Abstract: Chemically-amplified positive photoresist compositions are provided that contain a resin that comprises acetal and alicyclic groups. Photoresists of the invention can exhibit notably enhanced lithographic properties. Preferred photoresists of the invention comprise one or more photoacid generator compounds and one or more phenolic resins comprise one or more photoacid-labile acetal groups and one or more alicyclic groups such as adamantyl.

Abstract: The present invention provides a method and apparatus for reducing error in interferometric fringe stability and reproducibility in an interference fringe generator. In one aspect, the method for reducing error in interferometric fringe stability and reproducibility includes providing a light source, positioning a grating to receive light from the light source and positioning a projection lens having a focal length F to receive light from the grating. The projection lens projects the received light upon an object of interest positioned substantially at a distance d1 from the lens. Typically the lens is positioned substantially at a distance d2 from the grating. The values of d1, d2, and F are related by d2 being approximately equal to d1F/(d1?F).

Abstract: A multilevel optical phase element is illuminated with a light source having a plurality of wavelengths of interest. The multilevel phase element disperses light from the light source by diffraction and focuses the dispersed light onto an imaging plane. A light modulating display in the imaging plane having a plurality of pixel elements is actuated. Each pixel element is assigned to transmit a predetermined spectral region within the near field region of the multilevel display element so as to receive the dispersed and focused light from the multilevel optical phase element. A system for displaying a color image includes a light source emitting a plurality of wavelengths of interest, a multilevel optical phase element, and a light modulating electronic display.

Abstract: Binary optics are used in an illumination system for a color projection display. In one embodiment a broad spectrum light source illuminates a multilevel optical phase element which disperses the broad spectrum light from the light source by diffraction. A display having a number of pixel elements, each capable of transmitting a predetermined spectral region, is positioned within the near field region of the multilevel optical phase element so as to receive the light dispersed by the multilevel phase element.

Abstract: An aspect of the invention relates to a calibration standard for a three-dimensional measurement system and various calibration methods and techniques. The calibration standard typically includes a calibration standard surface and a plurality of optical targets. The optical targets being are affixed to the calibration standard surface and define a three-dimensional distribution of optical reference points. The optical targets can be serve as active, passive calibration targets, or combinations of both. In one embodiment, the optical targets include an optical source and a diffusing target, and each of the optical sources are configured to illuminate the respective diffusing target. The optical targets can be removably affixed to the calibration standard surface.

Abstract: A display viewer has an electronic display including an array of pixel electrodes having an area of less than 400 mm2. A light source can be used to illuminate the array of pixel electrodes of a liquid crystal display in a preferred embodiment. The viewer has a lens system that enlarges an image on the display and can also include a mirror that reflects the enlarged image from the lens. A display viewer in a preferred embodiment has a planar mirror and a viewing screen. The viewing screen has a diffuser and a Fresnel lens through which the image is viewed.

Abstract: A transmissive active matrix liquid crystal display device has a multievel optical phase element that sepaeates each color component of light into a plurality of diffraction orders. The multilevel optical phase element is aligned with a an active matrix array and directs light of different colors through different pixels of a liquid crystal material. The transmission of light through the liquid crystal material is controlled by an array of transistor circuits that actuate pixel electrodes.

Abstract: A multilevel optical phase element is illuminated with a light source having a plurality of wavelengths of interest. The multilevel phase element disperses light from the light source by diffraction and focuses the dispersed light onto an imaging plane. A light modulating display in the imaging plane having a plurality of pixel elements is actuated. Each pixel element is assigned to transmit a predetermined spectral region within the near field region of the multilevel display element so as to receive the dispersed and focused light from the multilevel optical phase element. A system for displaying a color image includes a light source emitting a plurality of wavelengths of interest, a multilevel optical phase element, and a light modulating electronic display.

Abstract: An illumination system for a color projection display. In one embodiment a broad spectrum light source illuminates a multilevel optical phase element which disperses the broad spectrum light from the light source by diffraction. A display having a number of pixel elements, each capable of transmitting a predetermined spectral region, is positioned within the near field region of the multilevel optical phase element so as to receive the light dispersed by the multilevel phase element.

Abstract: A method and system for providing an improved color image wherein a broad spectrum light is supplied to a phase grating which provides dispersed light having multiple diffraction orders. The dispersed light is supplied to a zero-order phase shifter which shifts the phase of the undiffracted (zero order) light relative to the diffracted light. The light from the phase shifter is thereupon concentrated so that the plane of the phase grating is imaged onto a display having a plurality of pixels assigned to transmit different spectral regions. The depths of the grating elements of each of the grating periods of the phase grating and the depth of the zero-order phase element of the phase shifter are selected to maximize the area of chromaticity space spanned by the different spectral regions at the display.

