Abstract: A method and apparatus for error avoidance in data transmission using dynamic modification of sampling rates. An embodiment of a method for transmission of data includes determining the transmission capacity for a transmission channel or channels. A sampling rate is selected based at least in part on the determined transmission capacity for the one or more transmission channels. An instruction, command, or information regarding the sampling rate is inserted in a data packet, and the data packet is transmitted.

Abstract: A method and apparatus for error masking for data transmission using received data. An embodiment of a method includes receiving a first data packet, where the first data packet contains multiple data elements, the first data packet being a data packet in a data stream. The method further includes determining that one or more data packets are missing from the data stream, and generating one or more data packets to replace the one or more missing data packets based at least in part on the one or more data elements of the first data packet.

Abstract: A method and apparatus for error masking for data transmission using received data. An embodiment of a method includes receiving a first data packet, where the first data packet contains multiple data elements, the first data packet being a data packet in a data stream. The method further includes determining that one or more data packets are missing from the data stream, and generating one or more data packets to replace the one or more missing data packets based at least in part on the one or more data elements of the first data packet.

Abstract: A method and apparatus for error avoidance in data transmission using dynamic modification of sampling rates. An embodiment of a method for transmission of data includes determining the transmission capacity for a transmission channel or channels. A sampling rate is selected based at least in part on the determined transmission capacity for the one or more transmission channels. An instruction, command, or information regarding the sampling rate is inserted in a data packet, and the data packet is transmitted.

Abstract: A semiconductor wafer processing system for processing wafers from a wafer storage cassette includes a wafer transfer chamber; a wafer storage elevator within the transfer chamber; one or more wafer processing chambers; and a wafer transfer apparatus for transferring a wafer between a standard storage cassette adjacent and outside the transfer chamber and the elevator, and between the elevator and the processing chamber. The storage chamber pressure varies between atmospheric when accepting wafers from outside, and a subatmospheric pressure when transferring wafers to or from a processing chamber. The transfer apparatus includes a robot arm; a thin flat wafer carrying blade at the leading end of the robot arm configured for engaging a wafer from the storage cassette or the elevator; and a wafer support tray configured for removable engagement with the blade and for engaging and positively positioning a wafer from the elevator, or a support pedestal within a processing chamber.

Abstract: A semiconductor wafer processing system for processing wafers from a wafer storage cassette includes a wafer transfer chamber; a wafer storage elevator within the transfer chamber; one or more wafer processing chambers; and a wafer transfer apparatus for transferring a wafer between a standard storage cassette adjacent and outside the transfer chamber and the elevator, and between the elevator and the processing chamber. The storage chamber pressure varies between atmospheric when accepting wafers from outside, and a subatmospheric pressure when transferring wafers to or from a processing chamber. The transfer apparatus includes a robot arm; a thin flat wafer carrying blade at the leading end of the robot arm configured for engaging a wafer from the storage cassette or the elevator; and a wafer support tray configured for removable engagement with the blade and for engaging and positively positioning a wafer from the elevator, or a support pedestal within a processing chamber.

Abstract: A semiconductor wafer processing system for processing wafers from a wafer storage cassette includes a wafer transfer chamber; a wafer storage elevator within the transfer chamber; one or more wafer processing chambers; and a wafer transfer apparatus for transferring a wafer between a standard storage cassette adjacent and outside the transfer chamber and the elevator, and between the elevator and the processing chamber. The storage chamber pressure varies between atmospheric when accepting wafers from outside, and a subatmospheric pressure when transferring wafers to or from a processing chamber. The transfer apparatus includes a robot arm; a thin flat wafer carrying blade at the leading end of the robot arm configured for engaging a wafer from the storage cassette or the elevator; and a wafer support tray configured for removable engagement with the blade and for engaging and positively positioning a wafer from the elevator, or a support pedestal within a processing chamber.

Abstract: A semiconductor wafer processing system for processing wafers from a wafer storage cassette includes a wafer transfer chamber; a wafer storage elevator within the transfer chamber; one or more wafer processing chambers; and a wafer transfer apparatus for transferring a wafer between a standard storage cassette adjacent and outside the transfer chamber and the elevator, and between the elevator and the processing chamber. The environment of the storage chamber varies in pressure between atmospheric when accepting wafers from outside, and a subatmospheric pressure when transferring wafers to or from a processing chamber.