Patents by Inventor Duy K. Lehuu

Duy K. Lehuu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10071459
    Abstract: A multi-layered polishing pad arrangement includes a first polishing pad layer having a first top and a first bottom major surface, a second polishing pad layer having a second top and a second bottom major surface, and a coupling arrangement disposed between the first bottom surface and the second top surface. The thickness of each of the first and second polishing pad layer ranges between 0.125 mm and 10 mm.
    Type: Grant
    Filed: September 23, 2014
    Date of Patent: September 11, 2018
    Assignee: 3M Innovative Properties Company
    Inventors: Paul S Lugg, Duy K Lehuu
  • Patent number: 9956664
    Abstract: An abrasive element precursor includes a green body ceramic element having a first major surface, a second major surface, a plurality of inorganic particles, and a binder. At least the first major surface comprises a plurality of precisely shaped features. The plurality of inorganic particles is at least about 99% carbide ceramic by weight.
    Type: Grant
    Filed: July 31, 2013
    Date of Patent: May 1, 2018
    Assignee: 3M Innovative Properties Company
    Inventors: Duy K. Lehuu, Noah O. Shanti, Junqing Xie, Kathryn R. Bretscher, Vincent W. Nehring
  • Publication number: 20170182629
    Abstract: The present disclosure relates to polishing pads which include a polishing layer, wherein the polishing layer includes a working surface and a second surface opposite the working surface. The working surface includes a plurality of precisely shaped pores, a plurality of precisely shaped asperities and a land region. The present disclosure further relates to a polishing system, the polishing system includes the preceding polishing pad and a polishing solution. The present disclosure relates to a method of polishing a substrate, the method of polishing including: providing a polishing pad according to any one of the previous polishing pads; providing a substrate, contacting the working surface of the polishing pad with the substrate surface, moving the polishing pad and the substrate relative to one another while maintaining contact between the working surface of the polishing pad and the substrate surface, wherein polishing is conducted in the presence of a polishing solution.
    Type: Application
    Filed: March 31, 2015
    Publication date: June 29, 2017
    Inventors: Duy K. Lehuu, Kenneth A.P. Meyer, Moses M. David
  • Publication number: 20170173758
    Abstract: The present disclosure relates to polishing pads which include a polishing layer, wherein the polishing layer includes a working surface and a second surface opposite the working surface. The working surface includes at least one of a plurality of precisely shaped pores and a plurality of precisely shaped asperities. The present disclosure further relates to a polishing system, the polishing system includes the preceding polishing pad and a polishing solution. The present disclosure relates to a method of polishing a substrate, the method of polishing including: providing a polishing pad according to any one of the previous polishing pads; providing a substrate, contacting the working surface of the polishing pad with the substrate surface, moving the polishing pad and the substrate relative to one another while maintaining contact between the working surface of the polishing pad and the substrate surface, wherein polishing is conducted in the presence of a polishing solution.
    Type: Application
    Filed: March 31, 2015
    Publication date: June 22, 2017
    Applicant: 3M INNOVATIVE PROPERTIES COMPANY
    Inventors: Duy K. Lehuu, Kenneth A.P. Meyer, Moses M. David
  • Publication number: 20160229023
    Abstract: A multi-layered polishing pad arrangement includes a first polishing pad layer having a first top and a first bottom major surface, a second polishing pad layer having a second top and a second bottom major surface, and a coupling arrangement disposed between the first bottom surface and the second top surface. The thickness of each of the first and second polishing pad layer ranges between 0.125 mm and 10 mm.
    Type: Application
    Filed: September 23, 2014
    Publication date: August 11, 2016
    Applicant: 3M Innovative Properties Company
    Inventors: Paul S Lugg, Duy K Lehuu
  • Publication number: 20160221146
    Abstract: A polishing solution includes a fluid component and a plurality of ceramic abrasive composites. The ceramic abrasive composites include individual abrasive particles uniformly dispersed throughout a porous ceramic matrix. At least a portion of the porous ceramic matrix includes glassy ceramic material. The ceramic abrasive composites are dispersed in the fluid component.
    Type: Application
    Filed: September 22, 2014
    Publication date: August 4, 2016
    Applicant: 3M Innovative Properties Company
    Inventors: Paul S Lugg, Duy K Lehuu
  • Publication number: 20150224625
    Abstract: An abrasive element includes a first major surface and a second major surface. At least the first major surface includes a plurality of precisely shaped features. The abrasive element includes at least about 99% of carbide ceramic by weight and has a porosity of less than about 5%.
    Type: Application
    Filed: July 31, 2013
    Publication date: August 13, 2015
    Inventors: Duy K. Lehuu, Noah O. Shanti, Junqing Xie, Kathryn R. Bretscher, Vincent W. Nehring
  • Publication number: 20150209932
    Abstract: An abrasive article includes a first abrasive element, a second abrasive element, a resilient element having first and second major surfaces, and a carrier. The first element and the second abrasive element each comprises a first major surface and a second major surface. At least the first major surfaces of the first and second abrasive elements comprise a plurality of precisely shaped features. The abrasive elements comprise substantially inorganic, monolithic structures.
    Type: Application
    Filed: July 31, 2013
    Publication date: July 30, 2015
    Inventors: Duy K. Lehuu, Noah O. Shanti, Junqing Xie, Kathryn R. Bretscher
  • Publication number: 20150209933
    Abstract: An abrasive element precursor includes a green body ceramic element having a first major surface, a second major surface, a plurality of inorganic particles, and a binder. At least the first major surface comprises a plurality of precisely shaped features. The plurality of inorganic particles is at least about 99% carbide ceramic by weight.
    Type: Application
    Filed: July 31, 2013
    Publication date: July 30, 2015
    Inventors: Duy K. Lehuu, Noah O. Shanti, Junqing Xie, Kathryn R. Bretscher, Vincent W. Nehring