Abstract: A plug valve for controlling flow through high-pressure fluid flow lines has a valve chamber and a rotatable valve body. The chamber has an undercut. First and second valve seat inserts are mounted in the chamber undercut. The valve body has a midsection, a flow port extending through the midsection, a passage extending between an upper surface and a lower surface of the midsection, an upper valve stem extending from the midsection upper surface, and a lower valve stem extending from the midsection lower surface. The upper surfaces of the valve body exposed to internal fluid pressure and lower surfaces of the valve body exposed to internal fluid pressure have substantially equal surface areas. First and second plug seal rings having substantially equal diameters are mounted, respectively around the upper valve stem and the lower valve stem.

Abstract: An anti-vibration mount has a base with a cavity. A core extends through the cavity and is coupled at its lower end to the base. A connector is threaded to the core and couples a part subject to vibration to the mount. The base cavity and the core define a receptacle extending around the core. A lower portion of the receptacle is substantially filled with lead. A bushing is carried in the upper portion of the receptacle around the core and bears on the lead. The upper surface of the bushing is elevated above the top surface of the base and bears the load of the part. A resilient body is carried around the connecter and, when the part is coupled to the mount, between the part and a connector head.

Abstract: A swivel flange fitting for a high-pressure flow line has a fitting body, a hub, and a rotatable flange. The fitting body has a central conduit with internal threads proximate to a terminus of the central conduit. The hub is threaded into the fitting body. The hub has a central conduit, a portion having a nominal outer diameter, and an end. The portion has external threads engaging the fitting body internal threads. The end has an enlarged outer diameter relative to the nominal outer diameter, a flange-type union face, and an inward-facing shoulder. The rotatable flange has a central passage having an outward-facing shoulder and a plurality of openings adapted to accommodate threaded connectors for applying axial load to the flange. The flange outward-facing shoulder is adapted to bear on the hub inward-facing shoulder to transmit axial load applied to the flange from the flange to the hub.

Abstract: Swivel joints comprise a male sub, a female sub, annular races, ball bearings, a replaceable sleeve, and first and second pressure seals. The male sub is rotationally coupled to the female sub at, respective, generally tubular joint ends thereof. A passage extends through the subs. The female joint end and male joint end are rotationally coupled by ball bearings in the annular races. The replaceable sleeve is received in enlarged inner diameter portions of the male joint end and the female joint end. The first pressure seal ring is mounted between the replaceable sleeve and the enlarged diameter portion of the male joint end. The second pressure seal ring is mounted between the replaceable sleeve and the enlarged diameter portion of the female joint end.

Abstract: Flapper valves may be provided with flapper assemblies. The flapper assemblies comprise a bracket, a flapper, a bearing, and a pin. The bracket has a pair of knuckles with a bore extending through the knuckles. The flapper has a knuckle with a bore. The bearing is mounted in the flapper knuckle bore and has a bore extending through it. The pin extends through the bores in the bracket knuckles and the bearing bore. The pin and the bracket are locked to each other. Clearance between the pin and the bearing bore allows relative rotation between the flapper and the pin. The flapper thus is mounted to the bracket for pivoting movement between a closed position, in which the flapper is adapted to bear on a seat in the flapper valve, and an open position, in which the flapper is adapted to pivot away from the seat.

Abstract: Methods and systems for controlling temperatures in plasma processing chamber with reduced controller response times and increased stability. Temperature control is based at least in part on a feedforward control signal derived from a plasma power input into the processing chamber. A feedforward control signal compensating disturbances in the temperature attributable to the plasma power may be combined with a feedback control signal counteracting error between a measured and desired temperature.

Abstract: A union joins male and female subs of two flowline components. The male sub includes a male end of one component, a retainer collar, and a union nut. An annular boss extends around a union face of the male end and provides a rearward-facing shoulder. The retainer collar is carried on the male end and has a forward-facing shoulder and a rearward-facing shoulder. The collar forward-facing shoulder bears on the male end rearward-facing shoulder. The female sub includes a threaded female end of the other component. The nut is carried on the male end around the collar and threads onto the female end. It also has a forward-facing shoulder which bears on the collar rearward-facing shoulder. The nut forward-facing shoulder and the collar rearward-facing shoulder are beveled. Thus, load from the nut is transmitted through the collar axially to the annular boss and radially inward to the male end.

Abstract: Swivel joints comprise a male sub, a female sub, annular races, ball bearings, a replaceable sleeve, and first and second pressure seals. The male sub is rotationally coupled to the female sub at, respective, generally tubular joint ends thereof. A passage extends through the subs. The female joint end and male joint end are rotationally coupled by ball bearings in the annular races. The replaceable sleeve is received in enlarged inner diameter portions of the male joint end and the female joint end. The first pressure seal ring is mounted between the replaceable sleeve and the enlarged diameter portion of the male joint end. The second pressure seal ring is mounted between the replaceable sleeve and the enlarged diameter portion of the female joint end.

Abstract: Flapper valves may be provided in fluid transportation systems. The flapper valves comprise a body adapted for assembly into the system. The body comprises a first sub and a second sub which are removably assembled to each other. A passage is defined in the body which extends through the first and second subs. A seat is removably mounted in the passage. The seat is accessible by disassembling the first sub and the second sub. The valve also has a service port. A cap removably closes the port. A flapper is removably a mounted within the service port for pivoting movement between a closed position and an open position. In the closed position the flapper shuts off back flow through the passage. In the open position, the flapper allows fluid flow through the valve. The flapper is accessible by removing the cap from the service port.

