Patents by Inventor Feng-Ming Chang
Feng-Ming Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11961769Abstract: A method of forming an integrated circuit, including forming a n-type doped well (N-well) and a p-type doped well (P-well) disposed side by side on a semiconductor substrate, forming a first fin active region extruded from the N-well and a second fin active region extruded from the P-well, forming a first isolation feature inserted between and vertically extending through the N-well and the P-well, and forming a second isolation feature over the N-well and the P-well and laterally contacting the first and the second fin active regions.Type: GrantFiled: November 7, 2022Date of Patent: April 16, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTDInventors: Kuo-Hsiu Hsu, Yu-Kuan Lin, Feng-Ming Chang, Hsin-Wen Su, Lien Jung Hung, Ping-Wei Wang
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Publication number: 20240113237Abstract: The present disclosure provides a semiconductor structure and a method of manufacturing the same. The semiconductor structure includes a sensing device, a solar cell, and an interconnecting structure. The solar cell is disposed above the sensing device and is electrically connected to the sensing device. The interconnecting structure is disposed between the sensing device and the solar cell and has a first surface facing the solar cell and a second surface facing the sensing devices. The interconnecting structure comprises a first energy storage component and a second energy storage component. The first energy storage component is disposed closer to the first surface of the interconnecting structure than the second energy storage component.Type: ApplicationFiled: January 10, 2023Publication date: April 4, 2024Inventors: FENG-CHIEN HSIEH, YUN-WEI CHENG, KUO-CHENG LEE, CHENG-MING WU, PING KUAN CHANG
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Patent number: 11942145Abstract: The present disclosure describes a method for memory cell placement. The method can include placing a memory cell region in a layout area and placing a well pick-up region and a first power supply routing region along a first side of the memory cell region. The method also includes placing a second power supply routing region and a bitline jumper routing region along a second side of the memory cell region, where the second side is on an opposite side to that of the first side. The method further includes placing a device region along the second side of the memory cell region, where the bitline jumper routing region is between the second power supply routing region and the device region.Type: GrantFiled: May 6, 2022Date of Patent: March 26, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chih-Chuan Yang, Jui-Wen Chang, Feng-Ming Chang, Kian-Long Lim, Kuo-Hsiu Hsu, Lien Jung Hung, Ping-Wei Wang
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Patent number: 11943908Abstract: Systems and methods are provided for forming an intra-connection structure. A first gate structure and a first source/drain region adjacent to the first gate structure is formed on a substrate. A first dielectric material is disposed on the first source/drain region. A spacer material is formed on the first gate structure. The first dielectric material is removed to expose at least part of the first source/drain region. At least part of the spacer material is removed to expose at least part of the first gate structure. A first conductive material is formed between the first gate structure and the first source/drain region to electrically connect the first source/drain region and the first gate structure.Type: GrantFiled: November 9, 2020Date of Patent: March 26, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Feng-Ming Chang, Kuo-Hsiu Hsu
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Patent number: 11937415Abstract: A method of forming a semiconductor device includes providing a substrate including a circuit region and a well strap region, forming a mandrel extending from the circuit region to the well strap region, depositing mandrel spacers on sidewalls of the mandrel, removing the mandrel in the circuit region, while the mandrel in the well strap region remains intact, patterning the substrate with the mandrel spacers in the circuit region and the mandrel in the well strap region as an etch mask, thereby forming at least a first fin in the circuit region and a second fin in the well strap region, and epitaxially growing a first epitaxial feature over the first fin in the circuit region and a second epitaxial feature over the second fin in the well strap region. A width of the second fin is larger than a width of the first fin.Type: GrantFiled: July 27, 2022Date of Patent: March 19, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chih-Chuan Yang, Kuo-Hsiu Hsu, Feng-Ming Chang, Wen-Chun Keng, Lien Jung Hung
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Publication number: 20240079050Abstract: A memory device is provided, including an array of bit cells and a set of tracking cells. The set of tracking cells is arranged adjacent to the array of bit cells along a first direction. The set of tracking cells includes a set of first tracking cells configured to perform a read tracking operation and a set of second tracking cells configured to perform a write tracking operation and arranged adjacent to the set of first tracking cells along a second direction. First tracking cells in the set of first tracking cells are coupled in series with each other and arranged along the second direction, and second tracking cells in the set of second tracking cells are coupled in series with each other and arranged along the second direction.Type: ApplicationFiled: January 10, 2023Publication date: March 7, 2024Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kuang Ting CHEN, Peijiun LIN, Ching-Wei WU, Feng-Ming CHANG
