Patents by Inventor Eng Huat Toh

Eng Huat Toh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11355599
    Abstract: Methods of forming a ferroelectric material layer below a field plate for achieving increased Vbr with reduced Rdson and resulting devices are provided. Embodiments include forming a N-Drift in a portion of the Si layer formed in a portion of a p-sub; forming an oxide layer over portions of the Si layer and the N-Drift; forming a gate over a portion of the oxide layer; forming a S/D extension region in the Si layer; forming first and second spacers on opposite sides of the gate and the oxide layer; forming a S/D region in the Si layer adjacent to the S/D extension region and a S/D region in the N-Drift remote from the Si layer; forming a U-shaped ferroelectric material layer over the oxide layer and the N-Drift, proximate or adjacent to the gate; and filling the U-shaped ferroelectric material layer with a metal, a field gate formed.
    Type: Grant
    Filed: August 17, 2020
    Date of Patent: June 7, 2022
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Eng Huat Toh, Shyue Seng Tan, Elgin Kiok Boone Quek
  • Publication number: 20220171001
    Abstract: A magnetic field sensor may include a semiconductor structure having a planar surface, and first, second, and third sensing devices. The semiconductor structure may include a semiconductor member having a two-dimensional electron gas therein, and an insulator member disposed on the semiconductor member. The first sensing device may be configured to sense magnetic field along a first axis parallel to the planar surface. The second sensing device may be configured to sense magnetic field along a second axis parallel to the planar surface, and orthogonal to the first axis. The third sensing device may be configured to sense a magnetic field along a third axis normal to the planar surface. Each of the first, second, and third sensing devices may be formed in the semiconductor structure and may include electrodes that extend from the insulator member to the two-dimensional electron gas.
    Type: Application
    Filed: November 27, 2020
    Publication date: June 2, 2022
    Inventors: Ping ZHENG, Eng Huat TOH, Yongshun SUN
  • Patent number: 11349071
    Abstract: A memory device may include at least one inert electrode, at least one active electrode, an insulating element arranged at least partially between the at least one active electrode and the at least one inert electrode, and a switching element arranged under the insulating element. The switching element may be arranged at least partially between the at least one active electrode and the at least one inert electrode. The switching element may include a first end and a second end contacting the at least one active electrode; and a middle segment between the first end and the second end, where the middle segment may at least partially contact the at least one inert electrode.
    Type: Grant
    Filed: November 4, 2019
    Date of Patent: May 31, 2022
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Desmond Jia Jun Loy, Eng Huat Toh, Shyue Seng Tan, Steven Soss
  • Patent number: 11335852
    Abstract: The present disclosure generally relates to memory devices and methods of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices. The present disclosure provides a memory device including a dielectric layer having an opening, sidewalls along the opening, a first electrode in the opening, a resistive layer disposed upon the first electrode, an oxygen scavenging layer disposed upon the resistive layer, and a second electrode in contact with the oxygen scavenging layer. The oxygen scavenging layer includes a material that is different from the resistive layer and partially covers the resistive layer. The first electrode is electrically linked to the second electrode by the oxygen scavenging layer and the resistive layer.
    Type: Grant
    Filed: September 21, 2020
    Date of Patent: May 17, 2022
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Desmond Jia Jun Loy, Eng Huat Toh, Shyue Seng Tan
  • Publication number: 20220149051
    Abstract: Structures for a non-volatile memory and methods of forming such structures. A gate electrode and a gate dielectric layer are formed over an active region with the gate dielectric layer between the gate electrode and the active region. A first doped region is formed in the active region, a second doped region is formed in the active region, and a source line is coupled to the second doped region. The first doped region is positioned in the active region at least in part beneath the gate dielectric layer, and the second doped region is positioned in the active region adjacent to the first doped region. The first doped region has a first conductivity type, and the second doped region has a second conductivity type opposite to the first conductivity type.
    Type: Application
    Filed: January 21, 2022
    Publication date: May 12, 2022
    Inventors: Desmond Jia Jun Loy, Eng Huat Toh, Sriram Balasubramanian, Shyue Seng Tan
  • Publication number: 20220149057
    Abstract: A nonvolatile memory device may be provided. The nonvolatile memory device comprises an active region, an n-well region and an isolation region separating the active region and the n-well region. A floating gate may be provided. The floating gate may be arranged over a portion of the active region and over a first portion of the n-well region. A first doped region in the active region may be laterally displaced from the floating gate on a first side and a second doped region in the active region may be laterally displaced from the floating gate on a second side opposite to the first side. A contact may be arranged over the n-well region, whereby the contact may be laterally displaced from a first corner of the floating gate over the first portion of the n-well region. A silicide exclusion layer may be arranged at least partially over the floating gate.
