Abstract: As inputs of a controller of a direct current (DC)-DC converter are sampled for a predetermined time and thus two-dimensional state information in which one axis is an input physical quantity and the other axis is a time is generated, the two-dimensional state information is processed by a convolutional neural network to determine and output one of a plurality of control signals. An artificial intelligence control part may operate in accordance with a plurality of operation conditions or dynamically determined operation conditions by applying different artificial intelligence engines according to operation modes.

Abstract: An EUV mask inspection device includes: an EUV light source for outputting EUV light with a wavelength ranging from 5 nm to 15 nm; a multilayer reflection zone plate having an EUV reflection multilayer film, which is a planar substrate, and a zone plate pattern; and an EUV lighting unit for creating EUV illumination light by obtaining 1st diffraction light reflected after radiating EUV light output from the EUV light source to the multilayer reflection zone plate. The EUV mask inspection device further includes: an aperture for providing monochromatic light or reducing a light radiation area by reducing a linewidth of optical wavelength radiated from the EUV lighting unit; a transmissive zone plate for forming expanded light by collecting reflected or scattered light after radiating light passing through the aperture to the EUV mask; and an image sensor for measuring intensity of light through EUV mask measured light.

Abstract: A high performance EUV microscope device with a freeform illumination system having an elliptical mirror, includes: an EUV source for outputting EUV light; a spherical mirror having a two-axis driving unit which receives and reflects the EUV light output from the EUV light source and controls a reflection direction of the incident light through two-axis angle scanning; an optical path changing means for receiving the reflected light reflected from the spherical mirror and providing illumination light to a target object to be measured; a zone plate lens for focusing the light reflected after entering the target object; and a photodetector for receiving the light focused by the zone plate lens.

Abstract: A high-performance EUV microscope with a free form illumination system, includes: an EUV light source that outputs EUV light; one spherical mirror, which receives and reflects the EUV light outputted from the EUV light source and includes a two-axis drive part for controlling reflection direction of incident light through two-axis angle scan; one plane mirror, which receives the reflected light reflected from the spherical mirror and provides illumination light to a measurement target, and in which a plurality of mirror cells are arranged at each angle; a zone plate lens for focusing measurement light, which is the illumination light formed through the plane mirror and incident on the measurement target and then reflected; and a photodetector for receiving the measurement light focused by the zone plate lens, wherein a reflection angle of the spherical mirror and a reflection angle of the plane mirror are selectively controlled, respectively.

Abstract: A display device includes a display panel including a plurality of pixels, and an image capturing unit disposed below the plurality of pixels, wherein, when the image capturing unit is driven, the display panel is time-divisionally driven by dividing one frame into a plurality of sub-frame sections, and the image capturing unit is synchronized with the display panel to receive different color data for each section of the plurality of sub-frame sections.

Abstract: An EUV lighting device for metrology and inspection of an EUV mask in an EUV exposure process of a semiconductor device manufacturing process includes: an EUV light source for outputting EUV light with a wavelength ranging from 5 nm to 15 nm; and a multilayer reflection zone plate having an EUV reflection multilayer film, which is a planar substrate, and a zone plate pattern. The EUV lighting device radiates EUV light output from the EUV light source to the multilayer reflection zone plate, acquires 1st diffraction light reflected, and creates EUV illumination light.

Abstract: An extreme ultraviolet (EUV) light source device for generating EUV light through a plasma reaction, includes: a focusing lens for focusing a laser beam generated from a laser source; a vacuum chamber for providing a vacuum environment to generate the laser beam focused on the focusing lens as the EUV light through the plasma reaction; a gas jet nozzle for supplying a plasma reaction gas to the laser beam focused on the focusing lens to generate the EUV light; and a gas supply part for supplying the plasma reaction gas to the gas jet nozzle from the outside.

Abstract: The present invention relates to an EUV light generation device including: a laser beam irradiated on a target material droplet; and a focusing mirror for focusing the EUV light generated through the plasma emitted by means of the irradiation of the laser beam on the droplet, wherein the focusing mirror has a concaved operating surface and a focusing point formed at a position facing the operating surface, and the laser beam and a focusing lens for focusing the laser beam are located at the positions facing the operating surface of the focusing mirror, so that the focusing point, the laser beam, and the focusing lens are located on the positions facing the operating surface, that is, on one side of the operating surface.

Abstract: The present invention relates to an EUV light generation device including: a laser beam irradiated on a target material droplet; and a focusing mirror for focusing the EUV light generated through the plasma emitted by means of the irradiation of the laser beam on the droplet, wherein the focusing mirror has a concaved operating surface and a focusing point formed at a position facing the operating surface, and the laser beam and a focusing lens for focusing the laser beam are located at the positions facing the operating surface of the focusing mirror, so that the focusing point, the laser beam, and the focusing lens are located on the positions facing the operating surface, that is, on one side of the operating surface.

