Patents by Inventor Evgueni Gantvarg

Evgueni Gantvarg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for storing and moving a cassette
    Patent number: 7637707
    Abstract: A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the shelves and the docking station. An interstation transfer apparatus includes an overhead support beam and a transfer arm adapted to carry a cassette between processing stations.
    Type: Grant
    Filed: October 24, 2005
    Date of Patent: December 29, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Ilya Perlov, Evgueni Gantvarg, Victor Belitsky
  • Apparatus for storing and moving a cassette
    Publication number: 20060072986
    Abstract: A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the shelves and the docking station. An interstation transfer apparatus includes an overhead support beam and a transfer arm adapted to carry a cassette between processing stations.
    Type: Application
    Filed: October 24, 2005
    Publication date: April 6, 2006
    Inventors: Ilya Perlov, Evgueni Gantvarg, Victor Belitsky
  • Method and apparatus for improved substrate handling
    Patent number: 6575737
    Abstract: A transfer chamber is provided. The transfer chamber has a temperature adjustment plate located in an upper portion of the chamber, a substrate handler located in a lower portion of the chamber, and a rotatable substrate carriage adapted so as to raise and lower between an elevation above a substrate supporting surface of the temperature adjustment plate, and an elevation below a substrate supporting blade of the substrate handler. The rotatable substrate carriage is adapted to transfer a substrate to and from the substrate supporting surfaces of the temperature adjustment plate, and of the substrate handler blade.
    Type: Grant
    Filed: July 7, 2000
    Date of Patent: June 10, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Ilya Perlov, Alexey Goder, Evgueni Gantvarg, Howard E Grunes
  • Apparatus for storing and moving a cassette
    Publication number: 20010043849
    Abstract: A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the shelves and the docking station. An interstation transfer apparatus includes an overhead support beam and a transfer arm adapted to carry a cassette between processing stations.
    Type: Application
    Filed: July 30, 2001
    Publication date: November 22, 2001
    Inventors: Ilya Perlov, Evgueni Gantvarg, Victor Belitsky
  • Apparatus for storing and moving a cassette
    Patent number: 6283692
    Abstract: A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the shelves and the docking station. An interstation transfer apparatus includes an overhead support beam and a transfer arm adapted to carry a cassette between processing stations.
    Type: Grant
    Filed: December 1, 1998
    Date of Patent: September 4, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Ilya Perlov, Evgueni Gantvarg, Victor Belitsky