Patents by Inventor Durai Vishak Nirmal Ramaswamy

Durai Vishak Nirmal Ramaswamy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11856790
    Abstract: A method used in forming an electronic component comprising conductive material and ferroelectric material comprises forming a non-ferroelectric metal oxide-comprising insulator material over a substrate. A composite stack comprising at least two different composition non-ferroelectric metal oxides is formed over the substrate. The composite stack has an overall conductivity of at least 1×102 Siemens/cm. The composite stack is used to render the non-ferroelectric metal oxide-comprising insulator material to be ferroelectric. Conductive material is formed over the composite stack and the insulator material. Ferroelectric capacitors and ferroelectric field effect transistors independent of method of manufacture are also disclosed.
    Type: Grant
    Filed: November 30, 2022
    Date of Patent: December 26, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Ashonita A. Chavan, Durai Vishak Nirmal Ramaswamy, Manuj Nahar
  • Patent number: 11853552
    Abstract: The hybrid memory device may include volatile and non-volatile memory cells on a single substrate, or die. The non-volatile memory cells may have ferroelectric capacitors and the volatile memory cells may have paraelectric or linear dielectric capacitors for their respective logic storage components. In some examples, the volatile memory cells may be used as a cache for the non-volatile memory cells. Or the non-volatile memory cells may be used as a back-up for the volatile memory cells. By placing both types of cells on a single die, rather than separate dies, various performance metrics may be improved, including those related to power consumption and operation speed.
    Type: Grant
    Filed: July 13, 2021
    Date of Patent: December 26, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Kevin J. Ryan, Kirk D. Prall, Durai Vishak Nirmal Ramaswamy, Robert Quinn
  • Publication number: 20230402082
    Abstract: A field effect transistor construction includes a semiconductive channel core. A source/drain region is at opposite ends of the channel core. A gate is proximate a periphery of the channel core. A gate insulator is between the gate and the channel core. The gate insulator has local regions radially there-through that have different capacitance at different circumferential locations relative to the channel core periphery. Additional constructions, and methods, are disclosed.
    Type: Application
    Filed: August 21, 2023
    Publication date: December 14, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Chandra Mouli, Durai Vishak Nirmal Ramaswamy, F. Daniel Gealy
  • Publication number: 20230403867
    Abstract: A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually comprise a transistor and a capacitor. The capacitor comprises a first electrode electrically coupled to a source/drain region of the transistor. The first electrode comprises an annulus in a straight-line horizontal cross-section and a capacitor insulator radially inward of the first electrode annulus. A second electrode is radially inward of the capacitor insulator. A capacitor-electrode structure extends elevationally through the vertically-alternating tiers. Individual of the second electrodes of individual of the capacitors are electrically coupled to the elevationally-extending capacitor-electrode structure. A sense line is electrically coupled to another source/drain region of multiple of the transistors that are in different memory-cell tiers. Additional embodiments and aspects are disclosed, including methods.
    Type: Application
    Filed: August 28, 2023
    Publication date: December 14, 2023
    Applicant: Micron Technology, Inc.
    Inventor: Durai Vishak Nirmal Ramaswamy
  • Patent number: 11843055
    Abstract: A transistor comprising threshold voltage control gates. The transistor also comprises active control gates adjacent opposing first sides of a channel region, the threshold voltage control gates adjacent opposing second sides of the channel region, and a dielectric region between the threshold voltage control gates and the channel region and between the active control gates and the channel region. A semiconductor device comprising memory cells comprising the transistor is also disclosed, as are systems comprising the memory cells, methods of forming the semiconductor device, and methods of operating a semiconductor device.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: December 12, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Kirk D. Prall, Haitao Liu, Durai Vishak Nirmal Ramaswamy
  • Publication number: 20230397431
    Abstract: Methods, systems, and devices for formation for memory cells are described. A semiconductor device (e.g., a memory die) may include asymmetrical rows of conductive pillars and one or more dielectric materials. For example, the memory die may include a set of conductive pillars that are arranged in rows that are asymmetrically spaced. Here, a first row of conductive pillars may be a first distance away from a second row of conductive pillars and a second, larger distance away from a third row of conductive pillars. Additionally, the memory die may include one or more dielectric materials. In some cases, when depositing a dielectric material as part of a self-aligning process, the material may conformally line exposed surfaces according to a substantially uniform depth, which may decrease a subsequent quantity of masking operations to form the memory die.
    Type: Application
    Filed: June 1, 2023
    Publication date: December 7, 2023
    Inventors: Giorgio Servalli, Durai Vishak Nirmal Ramaswamy, Marcello Mariani
  • Patent number: 11839073
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a memory cell, first, second, and third data lines, and first and second access lines. Each of the first, second, and third data lines includes a length extending in a first direction. Each of the first and second access lines includes a length extending in a second direction. The memory cell includes a first transistor including a charge storage structure, and a first channel region electrically separated from the charge storage structure, and a second transistor including a second channel region electrically coupled to the charge storage structure. The first data line is electrically coupled to the first channel region. The second data line is electrically coupled to the first channel region. The third data line is electrically coupled to the second channel region, the second channel region being between the charge storage structure and the third data line.