    Type: Application
    Filed: November 9, 2020
    Publication date: May 12, 2022
    Inventors: LANXIANG WANG, SHYUE SENG TAN, XINSHU CAI, ENG HUAT TOH, YONGSHUN SUN
  • Patent number: 11327045
    Abstract: A sensor device includes a substrate, first and second source regions, first and second drain regions, first and second channel regions, and first and second gate structures disposed over the first and second channel regions respectively. The source regions and drain regions are at least partially disposed within the substrate. The second gate structure includes first and second gate elements, and a resistance region configured to provide a resistance to a second current flow through the second channel region. In use, the first gate structure may receive a solution, and a change in pH in the solution changes a first current flow through the first channel region. In turn, the second current flow through the second channel region changes to compensate for the change in the first current flow to maintain a constant current flow through the sensor device.
    Type: Grant
    Filed: October 18, 2018
    Date of Patent: May 10, 2022
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Lanxiang Wang, Ping Zheng, Shyue Seng Tan, Eng Huat Toh
  • Publication number: 20220139929
    Abstract: A memory structure may be provided, including a substrate, and a first well region, a second well region, and a third well region arranged within the substrate, where the first well region and the third well region may have a first conductivity type, and the second well region may have a second conductivity type different from the first conductivity type, and where the second well region may be arranged laterally between the first well region and the third well region. The memory structure may further include a first gate structure and a second gate structure arranged over the second well region. The first gate structure may extend over the third well region and the second gate structure may extend over the first well region.
    Type: Application
    Filed: November 3, 2020
    Publication date: May 5, 2022
    Inventors: Xinshu CAI, Yongshun SUN, Lanxiang WANG, Eng Huat TOH, Shyue Seng TAN
  • Patent number: 11320417
    Abstract: In a non-limiting embodiment, a device may include a substrate having conducting lines thereon. One or more fin structures may be arranged over the substrate. Each fin structure may include a sensor arranged over the substrate and around the fin structure. The sensor may include a self-aligned first sensing electrode and a self-aligned second sensing electrode arranged around the fin structure. The first sensing electrode and the second sensing electrode each may include a first portion lining a sidewall of the fin structure and a second portion arranged laterally from the first portion. At least the first portion of the first sensing electrode and the first portion of the second sensing electrode may define a sensing cavity of the sensor. The second portion of the first sensing electrode and the second portion of the second sensing electrode may be electrically coupled to the conducting lines.
    Type: Grant
    Filed: July 9, 2019
    Date of Patent: May 3, 2022
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Xinshu Cai, Shyue Seng Tan, Eng Huat Toh, Kiok Boone Elgin Quek
  • Patent number: 11313827
    Abstract: According to various embodiments, there is provided a sensor device that includes: a substrate and two semiconductor structures. Each semiconductor structure includes a source region and a drain region at least partially disposed within the substrate, a channel region between the source region and the drain region, and a gate region. A first semiconductor structure of the two semiconductor structures further includes a sensing element electrically connected to the first gate structure. The sensing element is configured to receive a solution. The drain regions of the two semiconductor structures are electrically coupled. The source regions of the two semiconductor structures are also electrically coupled. A mobility of charge carriers of the channel region of a second semiconductor structure of the two semiconductor structures is lower than a mobility of charge carriers of the channel region of the first semiconductor structure.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: April 26, 2022
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Lanxiang Wang, Bin Liu, Eng Huat Toh, Shyue Seng Tan, Kiok Boone Elgin Quek
  • Patent number: 11309324
    Abstract: An illustrative device disclosed herein includes a first memory cell comprising a first memory gate positioned above an upper surface of a semiconductor substrate and a second memory cell comprising a second memory gate positioned above the upper surface of the semiconductor substrate. In this example, the device also includes a conductive word line structure positioned above the upper surface of the semiconductor substrate between the first and second memory gates, wherein the conductive word line structure is shared by the first and second memory cells.
    Type: Grant
    Filed: July 28, 2020
    Date of Patent: April 19, 2022
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Yongshun Sun, Eng Huat Toh, Shyue Seng Tan, Kiok Boone Elgin Quek
  • Patent number: 11302702
    Abstract: Structures for a non-volatile memory and methods of forming such structures. A gate electrode and a gate dielectric layer are formed over an active region with the gate dielectric layer between the gate electrode and the active region. A first doped region is formed in the active region, a second doped region is formed in the active region, and a source line is coupled to the second doped region. The first doped region is positioned in the active region at least in part beneath the gate dielectric layer, and the second doped region is positioned in the active region adjacent to the first doped region. The first doped region has a first conductivity type, and the second doped region has a second conductivity type opposite to the first conductivity type.
    Type: Grant
    Filed: December 2, 2019
    Date of Patent: April 12, 2022
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Desmond Jia Jun Loy, Eng Huat Toh, Sriram Balasubramanian, Shyue Seng Tan
  • Publication number: 20220107372
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to 3-contact hall sensors and methods of manufacture and modes of operation. The structure includes: a plurality of sensing blocks each of which include a plurality of contacts; a first switching element connecting to a first set of sensing blocks of the plurality of sensing blocks; and a second switching element connecting to a second set of sensing blocks of the plurality of sensing blocks.