Abstract: Flapper valves may be provided in fluid transportation systems. The flapper valves comprise a body adapted for assembly into the system. The body comprises a first sub and a second sub which are removably assembled to each other. A passage is defined in the body which extends through the first and second subs. A seat is removably mounted in the passage. The seat is accessible by disassembling the first sub and the second sub. The valve also has a service port. A cap removably closes the port. A flapper is removably a mounted within the service port for pivoting movement between a closed position and an open position. In the closed position the flapper shuts off back flow through the passage. In the open position, the flapper allows fluid flow through the valve. The flapper is accessible by removing the cap from the service port.

Abstract: A union joins male and female subs of two flowline components. The male sub includes a male end of one component, a retainer collar, and a union nut. An annular boss extends around a union face of the male end and provides a rearward-facing shoulder. The retainer collar is carried on the male end and has a forward-facing shoulder and a rearward-facing shoulder. The collar forward-facing shoulder bears on the male end rearward-facing shoulder. The female sub includes a threaded female end of the other component. The nut is carried on the male end around the collar and threads onto the female end. It also has a forward-facing shoulder which bears on the collar rearward-facing shoulder. The nut forward-facing shoulder and the collar rearward-facing shoulder are beveled. Thus, load from the nut is transmitted through the collar axially to the annular boss and radially inward to the male end.

Abstract: Methods and systems for controlling temperatures in plasma processing chamber for a wide range of setpoint temperatures and reduced energy consumption. Temperature control is coordinated between a coolant liquid loop and a heat source by a control algorithm implemented by the plasma processing module controller. The control algorithm may completely stop the flow of coolant liquid to a temperature-controlled component in response to a feedback signal indicating an actual temperature is below the setpoint temperature. The control algorithm may further be based at least in part on a feedforward control signal derived from a plasma power or change in plasma power input into the processing chamber during process recipe execution.

Abstract: Methods and systems for controlling temperatures in plasma processing chamber with reduced controller response times and increased stability. Temperature control is based at least in part on a feedforward control signal derived from a plasma power input into the processing chamber. A feedforward control signal compensating disturbances in the temperature attributable to the plasma power may be combined with a feedback control signal counteracting error between a measured and desired temperature.

Abstract: Methods and systems for controlling temperatures in plasma processing chamber with reduced controller response times and increased stability. Temperature control is based at least in part on a feedforward control signal derived from a plasma power input into the processing chamber. A feedforward control signal compensating disturbances in the temperature attributable to the plasma power may be combined with a feedback control signal counteracting error between a measured and desired temperature.

Abstract: Methods and systems for controlling temperatures in plasma processing chamber via pulsed application of heating power and pulsed application of cooling power. In an embodiment, temperature control is based at least in part on a feedforward control signal derived from a plasma power input into the processing chamber. In further embodiments, fluid levels in each of a hot and cold reservoir coupled to the temperature controlled component are maintained in part by a passive leveling pipe coupling the two reservoirs. In another embodiment, digital heat transfer fluid flow control valves are opened with pulse widths dependent on a heating/cooling duty cycle value and a proportioning cycle having a duration that has been found to provide good temperature control performance.

Abstract: Methods and systems for controlling temperatures in plasma processing chamber via pulsed application of heating power and pulsed application of cooling power. In an embodiment, temperature control is based at least in part on a feedforward control signal derived from a plasma power input into the processing chamber. In further embodiments, fluid levels in each of a hot and cold reservoir coupled to the temperature controlled component are maintained in part by a passive leveling pipe coupling the two reservoirs. In another embodiment, digital heat transfer fluid flow control valves are opened with pulse widths dependent on a heating/cooling duty cycle value and a proportioning cycle having a duration that has been found to provide good temperature control performance.

Abstract: Methods and systems for controlling temperatures in plasma processing chamber for a wide range of setpoint temperatures and reduced energy consumption. Temperature control is coordinated between a coolant liquid loop and a heat source by a control algorithm implemented by the plasma processing module controller. The control algorithm may completely stop the flow of coolant liquid to a temperature-controlled component in response to a feedback signal indicating an actual temperature is below the setpoint temperature. The control algorithm may further be based at least in part on a feedforward control signal derived from a plasma power or change in plasma power input into the processing chamber during process recipe execution.

Abstract: Methods for processing a substrate are provided herein. In some embodiments, a method of etching a dielectric layer includes generating a plasma by pulsing a first RF source signal having a first duty cycle; applying a second RF bias signal having a second duty cycle to the plasma; applying a third RF bias signal having a third duty cycle to the plasma, wherein the first, second, and third signals are synchronized; adjusting a phase variance between the first RF source signal and at least one of the second or third RF bias signals to control at least one of plasma ion density non-uniformity in the plasma or charge build-up on the dielectric layer; and etching the dielectric layer with the plasma.

Abstract: Methods and systems for controlling temperatures in plasma processing chamber via pulsed application of heating power and pulsed application of cooling power. In an embodiment, temperature control is based at least in part on a feedforward control signal derived from a plasma power input into the processing chamber. In further embodiments, fluid levels in each of a hot and cold reservoir coupled to the temperature controlled component are maintained in part by a passive leveling pipe coupling the two reservoirs. In another embodiment, digital heat transfer fluid flow control valves are opened with pulse widths dependent on a heating/cooling duty cycle value and a proportioning cycle having a duration that has been found to provide good temperature control performance.

Abstract: Methods and systems for controlling temperatures in plasma processing chamber for a wide range of setpoint temperatures and reduced energy consumption. Temperature control is coordinated between a coolant liquid loop and a heat source by a control algorithm implemented by the plasma processing module controller. The control algorithm may completely stop the flow of coolant liquid to a temperature-controlled component in response to a feedback signal indicating an actual temperature is below the setpoint temperature. The control algorithm may further be based at least in part on a feedforward control signal derived from a plasma power or change in plasma power input into the processing chamber during process recipe execution.