Abstract: A method for encapsulating an MEMS structure in a stack structure includes providing a functional wafer structure including at least partly the MEMS structure. The method includes arranging the functional wafer structure and a glass wafer in the stack structure and along a stacking direction and is performed such that a cavity, in which at least part of the MEMS structure is arranged, is closed on one side along the stacking direction by the glass wafer and such that a spacing structure is arranged between the part of the MEMS structure and the glass wafer in the stack structure to provide a spacing between the part of the MEMS structure and the glass wafer along the stacking direction, such that the spacing structure encloses part of the cavity.

Abstract: There is provided a micro-electromechanical system (MEMS) device (102, 200, 300, 404) for cancelling noise generated by oscillation of a movable micro-electromechanical system (MEMS) element (104, 204, 304, 406). The micro-electromechanical system (MEMS) device (102, 200, 300, 404) includes the movable micro-electromechanical system (MEMS) element (104, 204, 304, 406), an actuator (106, 208, 306, 408), a controller (108, 410) and a movable noise cancelling element (110, 202, 312, 412). The controller (108, 410) provides electrical signals to drive the actuator (106, 208, 306, 408) and the movable noise cancelling element (110, 202, 312, 412) in a way to cancel the noise generated in the micro-electromechanical system (MEMS) device (102, 200, 300, 404) by oscillation of the movable MEMS element (104, 204, 304, 406).

Abstract: The present disclosure provides a deflection device (100, 200, 300, 400) for use in a scanner. The deflection device (100, 200, 300, 400) includes a substrate (102, 202), a mirror (106, 206, 304, 404) and actuator means (110). The mirror (106, 206, 304, 404) arranged in a recess (104, 204, 306, 406) in the substrate (102, 202) by connector means (108) in such a way that it can rotate about at least two axes in an oscillatory manner. The actuator means (110) causes the mirror (106, 206, 304, 404) to oscillate. The actuator means (110) are arranged in one or more trenches (112A-D) in the substrate (102, 202) surrounding the recess (104, 204, 306, 406), in such a way that a change of shape of the actuator means (110) will cause a movement in the substrate (102, 202), thereby inducing oscillatory movement of the mirror (106, 206, 304, 404).

Abstract: A micromechanical resonator wafer assembly includes an actuator wafer supporting an outer actuator layer. The outer actuator layer includes an oscillating part configured to be driven by an electrical drive signal. The micromechanical resonator wafer assembly further includes a device wafer mounted on top of the actuator wafer. The device wafer includes a plurality of inner actuators. Each of the inner actuators include an oscillation body configured to oscillate about one or more axes. The device wafer is physically connected to the actuator wafer such that each of the inner actuators forms with the outer actuator layer a coupled oscillation system for excitation of the oscillation body of the respective inner actuator. The micromechanical resonator wafer assembly provides external actuation of the oscillation body of each of the inner actuators by use of the outer actuator layer and hence, provides improved scan angles with fast start-up time.

Abstract: A deflection device for Lissajous scanning is provided. The deflection device includes a frame and a mirror. The mirror is movably arranged in a recess in the frame by means of a suspension mount including one or more springs. The mirror may be configured to swing back and forth about each of two or three axes with a respective eigenfrequency for reflecting incoming light at different angles to form a two-dimensional Lissajous pattern. The deflection device may include a driving device configured to excite swing motion of the mirror about each of the two or three axes at or near the respective eigenfrequency. Each of the one or more springs has a shape of a path segment along a circumference of the mirror together covering more than 360 degrees. An arrangement of the one or more springs provides a compact suspension for the mirror and larger tilt angles.

Abstract: The invention relates to an antenna device having at least one antenna element. The antenna element is implemented so as to emit electromagnetic radiation in a beam direction advantageously at frequencies in the GHz range and/or receive same from a beam direction. In addition, the antenna element is arranged on a carrier element which is arranged relative to a holding element. In addition, the carrier element is movable relative to the holding element.

Abstract: The invention relates to an appliance for detecting objects in a detection region, with a radiation device for emitting an electromagnetic scanning beam into at least a part of the detection region and with a device for modulating the scanning beam as well as with a detection device for the detection of reflected radiation from at least a part of the detection region and with a device for evaluating the time response of the detected, reflected radiation, in dependence on the modulation of the scanning beam. According to the invention, one can envisage the radiation device comprising a radiation source radiating a diffusion device scattering the radiation at least partly into the detection region, in order to be able to apply an as powerful as possible laser as a t source without endangering the eye safety or the general safety of persons.

