Abstract: Disclosed are a tungsten hexafluoride preparation method and apparatus based on photoelectric synergy. A photocatalyst and metal tungsten are sequentially filled in a discharge area of a plasma reactor in a direction of gas entry, and the discharge area of the plasma reactor is irradiated with light at the same time; the background gas generates a large amount of plasma in the discharge area, SF6 undergoes decomposition under the synergistic effect of photocatalysis and plasma, SF6 is decomposed to generate fluorine atoms and low-fluorine sulfides such as SF5 and SF4. The generated fluorine ions, SF5, SF4 and low-fluorine sulfides further react with metal tungsten to generate WF6 specialty gas, which not only realizes the utilization of fluorine resources of SF6, but also replaces highly toxic fluorine gas with non-toxic SF6 exhaust gas in the plasma reactor for reaction, thereby ensuring safe operation and low energy consumption.

Abstract: Disclosed are a tungsten hexafluoride preparation method and apparatus based on photoelectric synergy. A photocatalyst and metal tungsten are sequentially filled in a discharge area of a plasma reactor in a direction of gas entry, and the discharge area of the plasma reactor is irradiated with light at the same time; the background gas generates a large amount of plasma in the discharge area, SF6 undergoes decomposition under the synergistic effect of photocatalysis and plasma, SF6 is decomposed to generate fluorine atoms and low-fluorine sulfides such as SF5 and SF4. The generated fluorine ions, SF5, SF4 and low-fluorine sulfides further react with metal tungsten to generate WF6 specialty gas, which not only realizes the utilization of fluorine resources of SF6, but also replaces highly toxic fluorine gas with non-toxic SF6 exhaust gas in the plasma reactor for reaction, thereby ensuring safe operation and low energy consumption.

Abstract: A method and a device for preparing MoF6 based on plasma activation of SF6. The method includes the following steps: S1, filling a discharge area of a plasma reactor with molybdenum powder; S2, introducing an inert gas and an SF6 gas into the discharge area of the plasma reactor, where the inert gas is ionized into plasma, and the SF6 gas is ionized into fluorine atoms and low-fluorine sulfides after being activated by the plasma; and S3, generating an MoF6 gas and sulfur elements through reaction of the fluorine atoms and the low-fluorine sulfides with the molybdenum powder.