Patents by Inventor Gregory J. Stagaman

Gregory J. Stagaman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Adaptive wafer modulator for placing a selected pattern on a semiconductor wafer
    Patent number: 5563684
    Abstract: An adaptive wafer modulator in a photolithography device is described. A focal pattern of a lithographic system is calibrated. Prior to exposing a wafer surface to a selected image pattern, the wafer surface is elastically bent or modulated by actuating a set of adjustable pins supporting the wafer so that the wafer surface being exposed conforms more closely to the calibrated focal pattern of the lithographic system than to the presumed flat focal plane of the lithographic system.
    Type: Grant
    Filed: November 30, 1994
    Date of Patent: October 8, 1996
    Assignee: SGS-THOMSON Microelectronics, Inc.
    Inventor: Gregory J. Stagaman
  • Photolithography system with improved illumination
    Patent number: 5406351
    Abstract: A photolithographic system wherein optical fiber routing is used to combine two or more ultraviolet light sources for reticle illumination.
    Type: Grant
    Filed: December 30, 1993
    Date of Patent: April 11, 1995
    Assignee: SGS-Thomson Microelectronics, Inc.
    Inventors: John C. Sardella, Gregory J. Stagaman