Patents by Inventor Griselda Bonilla

Griselda Bonilla has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190139904
    Abstract: An interconnect level is provided on a surface of a substrate that has improved crack stop capability. The interconnect level includes at least one wiring region including an electrically conductive structure embedded in an interconnect dielectric material having a dielectric constant of less than 4.0, and a crack stop region laterally surrounding the wiring region. The crack stop region includes a crack stop dielectric material having a dielectric constant greater than the dielectric constant of the interconnect dielectric material. The crack stop region may be devoid of any metallic structure, or it may contain a metallic structure. The metallic structure in the crack stop region, which is embedded in the crack stop dielectric material, may be composed of a same, or different, electrically conductive metal or metal alloy as the electrically conductive structure embedded in the interconnect dielectric material.
    Type: Application
    Filed: November 7, 2017
    Publication date: May 9, 2019
    Inventors: Baozhen Li, Chih-Chao Yang, Griselda Bonilla
  • Patent number: 10256186
    Abstract: Methods of forming an interconnect structure include depositing a first conductive material on a substrate. Aspects include subtractively etching the conductive material to form a patterned first conductive layer, and depositing a dielectric layer on interconnect structure. Aspects also include depositing a second conductive material on the dielectric layer and removing the second conductive material through the top of the second metal liner.
    Type: Grant
    Filed: November 17, 2017
    Date of Patent: April 9, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Griselda Bonilla, Samuel S. Choi, Ronald G. Filippi, Elbert E. Huang, Naftali E. Lustig, Andrew H. Simon
  • Patent number: 10256171
    Abstract: Embodiments are directed to a method of forming a semiconductor device and resulting structures having an air spacer between a gate and a contact by forming a gate on a substrate and over a channel region of a semiconductor fin. A contact is formed on a doped region of the substrate such that a space between the contact and the gate defines a trench. A first dielectric layer is formed over the gate and the contact such that the first dielectric layer partially fills the trench. A second dielectric layer is formed over the first dielectric layer such that an air spacer forms in the trench between the gate and the contact.
    Type: Grant
    Filed: August 22, 2017
    Date of Patent: April 9, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Griselda Bonilla, Elbert Huang, Son Nguyen, Takeshi Nogami, Christopher J. Penny, Deepika Priyadarshini
  • Patent number: 10242933
    Abstract: Embodiments are directed to a method of forming a semiconductor device and resulting structures having an air spacer between a gate and a contact by forming a gate on a substrate and over a channel region of a semiconductor fin. A contact is formed on a doped region of the substrate such that a space between the contact and the gate defines a trench. A first dielectric layer is formed over the gate and the contact such that the first dielectric layer partially fills the trench. A second dielectric layer is formed over the first dielectric layer such that an air spacer forms in the trench between the gate and the contact.
    Type: Grant
    Filed: August 22, 2017
    Date of Patent: March 26, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Griselda Bonilla, Elbert Huang, Son Nguyen, Takeshi Nogami, Christopher J. Penny, Deepika Priyadarshini
  • Patent number: 10229875
    Abstract: A back end of the line (BEOL) fuse structure having a stack of vias. The stacking of vias leads to high aspect ratios making liner and seed coverage inside the vias poorer. The weakness of the liner and seed layers leads to a higher probability of electromigration (EM) failure. The fuse structure addresses failures due to poor liner and seed coverage. Design features permit determining where failures occur, determining the extent of the damaged region after fuse programming and preventing further propagation of the damaged dielectric region.