Abstract: The present invention relates to a radiation imaging sensor with at least one detection element, which is implemented on a substrate as a micromechanical resonator and which absorbs the radiation to be detected. The resonator is set into a resonant oscillation with an excitation device and a shift in the resonance frequency of the detection element under exposure to radiation is detected with a detection device. The radiation sensor is characterized by the fact that it comprises a scanning device with a single-axis or multi-axis tiltable scanning element. The facility to tilt the device means that the detection element can be used to detect radiation from different directions. The imaging sensor can be realized in a compact manner and be economically produced.

Abstract: The invention relates to an antenna device having at least one antenna element. The antenna element is implemented so as to emit electromagnetic radiation in a beam direction advantageously at frequencies in the GHz range and/or receive same from a beam direction. In addition, the antenna element is arranged on a carrier element which is arranged relative to a holding element. In addition, the carrier element is movable relative to the holding element.

Abstract: A method for activating a deflection device comprising at least one deflection unit, for a projection device for projecting trajectories upon a projection surface, wherein the deflection device deflects electromagnetic radiation which is directed upon it, for producing trajectories, and the at least one deflection unit is activated by way of an activation signal delivered from a control device, for producing oscillations in each case with a turning amplitude at a direction change of the oscillation, about at least one deflection axis, wherein in the case of resonance, the oscillations have a maximal amplitude, at which the produced trajectories reach an edge of the projection surface.

Abstract: What is proposed is: a micromirror arrangement which comprises: a first spring-mass oscillator, which has an oscillatory body forming a mirror plate (1) and first spring elements (2); a second spring-mass oscillator, which has a drive plate (3) and second spring elements (4) and which is connected to a carrier arrangement (5, 8, 9) via the second spring elements (4), wherein the first spring-mass oscillator is suspended in the second spring-mass oscillator via the first spring elements (2); and a drive arrangement (11), which is assigned to the drive plate and is designed to cause the drive plate (3) to oscillate.

Abstract: The invention relates to an appliance for detecting objects in a detection region, with a radiation device for emitting an electromagnetic scanning beam into at least a part of the detection region and with a device for modulating the scanning beam as well as with a detection device for the detection of reflected radiation from at least a part of the detection region and with a device for evaluating the time response of the detected, reflected radiation, in dependence on the modulation of the scanning beam. According to the invention, one can envisage the radiation device comprising a radiation source radiating a diffusion device scattering the radiation at least partly into the detection region, in order to be able to apply an as powerful as possible laser as a t source without endangering the eye safety or the general safety of persons.

Abstract: What is proposed is: a micromirror arrangement which comprises: a first spring-mass oscillator, which has an oscillatory body forming a mirror plate (1) and first spring elements (2); a second spring-mass oscillator, which has a drive plate (3) and second spring elements (4) and which is connected to a carrier arrangement (5, 8, 9) via the second spring elements (4), wherein the first spring-mass oscillator is suspended in the second spring-mass oscillator via the first spring elements (2); and a drive arrangement (11), which is assigned to the drive plate and is designed to cause the drive plate (3) to oscillate.

Abstract: A method for activating a deflection device comprising at least one deflection unit, for a projection device for projecting trajectories upon a projection surface, wherein the deflection device deflects electromagnetic radiation which is directed upon it, for producing trajectories, and the at least one deflection unit is activated by way of an activation signal delivered from a control device, for producing oscillations in each case with a turning amplitude at a direction change of the oscillation, about at least one deflection axis, wherein in the case of resonance, the oscillations have a maximal amplitude, at which the produced trajectories reach an edge of the projection surface.

Abstract: The present invention relates to a radiation imaging sensor with at least one detection element, which is implemented on a substrate as a micromechanical resonator and which absorbs the radiation to be detected. The resonator is set into a resonant oscillation with an excitation device and a shift in the resonance frequency of the detection element under exposure to radiation is detected with a detection device. The radiation sensor is characterized by the fact that it comprises a scanning device with a single-axis or multi-axis tiltable scanning element. The facility to tilt the device means that the detection element can be used to detect radiation from different directions. The imaging sensor can be realized in a compact manner and be economically produced.