveen Kumar Radhakrishnan, Dino Faralli
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Publication number: 20190115524Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.Type: ApplicationFiled: December 11, 2018Publication date: April 18, 2019Applicant: STMicroelectronics S.r.l.Inventors: Maria Fortuna BEVILACQUA, Flavio Francesco VILLA, Rossana SCALDAFERRI, Valeria CASUSCELLI, Andrea DI MATTEO, Dino FARALLI
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Patent number: 10245834Abstract: A method for manufacturing a device for ejecting a fluid, including producing a nozzle plate including: forming a first nozzle cavity, having a first diameter, in a first semiconductor body; forming a hydrophilic layer at least in part in the first nozzle cavity; forming a structural layer on the hydrophilic layer; etching the structural layer to form a second nozzle cavity aligned to the first nozzle cavity in a fluid-ejection direction and having a second diameter larger than the first diameter; proceeding with etching of the structural layer for removing portions thereof in the first nozzle cavity, to reach the hydrophilic layer and arranged in fluid communication the first and second nozzle cavities; and coupling the nozzle plate with a chamber for containing the fluid.Type: GrantFiled: November 14, 2017Date of Patent: April 2, 2019Assignee: STMICROELECTRONICS S.R.L.Inventors: Mauro Cattaneo, Carlo Luigi Prelini, Lorenzo Colombo, Dino Faralli, Alessandra Sciutti, Lorenzo Tentori
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Patent number: 10186654Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.Type: GrantFiled: May 24, 2016Date of Patent: January 22, 2019Assignee: STMicroelectronics S.r.l.Inventors: Maria Fortuna Bevilacqua, Flavio Francesco Villa, Rossana Scaldaferri, Valeria Casuscelli, Andrea Di Matteo, Dino Faralli
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Publication number: 20180236447Abstract: A microfluidic-based sensor, comprising: a semiconductor body, having a first and a second side opposite to one another in a direction; a buried channel, extending within the semiconductor body; a structural layer, of dielectric or insulating material, formed over the first side of the semiconductor body at least partially suspended above the buried channel; and a first thermocouple element, including a first strip, of a first electrical conductive material, and a second strip, of a second electrical conductive material different from the first electrical conductive material, electrically coupled to the first strip. The first thermocouple element is buried in the structural layer and partially extends over the buried channel at a first location. A corresponding manufacturing method is disclosed.Type: ApplicationFiled: April 23, 2018Publication date: August 23, 2018Inventors: Praveen Kumar Radhakrishnan, Dino Faralli
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Patent number: 9976914Abstract: A microfluidic-based sensor, comprising: a semiconductor body, having a first and a second side opposite to one another in a direction; a buried channel, extending within the semiconductor body; a structural layer, of dielectric or insulating material, formed over the first side of the semiconductor body at least partially suspended above the buried channel; and a first thermocouple element, including a first strip, of a first electrical conductive material, and a second strip, of a second electrical conductive material different from the first electrical conductive material, electrically coupled to the first strip. The first thermocouple element is buried in the structural layer and partially extends over the buried channel at a first location. A corresponding manufacturing method is disclosed.Type: GrantFiled: June 18, 2014Date of Patent: May 22, 2018Assignees: STMICROELECTRONICS S.R.L., STMICROELECTRONICS ASIA PACIFIC PTE LTDInventors: Praveen Kumar Radhakrishnan, Dino Faralli
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Publication number: 20180065371Abstract: A method for manufacturing a device for ejecting a fluid, including producing a nozzle plate including: forming a first nozzle cavity, having a first diameter, in a first semiconductor body; forming a hydrophilic layer at least in part in the first nozzle cavity; forming a structural layer on the hydrophilic layer; etching the structural layer to form a second nozzle cavity aligned to the first nozzle cavity in a fluid-ejection direction and having a second diameter larger than the first diameter; proceeding with etching of the structural layer for removing portions thereof in the first nozzle cavity, to reach the hydrophilic layer and arranged in fluid communication the first and second nozzle cavities; and coupling the nozzle plate with a chamber for containing the fluid.Type: ApplicationFiled: November 14, 2017Publication date: March 8, 2018Inventors: Mauro Cattaneo, Carlo Luigi Prelini, Lorenzo Colombo, Dino Faralli, Alessandra Sciutti, Lorenzo Tentori
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Patent number: 9849674Abstract: A method for manufacturing a device for ejecting a fluid, including producing a nozzle plate including: forming a first nozzle cavity, having a first diameter, in a first semiconductor body; forming a hydrophilic layer at least in part in the first nozzle cavity; forming a structural layer on the hydrophilic layer; etching the structural layer to form a second nozzle cavity aligned to the first nozzle cavity in a fluid-ejection direction and having a second diameter larger than the first diameter; proceeding with etching of the structural layer for removing portions thereof in the first nozzle cavity, to reach the hydrophilic layer and arranged in fluid communication the first and second nozzle cavities; and coupling the nozzle plate with a chamber for containing the fluid.Type: GrantFiled: June 10, 2016Date of Patent: December 26, 2017Assignee: STMicroelectronics S.r.l.Inventors: Mauro Cattaneo, Carlo Luigi Prelini, Lorenzo Colombo, Dino Faralli, Alessandra Sciutti, Lorenzo Tentori
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Publication number: 20170203568Abstract: A nozzle plate for a fluid-ejection device, comprising: a first substrate made of semiconductor material, having a first side and a second side; a structural layer extending on the first side of the first substrate, the structural layer having a first side and a second side, the second side of the structural layer facing the first side of the first substrate; at least one first through hole, having an inner surface, extending through the structural layer, the first through hole having an inlet section corresponding to the first side of the structural layer and an outlet section corresponding to the second side of the structural layer; a narrowing element adjacent to the surface of the first through hole, and including a tapered portion such that the inlet section of the first through hole has an area larger than a respective area of the outlet section of the first through hole.Type: ApplicationFiled: October 24, 2014Publication date: July 20, 2017Inventors: Dino Faralli, Michele Palmieri