Abstract: A method and system for providing an improved color image wherein a broad spectrum light is supplied to a phase grating which provides dispersed light having multiple diffraction orders. The dispersed light is supplied to a zero-order phase shifter which shifts the phase of the undiffracted (zero order) light relative to the diffracted light. The light from the phase shifter is thereupon concentrated so that the plane of the phase grating is imaged onto a display having a plurality of pixels assigned to transmit different spectral regions. The depths of the grating elements of each of the grating periods of the phase grating and the depth of the zero-order phase element of the phase shifter are selected to maximize the area of chromaticity space spanned by the different spectral regions at the display.

Abstract: Binary optics are used in an illumination system for a color projection display. In one embodiment a broad spectrum light source illuminates a multilevel optical phase element which disperses the broad spectrum light from the light source by diffraction. A display having a number of pixel elements, each capable of transmitting a predetermined spectral region, is positioned within the near field region of the multilevel optical phase element so as to receive the light dispersed by the multilevel phase element.

Abstract: Binary optics are used in an illumination system to provide a method of imaging for a color projection display. In one embodiment a broad spectrum light source illuminates a multilevel optical phase element which disperses the broad spectrum light from the light source by diffraction. A display having a number of pixel elements, each capable of transmitting a predetermined spectral region, is positioned within the near field region of the multilevel optical phase element so as to receive the light dispersed by the multilevel phase element.

Abstract: Binary optics are used in an illumination system for a color projection display. In one embodiment a broad spectrum light source illuminates a multilevel optical phase element which disperses the broad spectrum light from the light source by diffraction. A display having a number of pixel elements, each capable of transmitting a predetermined spectral region, is positioned within the near field region of the multilevel optical phase element so as to receive the light dispersed by the multilevel phase element.

Abstract: Chromatic dispersion between first and second wavelengths of light is corrected by a lens/zone plate combination. The zone plate is adapted both to send most of the first wavelength light into its zeroth order and to send most of the second wavelength light into its first order and to change the focal length of the second wavelength light to coincide with the focal length of the first wavelength light. A preferred embodiment includes a zinc/selinide sulfide lens having a zone plate etched onto one of its surfaces. The zone plate has a multi-step phase profile including four phase levels. The lens/zone plate combination is particularly adapted for use with CO.sub.2 and HeNe lasers to bring their focal lengths into coincidence.

Abstract: An intraocular lens including a refractive/diffractive lens having an anterior surface and a posterior surface and a generally anterior posterior optical axis. At least one of the surfaces has a diffractive lens profile that is binary in phase, and produces three useful focal points. The diffractive lens profile is designed to provide three foci each containing 28.8% of the incident light, with the residual 14% of the light going into other foci. Additionally, some of the out-of-focus light of this design contributes positively to the image, and the resultant maximum image contrast is above 28.8%. This design adds clear mid-range vision, at the expense of a slight decrease in near and far vision, and the added mid-range vision makes the device less sensitive to longitudinal placement in the eye.

Abstract: The method utilizes high resolution lithography, mask aligning, and reactive ion etching. In particular, at least two binary amplitude masks are generated. A photoresist layer on an optical element substrate is exposed through the first mask and then etched. The process is then repeated for the second and subsequent masks to create a multistep configuration. The resulting optical element is highly efficient.

Abstract: A high-efficiency, diffractive optical element having at least one surface including multilevel steps, the steps determined by calculating equiphase boundaries utilizing a disclosed equation and algorithm. The optical element can be adapted to correct for chromatic and/or spherical aberration, and can be used in UV lithographic apparatus.

Abstract: An optical element for converting a uniform beam of light of wavelength .lambda. into an array of illuminated spots, the optical element including a phase plate made of an array of constant phase zones; and an image plane disposed parallel to and at a preselected distance from the phase plate, the preselected distance being selected so that illuminating the phase plate with uniform coherent illumination of wavelength .lambda. produces the array of illuminated spots on the image plane, the spot array having a fill factor in at least one dimension that is less than 1/2.

Abstract: The method utilizes high resolution lithography, mask aligning, and reactive ion etching. In particular, at least two binary amplitude masks are generated. A photoresist layer on an optical element substrate is exposed through the first mask and then etched. The process is then repeated for the second and subsequent masks to create a multistep configuration. The resulting optical element is highly efficient.