    Type: Grant
    Filed: October 6, 2022
    Date of Patent: December 5, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Srinivas Pulugurtha, Durai Vishak Nirmal Ramaswamy
  • Patent number: 11832454
    Abstract: Some embodiments include an integrated assembly having a first semiconductor material between two regions of a second semiconductor material. The second semiconductor material is a different composition than the first semiconductor material. Hydrogen is diffused within the first and second semiconductor materials. The conductivity of the second semiconductor material increases in response to the hydrogen diffused therein to thereby create a structure having the second semiconductor material as source/drain regions, and having the first semiconductor material as a channel region between the source/drain regions. A transistor gate is adjacent the channel region and is configured to induce an electric field within the channel region. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: August 6, 2021
    Date of Patent: November 28, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Yi Fang Lee, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Ramanathan Gandhi, Karthik Sarpatwari, Scott E. Sills, Sameer Chhajed
  • Patent number: 11825662
    Abstract: A ferroelectric capacitor comprises two conductive capacitor electrodes having ferroelectric material there-between. At least one of the capacitor electrodes comprise MxSiOy, where “M” is at least one of Ru, Ti, Ta, Co, Pt, Ir, Os, Mo, V, W, Sr, Re, Rh, Pd, La, Zn, In, Sig, and Nb, Other aspects, including method, are disclosed.
    Type: Grant
    Filed: July 16, 2021
    Date of Patent: November 21, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Clement Jacob, Vassil N. Antonov, Jaydeb Goswami, Albert Liao, Christopher W. Petz, Durai Vishak Nirmal Ramaswamy
  • Publication number: 20230361118
    Abstract: A microelectronic device comprises vertical inverter comprising a pillar structure vertically extending above a first conductive line. The pillar structure comprises a first vertical transistor vertically overlying and in electrical communication with the first conductive line, a second conductive line vertically overlying the first conductive line and electrically isolated from the first conductive line by a dielectric material, the second conductive line configured to be coupled to a ground structure, a second vertical transistor horizontally neighboring the first vertical transistor and in electrical communication with the second conductive line, the second vertical transistor horizontally spaced from the first vertical transistor by the dielectric material, and at least one electrode horizontally extending along a channel region of the first vertical transistor and an additional channel region of the second vertical transistor. Related microelectronic devices and electronic systems are also described.
    Type: Application
    Filed: May 4, 2022
    Publication date: November 9, 2023
    Inventors: Kamal M. Karda, Durai Vishak Nirmal Ramaswamy, Karthik Sarpatwari, Haitao Liu
  • Patent number: 11791391
    Abstract: An inverter includes a transistor, an additional transistor overlying the transistor, and a hybrid gate electrode interposed between and shared by the transistor and the additional transistor. The hybrid gate electrode includes a region overlying a channel structure of the transistor, an additional region overlying the region and underlying an additional channel structure of the additional transistor, and further region interposed between the region and the additional region. The region has a first material composition. The additional region has a second material composition different than the first material composition of the region. Memory devices and electronic systems are also described.
    Type: Grant
    Filed: March 18, 2022
    Date of Patent: October 17, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Karthik Sarpatwari, Richard E. Fackenthal
  • Patent number: 11778838
    Abstract: A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually comprise a transistor and a capacitor. The capacitor comprises a first electrode electrically coupled to a source/drain region of the transistor. The first electrode comprises an annulus in a straight-line horizontal cross-section and a capacitor insulator radially inward of the first electrode annulus. A second electrode is radially inward of the capacitor insulator. A capacitor-electrode structure extends elevationally through the vertically-alternating tiers. Individual of the second electrodes of individual of the capacitors are electrically coupled to the elevationally-extending capacitor-electrode structure. A sense line is electrically coupled to another source/drain region of multiple of the transistors that are in different memory-cell tiers. Additional embodiments and aspects are disclosed, including methods.
    Type: Grant
    Filed: July 18, 2022
    Date of Patent: October 3, 2023
    Assignee: Micron Technology, Inc.
    Inventor: Durai Vishak Nirmal Ramaswamy
  • Patent number: 11776907
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a data line, a memory cell coupled to the data line, a ground connection, and a conductive line. The memory cell includes a first transistor and a second transistor. The first transistor includes a first region electrically coupled to the data line, and a charge storage structure electrically separated from the first region. The second transistor includes a second region electrically coupled to the charge storage structure and the data line. The ground connection is coupled to the first region of the first transistor. The conductive line is electrically separated from the first and second regions and spans across part of the first region of the first transistor and part of the second region of the second transistor and forming a gate of the first and second transistors.
    Type: Grant
    Filed: August 26, 2020
    Date of Patent: October 3, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Karthik Sarpatwari, Haitao Liu, Durai Vishak Nirmal Ramaswamy
  • Patent number: 11778806
    Abstract: Some embodiments include apparatuses and methods of operating such apparatuses. One of such apparatuses includes a data line, a conductive region, and a memory cell including a first transistor and a second transistor. The first transistor includes a first channel region coupled to the data line and the conductive region, a charge storage structure, and a first gate. The second transistor includes a second channel region coupled to the data line and the charge storage structure, and a second gate. The first gate is electrically separated from the second gate and opposite from the second gate in a direction from the first channel region to the second channel region.
