Patents by Inventor Franck Fournel

Franck Fournel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240030033
    Abstract: A method for producing a semiconductor structure comprises: a) providing a working layer of a semiconductor material; b) providing a carrier substrate of a semiconductor material; c) depositing a thin film of a semiconductor material different from that or those of the working layer and the carrier substrate on a free face to be joined of the working layer and/or the carrier substrate; d) directly joining the free faces of the working layer and the carrier substrate, e) annealing the joined structure at an elevated temperature to bring about segmentation of the encapsulated thin film and form a semiconductor structure comprising an interface region between the working layer and the carrier substrate, the interface region comprising: —regions of direct contact between the working layer and the carrier substrate; and —agglomerates comprising the semiconductor material of the thin film adjacent the regions of direct contact.
    Type: Application
    Filed: November 29, 2021
    Publication date: January 25, 2024
    Inventors: Gweltaz Gaudin, Ionut Radu, Franck Fournel, Julie Widiez, Didier Landru
  • Publication number: 20230110410
    Abstract: Method comprising the following steps: i) manufacturing components on a face of a substrate fastened to a first temporary substrate, ii) fastening a second temporary substrate onto the substrate, iii) removing the first temporary substrate, iv) manufacturing components on another face of the substrate, the first and second temporary substrates having surface areas greater than the surface area of the substrate of interest, during step ii), an adhesive film is disposed between the substrate and the first temporary substrate or between the substrate and the second temporary substrate, the adhesive film forming a lateral band around the substrate and adhering to the temporary substrates, the adhesion energy E1 between the substrate of interest and the first temporary substrate being greater than the adhesion energy E2 between the substrate of interest and the second temporary substrate, the adhesion energy E31 between the first temporary substrate and the adhesive film being lower than the adhesion energy E32
    Type: Application
    Filed: October 3, 2022
    Publication date: April 13, 2023
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Pierre MONTMEAT, Franck FOURNEL
  • Patent number: 10818500
    Abstract: The invention aims for a wafer edge trimming method 1 adhered on a support wafer 2 by way of an interface layer 3. A zone at the perimeter 12 of the wafer 1 is trimmed by grinding. The stopping of the grinding is advantageously done at the level of the interface layer 3. To do this, an interface layer 3 comprising a transition layer 4 having a resistance to grinding greater than that of the wafer 1 is used. According to a possibility, detecting an increase of the resistance to grinding during the grinding is done, so as to stop the grinding.
    Type: Grant
    Filed: December 21, 2018
    Date of Patent: October 27, 2020
    Assignee: Commissariat A L'Energie Atomique et aux Energies Alternatives
    Inventors: Franck Fournel, Christophe Morales, Marc Zussy
  • Publication number: 20190206693
    Abstract: The invention aims for a wafer edge trimming method 1 adhered on a support wafer 2 by way of an interface layer 3. A zone at the perimeter 12 of the wafer 1 is trimmed by grinding. The stopping of the grinding is advantageously done at the level of the interface layer 3. To do this, an interface layer 3 comprising a transition layer 4 having a resistance to grinding greater than that of the wafer 1 is used. According to a possibility, detecting an increase of the resistance to grinding during the grinding is done, so as to stop the grinding.
    Type: Application
    Filed: December 21, 2018
    Publication date: July 4, 2019
    Applicant: Commissariat A L'Energie Atomique et aux Energies Alternatives
    Inventors: Franck Fournel, Christophe Morales, Marc Zussy
  • Patent number: 9824912
    Abstract: There is provided a method for transforming an electronic device from an initial state, wherein the device includes a first substrate and a second substrate, the first and second substrates being joined by means of a bonding interfaced using their respective first faces, wherein the first substrate includes at least one cavity, produced using the first face of the first substrate, the cavity including a bottom bordered by at least one peripheral region and being at least partially filled with a buffer layer, in the bottom of the cavity, and wherein the first face of the second substrate is at least partly opposite the cavity of the first substrate. The method also includes a step of removing the bottom of the cavity of the first substrate from a first face, opposite to the first face of the first substrate.
