Patents by Inventor Go Yamaguchi
Go Yamaguchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230400057Abstract: A transport system include: a workpiece holder configured to hold a workpiece; a moving body facing the workpiece holder at least in a gravity direction and movable in a movement direction intersecting the gravity direction; a weight reducer configured to apply a static non-contact force to the workpiece holder to reduce a weight of the workpiece holder; a force generator disposed on the moving body to face the workpiece holder in the gravity direction, the force generator configured to apply a controllable non-contact force to the workpiece holder so as to follow a movement of the moving body while levitating the workpiece holder having the reduced weight; and circuitry configured to control the controllable non-contact force generated by the force generator to control a relative position of the workpiece holder with respect to the moving body.Type: ApplicationFiled: June 9, 2023Publication date: December 14, 2023Inventors: Go YAMAGUCHI, Yoshiaki KUBOTA, Yuta HIGASHINAKA, Mina ORII, Dai SHIMIZU
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Patent number: 11804391Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.Type: GrantFiled: June 15, 2022Date of Patent: October 31, 2023Assignee: KABUSHIKI KAISHA YASKAWA DENKIInventors: Osamu Komiyaji, Hiromitsu Akae, Go Yamaguchi, Tadataka Noguchi
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Publication number: 20230312271Abstract: A substrate transport system comprises: a linear transport device configured to transport a substrate along a transport line; and a robot configured to receive the substrate from the linear transport device, load the substrate into a processing unit, unload the substrate from the processing unit, and deliver the substrate to the linear transport device, wherein the linear transport device comprises: a first moving body configured to move along the transport line; a second moving body configured to support the substrate; and a non-contact force generator configured to apply a non-contact force to the second moving body from the first moving body to cause the second moving body to follow movement of the first moving body while levitating, by the non-contact force, the second moving body with respect to the first moving body.Type: ApplicationFiled: June 8, 2023Publication date: October 5, 2023Inventors: Go YAMAGUCHI, Yoshiaki KUBOTA, Kensuke ONI
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Patent number: 11724383Abstract: A robot includes an articulated arm; and a base unit to which the articulated arm is operably coupled. The base unit includes: a rotating portion; an actuator mounted on the rotating portion and configured to rotate the rotating portion about a first axis; an arm connector attached to a first portion of the rotating portion. The articulated arm is connected to the arm connector to swing about a second axis; and a rib straddling the actuator and connecting the arm connector to a second portion of the rotating portion. The actuator is located between the first portion and the second portion of the rotating portion.Type: GrantFiled: March 30, 2021Date of Patent: August 15, 2023Inventors: Ryo Ozono, Masaki Ozawa, Go Yamaguchi
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Patent number: 11701785Abstract: A transport device in a transport chamber having a reduced pressure atmosphere and including a sidewall extending along an arrangement direction. The transport device includes a first robot fixed at a first robot position in the transport chamber and configured to transfer a substrate to and from a first chamber provided outside the transport chamber, and a second robot fixed at a second robot position in the transport chamber and configured to transfer the substrate to and from a second chamber provided outside the transport chamber on the sidewall. Additionally, the transport device includes a mobile buffer configured to hold the substrate and move along a movement locus extending along the arrangement direction and located between the sidewall and each of the first robot position and the second robot position. The movement locus includes a first position for transferring the substrate to and from the first robot and a second position for transferring the substrate to and from the second robot.Type: GrantFiled: December 21, 2021Date of Patent: July 18, 2023Inventors: Go Yamaguchi, Hiromitsu Akae, Kensuke Oni, Osamu Komiyaji
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Patent number: 11512212Abstract: An actinic radiation-curable inkjet ink contains an actinic radiation-polymerizable compound, surface-treated titanium oxide, and a wax. The surface-treated titanium oxide contains carbon atoms in an amount of 0.31 mass % to 2.0 mass % based on the total mass thereof.Type: GrantFiled: June 18, 2020Date of Patent: November 29, 2022Assignee: KONICA MINOLTA, INC.Inventors: Go Yamaguchi, Kouji Izawa