    Type: Grant
    Filed: March 17, 2016
    Date of Patent: March 12, 2019
    Assignee: International Business Machines Corporation
    Inventors: Griselda Bonilla, Kaushik Chanda, Ronald G. Filippi, Stephan Grunow, Naftali E. Lustig, Andrew H. Simon, Ping-Chuan Wang
  • Patent number: 10224236
    Abstract: A method of forming an air gap for a semiconductor device and the device formed are disclosed. The method may include forming an air gap mask layer over a dielectric interconnect layer, the dielectric interconnect layer including a dielectric layer having a conductive interconnect therein and a cap layer over the dielectric layer; patterning the air gap mask layer using extreme ultraviolet (EUV) light and etching to form an air gap mask including an opening in the cap layer exposing a portion of the dielectric layer of the dielectric interconnect layer adjacent to the conductive interconnect; removing the air gap mask; etching an air gap space adjacent to the conductive interconnect within the dielectric layer of the dielectric interconnect layer using the opening in the cap layer; and forming an air gap in the dielectric interconnect layer by depositing an air gap capping layer to seal the air gap space.
    Type: Grant
    Filed: November 15, 2017
    Date of Patent: March 5, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Samuel S. Choi, Ronald G. Filippi, Elbert E. Huang, Naftali E. Lustig, Griselda Bonilla, Andrew H. Simon
  • Patent number: 10177076
    Abstract: Embodiments are directed to a method of forming a semiconductor device and resulting structures having an air spacer between a gate and a contact by forming a gate on a substrate and over a channel region of a semiconductor fin. A contact is formed on a doped region of the substrate such that a space between the contact and the gate defines a trench. A first dielectric layer is formed over the gate and the contact such that the first dielectric layer partially fills the trench. A second dielectric layer is formed over the first dielectric layer such that an air spacer forms in the trench between the gate and the contact.
    Type: Grant
    Filed: August 22, 2017
    Date of Patent: January 8, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Griselda Bonilla, Elbert Huang, Son Nguyen, Takeshi Nogami, Christopher J. Penny, Deepika Priyadarshini
  • Patent number: 10177031
    Abstract: A method of forming an integrated metal line and interconnect. The method may include forming a first trench in a first ILD exposing a lower metal line, the first ILD is above a substrate, and the lower metal line is in the substrate; forming a first barrier layer in the first trench; forming an integrated metal layer (including a first metal line and a first via) on the first barrier layer; forming a first hardmask on the integrated metal layer; forming an isolation trench in the first hardmask and in the first metal line; forming a second barrier layer in the isolation trench; removing a portion of the second barrier layer from a bottom of the isolation trench exposing the first ILD; and forming a second ILD on the second barrier and in the isolation trench, where a bottom of the second ILD is in the first ILD.
    Type: Grant
    Filed: December 23, 2014
    Date of Patent: January 8, 2019
    Assignee: International Business Machines Corporation
    Inventors: Junjing Bao, Griselda Bonilla, Samuel S. Choi, Ronald G. Filippi, Naftali E. Lustig, Andrew H. Simon
  • Patent number: 10103068
    Abstract: A semiconductor device includes a first circuit structure and a second circuit structure. The first circuit structure includes a wiring line and a via upon and electrically contacting the wiring line. The via induces lateral etching voids between the via and the wiring line below the via upon the surface of the wiring line. The second circuit structure includes a similar wiring line, relative to the reference wiring line, without or fewer via thereupon. The first circuit structure is therefore relatively more prone to lateral etching void formation as compared to the second circuit structure. Resistances are measured across the first circuit structure and the second circuit structure and compared against a comparison threshold to determine whether the first circuit structure includes one or more lateral etching voids. If the first structure is deemed to not include lateral etching voids, the fabrication process of the device may be deemed reliable.
    Type: Grant
    Filed: June 18, 2015
    Date of Patent: October 16, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Griselda Bonilla, Samuel S. S. Choi, Ronald G. Filippi, Elbert E. Huang, Naftali E. Lustig, Andrew H. Simon
  • Publication number: 20180108596
    Abstract: Embodiments are directed to a method of forming a semiconductor device and resulting structures having an air spacer between a gate and a contact by forming a gate on a substrate and over a channel region of a semiconductor fin. A contact is formed on a doped region of the substrate such that a space between the contact and the gate defines a trench. A first dielectric layer is formed over the gate and the contact such that the first dielectric layer partially fills the trench. A second dielectric layer is formed over the first dielectric layer such that an air spacer forms in the trench between the gate and the contact.