    Type: Grant
    Filed: December 16, 2015
    Date of Patent: November 21, 2017
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Michel Pellat, Franck Fournel, Pierre Montmeat
  • Patent number: 9769931
    Abstract: A method for producing an electronic device including in a stack at least a first structure and a second structure, the structures being obtained from a first substrate and a second substrate. Marks are obtained from a pattern made on one of the substrates. Furthermore, the same supporting members are used during the bonding phase for the preparation of the marks and for the bonding phase for the assembly of the structures.
    Type: Grant
    Filed: July 29, 2016
    Date of Patent: September 19, 2017
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Franck Fournel, Chrystel Deguet
  • Patent number: 9718261
    Abstract: A method for assembling two substrates by molecular adhesion comprises: a first step (a) of putting first and second substrates in close contact in order to form an assembly having an assembly interface; a second step (b) of reinforcing the degree of adhesion of the assembly beyond a threshold adhesion value at which water is no longer able to diffuse along the assembly interface. The method also comprises a step (c) of anhydrous treatment of the first and second substrates in a treatment atmosphere having a dew point below ?10° C., and control of the dew point of a working atmosphere to which the first and second substrates are exposed from the anhydrous treatment step (c) until the end of the second step (b) so as to limit or prevent the appearance of bonding defects at the assembly interface.
    Type: Grant
    Filed: November 20, 2015
    Date of Patent: August 1, 2017
    Assignees: SOITEC, Commissariat A L'Energie Atomique et aux Energies Alternatives
    Inventors: Didier Landru, Capucine Delage, Franck Fournel, Elodie Beche
  • Publication number: 20170034919
    Abstract: A method for producing an electronic device including in a stack at least a first structure and a second structure, the structures being obtained from a first substrate and a second substrate. Marks are obtained from a pattern made on one of the substrates. Furthermore, the same supporting members are used during the bonding phase for the preparation of the marks and for the bonding phase for the assembly of the structures.
    Type: Application
    Filed: July 29, 2016
    Publication date: February 2, 2017
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Franck FOURNEL, Chrystel DEGUET
  • Publication number: 20160181139
    Abstract: There is provided a method for transforming an electronic device from an initial state, wherein the device includes a first substrate and a second substrate, the first and second substrates being joined by means of a bonding interfaced using their respective first faces, wherein the first substrate includes at least one cavity, produced using the first face of the first substrate, the cavity including a bottom bordered by at least one peripheral region and being at least partially filled with a buffer layer, in the bottom of the cavity, and wherein the first face of the second substrate is at least partly opposite the cavity of the first substrate. The method also includes a step of removing the bottom of the cavity of the first substrate from a first face, opposite to the first face of the first substrate.
    Type: Application
    Filed: December 16, 2015
    Publication date: June 23, 2016
    Applicant: Commissariat a L'Energie Atomique et aux Energies Alternatives
    Inventors: Michel PELLAT, Franck Fournel, Pierre Montmeat
  • Publication number: 20160152017
    Abstract: A method for assembling two substrates by molecular adhesion comprises: a first step (a) of putting first and second substrates in close contact in order to form an assembly having an assembly interface; a second step (b) of reinforcing the degree of adhesion of the assembly beyond a threshold adhesion value at which water is no longer able to diffuse along the assembly interface. The method also comprises a step (c) of anhydrous treatment of the first and second substrates in a treatment atmosphere having a dew point below ?10° C., and control of the dew point of a working atmosphere to which the first and second substrates are exposed from the anhydrous treatment step (c) until the end of the second step (b) so as to limit or prevent the appearance of bonding defects at the assembly interface.
