Abstract: An EUV lighting device for metrology and inspection of an EUV mask in an EUV exposure process of a semiconductor device manufacturing process includes: an EUV light source for outputting EUV light with a wavelength ranging from 5 nm to 15 nm; and a multilayer reflection zone plate having an EUV reflection multilayer film, which is a planar substrate, and a zone plate pattern. The EUV lighting device radiates EUV light output from the EUV light source to the multilayer reflection zone plate, acquires 1st diffraction light reflected, and creates EUV illumination light.

Abstract: An extreme ultraviolet (EUV) light source device for generating EUV light through a plasma reaction, includes: a focusing lens for focusing a laser beam generated from a laser source; a vacuum chamber for providing a vacuum environment to generate the laser beam focused on the focusing lens as the EUV light through the plasma reaction; a gas jet nozzle for supplying a plasma reaction gas to the laser beam focused on the focusing lens to generate the EUV light; and a gas supply part for supplying the plasma reaction gas to the gas jet nozzle from the outside.

Abstract: The present invention relates to an EUV light generation device including: a laser beam irradiated on a target material droplet; and a focusing mirror for focusing the EUV light generated through the plasma emitted by means of the irradiation of the laser beam on the droplet, wherein the focusing mirror has a concaved operating surface and a focusing point formed at a position facing the operating surface, and the laser beam and a focusing lens for focusing the laser beam are located at the positions facing the operating surface of the focusing mirror, so that the focusing point, the laser beam, and the focusing lens are located on the positions facing the operating surface, that is, on one side of the operating surface.

Abstract: The present invention relates to an EUV light generation device including: a laser beam irradiated on a target material droplet; and a focusing mirror for focusing the EUV light generated through the plasma emitted by means of the irradiation of the laser beam on the droplet, wherein the focusing mirror has a concaved operating surface and a focusing point formed at a position facing the operating surface, and the laser beam and a focusing lens for focusing the laser beam are located at the positions facing the operating surface of the focusing mirror, so that the focusing point, the laser beam, and the focusing lens are located on the positions facing the operating surface, that is, on one side of the operating surface.

Abstract: A display device and a mobile terminal including the same includes a display area in which a first group of display pixels to which pixel data is written are arranged, and a sensing area in which a second group of display pixels and a plurality of sensor pixels are arranged; each of the display pixels includes a pixel circuit configured to drive a light emitting element; each of the sensor pixels includes a photosensor driving circuit configured to drive a photodiode; a low potential power voltage and a pixel driving voltage are applied to the pixel circuit and the photosensor driving circuit; a cathode electrode of the light emitting element and the cathode electrode of the photodiode share the same metal electrode, and are commonly connected to a low potential power line to which the low potential power voltage is applied.

Abstract: The present disclosure provides chemical-mechanical polishing (CMP) particles exhibiting a high polishing rate and a high polishing quality of generating few defects or scratches due to their modified surface thereof. The present disclosure also provides a polishing slurry composition including the polishing particles.

Abstract: Discussed is battery pack case configured to receive a battery cell stack constituted by a plurality of battery cells stacked therein, the battery pack case including a first case configured to allow the battery cell stack to be mounted therein and a second case coupled to the first case, the second case being configured to cover the battery cell stack, wherein the first case includes a first flat panel portion and a first side portion, wherein the second case includes a second flat panel portion and a second side portion, and wherein a thickness of the second flat panel portion of the second case is less than the thickness of the second side portion of the second case.

Abstract: A binder for a secondary battery includes a copolymer having a first repeating unit, a second repeating unit, and a third repeating unit. A ratio of a number of the first repeating unit (A) and a sum of a number of the second repeating unit and a number of the third repeating unit (B) is 90:10 to 52:48. A ratio of the number of the second repeating unit and the number of the third repeating unit is 67:33 to 1:99. A weight average molecular weight of the copolymer is 225,000 to 2,000,000.

Abstract: A power module is disclosed. A power module according to an embodiment of the present disclosure may include a first substrate and a second substrate spaced apart from each other, an electronic device unit provided on at least either one of the first and second substrates, and a lead frame unit provided between the first and second substrates. One side of the lead frame unit may be connected to an external circuit, and the other side thereof may be configured to electrically connect the first and second substrates. Accordingly, the lead frame unit may perform a function of electrically connecting the first and second substrates instead of a via spacer in the related art.

