Patents by Inventor Elaine K. Poon

Elaine K. Poon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of making a metal to metal antifuse
    Patent number: 6001693
    Abstract: The antifuse structure of the present invention includes a bottom planarized electrode, an ILD disposed over the bottom electrode, an antifuse cell opening in and through the ILD exposing the bottom electrode, a first barrier metal layer disposed in the antifuse cell opening to protect the antifuse material layer from diffusion from the bottom electrode and to form an effective bottom electrode of reduced area, hence reducing the capacitance of the device, an antifuse material layer disposed in the antifuse cell opening and over the first barrier metal layer, a second barrier metal layer disposed over the antifuse material layer, and a top electrode disposed over the second barrier metal layer.
    Type: Grant
    Filed: September 1, 1995
    Date of Patent: December 14, 1999
    Inventors: Yen Yeouchung, Shih-Oh Chen, Leuh Fang, Elaine K. Poon, James B. Kruger
  • Metal to metal antifuse
    Patent number: 5541441
    Abstract: The antifuse structure of the present invention includes a bottom planarized electrode, an ILD disposed over the bottom electrode, an antifuse cell opening in and through the ILD exposing the bottom electrode, a first barrier metal layer disposed in the antifuse cell opening to protect the antifuse material layer from diffusion from the bottom electrode and to form an effective bottom electrode of reduced area, hence reducing the capacitance of the device, an antifuse material layer disposed in the antifuse cell opening and over the first barrier metal layer, a second barrier metal layer disposed over the antifuse material layer, and a top electrode disposed over the second barrier metal layer.
    Type: Grant
    Filed: October 6, 1994
    Date of Patent: July 30, 1996
    Assignee: Actel Corporation
    Inventors: Yen Yeuochung, Shih-Oh Chen, Leuh Fang, Elaine K. Poon, James B. Kruger