    Type: Grant
    Filed: July 29, 2021
    Date of Patent: October 3, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Eric S. Carman, Durai Vishak Nirmal Ramaswamy, Richard E Fackenthal, Kamal M. Karda, Karthik Sarpatwari, Haitao Liu, Duane R. Mills, Christian Caillat
  • Patent number: 11769542
    Abstract: A field effect transistor construction includes a semiconductive channel core. A source/drain region is at opposite ends of the channel core. A gate is proximate a periphery of the channel core. A gate insulator is between the gate and the channel core. The gate insulator has local regions radially there-through that have different capacitance at different circumferential locations relative to the channel core periphery. Additional constructions, and methods, are disclosed.
    Type: Grant
    Filed: October 14, 2021
    Date of Patent: September 26, 2023
    Assignee: Micron Technology, Inc
    Inventors: Kamal M. Karda, Chandra Mouli, Durai Vishak Nirmal Ramaswamy, F. Daniel Gealy
  • Publication number: 20230299163
    Abstract: An inverter includes a transistor, an additional transistor overlying the transistor, and a hybrid gate electrode interposed between and shared by the transistor and the additional transistor. The hybrid gate electrode includes a region overlying a channel structure of the transistor, an additional region overlying the region and underlying an additional channel structure of the additional transistor, and further region interposed between the region and the additional region. The region has a first material composition. The additional region has a second material composition different than the first material composition of the region. Memory devices and electronic systems are also described.
    Type: Application
    Filed: March 18, 2022
    Publication date: September 21, 2023
    Inventors: Kamal M. Karda, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Karthik Sarpatwari, Richard E. Fackenthal
  • Publication number: 20230298652
    Abstract: Some embodiments include apparatuses in which one of such apparatus includes a first memory cell including a first transistor having a first channel region coupled between a data line and a conductive region, and a first charge storage structure located between the first data line and the conductive region, and a second transistor having a second channel region coupled to and located between the first data line and the first charge storage structure; a second memory cell including a third transistor having a third channel region coupled between a second data line and the conductive region, and a second charge storage structure located between the second data line and the conductive region, and a fourth transistor having a fourth channel region coupled to and located between the second data line and the second charge storage structure; a conductive line forming a gate of each of the first, second, third, and fourth transistors; and a conductive structure located between the first and second charge storage stru
    Type: Application
    Filed: May 23, 2023
    Publication date: September 21, 2023
    Inventors: Kamal M. Karda, Haitao Liu, Karthik Sarpatwari, Durai Vishak Nirmal Ramaswamy, Alessandro Calderoni, Richard E. Fackenthal, Duane R. Mills
  • Publication number: 20230269922
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a substrate, a conductive plate located over the substrate to couple a ground connection, a data line located between the substrate and the conductive plate, a memory cell, and a conductive line. The memory cell includes a first transistor and a second transistor. The first transistor includes a first region electrically coupled between the data line and the conductive plate, and a charge storage structure electrically separated from the first region. The second transistor includes a second region electrically coupled to the charge storage structure and the data line. The conductive line is electrically separated from the first and second regions and spans across part of the first region of the first transistor and part of the second region of the second transistor and forming a gate of the first and second transistors.
    Type: Application
    Filed: April 28, 2023
    Publication date: August 24, 2023
    Inventors: Kamal M. Karda, Karthik Sarpatwari, Haitao Liu, Durai Vishak Nirmal Ramaswamy
  • Patent number: 11735416
    Abstract: A method includes forming a first amorphous material, forming a second amorphous material over and in contact with the first material, removing a portion of the second material and the first material to form pillars, and exposing the materials to a temperature between a crystallization temperature of the first material and a crystallization temperature of the second material. The first material and the second material each comprise at least one element selected from the group consisting of silicon and germanium. The second material exhibits a crystallization temperature different than a crystallization temperature of the first material. Semiconductor structures, memory devices, and systems are also disclosed.
    Type: Grant
    Filed: September 21, 2020
    Date of Patent: August 22, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Ashonita A. Chavan, Durai Vishak Nirmal Ramaswamy, Michael Mutch, Sameer Chhajed
  • Publication number: 20230262954
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a conductive region, a first data line, a second data line, a first memory cell coupled to the first data line and the conductive region, a second memory cell coupled to the second data line and the conductive region, a conductive structure, and a conductive line. The first memory cell includes a first transistor coupled to a second transistor, the first transistor including a first charge storage structure. The second memory cell includes a third transistor coupled to a fourth transistor, the third transistor including a second charge storage structure. The conductive structure is located between and electrically separated from the first and second charge storage structures. The conductive line forms a gate of each of the first, second, third, and fourth transistors.
    Type: Application
    Filed: April 21, 2023
    Publication date: August 17, 2023
    Inventors: Kamal M. Karda, Haitao Liu, Karthik Sarpatwari, Durai Vishak Nirmal Ramaswamy