Abstract: A display device and a mobile terminal including the same includes a display area in which a first group of display pixels to which pixel data is written are arranged, and a sensing area in which a second group of display pixels and a plurality of sensor pixels are arranged; each of the display pixels includes a pixel circuit configured to drive a light emitting element; each of the sensor pixels includes a photosensor driving circuit configured to drive a photodiode; a low potential power voltage and a pixel driving voltage are applied to the pixel circuit and the photosensor driving circuit; a cathode electrode of the light emitting element and the cathode electrode of the photodiode share the same metal electrode, and are commonly connected to a low potential power line to which the low potential power voltage is applied.

Abstract: A binder for a secondary battery includes a copolymer having a first repeating unit, a second repeating unit, and a third repeating unit. A ratio of a number of the first repeating unit (A) and a sum of a number of the second repeating unit and a number of the third repeating unit (B) is 90:10 to 52:48. A ratio of the number of the second repeating unit and the number of the third repeating unit is 67:33 to 1:99. A weight average molecular weight of the copolymer is 225,000 to 2,000,000.

Abstract: A manufacturing method includes the steps of: (a) preparing a lower layer member having a first base layer, a first protective thin film, and a first CNT thin film; (b) preparing a first upper layer member having a second base layer, a second protective thin film, and a second CNT thin film or a second upper layer member having a second base layer and a second protective thin film; (c) arranging the lower layer member above the first CNT thin film; (d) forming a group member by arranging the second CNT thin film of the first upper layer member or the second protective film of the second upper layer member to be stacked on the first CNT thin film; and € removing the second base layer from the group member.

Abstract: An EUV lighting device for metrology and inspection of an EUV mask in an EUV exposure process of a semiconductor device manufacturing process includes: an EUV light source for outputting EUV light with a wavelength ranging from 5 nm to 15 nm; and a multilayer reflection zone plate having an EUV reflection multilayer film, which is a planar substrate, and a zone plate pattern. The EUV lighting device radiates EUV light output from the EUV light source to the multilayer reflection zone plate, acquires 1st diffraction light reflected, and creates EUV illumination light.

Abstract: An electrolyte for a lithium secondary battery according to exemplary embodiments of the present inventing includes an organic solvent, a lithium salt, a first additive represented by a predetermined chemical formula, and a second additive represented by a predetermined chemical formula. A protective film is formed by the additives to suppress an expansion of a lithium secondary battery and improve storage property at high temperature.

Abstract: A binder for a secondary battery includes a copolymer having a first repeating unit, a second repeating unit, and a third repeating unit. A ratio of a number of the first repeating unit (A) and a sum of a number of the second repeating unit and a number of the third repeating unit (B) is 90:10 to 52:48. A ratio of the number of the second repeating unit and the number of the third repeating unit is 67:33 to 1:99. A weight average molecular weight of the copolymer is 225,000 to 2,000,000.

Abstract: Provided are a novel binder for a secondary battery including a copolymer containing specific repeating units, and a binder composition for a secondary battery including the binder for a secondary battery and a compound containing an amine group and a hydroxyl group. When the binder for a secondary battery or the binder composition for a secondary battery is applied to a negative electrode and a secondary battery, expansion of the negative electrode is effectively suppressed, and the charge/discharge cycle characteristics and the performance of the secondary battery are significantly improved. Furthermore, the binder for a secondary battery has improved coatability and adhesion to effectively suppress the exfoliation and desorption of the negative electrode, thereby improving the performance of the secondary battery.

Abstract: A display device includes a display panel including a plurality of pixels, and an image capturing unit disposed below the plurality of pixels, wherein, when the image capturing unit is driven, the display panel is time-divisionally driven by dividing one frame into a plurality of sub-frame sections, and the image capturing unit is synchronized with the display panel to receive different color data for each section of the plurality of sub-frame sections.

Abstract: An electrolyte for a lithium secondary battery according to exemplary embodiments of the present inventing includes an organic solvent, a lithium salt, a first additive represented by a predetermined chemical formula, and a second additive represented by a predetermined chemical formula. A protective film is formed by the additives to suppress an expansion of a lithium secondary battery and improve storage property at high temperature.

Abstract: Provided are a binder for a secondary battery, a negative electrode including the same, and a secondary battery including the same. More particularly, the binder for a secondary battery prepared by reacting a copolymer including specific repeating units and a crosslinking agent including two or more aldehyde groups has excellent mechanical properties and effectively improves a binding force. The negative electrode and the secondary battery including the binder for a secondary battery effectively suppress expansion of a negative electrode to manufacture a secondary battery having excellent charge/discharge cycle characteristics and battery performance.

Abstract: Provided are a binder composition for a secondary battery, a negative electrode including the same, and a secondary battery including the same. More particularly, the binder composition for a secondary battery having a three-dimensional structure, which is prepared by mixing a copolymer having specific repeating units and a polymer-type additive containing nitrogen (N) bonded to two or three carbons (C) in the repeating unit, has excellent mechanical properties and may effectively improve a binding force. The negative electrode and the secondary battery including the binder composition for a secondary battery effectively suppress expansion of a negative electrode to manufacture a secondary battery having excellent charge/discharge cycle characteristics and battery performance.