Abstract: A manufacturing method includes the steps of: (a) preparing a lower layer member having a first base layer, a first protective thin film, and a first CNT thin film; (b) preparing a first upper layer member having a second base layer, a second protective thin film, and a second CNT thin film or a second upper layer member having a second base layer and a second protective thin film; (c) arranging the lower layer member above the first CNT thin film; (d) forming a group member by arranging the second CNT thin film of the first upper layer member or the second protective film of the second upper layer member to be stacked on the first CNT thin film; and € removing the second base layer from the group member.

Abstract: An EUV lighting device for metrology and inspection of an EUV mask in an EUV exposure process of a semiconductor device manufacturing process includes: an EUV light source for outputting EUV light with a wavelength ranging from 5 nm to 15 nm; and a multilayer reflection zone plate having an EUV reflection multilayer film, which is a planar substrate, and a zone plate pattern. The EUV lighting device radiates EUV light output from the EUV light source to the multilayer reflection zone plate, acquires 1st diffraction light reflected, and creates EUV illumination light.

Abstract: A power module according implementations of the present disclosure includes a bonding layer for bonding two adjacent members. The bonding layer is formed by melting, applying, and solidifying a bonding material that has excellent thermal conductivity and electrical conductivity. The melted bonding material includes a plurality of anti-tilting members. The two members bonded during the process of solidifying the melted bonding material are supported by the plurality of anti-tilting members. This may allow tilting caused during the formation of the bonding layer to be suppressed.

Abstract: The present disclosure relates to a novel cell-penetrating multifunctional peptide, a composition including the same.

Abstract: An electrolyte for a lithium secondary battery according to exemplary embodiments of the present inventing includes an organic solvent, a lithium salt, a first additive represented by a predetermined chemical formula, and a second additive represented by a predetermined chemical formula. A protective film is formed by the additives to suppress an expansion of a lithium secondary battery and improve storage property at high temperature.

Abstract: A binder for a secondary battery includes a copolymer having a first repeating unit, a second repeating unit, and a third repeating unit. A ratio of a number of the first repeating unit (A) and a sum of a number of the second repeating unit and a number of the third repeating unit (B) is 90:10 to 52:48. A ratio of the number of the second repeating unit and the number of the third repeating unit is 67:33 to 1:99. A weight average molecular weight of the copolymer is 225,000 to 2,000,000.

Abstract: The present disclosure relates to a silver powder preparation method comprising: a silver powder preparation step of preparing a silver salt, which comprises silver ions, and then reducing the silver ion so as to precipitate silver particles; a silver powder recovery step of separating silver particles from an aqueous solution or a slurry, which comprises the precipitated silver particles, and then washing and drying same to recover silver powder; and a silver powder coating step of injecting a pH adjuster into the recovered silver powder to adjust the pH, and then injecting a coating agent to coat after the pH adjustment. The pH adjuster is used in the silver powder coating step to adjust the pH, and thus, when silver power is used in a conductive paste, as the rate of change in viscosity over time is low, a conductive paste having excellent viscosity stability can be provided.

Abstract: Disclosed is a battery distributing apparatus for efficiently using and distributing a plurality of exchange-type batteries. The battery distributing apparatus includes a battery determining module for determining a level of each battery for a plurality of batteries; a user determining module for determining a grade of each user who uses at least one battery among the plurality of batteries; and a selecting module for selecting a battery suitable for a requester who requests to use at least one battery among the plurality of batteries, based on the grade of the user determined by the user determining module and the level of the battery determined by the battery determining module.

Abstract: A display apparatus can include a display panel configured to display an image, a polarizing plate disposed on the display panel, a first film disposed on the polarizing plate, a liquid crystal layer disposed on the first film, and a second film disposed on the liquid crystal layer. Also, the liquid crystal layer can be disposed in a cover member and have a retardation of a quarter wave (?/4) to a half wave (?/2), and the liquid crystal layer can be spaced apart from the flexible display panel.

Abstract: Disclosed is a novel organometallic compound represented by following Chemical Formula 1. The organometallic compound acts as a dopant of a phosphorescent light-emitting layer of an organic light-emitting diode.

Abstract: Disclosed is a novel organometallic compound in which a main ligand (LA) has a fused ring structure including a thiophene group. The organometallic compound acts as a dopant of a phosphorescent light-emitting layer of an organic light-emitting diode. Thus, an operation voltage of the diode is lowered, and luminous efficiency and a lifespan thereof are improved.