    Type: Application
    Filed: December 8, 2017
    Publication date: April 19, 2018
    Inventors: Griselda Bonilla, Elbert Huang, Son Nguyen, Takeshi Nogami, Christopher J. Penny, Deepika Priyadarshini
  • Publication number: 20180090587
    Abstract: Embodiments are directed to a method of forming a semiconductor device and resulting structures having an air spacer between a gate and a contact by forming a gate on a substrate and over a channel region of a semiconductor fin. A contact is formed on a doped region of the substrate such that a space between the contact and the gate defines a trench. A first dielectric layer is formed over the gate and the contact such that the first dielectric layer partially fills the trench. A second dielectric layer is formed over the first dielectric layer such that an air spacer forms in the trench between the gate and the contact.
    Type: Application
    Filed: August 22, 2017
    Publication date: March 29, 2018
    Inventors: Griselda Bonilla, Elbert Huang, Son Nguyen, Takeshi Nogami, Christopher J. Penny, Deepika Priyadarshini
  • Publication number: 20180090418
    Abstract: Embodiments are directed to a method of forming a semiconductor device and resulting structures having an air spacer between a gate and a contact by forming a gate on a substrate and over a channel region of a semiconductor fin. A contact is formed on a doped region of the substrate such that a space between the contact and the gate defines a trench. A first dielectric layer is formed over the gate and the contact such that the first dielectric layer partially fills the trench. A second dielectric layer is formed over the first dielectric layer such that an air spacer forms in the trench between the gate and the contact.
    Type: Application
    Filed: August 22, 2017
    Publication date: March 29, 2018
    Inventors: Griselda Bonilla, Elbert Huang, Son Nguyen, Takeshi Nogami, Christopher J. Penny, Deepika Priyadarshini
  • Publication number: 20180090588
    Abstract: Embodiments are directed to a method of forming a semiconductor device and resulting structures having an air spacer between a gate and a contact by forming a gate on a substrate and over a channel region of a semiconductor fin. A contact is formed on a doped region of the substrate such that a space between the contact and the gate defines a trench. A first dielectric layer is formed over the gate and the contact such that the first dielectric layer partially fills the trench. A second dielectric layer is formed over the first dielectric layer such that an air spacer forms in the trench between the gate and the contact.
    Type: Application
    Filed: August 22, 2017
    Publication date: March 29, 2018
    Inventors: Griselda Bonilla, Elbert Huang, Son Nguyen, Takeshi Nogami, Christopher J. Penny, Deepika Priyadarshini
  • Publication number: 20180076133
    Abstract: Methods of forming an interconnect structure include depositing a first conductive material on a substrate. Aspects include subtractively etching the conductive material to form a patterned first conductive layer, and depositing a dielectric layer on interconnect structure. Aspects also include depositing a second conductive material on the dielectric layer and removing the second conductive material through the top of the second metal liner.
    Type: Application
    Filed: November 17, 2017
    Publication date: March 15, 2018
    Inventors: Griselda BONILLA, Samuel S. CHOI, Ronald G. FILIPPI, Elbert E. HUANG, Naftali E. LUSTIG, Andrew H. SIMON
  • Publication number: 20180076082
    Abstract: A method of forming an air gap for a semiconductor device and the device formed are disclosed. The method may include forming an air gap mask layer over a dielectric interconnect layer, the dielectric interconnect layer including a dielectric layer having a conductive interconnect therein and a cap layer over the dielectric layer; patterning the air gap mask layer using extreme ultraviolet (EUV) light and etching to form an air gap mask including an opening in the cap layer exposing a portion of the dielectric layer of the dielectric interconnect layer adjacent to the conductive interconnect; removing the air gap mask; etching an air gap space adjacent to the conductive interconnect within the dielectric layer of the dielectric interconnect layer using the opening in the cap layer; and forming an air gap in the dielectric interconnect layer by depositing an air gap capping layer to seal the air gap space.