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Patent number: 11462435Abstract: A robot includes: a first arm that is a horizontal multi-joint type arm provided with a first base link provided to be rotatable around a pivoting axis, a first intermediate link, and a first hand that holds a workpiece W thereon, and configured to move the first hand along a first diameter direction; a second arm that is a horizontal multi-joint type arm provided with a second base link provided to be independently rotatable from the first base link around the pivoting axis, a second intermediate link, and a second hand that holds the workpiece W thereon, and configured to move the second hand along a second diameter direction, and a pivoting device configured to pivot the first arm and the second arm together in the circumferential direction while maintaining a positional relationship of the first arm and the second arm in the circumferential direction.Type: GrantFiled: November 6, 2020Date of Patent: October 4, 2022Assignee: KABUSHIKI KAISHA YASKAWA DENKIInventors: Go Yamaguchi, Hiromitsu Akae
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Publication number: 20220310423Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.Type: ApplicationFiled: June 15, 2022Publication date: September 29, 2022Inventors: Osamu KOMIYAJI, Hiromitsu AKAE, Go YAMAGUCHI, Tadataka NOGUCHI
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Patent number: 11417550Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.Type: GrantFiled: December 10, 2020Date of Patent: August 16, 2022Assignee: KABUSHIKI KAISHA YASKAWA DENKIInventors: Osamu Komiyaji, Hiromitsu Akae, Go Yamaguchi, Tadataka Noguchi
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Publication number: 20220111539Abstract: The transport device provided in a transport chamber having a reduced pressure atmosphere and including a sidewall extending along an arrangement direction, the transport device comprising: a first robot fixed at a first robot position in the transport chamber and configured to transfer a substrate to and from a first chamber provided outside the transport chamber; a second robot fixed at a second robot position in the transport chamber and configured to transfer the substrate to and from a second chamber provided outside the transport chamber on the sidewall; and a mobile buffer configured to: hold the substrate; and move along a movement locus extending along the arrangement direction and located between the sidewall and each of the first robot position and the second robot position, wherein the movement locus includes a first position for transferring the substrate to and from the first robot and a second position for transferring the substrate to and from the second robot.Type: ApplicationFiled: December 21, 2021Publication date: April 14, 2022Inventors: Go YAMAGUCHI, Hiromitsu AKAE, Kensuke ONI, Osamu KOMIYAJI
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Publication number: 20220042166Abstract: A W18O49 peak is confirmed by X-ray diffraction analysis of a sputtering surface and a cross section orthogonal to the sputtering surface, a ratio IS(103)/IS(010) of a diffraction intensity IS(103) of a (103) plane to a diffraction intensity IS(010) of a (010) plane of W18O49 of the sputtering surface is 0.38 or less, a ratio IC(103)/IC(010) of a diffraction intensity IC(103) of the (103) plane to a diffraction intensity IC(010) of the (010) plane of W18O49 of the cross section is 0.55 or more, and an area ratio of W18O49 phase of a surface parallel to the sputtering surface is 37% or more.Type: ApplicationFiled: March 11, 2020Publication date: February 10, 2022Applicant: MITSUBISHI MATERIALS CORPORATIONInventors: Go Yamaguchi, Kensuke Io, Shiori Kawamura, Keita Umemoto
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Publication number: 20220025510Abstract: A W18O49 peak is confirmed by X-ray diffraction analysis of a sputtering surface and a cross section orthogonal to the sputtering surface, a ratio IS(103)/IS(010) of a diffraction intensity IS(103) of a (103) plane to a diffraction intensity IS(010) of a (010) plane of W18O49 of the sputtering surface is 0.57 or more, a ratio IC(103)/IC(010) of a diffraction intensity IC(103) of the (103) plane to a diffraction intensity IC(010) of the (010) plane of W18O49 of the cross section is 0.38 or less, and an area ratio of the W18O49 phase of a surface parallel to the sputtering surface is 37% or more.Type: ApplicationFiled: March 12, 2020Publication date: January 27, 2022Applicant: MITSUBISHI MATERIALS CORPORATIONInventors: Go Yamaguchi, Kensuke Io, Shiori Kawamura, Keita Umemoto
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Publication number: 20210308859Abstract: A robot includes an articulated arm; and a base unit to which the articulated arm is operably coupled. The base unit includes: a rotating portion; an actuator mounted on the rotating portion and configured to rotate the rotating portion about a first axis; an arm connector attached to a first portion of the rotating portion. The articulated arm is connected to the arm connector to swing about a second axis; and a rib straddling the actuator and connecting the arm connector to a second portion of the rotating portion. The actuator is located between the first portion and the second portion of the rotating portion.Type: ApplicationFiled: March 30, 2021Publication date: October 7, 2021Inventors: Ryo OZONO, Masaki OZAWA, Go YAMAGUCHI