    Type: Application
    Filed: November 20, 2015
    Publication date: June 2, 2016
    Inventors: Didier Landru, Capucine Delage, Franck Fournel, Elodie Beche
  • Patent number: 9209068
    Abstract: A method for treating at least one first material layer including siloxane bonds, wherein at least one surface can be interlocked with a surface of a second material layer by direct bonding, the method including: at least one forced diffusion at a temperature greater than or equal to 30° C., at least in the first material layer, of chemical species including at least one pair of free electrons and at least one labile proton; and converting at least one portion of the siloxane bonds into silanol bonds in at least one portion of the first material layer extending from the surface to a depth greater than or equal to approximately 10 nm.
    Type: Grant
    Filed: October 24, 2012
    Date of Patent: December 8, 2015
    Assignee: Commissariat a l'energie atomique et aux energies alternatives
    Inventors: Hubert Moriceau, Franck Fournel, Christophe Morales, Caroline Rauer
  • Publication number: 20150194337
    Abstract: A method for treating at least one first material layer including siloxane bonds, wherein at least one surface can be interlocked with a surface of a second material layer by direct bonding, the method including: at least one forced diffusion at a temperature greater than or equal to 30° C., at least in the first material layer, of chemical species including at least one pair of free electrons and at least one labile proton; and converting at least one portion of the siloxane bonds into silanol bonds in at least one portion of the first material layer extending from the surface to a depth greater than or equal to approximately 10 nm.
    Type: Application
    Filed: October 24, 2012
    Publication date: July 9, 2015
    Applicant: Commissariat a I'energie atomique et aux ene alt
    Inventors: Hubert Moriceau, Franck Fournel, Christophe Morales, Caroline Rauer
  • Patent number: 8871607
    Abstract: A method for producing a hybrid substrate, including a support substrate, a continuous buried insulator layer and, on this continuous layer, a hybrid layer including alternating zones of a first material and at least one second material, wherein these two materials are different by their nature and/or their crystallographic characteristics. The method forms a hybrid layer, including alternating zones of first and second materials, on a homogeneous substrate, assembles this hybrid layer, the continuous insulator layer and the support substrate, and eliminates a part at least of the homogeneous substrate, before or after the assembling.
    Type: Grant
    Filed: June 6, 2008
    Date of Patent: October 28, 2014
    Assignees: S.O.I. TEC Silicon on Insulator Technologies, Commissariat a l'Energie Atomique
    Inventors: Thomas Signamarcheix, Franck Fournel, Hubert Moriceau
  • Patent number: 8841202
    Abstract: A method of producing a hybrid substrate includes preparing a monocrystalline first substrate to obtain two surface portions. A temporary substrate is prepared including a mixed layer along which extends one surface portion and is formed of first areas and adjacent different second areas of amorphous material, the second areas forming at least part of the free surface of the first substrate. The first substrate is bonded to the other surface portion with the same crystal orientation as the first surface portion, by molecular bonding over at least the amorphous areas. A solid phase recrystallization of at least part of the amorphous areas according to the crystal orientation of the first substrate is selectively carried and the two surface portions are separated.
    Type: Grant
    Filed: February 12, 2010
    Date of Patent: September 23, 2014
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Franck Fournel, Thomas Signamarcheix, Laurent Clavelier, Chrystel Deguet
  • Patent number: 8501589
    Abstract: A process for forming a thin film of a given material includes providing a first substrate having, on the surface, an amorphous and/or polycrystalline film of the given material and a second substrate is bonded to the first substrate by hydrophobic direct bonding (molecular adhesion), the second substrate having a single-crystal reference film of a given crystallographic orientation on the surface thereof. A heat treatment is applied at least to the amorphous and/or polycrystalline film, where the heat treatment causes at least a portion of the amorphous and/or polycrystalline film to undergo solid-phase recrystallization along the crystallographic orientation of the reference film, where the reference film acts as a recrystallization seed. The at least partly recrystallized film is then separated from at least a portion of the reference film.
