Abstract: Embodiments of semiconductor devices and methods of their formation include providing a semiconductor substrate having a top surface, a bottom surface, an active region, and an edge region, and forming a gate structure in a first trench in the active region of the semiconductor substrate. A termination structure is formed in a second trench in the edge region of the semiconductor substrate. The termination structure has an active region facing side and a device perimeter facing side. The method further includes forming first and second source regions of the first conductivity type are formed in the semiconductor substrate adjacent both sides of the gate structure. A third source region is formed in the semiconductor substrate adjacent the active region facing side of the termination structure. The semiconductor device may be a trench metal oxide semiconductor device, for example.

Abstract: A semiconductor device comprises a first contact layer, a first drift layer adjacent the first contact layer, a buried body layer adjacent the first drift layer and a second contact layer. A first vertical trench and a second vertical trench are provided, the first and second vertical trenches being spaced with respect to each other and extending from the second contact layer to substantially beyond the buried body layer. A second drift layer is also provided and sandwiched between the buried body layer and the second contact layer.

Abstract: A semiconductor device includes a semiconductor layer disposed at a substrate and a plurality of active cells disposed at the semiconductor layer. Each active cell includes a trench extending into the semiconductor layer and a body region disposed in the semiconductor layer adjacent to a sidewall of the trench and at a first depth below the surface of the semiconductor layer. The semiconductor device further includes a termination cell disposed at the semiconductor layer adjacent to an edge of the plurality of active cells. The termination cell includes a trench extending into the semiconductor layer, and further includes a body region disposed in the semiconductor layer adjacent to a sidewall of the trench of the termination cell and at a second depth less than the first depth. The body regions of the active cells and of the termination cell have a conductivity type different than that of the semiconductor layer.

Abstract: A semiconductor device includes a substrate and a semiconductor layer having a first conductivity type. The semiconductor device further includes first and second trenches extending into the semiconductor layer from a surface of the semiconductor layer, each of the first and second trenches including a corresponding gate electrode. The semiconductor device further includes a body region having a second conductivity type different than the first conductivity type and a source contact region having the first conductivity type. The body region is disposed in the semiconductor layer below the surface of the semiconductor layer and between a sidewall of the first trench and an adjacent sidewall of a second trench. The source contact region is disposed in the semiconductor layer between the body region and the surface of the semiconductor layer and extending between the sidewall of the first trench and the corresponding sidewall of the second trench.

Abstract: A semiconductor device comprises a first contact layer, a first drift layer adjacent the first contact layer, a buried body layer adjacent the first drift layer and a second contact layer. A first vertical trench and a second vertical trench are provided, the first and second vertical trenches being spaced with respect to each other and extending from the second contact layer to substantially beyond the buried body layer. A second drift layer is also provided and sandwiched between the buried body layer and the second contact layer.

Abstract: A semiconductor device includes a substrate and a semiconductor layer having a first conductivity type. The semiconductor device further includes first and second trenches extending into the semiconductor layer from a surface of the semiconductor layer, each of the first and second trenches including a corresponding gate electrode. The semiconductor device further includes a body region having a second conductivity type different than the first conductivity type and a source contact region having the first conductivity type. The body region is disposed in the semiconductor layer below the surface of the semiconductor layer and between a sidewall of the first trench and an adjacent sidewall of a second trench. The source contact region is disposed in the semiconductor layer between the body region and the surface of the semiconductor layer and extending between the sidewall of the first trench and the corresponding sidewall of the second trench.

Abstract: A semiconductor device includes a semiconductor layer disposed at a substrate and a plurality of active cells disposed at the semiconductor layer. Each active cell includes a trench extending into the semiconductor layer and a body region disposed in the semiconductor layer adjacent to a sidewall of the trench and at a first depth below the surface of the semiconductor layer. The semiconductor device further includes a termination cell disposed at the semiconductor layer adjacent to an edge of the plurality of active cells. The termination cell includes a trench extending into the semiconductor layer, and further includes a body region disposed in the semiconductor layer adjacent to a sidewall of the trench of the termination cell and at a second depth less than the first depth. The body regions of the active cells and of the termination cell have a conductivity type different than that of the semiconductor layer.

Abstract: A semiconductor device includes a substrate and a semiconductor layer having a first conductivity type. The semiconductor device further includes first and second trenches extending into the semiconductor layer from a surface of the semiconductor layer, each of the first and second trenches including a corresponding gate electrode. The semiconductor device further includes a body region having a second conductivity type different than the first conductivity type and a source contact region having the first conductivity type. The body region is disposed in the semiconductor layer below the surface of the semiconductor layer and between a sidewall of the first trench and an adjacent sidewall of a second trench. The source contact region is disposed in the semiconductor layer between the body region and the surface of the semiconductor layer and extending between the sidewall of the first trench and the corresponding sidewall of the second trench.