    Type: Application
    Filed: October 5, 2020
    Publication date: April 7, 2022
    Inventors: Yongshun SUN, Eng Huat TOH, Ping ZHENG
  • Patent number: 11289649
    Abstract: Structures for a non-volatile memory element and methods of forming a structure for a non-volatile memory element. A switching layer is positioned over a first electrode, and a dielectric layer is positioned over the switching layer. The dielectric layer includes an opening extending to the switching layer. A second electrode includes a portion in the opening in the dielectric layer. The portion of the second electrode is in contact with a first portion of the switching layer. The switching layer further includes a second portion positioned between the dielectric layer and the first electrode.
    Type: Grant
    Filed: April 13, 2020
    Date of Patent: March 29, 2022
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Lup San Leong, Curtis Chun-I Hsieh, Juan Boon Tan, Eng Huat Toh, Kin Wai Tang
  • Publication number: 20220093765
    Abstract: Structures for a split gate flash memory cell and methods of forming a structure for a split gate flash memory cell. A trench is formed in a semiconductor substrate. First and second source/drain regions are formed in the semiconductor substrate. A first gate is laterally positioned between the trench and the second source/drain region, and a second gate includes a portion inside the trench. The first source/drain region is located in the semiconductor substrate beneath the trench. A dielectric layer is positioned between the portion of the second gate inside the trench and the semiconductor substrate.
    Type: Application
    Filed: September 21, 2020
    Publication date: March 24, 2022
    Inventors: Xinshu Cai, Shyue Seng Tan, Eng Huat Toh, Kiok Boone Elgin Quek
  • Publication number: 20220093860
    Abstract: The present disclosure generally relates to memory devices and methods of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices. The present disclosure provides a memory device including a dielectric layer having an opening, sidewalls along the opening, a first electrode in the opening, a resistive layer disposed upon the first electrode, an oxygen scavenging layer disposed upon the resistive layer, and a second electrode in contact with the oxygen scavenging layer. The oxygen scavenging layer includes a material that is different from the resistive layer and partially covers the resistive layer. The first electrode is electrically linked to the second electrode by the oxygen scavenging layer and the resistive layer.
    Type: Application
    Filed: September 21, 2020
    Publication date: March 24, 2022
    Inventors: DESMOND JIA JUN LOY, ENG HUAT TOH, SHYUE SENG TAN
  • Patent number: 11276460
    Abstract: Structures for an optoelectronic memory and related fabrication methods. A metal oxide layer is located on an interlayer dielectric layer. A layer composed of a donor/acceptor dye is positioned on a portion of the first layer.
    Type: Grant
    Filed: August 30, 2019
    Date of Patent: March 15, 2022
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Jianxun Sun, Juan Boon Tan, Tu Pei Chen, Eng Huat Toh
  • Patent number: 11271082
    Abstract: The present disclosure generally relates to semiconductor devices, and more particularly, to semiconductor devices having memory cells for multi-bit programming and methods of forming the same. The present disclosure provides a semiconductor device including an isolation region disposed on a substrate, a pair of diffusion structures disposed upon the isolation region, a dielectric layer that covers side surfaces of the diffusion structures, and a gate structure disposed on the dielectric layer and between the diffusion structures, where the gate structure is electrically coupled to the diffusion structures.
    Type: Grant
    Filed: January 13, 2020
    Date of Patent: March 8, 2022
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Wei Chang, Eng Huat Toh, Shyue Seng Tan
  • Publication number: 20220069013
    Abstract: Structures for a resistive memory element and methods of forming a structure for a resistive memory element. The resistive memory element includes a first switching layer, a second switching layer, a conductive spacer, a first electrode, and a second electrode. The first switching layer includes a portion positioned between the first electrode and the conductive spacer, the second switching layer includes a portion positioned between the second electrode and the conductive spacer, and the conductive spacer is positioned between the portion of the first switching layer and the portion of the second switching layer.
    Type: Application
    Filed: September 1, 2020
    Publication date: March 3, 2022
    Inventors: Desmond Jia Jun Loy, Eng Huat Toh, Shyue Seng Tan
  • Publication number: 20220069213
    Abstract: Structures for a resistive memory element and methods of forming a structure for a resistive memory element. The resistive memory element has a first electrode, a second electrode, a third electrode, and a switching layer. The first electrode is coupled to the switching layer, the second electrode is coupled to a side surface of the switching layer, and the third electrode is coupled to the switching layer.
    Type: Application
    Filed: August 31, 2020
    Publication date: March 3, 2022
    Inventors: Lanxiang Wang, Shyue Seng Tan, Eng Huat Toh