    Type: Grant
    Filed: October 29, 2009
    Date of Patent: August 6, 2013
    Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
    Inventors: Franck Fournel, Thomas Signamarcheix, Laurent Clavelier, Chrystel Deguet
  • Patent number: 8445122
    Abstract: A data storage medium includes a carrier substrate having an electrode layer on the surface thereof and a sensitive material layer extending along the electrode layeradapted to be locally modified between two electrical states by the action of a localized electric field. A reference plane extends globally parallel to the sensitive material layer and is configured to accommodate at least one element for application of an electrostatic field in combination with the electrode layer the electrode layer including a plurality of conductive portions having a dimension at most equal to 100 nm in at least one direction parallel to the reference plane and separated by at least one electrically insulative zone, where at least some of the conductive portions are electrically interconnected, the conductive portions defining data write/read locations within the sensitive material layer.
    Type: Grant
    Filed: December 18, 2008
    Date of Patent: May 21, 2013
    Assignees: Commissariat a l 'Energie Atomique, S.O.I. Tec Silicon on Insulator Technologies
    Inventors: Chrystel Deguet, Laurent Clavelier, Franck Fournel, Jean-Sebastien Moulet
  • Patent number: 8389379
    Abstract: A method of making a complex microelectronic structure by assembling two substrates through two respective linking surfaces, the structure being designed to be dissociated at a separation zone. Prior to assembly, in producing a state difference in the tangential stresses between the two surfaces to be assembled, the state difference is selected so as to produce in the assembled structure a predetermined stress state at the time of dissociation.
    Type: Grant
    Filed: December 1, 2009
    Date of Patent: March 5, 2013
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Franck Fournel, Hubert Moriceau, Christelle Lagahe
  • Patent number: 8318555
    Abstract: A method for producing a hybrid substrate includes preparing a first substrate including a mixed layer and an underlying electrically insulating continuous layer, the mixed layer made up of first single-crystal areas and second adjacent amorphous areas, the second areas making up at least part of the free surface of the first substrate. A second substrate is bonded to the first substrate, the second substrate including on the surface thereof, a reference layer with a predetermined crystallographic orientation. The first substrate is bonded to the second substrate by hydrophobic molecular bonding of at least the amorphous areas. A recrystallization of at least part of the amorphous areas to solid phase is carried out according to the crystallographic orientation of the reference layer, and the two substrates are separated at the bonding interface.
    Type: Grant
    Filed: October 29, 2009
    Date of Patent: November 27, 2012
    Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
    Inventors: Thomas Signamarcheix, Franck Fournel, Laurent Clavelier, Chrystel Deguet
  • Patent number: 8309431
    Abstract: A method for self-supported transfer of a fine layer, in which at least one species of ions is implanted in a source-substrate at a specified depth in relation to the surface of the source-substrate. A stiffener is applied in intimate contact with the source-substrate and the source-substrate undergoes a heat treatment at a specified temperature during a specified period of time in order to create an embrittled buried area substantially at the specified depth without causing a thin layer, defined between the surface and the embrittled buried layer in relation to the remainder of the source-substrate, to become thermally detached. A controlled localized energy pulse is applied to the source-substrate in order to cause the self-supported detachment of the thin layer.
    Type: Grant
    Filed: October 28, 2004
    Date of Patent: November 13, 2012
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Nguyet-Phuong Nguyen, Ian Cayrefourcq, Christelle Lagahe-Blanchard, Konstantin Bourdelle, Aurélie Tauzin, Franck Fournel
  • Patent number: 8252663
    Abstract: A method of transferring a thin layer from a source substrate having a surface layer of a first material along a free surface thereof to a target substrate having at least one surface layer of a second material along a free surface thereof, where the first material differs from the second material, includes forming within the surface layer of the source substrate a weakened zone delimiting a thin layer with respect to the free surface, and assembling the free surface of the source substrate to the free surface of the target substrate in a stack of alternating layers comprising the first and second materials, so that there are, on either side of an interface formed by bringing the free surfaces into intimate contact. The cumulative thicknesses of the layers of the first material are substantially equal to the cumulative thickness of the layers of the second material, the layers having thicknesses at least equal to 50 microns and at least 1000 times the depth at which the weakened zone is formed.
    Type: Grant
    Filed: June 17, 2010
    Date of Patent: August 28, 2012
    Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
    Inventor: Franck Fournel