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Publication number: 20210242052Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.Type: ApplicationFiled: December 10, 2020Publication date: August 5, 2021Inventors: Osamu KOMIYAJI, Hiromitsu AKAE, Go YAMAGUCHI, Tadataka NOGUCHI
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Publication number: 20210155421Abstract: A conveying system includes a guide constituting a conveying path, a carrier configured to move along the conveying path, a magnetic member provided on one of the guide and the carrier so as to be arranged along the conveying path, a plurality of coils provided on the other one of the guide and the carrier and configured to generate thrust along the conveying path by generating a moving magnetic field acting on the magnetic member in accordance with supply of power, a magnetic sensor configured to detect magnetism varying with a movement of the carrier, and a controller which is configured to execute position detection of a first method of obtaining a position of the carrier based on inductance variation of the coil and execute position detection of a second method of obtaining a position of the carrier based on an output of the magnetic sensor.Type: ApplicationFiled: February 3, 2021Publication date: May 27, 2021Applicant: KABUSHIKI KAISHA YASKAWA DENKIInventors: Minoru KOGA, Hiromitsu AKAE, Yuki HONDA, Mina ORII, Go YAMAGUCHI, Sohei OGA, Hidenori HARA
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Publication number: 20210143047Abstract: A robot includes: a first arm that is a horizontal multi-joint type arm provided with a first base link provided to be rotatable around a pivoting axis, a first intermediate link, and a first hand that holds a workpiece W thereon, and configured to move the first hand along a first diameter direction; a second arm that is a horizontal multi-joint type arm provided with a second base link provided to be independently rotatable from the first base link around the pivoting axis, a second intermediate link, and a second hand that holds the workpiece W thereon, and configured to move the second hand along a second diameter direction, and a pivoting device configured to pivot the first arm and the second arm together in the circumferential direction while maintaining a positional relationship of the first arm and the second arm in the circumferential direction.Type: ApplicationFiled: November 6, 2020Publication date: May 13, 2021Inventors: Go YAMAGUCHI, Hiromitsu AKAE
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Patent number: 10947066Abstract: A conveying system includes a plurality of carriers and circuitry. The plurality of carriers has a power source generating thrust in accordance with supply of power and moves along a conveying path. The circuitry is configured to execute detection of a collision between the carriers based on an increase in the thrust in the carriers.Type: GrantFiled: June 28, 2019Date of Patent: March 16, 2021Assignee: KABUSHIKI KAISHA YASKAWA DENKIInventors: Minoru Koga, Hiromitsu Akae, Yuki Honda, Mina Orii, Go Yamaguchi, Sohei Oga, Hidenori Hara
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Publication number: 20200407578Abstract: An actinic radiation-curable inkjet ink contains an actinic radiation-polymerizable compound, surface-treated titanium oxide, and a wax. The surface-treated titanium oxide contains carbon atoms in an amount of 0.31 mass % to 2.0 mass % based on the total mass thereof.Type: ApplicationFiled: June 18, 2020Publication date: December 31, 2020Inventors: Go YAMAGUCHI, Kouji IZAWA
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Publication number: 20200385589Abstract: An active ray-curable inkjet ink set according to the present invention is characterized by being composed of a white ink and a colored ink, each of which contains at least a photopolymerizable compound and a photopolymerization initiator.Type: ApplicationFiled: December 20, 2017Publication date: December 10, 2020Inventors: Go YAMAGUCHI, Masashi IKEDA
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Publication number: 20200215828Abstract: An image forming method includes: discharging an inkjet actinic ray curable white ink containing an actinic ray polymerizable compound, a gelling agent, and titanium oxide from a nozzle of an inkjet head to attach the inkjet actinic ray curable white ink to a surface of a recording medium; irradiating the inkjet actinic ray curable white ink attached to the surface of the recording medium with an actinic ray to cure the inkjet actinic ray curable white ink; discharging an inkjet actinic ray curable ink containing an actinic ray polymerizable compound from a nozzle to attach the inkjet actinic ray curable ink to a surface of a white cured film obtained by curing the inkjet actinic ray curable white ink; and irradiating the inkjet actinic ray curable ink attached to the surface of the white cured film with an actinic ray to cure the inkjet actinic ray curable ink.Type: ApplicationFiled: November 22, 2019Publication date: July 9, 2020Inventors: Shogo Watanabe, Go Yamaguchi, Masashi Ikeda