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Publication number: 20240064950Abstract: A semiconductor device includes a first source/drain feature on a front side of a substrate. The device includes a first backside metal line under the first source/drain feature and extending lengthwise along a first direction. The device includes a first backside via disposed between the first source/drain feature and the first backside metal line. The first backside metal line is a first bit line of a first static random access memory (SRAM) cell and is connected to the first source/drain feature through the first backside via. The first backside metal line includes a first portion and a second portion each extending widthwise along a second direction perpendicular to the first direction, the first portion is wider than the second portion, and the first portion partially lands on the first backside via. The first and the second portions are substantially aligned on one side along the first direction.Type: ApplicationFiled: August 18, 2022Publication date: February 22, 2024Inventors: Jui-Lin Chen, Kian-Long Lim, Feng-Ming Chang, Yi-Feng Ting, Hsin-Wen Su, Lien-Jung Hung, Ping-Wei Wang
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Publication number: 20240064953Abstract: An IC structure includes an SRAM cell. In an embodiment, the SRAM cell includes a channel region over a substrate, a source/drain feature coupled to the channel region, a gate structure intersecting the channel region, and a first contact feature electrically coupled to the source/drain feature and the gate structure. A portion of the first contact feature is disposed directly under the gate structure.Type: ApplicationFiled: August 22, 2022Publication date: February 22, 2024Inventors: Feng-Ming Chang, Yi-Hsun Chiu
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Publication number: 20230371228Abstract: A memory device includes a first pull-down (PD) transistor, a second PD transistor, a first pass-gate (PG) transistor, and a second PG transistor arranged in a first direction and share a first active area, and a first pull-up (PU) transistor, a second PU transistor, a first dielectric structure, and a second dielectric structure arranged in the first direction and share a second active area. The first dielectric structure and a third gate structure of the first PG transistor extend in the second direction and are aligned with each other in the second direction. The second dielectric structure and a fourth gate structure of the second PG transistor extend in the second direction and are aligned with each other in the second direction.Type: ApplicationFiled: May 13, 2022Publication date: November 16, 2023Inventors: Ping-Wei WANG, Jui-Wen CHANG, Feng-Ming CHANG
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Publication number: 20230363132Abstract: A semiconductor device comprising a plurality of cells arranged in an array is disclosed. Each cell comprises: at least one active region arranged along a first direction; and at least five spaced apart conductive regions arranged along a second direction disposed over the active regions, wherein the first through fifth conductive regions comprise one or more conductors, wherein the one or more conductors have a dimension along the first direction. The dimension along the first direction is larger for at least one conductor in the first or fifth conductive regions than the dimension along the first direction for a conductor in the third conductive region. The pitch between conductors in the second and the fourth conductive region and the pitch between a conductor in the second or fourth conductive region and a conductor in a next closest conductive region that is not the second or fourth conductive region are different.Type: ApplicationFiled: May 3, 2022Publication date: November 9, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Feng-Ming Chang, Jui-wen Chang, Chao-Yuan Chang
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Publication number: 20230354573Abstract: The present disclosure describes a memory structure including a memory cell array. The memory cell array includes memory cells and first n-type wells extending in a first direction. The memory structure also includes a second n-type well formed in a peripheral region of the memory structure. The second n-type well extends in a second direction and is in contact with a first n-type well of the first n-type wells. The memory structure further includes a pick-up region formed in the second n-type well. The pick-up region is electrically coupled to the first n-type well of first n-type wells.Type: ApplicationFiled: April 28, 2022Publication date: November 2, 2023Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chih-Chuan Yang, Chao-Yuan CHANG, Shih-Hao LIN, Chia-Hao PAO, Feng-Ming CHANG, Lien-Jung HUNG, Ping-Wei WANG
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Publication number: 20230335184Abstract: The current disclosure is directed to a SRAM bit cell having a reduced coupling capacitance. In a vertical direction, a wordline “WL” and a bitline “BL” of the SRAM cell are stacked further away from one another to reduce the coupling capacitance between the WL and the BL. In an embodiment, the WL is vertically spaced apart from the BL with one or more metallization level that none of the WL or the BL is formed from. Connection island structures or jumper structures are provided to connect the upper one of the WL or the BL to the transistors of the SRAM cell.Type: ApplicationFiled: June 16, 2023Publication date: October 19, 2023Inventors: Chao-Yuan CHANG, Feng-Ming CHANG, Jui-Lin CHEN, Kian-Long LIM
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Publication number: 20230328948Abstract: A semiconductor device includes first, second, third, fourth, and fifth active regions each extending lengthwise along a first direction, and first, second, third, fourth, fifth, and sixth gates each extending lengthwise along a second direction perpendicular to the first direction. The first, second, third, and fourth active regions comprise channel regions and source/drain (S/D) regions of first, second, third, and fourth transistors respectively, and the fifth active region comprises channel regions and S/D regions of fifth and sixth transistors. The first through sixth gates are configured to engage the channel regions of the first through sixth transistors respectively. The first, second, and fifth gates are electrically connected. The fifth active region is disposed between the second and third active regions.Type: ApplicationFiled: June 12, 2023Publication date: October 12, 2023Inventors: Kuo-Hsiu Hsu, Yu-Kuan Lin, Feng-Ming Chang, Lien-Jung Hung, Ping-Wei Wang