Abstract: A trench gate transistor is formed from a semiconductor substrate with its upper surface covered in an oxide dielectric layer. The trench gate transistor has a drain region, a body region, source region and a trench lined with a gate insulator that electrically insulates a conductive gate electrode formed in the trench from the body region. The body region has a sloping upper surface that extends away from the trench towards the drain region. The sloping upper surface is formed by exposing the oxide dielectric layer to an oxidized atmosphere, through an opening in a mask, so as to form a dielectric region. The dielectric region includes the oxide dielectric layer and a sacrificial area of the semiconductor substrate.

Abstract: Electronic elements with very low resistance back-side coupling are provided by forming one or more narrow trenches or pipes, preferably dielectric lined, in front sides of substrates, filling the trenches or pipes with a conductor having a coefficient of expansion not too different from that of the substrate but of higher conductivity, forming an epitaxial SC layer over the front side of the substrate in Ohmic contact with the conductor the trenches or pipes, forming various semiconductor (SC) devices in the epi-layer, back grinding the substrate to expose bottoms of the conductor filled trenches or pipes, and providing a back-side conductor contacting the conductor in the trenches or pipes. For silicon SCs, tungsten is a suitable conductor for filling the trenches or pipes to minimize substrate stress. Series ON-resistance of the elements due to the substrate resistance is substantially reduced.

Abstract: Electronic elements with very low resistance back-side coupling are provided by forming one or more narrow trenches or pipes, preferably dielectric lined, in front sides of substrates, filling the trenches or pipes with a conductor having a coefficient of expansion not too different from that of the substrate but of higher conductivity, forming an epitaxial SC layer over the front side of the substrate in Ohmic contact with the conductor the trenches or pipes, forming various semiconductor (SC) devices in the epi-layer, back grinding the substrate to expose bottoms of the conductor filled trenches or pipes, and providing a back-side conductor contacting the conductor in the trenches or pipes. For silicon SCs, tungsten is a suitable conductor for filling the trenches or pipes to minimize substrate stress. Series ON-resistance of the elements due to the substrate resistance is substantially reduced.

Abstract: Electronic elements (40) with very low resistance back-side coupling are provided by forming one or more narrow trenches or pipes (411), preferably dielectric lined, in front sides (523) of substrates (52?), filling the trenches or pipes with a conductor (54) having a coefficient of expansion not too different from that of the substrate (52?) but of higher conductivity, forming an epitaxial SC layer (64) over the front side (523) of the substrate (52?) in Ohmic contact with the conductor (54) in the trenches or pipes (411), forming various semiconductor (SC) devices (42, 80) in the epi-layer (64), back grinding the substrate (52?) to expose bottoms (548) of the conductor filled trenches or pipes (41), and providing a back-side conductor (524) contacting the conductor (54) in the trenches or pipes (411). For silicon SCs, tungsten is a suitable conductor (54) for filling the trenches or pipes (411) to minimize substrate stress.

Abstract: Electronic elements (40) with very low resistance back-side coupling are provided by forming one or more narrow trenches or pipes (411), preferably dielectric lined, in front sides (523) of substrates (52?), filling the trenches or pipes with a conductor (54) having a coefficient of expansion not too different from that of the substrate (52?) but of higher conductivity, forming an epitaxial SC layer (64) over the front side (523) of the substrate (52?) in Ohmic contact with the conductor (54) in the trenches or pipes (411), forming various semiconductor (SC) devices (42, 80) in the epi-layer (64), back grinding the substrate (52?) to expose bottoms (548) of the conductor filled trenches or pipes (41), and providing a back-side conductor (524) contacting the conductor (54) in the trenches or pipes (411). For silicon SCs, tungsten is a suitable conductor (54) for filling the trenches or pipes (411) to minimize substrate stress.

Abstract: Methods and apparatus are provided for a MOSFET (50, 99, 199) exhibiting increased source-drain breakdown voltage (BVdss). Source (S) (70) and drain (D) (76) are spaced apart by a channel (90) underlying a gate (84) and one or more carrier drift spaces (92, 92?) serially located between the channel (90) and the source (70, 70?) or drain (76, 76?). A buried region (96, 96?) of the same conductivity type as the drift space (92, 92?) and the source (70, 70?) or drain (76, 76?) is provided below the drift space (92, 92?), separated therefrom in depth by a narrow gap (94, 94?) and ohmically coupled to the source (70, 70?) or drain (76, 76?). Current flow (110) through the drift space produces a potential difference (Vt) across this gap (94, 94?).