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Patent number: 9707761Abstract: A nozzle plate for a fluid-ejection device, comprising: a first substrate made of semiconductor material, having a first side and a second side; a structural layer extending on the first side of the first substrate, the structural layer having a first side and a second side, the second side of the structural layer facing the first side of the first substrate; at least one first through hole, having an inner surface, extending through the structural layer, the first through hole having an inlet section corresponding to the first side of the structural layer and an outlet section corresponding to the second side of the structural layer; a narrowing element adjacent to the surface of the first through hole, and including a tapered portion such that the inlet section of the first through hole has an area larger than a respective area of the outlet section of the first through hole.Type: GrantFiled: October 24, 2014Date of Patent: July 18, 2017Assignees: STMICROELECTRONICS S.R.L., STMICROELECTRONICS, INC.Inventors: Dino Faralli, Michele Palmieri
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Publication number: 20170186940Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.Type: ApplicationFiled: May 24, 2016Publication date: June 29, 2017Applicant: STMicroelectronics S.r.l.Inventors: Maria Fortuna Bevilacqua, Flavio Francesco Villa, Rossana Scaldaferri, Valeria Casuscelli, Andrea Di Matteo, Dino Faralli
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Publication number: 20170182778Abstract: A method for manufacturing a device for ejecting a fluid, including producing a nozzle plate including: forming a first nozzle cavity, having a first diameter, in a first semiconductor body; forming a hydrophilic layer at least in part in the first nozzle cavity; forming a structural layer on the hydrophilic layer; etching the structural layer to form a second nozzle cavity aligned to the first nozzle cavity in a fluid-ejection direction and having a second diameter larger than the first diameter; proceeding with etching of the structural layer for removing portions thereof in the first nozzle cavity, to reach the hydrophilic layer and arranged in fluid communication the first and second nozzle cavities; and coupling the nozzle plate with a chamber for containing the fluid.Type: ApplicationFiled: June 10, 2016Publication date: June 29, 2017Inventors: Mauro Cattaneo, Carlo Luigi Prelini, Lorenzo Colombo, Dino Faralli, Alessandra Sciutti, Lorenzo Tentori
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Patent number: 9568566Abstract: An integrated magnetoresistive sensor, formed in a chip including a substrate having a surface and an insulating region covering the surface of the substrate. A magnetoresistor, of a first ferromagnetic material, is formed in the insulating region and has a sensitivity plane parallel to the surface. A concentrator of a second ferromagnetic material is formed in the substrate and has at least one arm extending in a transverse direction to the sensitivity plane. The arm has one end in contact with the magnetoresistor.Type: GrantFiled: December 11, 2013Date of Patent: February 14, 2017Assignee: STMicroelectronics S.r.l.Inventors: Dario Paci, Dino Faralli, Andrea Picco
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Patent number: 9469109Abstract: Embodiments disclose herein are directed to a microfluidic delivery device that has a predominantly semiconductor structure, such as silicon. In particular, the structure for delivering fluid may be formed from polycrystalline silicon, also called polysilicon, or epitaxial silicon. The microfluidic delivery device that predominantly uses silicon based materials to form the structures that are in contact with the dispensed fluid results in a device that is compatible with a wide set of fluids and applications.Type: GrantFiled: November 3, 2014Date of Patent: October 18, 2016Assignee: STMicroelectronics S.r.l.Inventors: Dino Faralli, Laura Maria Castoldi, Paolo Ferrari, Marta Carminati
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Publication number: 20160121612Abstract: Embodiments disclose herein are directed to a microfluidic delivery device that has a predominantly semiconductor structure, such as silicon. In particular, the structure for delivering fluid may be formed from polycrystalline silicon, also called polysilicon, or epitaxial silicon. The microfluidic delivery device that predominantly uses silicon based materials to form the structures that are in contact with the dispensed fluid results in a device that is compatible with a wide set of fluids and applications.Type: ApplicationFiled: December 28, 2015Publication date: May 5, 2016Inventors: Dino Faralli, Laura Maria Castoldi, Paolo Ferrari, Marta Carminati
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Publication number: 20160121607Abstract: Embodiments disclose herein are directed to a microfluidic delivery device that has a predominantly semiconductor structure, such as silicon. In particular, the structure for delivering fluid may be formed from polycrystalline silicon, also called polysilicon, or epitaxial silicon. The microfluidic delivery device that predominantly uses silicon based materials to form the structures that are in contact with the dispensed fluid results in a device that is compatible with a wide set of fluids and applications.Type: ApplicationFiled: November 3, 2014Publication date: May 5, 2016Inventors: Dino FARALLI, Laura Maria CASTOLDI, Paolo FERRARI, Marta CARMINATI
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Patent number: 9321628Abstract: A MEMS device wherein a die of semiconductor material has a first face and a second face. A membrane is formed in or on the die and faces the first surface. A cap is fixed to the first face of the first die and is spaced apart from the membrane by a space. The die is fixed, on its second face, to an ASIC, which integrates a circuit for processing the signals generated by the die. The ASIC is in turn fixed on a support. A packaging region coats the die, the cap, and the ASIC and seals them from the outside environment. A fluidic path is formed through the support, the ASIC, and the first die, and connects the membrane and the first face of the die with the outside, without requiring holes in the cap.Type: GrantFiled: June 26, 2014Date of Patent: April 26, 2016Assignee: STMicroelectronics S.r.l.Inventors: Dino Faralli, Benedetto Vigna, Laura Maria Castoldi