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Publication number: 20230276608Abstract: A static random access memory device is provided and includes a first gate of a first pass-gate transistor extending to cross a first number of fins in a first threshold voltage region of a substrate and a second gate of a second pass-gate transistor extending to cross a second number of fins in a second threshold voltage region of a substrate. A boundary of the first threshold voltage region between the first and second gates is arranged closer to one, which crosses a smaller number of fins, of the first and second gates.Type: ApplicationFiled: May 5, 2023Publication date: August 31, 2023Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kuo-Hung LO, Feng-Ming CHANG, Ying-Hsiu KUO
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Publication number: 20230267991Abstract: One aspect of this description relates to a memory cell. In some embodiments, the memory cell includes a first gate structure, a second gate structure, a third gate structure, a fourth gate structure, and a fifth gate structure that each extend along a first lateral direction, a first active structure extending along a second lateral direction and overlaid by respective first portions of the first to fourth gate structures, a second active structure extending along the second lateral direction and overlaid by respective second portions of the first to fourth gate structures, and a third active structure extending along the second lateral direction and overlaid by respective third portions of the third and fifth gate structures. In some embodiments, the first and second gate structures are aligned with each other, with the fourth and fifth gate structures aligned with a first segment and a second segment of the third gate structure, respectively.Type: ApplicationFiled: April 25, 2023Publication date: August 24, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Chuan Yang, Feng-Ming Chang, Kuo-Hsiu Hsu, Ping-Wei Wang
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Publication number: 20230267263Abstract: A method includes laying out a standard cell region, with a rectangular space being within the standard cell region. The standard cell region includes a first row of standard cells having a first bottom boundary facing the rectangular space, and a plurality of standard cells having side boundaries facing the rectangular space. The plurality of standard cells include a bottom row of standard cells. A memory array is laid out in the rectangular space, and a second bottom boundary of the bottom row and a third bottom boundary of the memory array are aligned to a same straight line. A filler cell region is laid out in the rectangular space. The filler cell region includes a first top boundary contacting the first bottom boundary of the first row of standard cells, and a fourth bottom boundary contacting a second top boundary of the memory array.Type: ApplicationFiled: April 28, 2023Publication date: August 24, 2023Inventors: Feng-Ming Chang, Ruey-Wen Chang, Ping-Wei Wang, Sheng-Hsiung Wang, Chi-Yu Lu
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Publication number: 20230262950Abstract: A method includes providing a substrate having an epitaxial stack of layers including a plurality of semiconductor channel layers interposed by a plurality of dummy layers. The substrate includes a first device region and a second device region. An etch process is performed to remove a first portion of the epitaxial stack of layers from the second device region to form a trench in the second device region. The removed first portion of the epitaxial stack of layers includes at least one semiconductor channel layer of the plurality of semiconductor channel layers. An epitaxial layer is formed within the trench in the second device region and over the second portion of the epitaxial stack of layers. A top surface of the epitaxial layer in the second device region is substantially level with a top surface of the epitaxial stack of layers in the first device region.Type: ApplicationFiled: February 14, 2022Publication date: August 17, 2023Inventors: Chao-Yuan CHANG, Feng-Ming CHANG, Jui-Wen CHANG
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Publication number: 20230211473Abstract: A carrying device is provided. The carrying device includes a stand, an upper clamp connected to the stand, a lower clamp assembled to the stand, a manipulation mechanism assembled to the stand and interlinked with the lower clamp, and a supporting column assembled to the lower clamp. The manipulation mechanism can drive the lower clamp to move relative to the upper clamp, and the upper clamp and the lower clamp jointly define a receiving space therebetween. The supporting column is movable relative to the lower clamp, so that the carrying device can be adjusted in a first clamping mode or a second clamping mode. When the carrying device is in the first clamping mode, the supporting column is located in the receiving space and faces toward the upper clamp, so that the supporting column and the upper clamp can jointly clamp a plate part of a first structure.Type: ApplicationFiled: August 3, 2022Publication date: July 6, 2023Inventors: Kai-Hsiang CHOU, Jen-Yung CHANG, Bau-Yi HUANG, Feng-Ming CHANG
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Patent number: 11690209Abstract: An integrated circuit device includes a FinFET disposed over a doped region of a first type dopant, wherein the FinFET includes a first fin structure and first source/drain (S/D) features, the first fin structure having a first width; and a fin-based well strap disposed over the doped region of the first type dopant, wherein the fin-based well strap includes a second fin structure and second S/D features, the second fin structure having a second width that is larger than the first width, wherein the fin-based well strap connects the doped region to a voltage.Type: GrantFiled: August 4, 2020Date of Patent: June 27, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chih-Chuan Yang, Kuo-Hsiu Hsu, Feng-Ming Chang, Wen-Chun Keng, Lien Jung Hung
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Patent number: D1019346Type: GrantFiled: October 5, 2021Date of Patent: March 26, 2024Assignee: WISTRON NEWEB CORPORATIONInventors: Pei-Ying Tsai, Feng-Ming Chang