Abstract: Methods and apparatus are provided for TMOS devices, comprising multiple N-type source regions, electrically in parallel, located in multiple P-body regions separated by N-type JFET regions at a first surface. The gate overlies the body channel regions and the JFET region lying between the body regions. The JFET region communicates with an underlying drain region via an N-epi region. Ion implantation and heat treatment are used to tailor the net active doping concentration Nd in the JFET region of length Lacc and net active doping concentration Na in the P-body regions of length Lbody so that a charge balance relationship (Lbody*Na)=k1*(Lacc*Nd) between P-body and JFET regions is satisfied, where k1 is about 0.6?k1?1.4. The entire device can be fabricated using planar technology and the charge balanced regions need not extend through the underlying N-epi region to the drain.

Abstract: Methods and apparatus are provided for a MOSFET (50, 99, 199) exhibiting increased source-drain breakdown voltage (BVdss). Source (S) (70) and drain (D) (76) are spaced apart by a channel (90) underlying a gate (84) and one or more carrier drift spaces (92, 92?) serially located between the channel (90) and the source (70, 70?) or drain (76, 76?). A buried region (96, 96?) of the same conductivity type as the drift space (92, 92?) and the source (70, 70?) or drain (76, 76?) is provided below the drift space (92, 92?), separated therefrom in depth by a narrow gap (94, 94?) and ohmically coupled to the source (70, 70?) or drain (76, 76?). Current flow (110) through the drift space produces a potential difference (Vt) across this gap (94, 94?).

Abstract: A non-volatile memory bitcell structure is disclosed that includes a dual capacitor structure. A first metal-insulator-metal (MIM) capacitor having a first capacitance value includes a first top plate, a first bottom plate, and a first dielectric disposed in-between the first top plate and the first bottom plate. A second metal-insulator-metal (MIM) capacitor having a second capacitance value includes a second top plate, a second bottom plate, and a second dielectric disposed in-between the second top plate and the second bottom plate. An element of the first MIM capacitor is electrically coupled in common with an element of the second MIM capacitor. In addition, the first capacitance value is greater than the second capacitance value.

Abstract: A semiconductor MOSFET device (70, 100), and method of fabricating the device, including a shielding structure (86, 210) for decreasing the gate-drain capacitance (CGD) without simultaneously increasing the gate resistance or the total device ON-state resistance (RDSON). The shielding structure (86, 210) is formed between a drain region (76, 106) and an active gate electrode (88, 118) in the form of a separate dummy gate (87) or a trench (212) having a material (214) formed therein. The shielding structure (86, 210) forms a capacitance “shield” between the gate (88, 118) and drain region (76, 106). The MOSFET device (70, 100) further includes a semiconductor material (74, 104) defining therein a drain region (76, 106), at least one body region (78, 108) formed in the semiconductor material (74, 104), at least one source region (80, 110) formed in each body region (78, 108), and an active gate electrode (88, 118) formed over the semiconductor material (74, 104).

Abstract: A Bipolar Junction Transistor (BJT) that reduces the variation in the current gain through the use of a trench pullback structure. The trench pullback structure is comprised of a trench and an active region. The trench reduces recombination in the emitter-base region through increasing the distance charge carriers must travel between the emitter and the base. The trench also reduces recombination by reducing the amount of interfacial traps that the electrons injected from the emitter are exposed to. Further, the trench is pulled back from the emitter allowing an active region where electrons injected from a sidewall of the emitter can contribute to the overall injected emitter current. This structure offers the same current capability and current gain as a device without the trench between the emitter and the base while reducing the current gain variation.

Abstract: A semiconductor component includes a semiconductor substrate (310) having a first conductivity type, a first semiconductor device (320) at least in a first portion of the semiconductor substrate, and a second semiconductor device (330, 310) at least in a second portion of the semiconductor substrate. The first semiconductor device includes a first electrode region (321), a second electrode region (322), a body region (323), and an isolation region (324) in the first portion of the semiconductor substrate. The body region has the first conductivity type, and the first electrode region, the second electrode region, and the isolation region have a second conductivity type. The second electrode region has a different doping concentration than the first electrode region, and the body region is isolated from the second portion of the semiconductor substrate by the isolation region and the first electrode region.