    Type: Application
    Filed: November 15, 2017
    Publication date: March 15, 2018
    Inventors: Samuel S. Choi, Ronald G. Filippi, Elbert E. Huang, Naftali E. Lustig, Griselda Bonilla, Andrew H. Simon
  • Patent number: 9893011
    Abstract: A BEOL e-fuse is disclosed which reliably blows in the via and can be formed even in the tightest pitch BEOL layers. The BEOL e-fuse can be formed utilizing a line first dual damascene process to create a sub-lithographic via to be the programmable link of the e-fuse. The sub-lithographic via can be patterned using standard lithography and the cross section of the via can be tuned to match the target programming current.
    Type: Grant
    Filed: October 1, 2015
    Date of Patent: February 13, 2018
    Assignee: International Business Machines Corporation
    Inventors: Junjing Bao, Griselda Bonilla, Kaushik Chanda, Samuel S. Choi, Ronald G. Filippi, Stephan Grunow, Naftali E. Lustig, Dan Moy, Andrew H. Simon
  • Patent number: 9852980
    Abstract: Methods of forming an interconnect structure include depositing a first conductive material on a substrate. Aspects include subtractively etching the conductive material to form a patterned first conductive layer, and depositing a dielectric layer on interconnect structure. Aspects also include depositing a second conductive material on the dielectric layer and removing the second conductive material through the top of the second metal liner.
    Type: Grant
    Filed: January 13, 2017
    Date of Patent: December 26, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Griselda Bonilla, Samuel S. Choi, Ronald G. Filippi, Elbert E. Huang, Naftali E. Lustig, Andrew H. Simon
  • Publication number: 20170365504
    Abstract: A method of forming an air gap for a semiconductor device and the device formed are disclosed. The method may include forming conductive interconnects in an ILD including a high etch selectivity dielectric layer such as a silicon nitride with hydrogen component (SiNH) layer, and patterning an air gap mask layer preferably using extreme ultraviolet (EUV) light form an air gap mask. The air gap mask may be used to etch an air gap space in the high etch selectivity dielectric layer. Use of EUV with the high etch selectivity dielectric layer provides an air gap having a width of no greater than 15 nm with the opening used to form the air gap space having a width of no greater than 10 nm width. This integration approach offers smaller pinch-off height, e.g., less than approximately 6 nm, which improves process window for subsequent Mx+1 module builds.
    Type: Application
    Filed: June 20, 2016
    Publication date: December 21, 2017
    Inventors: Samuel S. Choi, Ronald G. Filippi, Elbert E. Huang, Naftali E. Lustig, Griselda Bonilla, Andrew H. Simon
  • Patent number: 9793193
    Abstract: Embodiments are directed to a method of forming a semiconductor device and resulting structures having an air spacer between a gate and a contact by forming a gate on a substrate and over a channel region of a semiconductor fin. A contact is formed on a doped region of the substrate such that a space between the contact and the gate defines a trench. A first dielectric layer is formed over the gate and the contact such that the first dielectric layer partially fills the trench. A second dielectric layer is formed over the first dielectric layer such that an air spacer forms in the trench between the gate and the contact.
    Type: Grant
    Filed: October 21, 2016
    Date of Patent: October 17, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Griselda Bonilla, Elbert Huang, Son Nguyen, Takeshi Nogami, Christopher J. Penny, Deepika Priyadarshini
  • Patent number: 9786760
    Abstract: Embodiments are directed to a method of forming a semiconductor device and resulting structures having an air spacer between a gate and a contact by forming a gate on a substrate and over a channel region of a semiconductor fin. A contact is formed on a doped region of the substrate such that a space between the contact and the gate defines a trench. A first dielectric layer is formed over the gate and the contact such that the first dielectric layer partially fills the trench. A second dielectric layer is formed over the first dielectric layer such that an air spacer forms in the trench between the gate and the contact.
    Type: Grant
    Filed: September 29, 2016
    Date of Patent: October 10, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Griselda Bonilla, Elbert Huang, Son Nguyen, Takeshi Nogami, Christopher J. Penny, Deepika Priyadarshini