Patents by Inventor E. Terry Lisi

E. Terry Lisi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for polishing a substrate
    Patent number: 6241591
    Abstract: In one embodiment, a polishing apparatus (10) includes a retaining ring (12), a pressure ring (16), a first seal (18), and a second seal (20). The retaining ring (12) is movably attached to the pressure ring (16) to create a uniform pressure distribution across the retaining ring (12). In addition a positive fluid pressure is applied to the first seal (18) and the second seal (20) to create the uniform pressure distribution across the retaining ring (12). The uniform pressure distribution across the retaining ring (16) allows a semiconductor substrate (51), polished with the polishing apparatus (10), to have a reduced edge exclusion, and thus increased die yield.
    Type: Grant
    Filed: October 15, 1999
    Date of Patent: June 5, 2001
    Assignee: Prodeo Technologies, Inc.
    Inventors: Paul D. Jackson, E. Terry Lisi, Lee A. Reeves