Patents by Inventor Gunter Wurpts

Gunter Wurpts has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5538610
    Abstract: A vacuum coating system has a processing station (2) designed as a sputter-etching station, in which a high-frequency input electrode (25) is mounted between two substrate holders (23, 24), which carry the substrates (5, 6). Between the substrate holders (23, 24) and the high-frequency input electrode (25), a distance (a) is provided, which is smaller than the dark space distance.
    Type: Grant
    Filed: June 2, 1995
    Date of Patent: July 23, 1996
    Assignee: Leybold Aktiengesellschaft
    Inventors: Roland Gesche, Karl Keim, Helmut Rauner, Gunter Wurpts