Abstract: An integrated fluid delivery system (IFDS) is provided for delivering fluid streams such as high purity fluid streams to a processing destination, such as a wafer processing chamber. The delivery system includes a first modular manifold for internally channeling the high purity fluid streams along seamless slots. The first modular manifold receives each of the high purity fluid streams at a corresponding porting aperture. At least one fluid device from a group consisting of a flow controller, a valve, a filter and a pressure transducer is provided. The at least one fluid device is in fluidic communication with a corresponding one of the high purity liquid streams of the first modular manifold to dispense the high purity fluid streams from the integrated liquid delivery system to the wafer processing chamber.

Abstract: An atomizer is provided for combining a precise mass of atomized liquid into a gas stream. The atomizer includes a mixing slot formed in a face of a base member. The mixing slot comprises a throat in fluid communication with a gas inlet side having a smoothly decreasing cross-sectional area and a mixture outlet side having a smoothly increasing cross-sectional area. A gas stream enters the mixing slot via gas inlet side and a liquid enters the mixing slot via a liquid inlet in fluid communication with the throat of the mixing slot. The mixing slot is sealed by a sealing member abutting the face of the base member with the mixing slot in it. The liquid is atomized and combined with a gas stream by venturi effect.

Abstract: A flow controller is provided for delivering a precise volume of fluid such as high purity fluid streams to a processing destination, such as a wafer processing chamber. The flow controller includes a base with a seamless slot formed in a face thereof, providing a predictable pressure drop. The seamless slot is in fluidic communication with a sensor channel extending downwardly from the seamless slot first having temperature sensors thereon for inferring the mass flow through the flow controller. A valve is in fluidic communication with the seamless slot and is operably connected to the temperature sensors such that the valve opening is adjusted until the mass flow inferred by the temperature sensors is equal to a desired mass flow.

Abstract: A vaporizer is provided for delivering vapor streams such as high purity streams to a processing destination, such as a wafer processing chamber. The vaporizer includes a heated base having one or more seamless slots formed in one of its faces for carrying a liquid which is vaporized by heat from the heated plate. In one embodiment, the vaporizer includes an atomizer for atomizing the liquid prior to vaporization to reduce the temperature of vaporization. In one embodiment, the vaporizer includes a heat exchanger having cross-slots intersecting a plurality of seamless slots to reduce unvaporized liquid from exiting the vaporizer.

Abstract: An atomizer is provided for combining a precise mass of atomized liquid into a gas stream. The atomizer includes a mixing slot formed in a face of a base member. The mixing slot comprises a throat in fluid communication with a gas inlet side having a smoothly decreasing cross-sectional area and a mixture outlet side having a smoothly increasing cross-sectional area. A gas stream enters the mixing slot via gas inlet side and a liquid enters the mixing slot via a liquid inlet in fluid communication with the throat of the mixing slot. The mixing slot is sealed by a sealing member abutting the face of the base member with the mixing slot in it. The liquid is atomized and combined with a gas stream by venturi effect.

Abstract: A flow controller is provided for delivering a precise volume of fluid such as high purity fluid streams to a processing destination, such as a wafer processing chamber. The flow controller includes a base with a seamless slot formed in a face thereof, providing a predictable pressure drop. The seamless slot is in fluidic communication with a sensor channel extending downwardly from the seamless slot first having temperature sensors thereon for inferring the mass flow through the flow controller. A valve is in fluidic communication with the seamless slot and is operably connected to the temperature sensors such that the valve opening is adjusted until the mass flow inferred by the temperature sensors is equal to a desired mass flow.

Abstract: An integrated fluid delivery system (IFDS) is provided for delivering fluid streams such as high purity fluid streams to a processing destination, such as a wafer processing chamber. The delivery system includes a first modular manifold for internally channeling the high purity fluid streams along seamless slots. The first modular manifold receives each of the high purity fluid streams at a corresponding porting aperture. At least one fluid device from a group consisting of a flow controller, a valve, a filter and a pressure transducer is provided. The at least one fluid device is in fluidic communication with a corresponding one of the high purity liquid streams of the first modular manifold to dispense the high purity fluid streams from the integrated liquid delivery system to the wafer processing chamber.

Abstract: A vaporizer is provided for delivering vapor streams such as high purity streams to a processing destination, such as a wafer processing chamber. The vaporizer includes a heated base having one or more seamless slots formed in one of its faces for carrying a liquid which is vaporized by heat from the heated plate. In one embodiment, the vaporizer includes an atomizer for atomizing the liquid prior to vaporization to reduce the temperature of vaporization. In one embodiment, the vaporizer includes a heat exchanger having cross-slots intersecting a plurality of seamless slots to reduce unvaporized liquid from exiting the vaporizer.

Abstract: An emergency air intake valve has a circular plate having a top and bottom and depending central portion adapted to be connected to a conduit. The plate and the depending portion have a vertical bore therethrough. A diaphragm overlies the top of the plate and has a central opening aligned with the bore. The diaphragm has an enlarged depending peripheral portion adjacent the diaphragm opening and adapted to contact the top of the plate adjacent said bore. A cap secures the outer edge of the diaphragm adjacent the outer edge of the plate and forms with the diaphragm a chamber above the diaphragm. The plate has at least one opening therethrough to provide communication between the bottom of the diaphragm and the atmosphere.

Abstract: A coupler assembly for supplying different fluids has a base member adapted to supply one fluid through a first socket member and a second different fluid through a second spaced socket member. A hose terminal fitting has a pair of spaced tubular plugs of different diameters for entry into said socket members. One of the socket members has a hook which is engaged by a latch on the hose terminal fitting for locking the tubular plugs against withdrawal from the sockets. Advantageously the latch is spring biased into the latching position and has a cam surface to provide for the camming of the latch over the hook as the tubular plugs are moved into the sockets. Preferably the hook lies in a plane substantially perpendicular to the axes of the plugs and the latch is mounted for sliding movement transversely of the hose terminal fitting.